CN202133293U - Temperature tandem system with automatic temperature pulling zone function - Google Patents
Temperature tandem system with automatic temperature pulling zone function Download PDFInfo
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- CN202133293U CN202133293U CN201120223720U CN201120223720U CN202133293U CN 202133293 U CN202133293 U CN 202133293U CN 201120223720 U CN201120223720 U CN 201120223720U CN 201120223720 U CN201120223720 U CN 201120223720U CN 202133293 U CN202133293 U CN 202133293U
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- temperature
- thermocouple
- warm area
- temperature control
- tandem system
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Abstract
The utility model relates to a temperature tandem system with an automatic temperature pulling zone function, and specifically speaking, relates to the temperature tandem system with the automatic temperature pulling zone function for a diffusion furnace; the utility model discloses the temperature tandem system with an automatic temperature pulling zone, which carries out temperature rise, temperature drop and the staged temperature control of a constant-temperature stage by simultaneously utilizing a profile thermocouple and a spike thermocouple; the temperature tandem system comprises the profile thermocouple, and further comprises the spike thermocouple; the profile thermocouple and the spike thermocouple are connected with a double-channel temperature control instrument; the double-channel temperature control instrument is connected with an industrial control computer; and the temperature tandem system can be basically applied to most of temperature control equipment in the semiconductor industry, and furthermore, achieves the calibration of an unattended temperature zone with a plurality of temperature points. For important indexes such as temperature zone quantity, temperature zone precision and the like, the maximum adjustable space is given to a user, and the hardware maintenance is convenient and quick without depending on an equipment manufacturer.
Description
Technical field
The utility model relates to a kind of with the temperature tandem system of drawing warm area automatically, and specifically, the band that relates to a kind of diffusion furnace draws the temperature tandem system of warm area function automatically.
Background technology
At first, in the prior art of industries such as semiconductor, solar energy, the temperature of high-temperature furnace body is controlled mainly by dual mode: thermocouple and single-chip microcomputer or thermocouple and temperature control instrument.Be for preceding its shortcoming of a kind of temperature control mode: single-chip microcomputer damages easily; Its internal structure is complicated to make the temperature control system of high-temperature service in a single day break down; Failure cause is searched and is got rid of very loaded down with trivial details; And the control system hardware of general this temperature control method (single-chip microcomputer and integrated circuit board) is all customized by device fabrication producer, and so just very difficult assurance equipment can access and keep in repair and be not easy to control user cost timely.Therefore, a kind of temperature control method in back more and more obtains user's approval.
Secondly; Add in the temperature control method of temperature control instrument at existing thermocouple; Because industry particularity having relatively high expectations for temperature accuracy; Just need calibrate the displays temperature of thermocouple and the error between the use actual temperature, the existing use is that artificial use Profile thermocouple carries out the warm area calibration more.The existing drawback of drawing the warm area mode is: 1, can't carry out real stopped pipe static state and draw warm area, because want artificial the physical location of Profile thermocouple thermometric adjusted.2, can't proofread and correct simultaneously each temperature controlling point in the same warm area.3, need the parameter of artificial adjustment temperature control instrument to calibrate, can not avoid the interference of human factor, also be difficult to improve the repeatability of warm area.4, spended time is long, calibrates for the warm area of a temperature and almost will expend experienced operator's darg time.5, be difficult to reach versatility, different equipment carries out the warm area calibration, needs the calibration experience of workman to the distinct device warm area.
Summary of the invention
The utility model overcomes above-mentioned defective, provides a kind of and has utilized profile thermocouple and spike thermocouple to heat up simultaneously and temperature tandem system that cooling and temperature controlled stage by stage band of constant temperature stage draw warm area automatically.
It is such that the band of the utility model draws the technical scheme of the temperature tandem system of warm area automatically: it comprises the profile thermocouple; It also comprises the spike thermocouple; The profile thermocouple is connected with spike thermocouple binary channels temperature control instrument, and the binary channels temperature control instrument is connected with industrial computer.
Between binary channels temperature control instrument and the industrial computer PLC is set, concentrates programme-control by PLC.
Connect power control module in the spike thermocouple control loop.
The spike thermocouple heats up and the temperature control of lowering the temperature, and the profile thermocouple is set to the thermostatic control galvanic couple; Also can use and adopt the high accuracy tandem temperature control system of profile thermocouple as main control loop, applying flexible according to technology.
The band of the utility model draws the temperature tandem system of warm area to comprise the spike thermocouple automatically; The profile thermocouple is connected with spike thermocouple binary channels temperature control instrument; The binary channels temperature control instrument is connected with industrial computer, between binary channels temperature control instrument and the industrial computer PLC is set, and concentrates programme-control by PLC.Connect power control module in the spike thermocouple control loop.The spike thermocouple heats up and the temperature control of lowering the temperature, and the profile thermocouple is set to the thermostatic control galvanic couple; Also can use and adopt the high accuracy tandem temperature control system of profile thermocouple as main control loop, applying flexible according to technology.The technical scheme of the utility model is following: the utility model temperature control system is made up of power control module, temperature control thermocouple, binary channels temperature control instrument, programmable controller (PLC), industrial computer jointly.Primary structure is: with PLC for the control core system through temperature control thermocouple (Spike and Profile) sample jointly in the high-temperature furnace body Temperature numerical and return to temperature control instrument; Temperature control instrument feeds back to PLC with data; The contents of program that PLC works out according to industrial computer carries out the temperature control CALCULATION OF PARAMETERS; And result of calculation sent to temperature control instrument, temperature control instrument carries out the purpose that power output control finally reaches the adjustment temperature more according to this.This control loop is closed-loop control.
The tandem control of the utility model mainly is used in the Profile thermocouple temperature control stage.When body of heater constant temperature, according to the semiconductor fabrication process requirement, we can switch to the Profile temperature control, because the temperature that the Profile thermocouple records is only the technological standards temperature that we need.At this moment, two groups of thermocouples of Spike and Profile are all carrying out temperature detection, and this moment, Spike should reach design temperature, but Profile and design temperature also have difference.Read through PLC and can adjust algorithm computation with the Profile temperature through one after the detected temperatures and go out the setting value of Spike temperature-controlling thermal couple and write temperature control instrument; And different according to parameters such as measured value height, measured value and the setting value temperature difference, PLC makes amendment to limit the power output mode of Spike to the parameter of temperature control instrument simultaneously.The Spike thermocouple changed measured value that the actual temperature of adjusting body of heater finally makes the Profile thermocouple through power output and reached with setting value and equate this moment.Wherein, But temperature control instrument parameter adjustment mode is tested by our company's stand-alone development with adjustment algorithm; Reach the temperature requirements of semicon industry fully; And use through the production line actual production, conclusion is complete alternative similar import equipment, has broken the situation of the complete import of field of semiconductor manufacture high-precision temperature control system.
The temperature control instrument of the utility model is the double loop temperature control instrument, and it can read data and set setting value spike thermocouple and Profile thermocouple simultaneously.So just can realize the temperature control handoff functionality of Spike and Profile.This function is mainly used in intensification, constant temperature translate phase.Because Spike is high for the susceptibility of variations in temperature, we use the spike thermocouple to heat up and lower the temperature, temperature overshot in the time of can reducing heating and cooling effectively like this and temperature less stress.And we use the Profile thermocouple to carry out temperature control in the constant temperature stage, can more accurately control the temperature of product like this.Also can adopt the profile thermocouple according to process condition is the high accuracy tandem temperature control system of main control loop, applying flexible.
Use software function to realize that the unmanned of warm area calibration (drawing warm area) accomplishes automatically in the utility model.In semicon industry, have relatively high expectations for warm area, it is generally acknowledged that the Temperature numerical that the Profile thermocouple monitors just is the actual temperature of product in the body of heater.Draw warm area just to be meant will the monitor temperature of Spike thermocouple and the monitor temperature of Profile thermocouple to be calibrated to identical or close, could guarantee product quality like this.The utility model temperature control system only needs the user on industrial computer software, to write corresponding program when drawing warm area work, and fills in corresponding warm area form, and run user institute written program gets final product then.When user institute written program end of run, warm area calibration automatically finishes.In this control system, warm area is calibrated every temperature spot 1 hour time spent approximately, is example with 5 operating temperature points, and native system only needed time spent 5-6 hour can accomplish the warm area calibration operation, and calibration repeatability is much higher than manual work and draws warm area.If concrete technology operating mode needs, also can adopt the profile thermocouple is the high accuracy tandem temperature control system of main control loop, need not to draw warm area; Use more convenient; Saved the equipment debugging time greatly, simplified apparatus is used, various process function collocation applying flexibles.
Parametric users such as warm area quantity, temperature spot, warm area precision can import in the warm area form voluntarily, greatly facilitate regular maintenance (PM) time of semiconductor equipment.And the warm area of native system control can be controlled at the warm area precision in positive and negative 0.5 degree centigrade in low temperature (380-800 degree centigrade) section, this new breakthrough at last in homemade semiconductor equipment.
Description of drawings
Fig. 1 be the utility model block diagram.
The specific embodiment
Present embodiment is " deposition antireflective coating " operation that solar battery chip is produced; Its band draws the temperature tandem system of warm area to draw together the profile thermocouple automatically; It also comprises the spike thermocouple; The profile thermocouple is connected with spike thermocouple binary channels temperature control instrument, and the binary channels temperature control instrument is connected with industrial computer.Between binary channels temperature control instrument and the industrial computer PLC is set, concentrates programme-control by PLC.Connect power control module in the spike thermocouple control loop.The spike thermocouple heats up and the temperature control of lowering the temperature, and the profile thermocouple is set to the thermostatic control galvanic couple, also can use according to technology and adopt the high accuracy tandem temperature control system of profile thermocouple as main control loop, applying flexible.
This equipment is used for " deposition antireflective coating " operation that solar battery chip is produced; Its principle is following: in the enclosed vacuum body of heater; Filled process gas (silane and ammonia), they have been ionized into plasma by radio frequency, and the chemical property of these plasmas is very strong; Be easy to react, on silicon chip, deposit desirable film.The silicon chip that is contained in the graphite boat distributes in body of heater uniformly, and gas can deposit at silicon chip surface equably.The groove number of the volume of body of heater and graphite boat has determined the production capacity of PECVD, can reach the effect that improves production capacity through the quantity that increases body of heater volume and graphite boat groove.
The purpose that the utility model control system will reach is exactly: a kind of general temperature control mode is provided, can be applied to the Temperature-controlled appliance of most of semiconductor industries basically, and realize unattended many temperature spots warm area calibration.Give the user the maximum space adjusted for important indicators such as warm area quantity, warm area precision, hardware maintenance is convenient, fast, need not to rely on device fabrication producer.
The utility model compared with prior art has advantage and good effect:
1, the utility model temperature control system can be realized the switching use of Spike and Profile thermocouple.Its principle is to use the reading value control power output of Spike thermocouple, Profile thermocouple participation temperature control.As produce and need to use Spike thermocouple control temperature, then with related cut-out between Profile thermocouple and the Spike thermocouple; Use the Profile thermocouple to participate in temperature control like need, then the output valve of Profile thermocouple is carried out computed in software, the value of calculating is as the setting value of Spike thermocouple.The advantage of doing like this is: in the heating and cooling stage, the reflection of Spike thermocouple is relatively sensitiveer, helps to be rapidly heated, to lower the temperature, and controls temperature rate easily, to avoid the injury to product and body of heater.In the constant temperature stage, the thermometric degree of accuracy of Profile thermocouple is high, helps to control the accurate temperature of product in the body of heater.And, in temperature control instrument, making Spike and Profile process calculate the parameter of setting up and link the error that can avoid generation in the analog quantity transmission effectively, the control circuit electromagnetic property is for the influence of sampling numerical value when also having avoided using mechanical thermocouple to switch.In addition, than two cover temperature-controlling systems, control system cost and power output module cost have been saved.
2, the utility model temperature control system has been realized the lifting of temperature-controlled precision.In existing homemade semiconductor equipment, what adopt basically is positive and negative 0.5 degree centigrade of high temperature section (more than 800 degrees centigrade) temperature-controlled precision, and low-temperature zone (380-800 degree centigrade) temperature-controlled precision is at positive and negative 1 degree centigrade.And the utility model can be realized positive and negative 0.3 degree centigrade of high temperature section (more than 800 degrees centigrade) temperature-controlled precision, positive and negative 0.5 degree centigrade of low-temperature zone (380-800 degree centigrade) temperature-controlled precision.This field of semiconductor devices breakthrough at last at home.Different according to equipment, the best temperature control effect of our company's equipment can the section of reaching a high temperature positive and negative 0.2 degree centigrade, positive and negative 0.3 degree centigrade of low-temperature zone.
3, the utility model temperature control system has been realized the unmanned automation of warm area calibration.In the native system, draw the warm area process to realize fully carrying out automatically, need not manual intervention.The user only needs according to needed warm area temperature spot and temperature accuracy the warm area table to be filled in and uploaded, will write again draw the warm area process to upload after can begin to draw warm area work.After drawing the warm area end-of-job, system reports to the police automatically, and prompting user technology finishes.Draw writing of warm area technology in full accord, be convenient to user's grasp and use with the method for operation and the production technology method of operation.If concrete technology operating mode needs, also can adopt the profile thermocouple is the high accuracy tandem temperature control system of main control loop, need not to draw warm area; Use more convenient; Saved the equipment debugging time greatly, simplified apparatus is used, various process function collocation applying flexibles.
4, the utility model temperature control system has been realized the seamless link of warm area calibration with actual production.When the calibration of artificial warm area, for the Profile thermocouple is mobile between each warm area point, need perforate on fire door, the gas of feeding also different (some harmfulness gas or dangerous gas can't feed) with actual process, and can't feed in the burner hearth.Condition when these have all caused the actual production warm area to calibrate with warm area is different, also the problems such as the warm area precision is inaccurate, warm area poor repeatability with regard to having caused.In the warm area calibration process of native system; Operations such as the user can feed according to actual production technology, ventilation; Realized the synchronous of warm area calibration process and production technology; Greatly reduce the condition difference of drawing warm area and actual production technology, make that the warm area precision has obtained more strong assurance in the normal productive process.
5, the utility model temperature control system has been realized a plurality of temperature spots, and a plurality of warm areas are put the function of disposable calibration.Draw in the warm area work and need calibrate according to temperature spot and warm area point in manual work in the past, each warm area point is wanted order calibration successively.Existing problem is in body of heater of warm area point coexistence, all can exert an influence to other warm area points when some warm area points are calibrated, and this almost is impossible mission with regard to having caused the work of drawing warm area for unfamiliar operator.Even for experienced operator, between variety classes equipment and the body of heater, the characteristics of warm area also are different, and therefore this manual work draws the mode of warm area can make the repeatability of warm area not high.Because semiconductor equipment needs often maintenance and cleans, the warm area calibration result that so this repeatability is not high is insupportable.But, in this control system, have in having realized that closed-loop control and multiple spot that system calibrates automatically draw warm area simultaneously, not only accelerated the speed of warm area calibration greatly, also improved the repeatability of warm area calibration greatly.Basically got rid of the influence of body of heater specification, technology device gentle body flow for the warm area precision.
6, native system has been realized the disposable calibration of many temperature spots warm area.In actual production process; Same body of heater may be used for kinds of processes, and their needed temperature spots also are different so, like the method for drawing warm area with manual work; Each technology of changing will be drawn warm area one time; Perhaps be exactly to need long time that each can all be calibrated one time by employable temperature spot, but like this for those temperature spots that seldom uses, the manpower of cost and time have lose more than gain.In native system, the user can be with all can being edited into the warm area table and drawing in the warm area technology by employable temperature spot, and operation one-time process process can finish whole warm area point calibrations.Though the warm area alignment time can extend accordingly, to compare manual work and draw warm area, the time significantly reduces, and unordered operative employee is on duty.
7, for the time of drawing warm area, in native system, obtained optimization.Not only to save time than manual calibration; And we can write down calibration parameter after using warm area of native system calibration; The user can be directly uploads calibration parameter in the past when same body of heater is calibrated warm area once more; With the most conservative estimation (serving as to guarantee warm area precision accuracy), the time of calibration warm area can also reduce half the like this.
Claims (4)
1. a band draws the temperature tandem system of warm area function automatically, and it comprises the profile thermocouple, it is characterized in that, it also comprises the spike thermocouple, and the profile thermocouple is connected with the binary channels temperature control instrument with the spike thermocouple, and the binary channels temperature control instrument is connected with industrial computer.
2. band according to claim 1 draws the temperature tandem system of warm area function automatically, it is characterized in that, between binary channels temperature control instrument and the industrial computer PLC is set, and concentrates programme-control by PLC.
3. band according to claim 1 draws the temperature tandem system of warm area function automatically, it is characterized in that, connects power control module on the spike thermocouple.
4. band according to claim 1 draws the temperature tandem system of warm area function automatically, it is characterized in that, the spike thermocouple heats up and the temperature control of lowering the temperature, and the profile thermocouple is set to the thermostatic control galvanic couple.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120223720U CN202133293U (en) | 2011-06-29 | 2011-06-29 | Temperature tandem system with automatic temperature pulling zone function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120223720U CN202133293U (en) | 2011-06-29 | 2011-06-29 | Temperature tandem system with automatic temperature pulling zone function |
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| Publication Number | Publication Date |
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| CN202133293U true CN202133293U (en) | 2012-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201120223720U Expired - Fee Related CN202133293U (en) | 2011-06-29 | 2011-06-29 | Temperature tandem system with automatic temperature pulling zone function |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109163554A (en) * | 2018-08-27 | 2019-01-08 | 江苏丰东热技术有限公司 | A kind of automatic heating method of meshbeltfurnace automatic heating system and meshbeltfurnace |
-
2011
- 2011-06-29 CN CN201120223720U patent/CN202133293U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109163554A (en) * | 2018-08-27 | 2019-01-08 | 江苏丰东热技术有限公司 | A kind of automatic heating method of meshbeltfurnace automatic heating system and meshbeltfurnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120201 Termination date: 20180629 |