CN202099411U - Automatic measuring device for crystal growth speed of multi-crystal furnace - Google Patents
Automatic measuring device for crystal growth speed of multi-crystal furnace Download PDFInfo
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- CN202099411U CN202099411U CN2011200991025U CN201120099102U CN202099411U CN 202099411 U CN202099411 U CN 202099411U CN 2011200991025 U CN2011200991025 U CN 2011200991025U CN 201120099102 U CN201120099102 U CN 201120099102U CN 202099411 U CN202099411 U CN 202099411U
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- pressure transmitter
- man
- machine interface
- polycrystalline furnace
- quartz pushrod
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Abstract
The utility model provides an automatic measuring device for crystal growth speed of a multi-crystal furnace. The automatic measuring device comprises a quartz rod, a driving cylinder, a position sensor, a first pressure sensor, a man-machine interface and a PLC (programmable logic controller), wherein the quartz rod is used for contacting with an ingot in the multi-crystal furnace, the driving cylinder is used for driving the quartz rod to move, the position sensor is mounted on a driving device, the first pressure sensor is mounted between the driving device and the quartz rod, the man-machine interface is used for setting parameters in a measuring process and displaying measurement results, and the PLC is respectively electrically connected with the driving device, the position sensor, the first pressure sensor and the man-machine interface and used for controlling the driving device to drive the quartz rod to ascend or descend. The automatic measuring device frees measuring staff, and is simple in structure and convenient and quick to operate, so that measuring efficiency of crystal growth speed is improved.
Description
Technical field
The utility model relates to a kind of measuring apparatus, particularly relate to a kind of in the brilliant process of polycrystalline furnace superintendent, the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent that the brilliant speed of polycrystalline furnace superintendent is measured automatically.
Background technology
Crystalline growth velocity is one of important factor of decision crystal degree of uniformity, for it is controlled, need measure the crystal ingot height in the polycrystalline furnace usually, calculates long brilliant speed then.As shown in Figure 1; At present; Measuring the brilliant speed of polycrystalline furnace superintendent generally is in survey crew 2 plug quartz pushrods 3, erects a graduated scale 1 on quartz pushrod 3 next doors, on graduated scale 1, carries out reading by the position of 2 pairs of quartz pushrods 3 of survey crew; Through institute's reading value is analyzed, calculated, the changing value of crystal ingot 6 position contacting in the quartz pushrod 3 and crucible 7 in the unit time realizes thereby draw.Adopt this method; Need survey crew to the top of polycrystalline furnace, reading to be carried out in the position of quartz pushrod on graduated scale continually; And thereby the trend of paying close attention to quartz pushrod constantly in time reads the numerical value on the graduated scale; Not only the labour intensity of survey crew is big, and accuracy of measurement is difficult to be guaranteed.
Therefore, need a kind of survey crew that can make to be able to liberation, and can in time determine the self-operated measuring unit of quartz pushrod change in location numerical value according to predetermined condition.
The utility model content
In order to address the above problem, a purpose of the utility model provides a kind of survey crew that can make and is able to liberation, and can in time determine the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent of quartz pushrod change in location numerical value according to preset parameter.
To achieve these goals, the technical scheme of the brilliant speed self-operated measuring unit of the polycrystalline furnace superintendent that provides of the utility model is following:
The brilliant speed self-operated measuring unit of a kind of polycrystalline furnace superintendent comprises:
Be used for the quartz pushrod that contacts with the crystal ingot of polycrystalline furnace;
Be used to drive said quartz pushrod straight-line drive unit up and down;
Be installed on the said drive unit, be used to measure the position transducer of the operation stroke of said drive unit;
Be installed between said drive unit and the said quartz pushrod, be used to first pressure transmitter of judging whether said quartz pushrod contacts with said crystal ingot;
Be used for measuring process is carried out parameter setting and shown the man-machine interface of measuring result;
Be electrically connected with said drive unit, said position transducer, said first pressure transmitter and said man-machine interface respectively; Be used to receive parameter and the said position transducer of said man-machine interface input and the signal that said pressure transmitter is gathered, and control said drive unit according to the signal of said first pressure transmitter that receives and the parameter value of man-machine interface input and drive that said quartz pushrod rises or the PLC of decline.
As preferably, said drive unit is an electric cylinder.
As preferably, said man-machine interface is a touch-screen.
As preferably, the parameter of said man-machine interface input comprises the induction pressure value of measuring period and said first pressure transmitter.
As preferably, has arithmetic element in the said PLC.
As preferably, also be provided with between said drive unit and the said quartz pushrod and be used to second pressure transmitter of judging whether said quartz pushrod contacts with said crystal ingot.
Preferred as further, the pressure sensitive end of said second pressure transmitter is connected with the upper surface of said first pressure transmitter.
The beneficial effect of the brilliant speed self-operated measuring unit of the polycrystalline furnace superintendent that the utility model provides is:
The first, the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent that using the utility model provides need not survey crew and to the top of polycrystalline furnace, reading is carried out in the position of quartz pushrod on graduated scale continually, makes survey crew be able to liberation.
The second, because the man-machine interface selected for use is a touch-screen, make simple in structure, the simple operation of the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent that the utility model provides.
The 3rd; Carry out computational analysis owing to have the signal that is used for receiving in the PLC from position transducer and pressure transmitter; Thereby obtain the numerical value of long brilliant speed and this numerical value is shown in the arithmetic element on the man-machine interface; The brilliant speed self-operated measuring unit of the polycrystalline furnace superintendent that makes the utility model provide can directly be exported the numerical value of the brilliant speed of length of polycrystalline furnace by man-machine interface, thereby has saved the step that manual calculation is analyzed, and has improved efficiency of measurement.
Description of drawings
Fig. 1 is for carrying out the synoptic diagram of metering system in the prior art to the brilliant speed of polycrystalline furnace superintendent.
Fig. 2 carries out the synoptic diagram of metering system to the brilliant speed of polycrystalline furnace superintendent for the brilliant speed self-operated measuring unit of the polycrystalline furnace superintendent of using the utility model.
Fig. 3 is the PLC control principle block diagram of the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent of the utility model.
Fig. 4 is the structural representation of the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent of the utility model.
Description of reference numerals:
1-graduated scale 2-survey crew
3-quartz pushrod 4-liquid level
5-polycrystalline furnace 6-crystal ingot
The brilliant speed self-operated measuring unit of 7-crucible 8-polycrystalline furnace superintendent
9-stationary installation 10-guide rail
11-slide block 12-first pressure transmitter
The 13-second pressure transmitter 14-PLC
15-touch screen 16-SW
The 17-fixed connecting piece
Embodiment
Describe the embodiment of the utility model with reference to the accompanying drawings in detail.
Extremely shown in Figure 4 like Fig. 2; The brilliant speed self-operated measuring unit of the polycrystalline furnace superintendent that the utility model provides comprises quartz pushrod 3, drive unit, position transducer and first pressure transmitter 12; Wherein, quartz pushrod 3 vertically is provided with, and the one of which end can contact with the crucible 7 interior crystal ingots 6 of polycrystalline furnace 5; Drive unit is used to drive quartz pushrod 3 translational motion on above-below direction; In the present embodiment; Drive unit adopts electric cylinder; The slide block 11 that electric cylinder comprises charged guide rail 10 and on guide rail 10, slides, guide rail 10 device 9 that is fixed is fixed on the top of polycrystalline furnace vertically, and is parallel with said quartz pushrod 3; Position transducer is installed on the drive unit, is used to detect the stroke of the slide block 11 that is connected on the electric cylinder, and position transducer can adopt Hall element commonly used; Be specially the magnet ring (not shown) is installed on guide rail 10, the Hall element (not shown) is installed on slide block 11, Hall element passes magnet ring; When slide block 11 drives Hall sensor movement; Produce magneticinduction between Hall element and the magnet ring, thereby in Hall element, produce electrical signal, and electrical signal is transferred to PLC14; Adopting Hall element to detect stroke is those skilled in the art's common technology means, seldom does at this and gives unnecessary details.In addition, position transducer also can adopt grating sensor commonly used or other position transducer commonly used; First pressure transmitter 12 is installed between electric cylinder and the quartz pushrod 3; Said first pressure transmitter 12 is connected with quartz pushrod 3 through fixed connecting piece 17, and is connected through SW 16 with PLC14, is synchronized with the movement with quartz pushrod 3; When the end of quartz pushrod 3 contacts with crystal ingot 6; The pressure of the crystal ingot 6 that quartz pushrod 3 ends receive reaches and sends signal indication quartz pushrod 3 to PLC14 behind these pressure of first pressure transmitter, 12, the first pressure transmitters 12 induction and contact with crystal ingot 6, in the present embodiment; First pressure transmitter 12 adopts piezoelectric transducer commonly used; When it is under pressure, produce piezoelectric effect, thereby send electrical signal, first pressure transmitter 12 also can adopt piezoresistance sensor commonly used or strain gauge transducer; Man-machine interface is used for measuring process is carried out parameter setting and shown measuring result; In the present embodiment; Needing the timed interval of twice measurement of input is the induction pressure value of the measuring period and first pressure transmitter 12, when first pressure transmitter, 12 induced pressure reach the force value of setting, sends signal to PLC14; PLC14 is electrically connected with drive unit, position transducer, pressure transmitter and man-machine interface respectively; Be used to receive by the parameter of man-machine interface input and the signal gathered from position transducer and first pressure transmitter 12; And, be specially: receive the signal of first pressure transmitter, 12 transmission as PLC14 after, make electric cylinder out of service according to the signal of first pressure transmitter 12 that receives with by 3 risings of parameter value accessory drive drive quartz pushrod or decline that man-machine interface is imported; Position transducer transfers to PLC14 with slide block 11 stroke at this moment of electric cylinder simultaneously; Slide block 11 inverted runnings of PLC14 control electric cylinder, drive quartz pushrod 3 moves upward and leaves crystal ingot 6, until starting position topmost; After the sense cycle through a setting; PLC14 restarts electric cylinder, and the slide block 11 drive quartz pushrods 3 of electric cylinder are moved downward, and repeats above step.Because slide block 11 is synchronized with the movement with quartz pushrod 3; The stroke of the slide block 11 of PLC14 record is the stroke of quartz pushrod 3; The difference of quartz pushrod 3 twice stroke is the height of crystal ingot 6 growths in this sense cycle; The speed of growth of crystal ingot 6 in this cycle can be obtained with this height divided by sense cycle, in like manner the speed of growth in whole crystal ingot 6 process of growth can be obtained through repeatedly measuring.The brilliant speed self-operated measuring unit 8 of polycrystalline furnace superintendent that using the utility model provides can be measured the speed of growth of crystal ingot 6 automatically; Need not survey crew and to the top of polycrystalline furnace, reading is carried out in the position of quartz pushrod 3 on graduated scale continually, make survey crew be able to liberation.
Wherein, man-machine interface can be a touch-screen 15, makes simple in structure, the simple operation of the brilliant speed self-operated measuring unit 8 of polycrystalline furnace superintendent that the utility model provides.Man-machine interface also can be that the screen combination of keyboard and non-touch-control forms, through keyboard input parameter, through the screen reading of data.
In the above-described embodiments; Between the slide block 11 and first pressure transmitter 12, also be provided with second pressure transmitter 13; Said second pressure transmitter 13 is connected with PLC14 through SW 16; Be between said first pressure transmitter 12 and second pressure transmitter 13 " series connection " that promptly the pressure sensitive end of second pressure transmitter 13 is connected with the upper surface of first pressure transmitter 12, when normally moving; The pressure that first pressure transmitter 12 is sensed quartz pushrod 3 sends signal to PLC14, and the pressure that while second pressure transmitter 13 is sensed first pressure transmitter 12 sends signal to PLC14.The effect that two pressure transmitters are set is, when one of them pressure transmitter breaks down can not send signal the time, also has another pressure transmitter operation, thereby strengthened the reliability of operation of the brilliant speed self-operated measuring unit 8 of whole polycrystalline furnace superintendent.Can also be " parallelly connected " between said first pressure transmitter 12 and second pressure transmitter 13, promptly two pressure transmitters all are connected respectively with slide block 11 with quartz pushrod 3.
In the above-described embodiments; Drive unit can also be a cylinder; The cylinder body of cylinder is fixed on the furnace roof of polycrystalline furnace through stationary installation 9; The piston rod of cylinder pumps, and pumps thereby drive quartz pushrod 3, is provided with first pressure transmitter 12 and/or second pressure transmitter 13 between quartz pushrod 3 and the piston rod.Cylinder is provided with position transducer, be used for detecting the stroke of piston rod and with the data transmission that detects to PLC14.Drive unit can also be hydro-cylinder or other PWR PLT.
Can have arithmetic element in the PLC14, be used for the signal from position transducer and pressure transmitter that receives is carried out computational analysis, thereby the numerical value that obtains long brilliant speed also is shown in this numerical value on the man-machine interface.The brilliant speed self-operated measuring unit 8 of polycrystalline furnace superintendent that the utility model provides that is arranged so that of arithmetic element can directly be exported the numerical value of the brilliant speed of length of polycrystalline furnace by man-machine interface, thereby has saved the step that manual calculation is analyzed, and has improved efficiency of measurement.
Use the method that the brilliant speed of 8 pairs of polycrystalline furnace superintendents of the brilliant speed self-operated measuring unit of above-mentioned polycrystalline furnace superintendent is measured automatically, may further comprise the steps:
1) at first imports the measurement period T of the brilliant speed self-operated measuring unit 8 of polycrystalline furnace superintendent and the induction pressure value F of first pressure transmitter 12 to PLC14 through man-machine interface;
2) PLC14 starts drive unit, and drive device drives quartz pushrod 3 slowly drops to the lower end of quartz pushrod 3 near crystal ingot 6 surfaces from starting position;
3) touch crystal ingot 6 surfaces when the lower end of quartz pushrod 3, and the pressure that receives of crystal ingot 6 surfaces is when reaching F, first pressure transmitter 12 is passed to PLC14 with the signal of sensing, and position transducer is with the stroke H of drive unit simultaneously
1Pass to PLC14, PLC14 writes down to the received signal and shows through man-machine interface;
4) quartz pushrod 3 driven devices drive to the direction away from crystal ingot 6 surfaces and move to starting position so that measure next time;
5) after the time through a measurement period T; The lower end that PLC14 accessory drive drive quartz pushrod 3 slowly drops to quartz pushrod 3 touches crystal ingot 6 surfaces; And crystal ingot 6 surfaces are under pressure when reaching F; Pressure transmitter is passed to PLC14 with the signal of sensing, and simultaneously, position transducer is the stroke H of drive unit at this moment
2Pass to PLC14, PLC14 writes down to the received signal and shows through man-machine interface;
6) calculate the brilliant speed of polycrystalline furnace superintendent in first measuring period according to above-mentioned observed value
7) repeat above-mentioned steps 2) to 6), can calculate the brilliant speed of length of the polycrystalline furnace in each measuring period;
8) the brilliant speed of the length in a plurality of measuring periods is average, can draw the brilliant velocity amplitude of total length.
In the aforesaid method, in step 1), can also import the induction pressure value of said second pressure transmitter 13 to said PLC through said man-machine interface; In step 3), when said quartz pushrod touched said crystal ingot surface, said second pressure transmitter 13 also sent signal to said PLC.
The brilliant speed method for automatic measurement of polycrystalline furnace superintendent that using the utility model provides need not survey crew and to the top of polycrystalline furnace, reading is carried out in the position of quartz pushrod on graduated scale continually, makes survey crew be able to liberation.
Man-machine interface can be a touch-screen 15, makes simple in structure, the simple operation of the brilliant speed self-operated measuring unit 8 of polycrystalline furnace superintendent that the utility model provides.
The brilliant speed method for automatic measurement of polycrystalline furnace superintendent can also comprise that the arithmetic element of utilizing PLC14 carries out computational analysis to the signal from position transducer and pressure transmitter that receives, thereby the numerical value that obtains long brilliant speed also is shown in the step on the man-machine interface with this numerical value.The brilliant speed method for automatic measurement of the polycrystalline furnace superintendent that makes the utility model provide can directly be exported the numerical value of the brilliant speed of length of polycrystalline furnace by man-machine interface, thereby has saved the step that manual calculation is analyzed, and has improved efficiency of measurement.
Certainly; The above is the preferred implementation of the utility model; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the utility model principle; Can also make some improvement and retouching, these improvement and retouching also are regarded as the protection domain of the utility model.
Claims (7)
1. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent is characterized in that, comprising:
Be used for the quartz pushrod that contacts with the crystal ingot of polycrystalline furnace;
Be used to drive said quartz pushrod straight-line drive unit up and down;
Be installed on the said drive unit, be used to measure the position transducer of the operation stroke of said drive unit;
Be installed between said drive unit and the said quartz pushrod, be used to first pressure transmitter of judging whether said quartz pushrod contacts with said crystal ingot;
Be used for measuring process is carried out parameter setting and shown the man-machine interface of measuring result;
Be electrically connected with said drive unit, said position transducer, said first pressure transmitter and said man-machine interface respectively; Be used to receive parameter and the said position transducer of said man-machine interface input and the signal that said pressure transmitter is gathered, and control said drive unit according to the signal of said first pressure transmitter that receives and the parameter value of man-machine interface input and drive that said quartz pushrod rises or the PLC of decline.
2. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 1, it is characterized in that: said drive unit is an electric cylinder.
3. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 1, it is characterized in that: said man-machine interface is a touch-screen.
4. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 1 is characterized in that: the parameter of said man-machine interface input comprises the induction pressure value of measuring period and said first pressure transmitter.
5. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 1 is characterized in that: have arithmetic element in the said PLC.
6. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 1 is characterized in that: also be provided with between said drive unit and the said quartz pushrod and be used to second pressure transmitter of judging whether said quartz pushrod contacts with said crystal ingot.
7. the brilliant speed self-operated measuring unit of polycrystalline furnace superintendent according to claim 6, it is characterized in that: the pressure sensitive end of said second pressure transmitter is connected with the upper surface of said first pressure transmitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200991025U CN202099411U (en) | 2011-04-06 | 2011-04-06 | Automatic measuring device for crystal growth speed of multi-crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200991025U CN202099411U (en) | 2011-04-06 | 2011-04-06 | Automatic measuring device for crystal growth speed of multi-crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN202099411U true CN202099411U (en) | 2012-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200991025U Expired - Lifetime CN202099411U (en) | 2011-04-06 | 2011-04-06 | Automatic measuring device for crystal growth speed of multi-crystal furnace |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102692199A (en) * | 2012-06-11 | 2012-09-26 | 苏州禹石自动化工程技术有限公司 | Unfused silicon ingot height measuring system |
| CN102732958A (en) * | 2011-04-06 | 2012-10-17 | 镇江荣德新能源科技有限公司 | Device and method for automatic measurement of crystal growth speed of polycrystal growing furnace |
| CN102877128A (en) * | 2012-08-30 | 2013-01-16 | 江西赛维Ldk太阳能高科技有限公司 | Reusable test rod and application method thereof |
| CN103243384A (en) * | 2012-02-03 | 2013-08-14 | 昆山中辰矽晶有限公司 | Crystal growth measurement compensation system and method thereof |
| CN103668449A (en) * | 2012-09-06 | 2014-03-26 | 镇江荣德新能源科技有限公司 | Solid-liquid interface determination device for silicon ingot furnace |
| CN104233473A (en) * | 2014-09-30 | 2014-12-24 | 天威新能源控股有限公司 | Seed crystal melting height measurement device for universal ingot furnace and measurement method therefor |
-
2011
- 2011-04-06 CN CN2011200991025U patent/CN202099411U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732958A (en) * | 2011-04-06 | 2012-10-17 | 镇江荣德新能源科技有限公司 | Device and method for automatic measurement of crystal growth speed of polycrystal growing furnace |
| CN102732958B (en) * | 2011-04-06 | 2016-01-20 | 镇江荣德新能源科技有限公司 | Automatic measuring device for crystal growth speed of multi-crystal furnace and measuring method thereof |
| CN103243384A (en) * | 2012-02-03 | 2013-08-14 | 昆山中辰矽晶有限公司 | Crystal growth measurement compensation system and method thereof |
| CN102692199A (en) * | 2012-06-11 | 2012-09-26 | 苏州禹石自动化工程技术有限公司 | Unfused silicon ingot height measuring system |
| CN102877128A (en) * | 2012-08-30 | 2013-01-16 | 江西赛维Ldk太阳能高科技有限公司 | Reusable test rod and application method thereof |
| CN102877128B (en) * | 2012-08-30 | 2015-08-05 | 江西赛维Ldk太阳能高科技有限公司 | A kind of test rod of reusing and application method thereof |
| CN103668449A (en) * | 2012-09-06 | 2014-03-26 | 镇江荣德新能源科技有限公司 | Solid-liquid interface determination device for silicon ingot furnace |
| CN103668449B (en) * | 2012-09-06 | 2017-06-06 | 镇江荣德新能源科技有限公司 | A kind of Solid-liquid interface determination device for silicon ingot furnace |
| CN104233473A (en) * | 2014-09-30 | 2014-12-24 | 天威新能源控股有限公司 | Seed crystal melting height measurement device for universal ingot furnace and measurement method therefor |
| CN104233473B (en) * | 2014-09-30 | 2016-08-24 | 天威新能源控股有限公司 | Measurement apparatus and measuring method for general ingot furnace seed crystal fusing height |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120104 |