CN202083648U - Optical detection device and glass substrate detection system - Google Patents

Optical detection device and glass substrate detection system Download PDF

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Publication number
CN202083648U
CN202083648U CN2011201744294U CN201120174429U CN202083648U CN 202083648 U CN202083648 U CN 202083648U CN 2011201744294 U CN2011201744294 U CN 2011201744294U CN 201120174429 U CN201120174429 U CN 201120174429U CN 202083648 U CN202083648 U CN 202083648U
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China
Prior art keywords
glass substrate
light
line source
luminescence component
emitting area
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CN2011201744294U
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Inventor
白国晓
赵海生
黄雄天
林金升
李毅楠
肖志莲
杨海洪
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BOE Technology Group Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Abstract

The embodiment of the utility model relates to the technical field of liquid crystal display, in particular to an optical detection device and a glass substrate detection system. The optical detection device comprises a light emitting module, a light receiving module and a confirming module, wherein the light emitting module is arranged at the outer side of a glass substrate and emits light rays to at least two directions along the upper surface of the glass substrate, and the light rays emitted from each light-emitting area of the luminous module cover the upper surface of the glass substrate; the light receiving module receives the light rays from the light emitting module; the confirming module is connected with the light receiving module to determine the position of impurities according to the light rays received by the light receiving module. In the optical detection device and the glass substrate detection system, the impurities on the surface of the glass substrate can be determined before the glass substrate is scanned and detected so as to protect the glass substrate detection device.

Description

A kind of optical detection apparatus and glass substrate detection system
Technical field
The utility model relates to technical field of liquid crystal display, particularly a kind of optical detection apparatus and glass substrate detection system.
Background technology
At present, as shown in Figure 1, when the glass substrate on the baseplate carrier 12 was detected, glass substrate pick-up unit 3 was approximately 100 microns apart from the distance of glass substrate 2 upper surfaces.
Yet, can't avoid broken in the process of production glass substrate 2, the glass slag may splash the upper surface of glass substrate 2 when glass was broken.As shown in Figure 2, glass substrate pick-up unit 3 has only 100 microns apart from glass substrate 2, when glass substrate pick-up unit 3 when the direction of arrow moves, very little impurity 4 (as glass slag, big dust etc.) is easy to cause glass substrate pick-up unit 3 and scratches and damage.Costing an arm and a leg and difficulty being installed of this glass substrate pick-up unit 3 if be scratched and then not only reduced the detection quality, and will significantly improve production cost.
The utility model content
A kind of optical detection apparatus and glass substrate detection system that the utility model embodiment provides can be determined the impurity of glass baseplate surface before glass substrate is scanned detection, thus the cover glass substrate detection apparatus.
The utility model embodiment provides a kind of optical detection apparatus, comprising:
Be positioned at glass substrate 2 outsides, along the luminescence component 5 that described glass substrate 2 upper surfaces emit beam to both direction at least, the light that each light-emitting area of described luminescence component 5 is sent all covers described glass substrate 2 upper surfaces;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with described receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light that described receipts optical assembly 6 receives.
Preferable, when described luminescence component 5 comprised a line source, described line source had at least one bending angle, formed at least two light-emitting areas, emitted beam to both direction at least.
Preferable, described luminescence component 5 comprises first line source and second line source, the light that the light-emitting area of described first line source and second line source is sent has intersection point.
Preferable, the light-emitting area of described first line source is vertical with the light that the light-emitting area of described second line source is sent.
Preferable, when described glass substrate 2 was rectangle, the light-emitting area of first line source was towards the broadside of described glass substrate 2, and the length of first line source is not less than the length of the broadside of described glass substrate 2; The light-emitting area of second line source is towards the long limit of described glass substrate 2, and the length of second line source is not less than the length on the long limit of described glass substrate 2.
Preferable, when described glass substrate 2 was polygon, the light-emitting area of first line source was towards the broadside of described glass substrate 2 boundary rectangle frames, and the length of first line source is not less than the length of the broadside of described glass substrate 2 boundary rectangle frames; The light-emitting area of second line source is towards the long limit of described glass substrate 2 boundary rectangle frames, and the length of second line source is not less than the length on long limit of the boundary rectangle frame of described glass substrate 2.
Preferable, the number of light sources that described luminescence component 5 comprises is during greater than two, and the light that the light that the light-emitting area of at least one line source is sent and the light-emitting area of all the other line sources are sent has intersection point.
The vertical range on described luminescence component 5 and plane, glass substrate 2 upper surface place is less than 100 microns.
Described receipts optical assembly 6 is positioned at same plane with described luminescence component 5, and the number of described receipts optical assembly 6 is identical with number of light sources in the described luminescence component 5, and the position is corresponding with the position of described light source.
A kind of glass substrate detection system that the utility model embodiment provides comprises: detect the glass substrate pick-up unit 3 of described glass substrate, also comprise: the optical detection apparatus 8 that detects glass substrate upper surface impurity position.
Preferable, described system also comprises: control the control device 9 that described glass substrate pick-up unit is skipped impurity.
Preferable, described system also comprises: the scavenge unit 10 of removing the impurity on the described glass substrate.
Optical detection apparatus that the utility model embodiment provides and glass substrate detection system, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.Determine this Impurity removal thoroughly to be eliminated the damage to the glass substrate pick-up unit behind the impurity position.
Description of drawings
The synoptic diagram of Fig. 1 in the prior art glass substrate being detected;
The process synoptic diagram that Fig. 2 detects for glass substrate pick-up unit in the prior art;
Fig. 3 is the structural representation of optical detection apparatus among the utility model embodiment;
Fig. 4 a-Fig. 4 b is the structural representation of luminescence component among the utility model embodiment;
Fig. 5 is the position view of two light sources in the luminescence component among the utility model embodiment;
When Fig. 6 is rectangle for glass substrate among the utility model embodiment, the position view of luminescence component;
When Fig. 7 is polygon for glass substrate among the utility model embodiment, the position view of luminescence component;
Fig. 8 is a luminescence component and the position view of receiving optical assembly among the utility model embodiment;
Fig. 9 is a luminescence component and the position view of receiving optical assembly among another embodiment of the utility model;
Figure 10 is the structural representation of optical detection apparatus among the utility model embodiment;
Figure 11 is the structural representation of optical detection apparatus among another embodiment of the utility model;
Figure 12 is the structural representation of glass substrate detection system among another embodiment of the utility model.
Embodiment
Below in conjunction with Figure of description the utility model embodiment is described in further detail.
The utility model embodiment provides a kind of optical detection apparatus, and as shown in Figure 3, it specifically comprises:
Be positioned at luminescence component 5 glass substrate 2 outsides, that emit beam to both direction at least along glass substrate 2 upper surfaces, equal cover glass substrate 2 upper surfaces of the light that each light-emitting area of described luminescence component 5 is sent;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light of receiving optical assembly 6 receptions.
Preferable, when luminescence component 5 comprises a line source, this line source has at least one bending angle, form at least two light-emitting areas, emit beam to both direction at least, shown in Fig. 4 a, this luminescence component 5 has a bending angle, a line source is formed two light-emitting areas, and the light that these two light-emitting areas produce has intersection point; Shown in Fig. 4 b, this luminescence component 5 has two bending angles, and a line source is formed three light-emitting areas, and the light that these three light-emitting areas produce has intersection point.The bending angle number of this luminescence component 5 can determine according to actual needs, but should guarantee the upper surface that light that luminescence component 5 each light-emitting area send all can cover glass substrate 2.
Preferable, luminescence component 5 comprises first line source and second line source, the light that the light-emitting area of first line source and second line source is sent has intersection point.As shown in Figure 5, the light that sends of the light-emitting area of first line source and the light-emitting area of second line source is vertical.Certainly, also can become the angle of other number of degrees, 60 degree etc. for example, but should guarantee the upper surface that each line source sends in the luminescence component 5 light all can cover glass substrate 2.
As shown in Figure 6, when glass substrate 2 was rectangle, the light-emitting area of first line source 51 was towards the broadside of this glass substrate 2, and the length of first line source is not less than the length of the broadside of glass substrate 2; The light-emitting area of second line source 52 is towards the long limit of this glass substrate 2, and the length of second line source is not less than the length on the long limit of glass substrate 2.As shown in Figure 7, when glass substrate 2 was polygon, the light-emitting area of first line source 51 was towards the broadside of these glass substrate 2 boundary rectangle frames (dotted portion among the figure), and the length of first line source is not less than the length of the broadside of glass substrate 2 boundary rectangle frames; The light-emitting area of second line source 52 is towards the long limit of glass substrate 2 boundary rectangle frames, and the length of second line source is not less than the length on long limit of the boundary rectangle frame of glass substrate 2.Wherein, polygonal glass substrate 2 boundary rectangle frames are meant: with the rectangle of polygonal glass substrate 2 complete frames in the minimum of inside.
Preferable, the number of light sources that luminescence component 5 comprises is during greater than two, and the light that the light that the light-emitting area of at least one line source is sent and the light-emitting area of all the other line sources are sent has intersection point.
The vertical range on above-mentioned luminescence component 5 and plane, glass substrate 2 upper surface place should for example, can be 80 microns less than 100 microns of the vertical ranges of glass substrate pick-up unit 3 and glass substrate 2.
Corresponding with above-mentioned luminescence component 5, to receive optical assembly 6 and be positioned at same plane with luminescence component 5, its number is identical with number of light sources in the luminescence component 5, and the position is corresponding with the position of light source.As shown in Figure 8, suppose that the number of light sources in the luminescence component 5 is 2, a line source is positioned at the outside, long limit of rectangle glass 2, another line source is positioned at the broadside outside of rectangle glass 2, the number of receiving optical assembly 6 is 2, another outside, long limit that is positioned at rectangle glass 2, another is positioned at another broadside outside of rectangle glass 2.
The number of this receipts optical assembly 6 also can be different with the number of light sources in the luminescence component 5, and the position can be not corresponding yet.Shown in Figure 9, suppose that luminescence component 5 has two line sources, the light angle that both send is 90 degree, and is corresponding, has a receipts optical assembly 6 and receives this two light that line source sends simultaneously.This receives optical assembly 6 also can be the same with luminescence component 5, has one or more bending angles, need guarantee to receive fully the light that luminescence component 5 sends and get final product.
Determine that assembly 7 is connected with above-mentioned receipts optical assembly 6, determine the impurity position according to the light of receiving optical assembly 6 receptions.Concrete, when having impurity on the glass substrate 2,, receive optical assembly 6 and can't be transmitted into because the rectilinear propagation characteristic of light has part light and is subjected to stopping of this impurity.Because the light of the both direction at least of luminescence component 5 emissions all covers whole glass substrate 2, therefore, receive optical assembly 6 and all can not receive light in certain two position, and then according to the position that can not receive light in luminescence component position and the receipts optical assembly, determine two straight lines, the intersection point of these two straight lines is the position of this impurity.
Pass through foregoing description, as can be seen, the optical detection apparatus that uses the utility model to provide, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction at least, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.
Below by specific embodiment the optical detection apparatus that the utility model provides is described in detail.
As shown in figure 10, suppose that glass substrate 2 is rectangle, luminescence component 5 has line source 51 and line source 52, lays respectively at the long limit L1 of glass substrate 2 and the outside of broadside L2, and the equal upper surface that can cover whole glass substrate 2 of light that sends of these two line sources.Receive optical assembly 61 and receive optical assembly 62 and lay respectively at another the long limit L3 of this glass substrate 2 and the outside of another broadside L2.Like this, the receipts optical assembly 61 of growing the limit L3 outside receives the light that the luminescence component 51 in the long limit L1 outside sends; The receipts optical assembly 62 in the broadside L4 outside receives the light that the luminescence component 52 outside the broadside L2 sends.And, this luminescence component is no more than 100 microns apart from the distance on the vertical direction of plane, glass substrate upper surface place, as being set to 85 microns, simultaneously, receive optical assembly and luminescence component and be positioned at same plane, to guarantee to receive the light that luminescence component sends.
If the glass substrate broadside is X, long side direction is Y, when having impurity 4 on the glass substrate 2, the light portion that luminescence component 51 sends is stopped by this impurity 4, can't be received optical assembly 61 receives, receive optical assembly 61 and determine the straight line (as dotted line m among Figure 10) that directions X can not receive light, and inform and determine assembly 7.In like manner, the light that luminescence component 52 sends also has part to be stopped by this impurity 4, can't be received optical assembly 62 and receive, and receives optical assembly 62 and determines the straight line (as dotted line n among Figure 10) that the Y direction can not receive light, and inform and determine assembly 7.Determine that position that assembly 7 can not receive light according to directions X and Y direction determines the particular location of impurity 4, promptly the intersection point place of straight line m and straight line n is the position at impurity 4 places.
When glass substrate 2 is polygon, can be referring to Fig. 7, with the broadside of glass substrate 2 boundary rectangle frames be made as directions X, long limit is made as the Y direction, and determines the impurity position with reference to aforesaid way.
Below by another specific embodiment the optical detection apparatus that the utility model provides is described in detail.As shown in figure 11, suppose that glass substrate 2 is rectangle, luminescence component 5 has line source 51 and line source 52, lays respectively at two adjacent drift angle outsides of glass substrate 2, and the light that these two line sources send all can cover the upper surface of whole glass substrate 2.Receive optical assembly 61 and receive the outside that optical assembly 62 lays respectively at all the other two drift angles of this glass.This luminescence component is no more than 100 microns apart from the distance of glass substrate, as being set to 80 microns, simultaneously, receiving optical assembly and luminescence component and is positioned at same plane, to guarantee to receive the light that luminescence component sends.
If the direction of the light that the direction of the light that line source 51 sends is X, line source 52 to be sent is Y, when having impurity 4 on the glass substrate 2, the light portion that luminescence component 51 sends is stopped by this impurity 4, can't be received optical assembly 61 receives, receive optical assembly 61 and determine the straight line that directions X can not receive light (as dotted line among Figure 11 a), and inform and determine assembly 7.In like manner, the light that luminescence component 52 sends also has part to be stopped by this impurity 4, can't be received optical assembly 62 and receive, and receives optical assembly 62 and determines the straight line (as dotted line b among Figure 11) that the Y direction can not receive light, and inform and determine assembly 7.Determine that position that assembly 7 can not receive light according to directions X and Y direction determines the particular location of impurity 4, promptly the intersection point place of straight line a and straight line b is the position at impurity 4 places.
Pass through foregoing description, as can be seen, the optical detection apparatus that uses the utility model to provide, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction at least, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.
Based on same conception, the utility model also provides a kind of glass substrate detection system, comprises the glass substrate pick-up unit 3 that detects described glass substrate; As shown in figure 12, also comprise: the optical detection apparatus 8 that detects glass substrate upper surface impurity position;
Described optical detection apparatus 8 comprises:
Be positioned at luminescence component 5 glass substrate 2 outsides, that emit beam to both direction at least along glass substrate 2 upper surfaces, equal cover glass substrate 2 upper surfaces of the light that each light-emitting area of described luminescence component 5 is sent;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light of receiving optical assembly 6 receptions.
Preferable, this system also comprises: control glass substrate pick-up unit 3 is skipped the control device 9 of impurity.
Preferable, this system also comprises: the scavenge unit 10 of removing the impurity on the described glass substrate 2.For example use the mode of vacuum suction to absorb impurity.
In addition, determine the impurity position after, can also take pictures and subsequent treatment such as preservation to this impurity.
Pass through foregoing description, as can be seen, optical detection apparatus that the utility model embodiment provides and glass substrate detection system, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.Determine this Impurity removal thoroughly to be eliminated the damage to the glass substrate pick-up unit behind the impurity position.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims (12)

1. an optical detection apparatus is characterized in that, comprising:
Be positioned at glass substrate (2) outside, along the luminescence component (5) that described glass substrate (2) upper surface emits beam to both direction at least, the light that each light-emitting area of described luminescence component (5) is sent all covers described glass substrate (2) upper surface;
Receive the receipts optical assembly (6) of the light that described luminescence component (5) sends;
Be connected with described receipts optical assembly (6), determine impurity position locking assembly (7) really according to the light that described receipts optical assembly (6) receives.
2. optical detection apparatus as claimed in claim 1 is characterized in that, when described luminescence component (5) comprised a line source, described line source had at least one bending angle, forms at least two light-emitting areas, emits beam to both direction at least.
3. optical detection apparatus as claimed in claim 1 is characterized in that, described luminescence component (5) comprises first line source and second line source, and the light that the light-emitting area of described first line source and second line source is sent has intersection point.
4. optical detection apparatus as claimed in claim 3 is characterized in that the light-emitting area of described first line source is vertical with the light that the light-emitting area of described second line source is sent.
5. optical detection apparatus as claimed in claim 4, it is characterized in that, when described glass substrate (2) was rectangle, the light-emitting area of first line source was towards the broadside of described glass substrate (2), and the length of first line source is not less than the length of the broadside of described glass substrate (2); The light-emitting area of second line source is towards the long limit of described glass substrate (2), and the length of second line source is not less than the length on the long limit of described glass substrate (2).
6. optical detection apparatus as claimed in claim 4, it is characterized in that, when described glass substrate (2) is polygon, the light-emitting area of first line source is towards the broadside of described glass substrate (2) boundary rectangle frame, and the length of first line source is not less than the length of the broadside of described glass substrate (2) boundary rectangle frame; The light-emitting area of second line source is towards the long limit of described glass substrate (2) boundary rectangle frame, and the length of second line source is not less than the length on long limit of the boundary rectangle frame of described glass substrate (2).
7. optical detection apparatus as claimed in claim 1 is characterized in that, the number of light sources that described luminescence component (5) comprises is during greater than two, and the light that the light that the light-emitting area of at least one line source is sent and the light-emitting area of all the other line sources are sent has intersection point.
8. optical detection apparatus as claimed in claim 1 is characterized in that, the vertical range on described luminescence component (5) and plane, glass substrate (2) upper surface place is less than 100 microns.
9. optical detection apparatus as claimed in claim 1, it is characterized in that, described receipts optical assembly (6) and described luminescence component (5) are positioned at same plane, and the number of described receipts optical assembly (6) is identical with number of light sources in the described luminescence component (5), and the position is corresponding with the position of described light source.
10. a glass substrate detection system comprises the glass substrate pick-up unit (3) that detects described glass substrate, it is characterized in that, also comprises: the arbitrary described optical detection apparatus of claim 1-9.
11. system as claimed in claim 10 is characterized in that, also comprises:
Control described glass substrate pick-up unit and skip the control device (9) of impurity.
12. system as claimed in claim 10 is characterized in that, also comprises:
Remove the scavenge unit (10) of the impurity on the described glass substrate.
CN2011201744294U 2011-05-27 2011-05-27 Optical detection device and glass substrate detection system Expired - Lifetime CN202083648U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621149A (en) * 2012-03-21 2012-08-01 深圳市华星光电技术有限公司 Substrate detection device and method
WO2013139055A1 (en) * 2012-03-22 2013-09-26 深圳市华星光电技术有限公司 Glass substrate detection device and method
CN106908454A (en) * 2015-12-23 2017-06-30 昆山国显光电有限公司 The testing equipment and method of substrate
CN110823106A (en) * 2019-10-16 2020-02-21 江苏大学 Method for detecting quality of plate glass based on laser continuous wave modulation principle
CN111650210A (en) * 2020-06-11 2020-09-11 深圳市信宇人科技股份有限公司 Burr detection method and detection system for high-speed high-precision lithium ion battery pole piece

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102621149A (en) * 2012-03-21 2012-08-01 深圳市华星光电技术有限公司 Substrate detection device and method
CN102621149B (en) * 2012-03-21 2015-07-22 深圳市华星光电技术有限公司 Substrate detection device and method
WO2013139055A1 (en) * 2012-03-22 2013-09-26 深圳市华星光电技术有限公司 Glass substrate detection device and method
CN106908454A (en) * 2015-12-23 2017-06-30 昆山国显光电有限公司 The testing equipment and method of substrate
CN106908454B (en) * 2015-12-23 2020-05-22 昆山国显光电有限公司 Substrate detection device and method
CN110823106A (en) * 2019-10-16 2020-02-21 江苏大学 Method for detecting quality of plate glass based on laser continuous wave modulation principle
CN110823106B (en) * 2019-10-16 2021-09-10 江苏大学 Method for detecting quality of plate glass based on laser continuous wave modulation principle
CN111650210A (en) * 2020-06-11 2020-09-11 深圳市信宇人科技股份有限公司 Burr detection method and detection system for high-speed high-precision lithium ion battery pole piece

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