The utility model content
A kind of optical detection apparatus and glass substrate detection system that the utility model embodiment provides can be determined the impurity of glass baseplate surface before glass substrate is scanned detection, thus the cover glass substrate detection apparatus.
The utility model embodiment provides a kind of optical detection apparatus, comprising:
Be positioned at glass substrate 2 outsides, along the luminescence component 5 that described glass substrate 2 upper surfaces emit beam to both direction at least, the light that each light-emitting area of described luminescence component 5 is sent all covers described glass substrate 2 upper surfaces;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with described receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light that described receipts optical assembly 6 receives.
Preferable, when described luminescence component 5 comprised a line source, described line source had at least one bending angle, formed at least two light-emitting areas, emitted beam to both direction at least.
Preferable, described luminescence component 5 comprises first line source and second line source, the light that the light-emitting area of described first line source and second line source is sent has intersection point.
Preferable, the light-emitting area of described first line source is vertical with the light that the light-emitting area of described second line source is sent.
Preferable, when described glass substrate 2 was rectangle, the light-emitting area of first line source was towards the broadside of described glass substrate 2, and the length of first line source is not less than the length of the broadside of described glass substrate 2; The light-emitting area of second line source is towards the long limit of described glass substrate 2, and the length of second line source is not less than the length on the long limit of described glass substrate 2.
Preferable, when described glass substrate 2 was polygon, the light-emitting area of first line source was towards the broadside of described glass substrate 2 boundary rectangle frames, and the length of first line source is not less than the length of the broadside of described glass substrate 2 boundary rectangle frames; The light-emitting area of second line source is towards the long limit of described glass substrate 2 boundary rectangle frames, and the length of second line source is not less than the length on long limit of the boundary rectangle frame of described glass substrate 2.
Preferable, the number of light sources that described luminescence component 5 comprises is during greater than two, and the light that the light that the light-emitting area of at least one line source is sent and the light-emitting area of all the other line sources are sent has intersection point.
The vertical range on described luminescence component 5 and plane, glass substrate 2 upper surface place is less than 100 microns.
Described receipts optical assembly 6 is positioned at same plane with described luminescence component 5, and the number of described receipts optical assembly 6 is identical with number of light sources in the described luminescence component 5, and the position is corresponding with the position of described light source.
A kind of glass substrate detection system that the utility model embodiment provides comprises: detect the glass substrate pick-up unit 3 of described glass substrate, also comprise: the optical detection apparatus 8 that detects glass substrate upper surface impurity position.
Preferable, described system also comprises: control the control device 9 that described glass substrate pick-up unit is skipped impurity.
Preferable, described system also comprises: the scavenge unit 10 of removing the impurity on the described glass substrate.
Optical detection apparatus that the utility model embodiment provides and glass substrate detection system, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.Determine this Impurity removal thoroughly to be eliminated the damage to the glass substrate pick-up unit behind the impurity position.
Embodiment
Below in conjunction with Figure of description the utility model embodiment is described in further detail.
The utility model embodiment provides a kind of optical detection apparatus, and as shown in Figure 3, it specifically comprises:
Be positioned at luminescence component 5 glass substrate 2 outsides, that emit beam to both direction at least along glass substrate 2 upper surfaces, equal cover glass substrate 2 upper surfaces of the light that each light-emitting area of described luminescence component 5 is sent;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light of receiving optical assembly 6 receptions.
Preferable, when luminescence component 5 comprises a line source, this line source has at least one bending angle, form at least two light-emitting areas, emit beam to both direction at least, shown in Fig. 4 a, this luminescence component 5 has a bending angle, a line source is formed two light-emitting areas, and the light that these two light-emitting areas produce has intersection point; Shown in Fig. 4 b, this luminescence component 5 has two bending angles, and a line source is formed three light-emitting areas, and the light that these three light-emitting areas produce has intersection point.The bending angle number of this luminescence component 5 can determine according to actual needs, but should guarantee the upper surface that light that luminescence component 5 each light-emitting area send all can cover glass substrate 2.
Preferable, luminescence component 5 comprises first line source and second line source, the light that the light-emitting area of first line source and second line source is sent has intersection point.As shown in Figure 5, the light that sends of the light-emitting area of first line source and the light-emitting area of second line source is vertical.Certainly, also can become the angle of other number of degrees, 60 degree etc. for example, but should guarantee the upper surface that each line source sends in the luminescence component 5 light all can cover glass substrate 2.
As shown in Figure 6, when glass substrate 2 was rectangle, the light-emitting area of first line source 51 was towards the broadside of this glass substrate 2, and the length of first line source is not less than the length of the broadside of glass substrate 2; The light-emitting area of second line source 52 is towards the long limit of this glass substrate 2, and the length of second line source is not less than the length on the long limit of glass substrate 2.As shown in Figure 7, when glass substrate 2 was polygon, the light-emitting area of first line source 51 was towards the broadside of these glass substrate 2 boundary rectangle frames (dotted portion among the figure), and the length of first line source is not less than the length of the broadside of glass substrate 2 boundary rectangle frames; The light-emitting area of second line source 52 is towards the long limit of glass substrate 2 boundary rectangle frames, and the length of second line source is not less than the length on long limit of the boundary rectangle frame of glass substrate 2.Wherein, polygonal glass substrate 2 boundary rectangle frames are meant: with the rectangle of polygonal glass substrate 2 complete frames in the minimum of inside.
Preferable, the number of light sources that luminescence component 5 comprises is during greater than two, and the light that the light that the light-emitting area of at least one line source is sent and the light-emitting area of all the other line sources are sent has intersection point.
The vertical range on above-mentioned luminescence component 5 and plane, glass substrate 2 upper surface place should for example, can be 80 microns less than 100 microns of the vertical ranges of glass substrate pick-up unit 3 and glass substrate 2.
Corresponding with above-mentioned luminescence component 5, to receive optical assembly 6 and be positioned at same plane with luminescence component 5, its number is identical with number of light sources in the luminescence component 5, and the position is corresponding with the position of light source.As shown in Figure 8, suppose that the number of light sources in the luminescence component 5 is 2, a line source is positioned at the outside, long limit of rectangle glass 2, another line source is positioned at the broadside outside of rectangle glass 2, the number of receiving optical assembly 6 is 2, another outside, long limit that is positioned at rectangle glass 2, another is positioned at another broadside outside of rectangle glass 2.
The number of this receipts optical assembly 6 also can be different with the number of light sources in the luminescence component 5, and the position can be not corresponding yet.Shown in Figure 9, suppose that luminescence component 5 has two line sources, the light angle that both send is 90 degree, and is corresponding, has a receipts optical assembly 6 and receives this two light that line source sends simultaneously.This receives optical assembly 6 also can be the same with luminescence component 5, has one or more bending angles, need guarantee to receive fully the light that luminescence component 5 sends and get final product.
Determine that assembly 7 is connected with above-mentioned receipts optical assembly 6, determine the impurity position according to the light of receiving optical assembly 6 receptions.Concrete, when having impurity on the glass substrate 2,, receive optical assembly 6 and can't be transmitted into because the rectilinear propagation characteristic of light has part light and is subjected to stopping of this impurity.Because the light of the both direction at least of luminescence component 5 emissions all covers whole glass substrate 2, therefore, receive optical assembly 6 and all can not receive light in certain two position, and then according to the position that can not receive light in luminescence component position and the receipts optical assembly, determine two straight lines, the intersection point of these two straight lines is the position of this impurity.
Pass through foregoing description, as can be seen, the optical detection apparatus that uses the utility model to provide, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction at least, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.
Below by specific embodiment the optical detection apparatus that the utility model provides is described in detail.
As shown in figure 10, suppose that glass substrate 2 is rectangle, luminescence component 5 has line source 51 and line source 52, lays respectively at the long limit L1 of glass substrate 2 and the outside of broadside L2, and the equal upper surface that can cover whole glass substrate 2 of light that sends of these two line sources.Receive optical assembly 61 and receive optical assembly 62 and lay respectively at another the long limit L3 of this glass substrate 2 and the outside of another broadside L2.Like this, the receipts optical assembly 61 of growing the limit L3 outside receives the light that the luminescence component 51 in the long limit L1 outside sends; The receipts optical assembly 62 in the broadside L4 outside receives the light that the luminescence component 52 outside the broadside L2 sends.And, this luminescence component is no more than 100 microns apart from the distance on the vertical direction of plane, glass substrate upper surface place, as being set to 85 microns, simultaneously, receive optical assembly and luminescence component and be positioned at same plane, to guarantee to receive the light that luminescence component sends.
If the glass substrate broadside is X, long side direction is Y, when having impurity 4 on the glass substrate 2, the light portion that luminescence component 51 sends is stopped by this impurity 4, can't be received optical assembly 61 receives, receive optical assembly 61 and determine the straight line (as dotted line m among Figure 10) that directions X can not receive light, and inform and determine assembly 7.In like manner, the light that luminescence component 52 sends also has part to be stopped by this impurity 4, can't be received optical assembly 62 and receive, and receives optical assembly 62 and determines the straight line (as dotted line n among Figure 10) that the Y direction can not receive light, and inform and determine assembly 7.Determine that position that assembly 7 can not receive light according to directions X and Y direction determines the particular location of impurity 4, promptly the intersection point place of straight line m and straight line n is the position at impurity 4 places.
When glass substrate 2 is polygon, can be referring to Fig. 7, with the broadside of glass substrate 2 boundary rectangle frames be made as directions X, long limit is made as the Y direction, and determines the impurity position with reference to aforesaid way.
Below by another specific embodiment the optical detection apparatus that the utility model provides is described in detail.As shown in figure 11, suppose that glass substrate 2 is rectangle, luminescence component 5 has line source 51 and line source 52, lays respectively at two adjacent drift angle outsides of glass substrate 2, and the light that these two line sources send all can cover the upper surface of whole glass substrate 2.Receive optical assembly 61 and receive the outside that optical assembly 62 lays respectively at all the other two drift angles of this glass.This luminescence component is no more than 100 microns apart from the distance of glass substrate, as being set to 80 microns, simultaneously, receiving optical assembly and luminescence component and is positioned at same plane, to guarantee to receive the light that luminescence component sends.
If the direction of the light that the direction of the light that line source 51 sends is X, line source 52 to be sent is Y, when having impurity 4 on the glass substrate 2, the light portion that luminescence component 51 sends is stopped by this impurity 4, can't be received optical assembly 61 receives, receive optical assembly 61 and determine the straight line that directions X can not receive light (as dotted line among Figure 11 a), and inform and determine assembly 7.In like manner, the light that luminescence component 52 sends also has part to be stopped by this impurity 4, can't be received optical assembly 62 and receive, and receives optical assembly 62 and determines the straight line (as dotted line b among Figure 11) that the Y direction can not receive light, and inform and determine assembly 7.Determine that position that assembly 7 can not receive light according to directions X and Y direction determines the particular location of impurity 4, promptly the intersection point place of straight line a and straight line b is the position at impurity 4 places.
Pass through foregoing description, as can be seen, the optical detection apparatus that uses the utility model to provide, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction at least, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.
Based on same conception, the utility model also provides a kind of glass substrate detection system, comprises the glass substrate pick-up unit 3 that detects described glass substrate; As shown in figure 12, also comprise: the optical detection apparatus 8 that detects glass substrate upper surface impurity position;
Described optical detection apparatus 8 comprises:
Be positioned at luminescence component 5 glass substrate 2 outsides, that emit beam to both direction at least along glass substrate 2 upper surfaces, equal cover glass substrate 2 upper surfaces of the light that each light-emitting area of described luminescence component 5 is sent;
Receive the receipts optical assembly 6 of the light that described luminescence component 5 sends;
Be connected with receipts optical assembly 6, determine impurity position locking assembly 7 really according to the light of receiving optical assembly 6 receptions.
Preferable, this system also comprises: control glass substrate pick-up unit 3 is skipped the control device 9 of impurity.
Preferable, this system also comprises: the scavenge unit 10 of removing the impurity on the described glass substrate 2.For example use the mode of vacuum suction to absorb impurity.
In addition, determine the impurity position after, can also take pictures and subsequent treatment such as preservation to this impurity.
Pass through foregoing description, as can be seen, optical detection apparatus that the utility model embodiment provides and glass substrate detection system, utilize the rectilinear propagation of light, determine the position of impurity by the light of both direction, and then can control the glass substrate pick-up unit and skip this impurity, avoid being caused scuffing by this impurity or damaging, guarantee the detection quality of glass substrate.And the velocity of propagation of light is very fast, and the time of checked for impurities is shorter, compares with other detection meanss thus, and detection efficiency is higher.Determine this Impurity removal thoroughly to be eliminated the damage to the glass substrate pick-up unit behind the impurity position.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.