CN202083181U - Chip dryer - Google Patents
Chip dryer Download PDFInfo
- Publication number
- CN202083181U CN202083181U CN2011201572546U CN201120157254U CN202083181U CN 202083181 U CN202083181 U CN 202083181U CN 2011201572546 U CN2011201572546 U CN 2011201572546U CN 201120157254 U CN201120157254 U CN 201120157254U CN 202083181 U CN202083181 U CN 202083181U
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- CN
- China
- Prior art keywords
- wafer
- cabinets cavity
- dryer
- blowing mouth
- drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to the technical field of chip drying, which particularly discloses a chip dryer. The chip dryer comprises a box body; a box body cavity is formed in the box body; a chip is positioned in the box body cavity; at least one air blowing opening is arranged on the inner wall of the box body cavity; the air blowing opening is communicated with a blower fan producing a hot air source; and an air exhaust opening is arranged on the opposite side of the air blowing opening. The chip drying has a simple structure, can realize effective and rapid chip drying, has a good drying effect, and saves the machining cost furthest.
Description
Technical field
The utility model relates to the drying crystal wafer technical field, particularly a kind of wafer dryer.
Background technology
In wafer production processes, grinding step is in preceding operation.Wafer needs rapid draing through grinding and clean the rear surface.Dry mode is common pneumatic conveying drying, spray-drying, Rotary drying, infra-red drying, microwave drying etc.For dry technology, it is that the scholar generally acknowledges that three targets are arranged, i.e. drying process will guarantee product quality; Drying operation does not pollute environment; Dry energy-conservation purpose.
First kind of existing production technology makes the method for wafer drying adopt electronic Blowing drum that the wafer after grinding is carried out the artificial drying operation usually, the shortcoming of its existence is: need hand-held product on one side during (1) personnel operation, one side hand electric Blowing drum, it is very inconvenient to operate, and production efficiency is low; (2) there is potential safety hazard in artificial hand electric Blowing drum, and personal safety can not get ensureing; (3) manually-operated has randomness, causes the wafer surface arid region not comprehensive easily, easily leaves watermark, and drying efficiency is low, and the wafer product quality is caused certain influence.
Second kind of existing production technology makes the method for wafer drying adopt the SRD drier that the wafer after grinding is carried out drying process usually, and it exists shortcoming to be: (1) SRD drier is relatively more expensive, has strengthened the production equipment cost; (2) the SRD drier needs to use deionized water in the process of drying, makes processing cost too high; (3) use the SRD drier to the dry time that needs about 10 minutes of wafer, make that the production efficiency of drying crystal wafer is low, and have the danger of broken wafer.
The utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model provides a kind of dryer, and safety and hidden danger of quality easily take place the inconvenient operation that existing drying crystal wafer exists, drying efficiency is low and processing cost is crossed high defective to overcome.
(2) technical scheme
In order to address the above problem, the utility model provides a kind of wafer dryer, comprises casing, has cabinets cavity in the described casing, and the wafer that is dried is arranged in cabinets cavity,
Described cabinets cavity inwall is provided with at least one blowing mouth, and described blowing mouth is communicated with the blower fan that produces hot air source, and the opposite of described blowing mouth is provided with exhaust outlet.
Further, described cabinets cavity has wafer case, and the described support that wafer is housed is positioned at wafer case, and described wafer case comprises the anchor clamps of holding chip support.
Further, relative tilt is provided with two walls that keep out the wind on the described cabinets cavity inwall, and the top opening of the described wall that keeps out the wind is greater than lower opening, and described wafer case is arranged in the wall that keeps out the wind.
Further, described casing is provided with transparent window.
Further, described blowing mouth is positioned at the top of cabinets cavity, and described exhaust outlet is positioned at the below of cabinets cavity.
Further, be provided with hot air duct between described blowing mouth and the blower fan, have several heat-generating pipes in the described hot air duct.
Further, be provided with warning device and temperature control meter in the described casing.
Further, inwall adopts glass fibre or asbestos board insulation around the described casing.
Further, airstrainer is installed before the described blower fan.
Further, described cabinets cavity inwall is provided with a plurality of blowing mouths, is provided with deep bead between the described adjacent blowing mouth.
(3) beneficial effect
The wafer dryer that the utility model provides, simple in structure, can realize drying effectively and quickly wafer, drying effect is good, and farthest saves processing cost.
Description of drawings
Fig. 1 is the utility model embodiment wafer drying machine structure schematic diagram.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
As shown in Figure 1, the wafer dryer that the utility model provides comprises: casing 1, and this casing 1 is a closed box, the inwall around it adopts the glass fibre asbestos board to be incubated.Be provided with cabinets cavity 2 in this fully sheathed case obturator, wafer to be dried is arranged in cabinets cavity 2.This casing 1 is provided with transparent window (figure does not show), and this transparent window is made by PC (Polycarbonate, Merlon) material.
This wafer can carry out alcohol to wafer earlier and handle before drying operation, makes alcoholic solution residual on the wafer under hot blast impacts, and drying efficiency is accelerated in volatilization fast.
These cabinets cavity 2 inwalls are provided with at least one blowing mouth 21, and the quantity of blowing mouth adopts two in the present embodiment, is provided with deep bead 22 between these two blowing mouths.This blowing mouth 21 is communicated with the blower fan 3 that produces hot air source, is provided with hot air duct 6 between blowing mouth 21 and the blower fan 3, has several heat-generating pipes 7 in the hot air duct 6, and heat-generating pipe provides heat to the wind that blows to wafer.Airstrainers are installed before the blower fan 3, and the hot blast of guaranteeing to blow to by blowing mouth 21 wafer surface is pure.
The setting of blowing mouth 21 quantity can be decided according to the actual requirements in the utility model.
Wherein, be provided with exhaust outlet 4 on the opposite of blowing mouth 21 in the cabinets cavity 2.Blowing over the hot blast of wafer discharges by exhaust outlet 4.More preferably, blowing mouth 21 is positioned at the top of cabinets cavity 2, exhaust outlet 4 is arranged at the below of cabinets cavity 2, be convenient to blowing mouth 21 like this and blow to the wafer hot blast and shed the drying rate of faster wafer by exhaust outlet 4 rows from top to bottom.
Cabinets cavity 2 has wafer case 5, and the support that wafer is housed is positioned at wafer case 5, and wafer case 5 comprises the anchor clamps 51 of holding chip support, by the fixing wafers having different sizes support of anchor clamps 51, guarantees to dry wafers having different sizes.
Relative tilt is provided with two and blocks wind wall 23 on cabinets cavity 2 inwalls, the top opening of this wall 23 that keeps out the wind is greater than lower opening, wafer case 5 is arranged in the wall 23 that keeps out the wind, what add blocks the cold air blast velocity that wind wall 23 can improve hot blast, farthest hot blast is directly blowed to wafer, strengthen drying efficiency wafer.
In addition, be provided with emergency alarm bell 8 in the casing 1, can set drying time arbitrarily, stop heating automatically after the time arrives, the automatic jingle bell of emergency alarm bell plays the effect of warning.
Temperature control meter 9 is installed in the casing 1, can be controlled the box house temperature.
In addition, this dryer also comprises support 10, blower fan 3 can be installed on the support 10.
Specifically describe the method for operating of wafer dryer below.
At first, with the power controling box power connection, the temperature of temperature control meter is set between the 40-120 degree, more excellent is 60 degree, and actual temp selected can be decided according to actual conditions.
Then, the drying regime of setting drying time and being 40 seconds or can observe wafer according to transparent window sets up drying time on their own, and the support that wafer is housed is put into wafer case, stirs anchor clamps, and chip support is fixed.
At last, casing is connected power supply, hear the buzzing chimes of doom after, wafer is taken out, the operation of oven dry wafer is finished.
The wafer dryer that the utility model provides, simple in structure, can realize drying effectively and quickly wafer, drying effect is good, and farthest saves processing cost.This dryer can be applied in the drying of the wafer manufacture operation beyond the non-super cleaning, also can be applied in other association areas.
Above embodiment only is used to illustrate the utility model; and be not to restriction of the present utility model; the those of ordinary skill in relevant technologies field; under the situation that does not break away from spirit and scope of the present utility model; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (10)
1. a wafer dryer is characterized in that, comprising: casing, have cabinets cavity in the described casing, and the wafer that is dried is arranged in cabinets cavity,
Described cabinets cavity inwall is provided with at least one blowing mouth, and described blowing mouth is communicated with the blower fan that produces hot air source, and the opposite of described blowing mouth is provided with exhaust outlet.
2. wafer dryer as claimed in claim 1 is characterized in that described cabinets cavity has wafer case, and described wafer is positioned at wafer case by support, and described wafer case comprises the anchor clamps of clamp bracket.
3. wafer dryer as claimed in claim 2 is characterized in that, relative tilt is provided with two walls that keep out the wind on the described cabinets cavity inwall, and the top opening of the described wall that keeps out the wind is greater than lower opening, and described wafer case is arranged in the wall that keeps out the wind.
4. wafer dryer as claimed in claim 1 is characterized in that described casing is provided with transparent window.
5. wafer dryer as claimed in claim 1 is characterized in that described blowing mouth is positioned at the top of cabinets cavity, and described exhaust outlet is positioned at the below of cabinets cavity.
6. wafer dryer as claimed in claim 1 is characterized in that, is provided with hot air duct between described blowing mouth and the blower fan, has several heat-generating pipes in the described hot air duct.
7. wafer dryer as claimed in claim 1 is characterized in that, is provided with warning device and temperature control meter in the described casing.
8. wafer dryer as claimed in claim 1 is characterized in that, inwall adopts glass fibre or asbestos board insulation around the described casing.
9. wafer dryer as claimed in claim 1 is characterized in that, airstrainer is installed before the described blower fan.
10. wafer dryer as claimed in claim 1 is characterized in that, described cabinets cavity inwall is provided with a plurality of blowing mouths, is provided with deep bead between the described adjacent blowing mouth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201572546U CN202083181U (en) | 2011-05-17 | 2011-05-17 | Chip dryer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201572546U CN202083181U (en) | 2011-05-17 | 2011-05-17 | Chip dryer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202083181U true CN202083181U (en) | 2011-12-21 |
Family
ID=45343807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201572546U Expired - Lifetime CN202083181U (en) | 2011-05-17 | 2011-05-17 | Chip dryer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202083181U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706120A (en) * | 2012-06-04 | 2012-10-03 | 广东金鼎光学机械有限公司 | Lens drying machine |
| CN104880036A (en) * | 2015-05-14 | 2015-09-02 | 江苏双仪光学器材有限公司 | Dust-free drying machine |
| CN114459217A (en) * | 2021-12-24 | 2022-05-10 | 宁波芯健半导体有限公司 | Wafer oven |
-
2011
- 2011-05-17 CN CN2011201572546U patent/CN202083181U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102706120A (en) * | 2012-06-04 | 2012-10-03 | 广东金鼎光学机械有限公司 | Lens drying machine |
| CN102706120B (en) * | 2012-06-04 | 2015-07-15 | 广东金鼎光学机械有限公司 | Lens drying machine |
| CN104880036A (en) * | 2015-05-14 | 2015-09-02 | 江苏双仪光学器材有限公司 | Dust-free drying machine |
| CN114459217A (en) * | 2021-12-24 | 2022-05-10 | 宁波芯健半导体有限公司 | Wafer oven |
| CN114459217B (en) * | 2021-12-24 | 2023-08-11 | 宁波芯健半导体有限公司 | Wafer baking oven |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111221 |