CN202057289U - Automatic ranging filler gauge - Google Patents
Automatic ranging filler gauge Download PDFInfo
- Publication number
- CN202057289U CN202057289U CN2011200964579U CN201120096457U CN202057289U CN 202057289 U CN202057289 U CN 202057289U CN 2011200964579 U CN2011200964579 U CN 2011200964579U CN 201120096457 U CN201120096457 U CN 201120096457U CN 202057289 U CN202057289 U CN 202057289U
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- China
- Prior art keywords
- clearance gauge
- shaped body
- wedge
- spacing
- display screen
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- A Measuring Device Byusing Mechanical Method (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
Abstract
The utility model relates to an automatic ranging filler gauge, which comprises a wedge-shaped body, a display screen and a processor. A slope plane of the wedge-shaped body is formed by a touch control panel, the display screen is disposed on the wedge-shaped body, and the processor is arranged in the wedge-shaped body and is respectively connected with the touch control panel and the display screen. The automatic ranging filler gauge is accurate in measurement and simple in operation.
Description
Technical field
The utility model relates to survey instrument, relates in particular to a kind of automatic survey spacing clearance gauge.
Background technology
Usually can run into the spacing that needs to measure between two very little at interval objects in the process for fabrication of semiconductor device, for example measure the spacing between the sharp-tongued of photoresist nozzle and the wafer pallet.The available technology adopting clearance gauge is measured little spacing, as shown in Figure 1, described clearance gauge comprises multi-disc scale 110, one end of described multi-disc scale 110 links together, the other end of every described scale 110 can be around its link 120 rotations, the thickness of every described scale 110 is known, and different scale 110 its thickness differences.When using clearance gauge to measure spacing, the spacing size in the gap that estimation earlier is to be measured, select the scale combination in view of the above, again gap to be measured is filled in the scale combination of selecting, if find that the scale combination of selecting is improper, then adjust accordingly (promptly change scale combination), until finding only scale combination, the thickness sum of only scale combination is exactly the spacing size in gap to be measured.
Use the shortcoming of the clearance gauge survey spacing of prior art to be: to measure not accurate, because the thickness of every scale is certain, the scale quantity that clearance gauge comprises is certain, therefore, the spacing that can accurately measure out can only be the thickness sum of different scales combination, and other spacing can not accurately measure out, and complicated operation when measuring, repeatedly change the scale combination possibly, to obtain measurement result the most accurately.
The utility model content
The purpose of this utility model is to provide a kind of automatic survey spacing clearance gauge, measures precisely, and is simple to operate.
To achieve the above object, the utility model provides a kind of automatic survey spacing clearance gauge, it is characterized in that, comprises wedge-shaped body, display screen and processor; The slope of described wedge-shaped body is formed by contact panel; Described display screen is arranged on the described wedge-shaped body; Described processor is arranged in the described wedge-shaped body, and is connected with display screen with described contact panel respectively.
Above-mentioned automatic survey spacing clearance gauge, wherein, described display screen is embedded on the sidewall of described wedge-shaped body.
Above-mentioned automatic survey spacing clearance gauge, wherein, described display screen is a LED display.
Above-mentioned automatic survey spacing clearance gauge, wherein, described processor is Programmable Logic Controller or single-chip microcomputer.
Above-mentioned automatic survey spacing clearance gauge wherein, also comprises pilot lamp, and described pilot lamp is arranged on the described wedge-shaped body, and is connected with described processor.
Above-mentioned automatic survey spacing clearance gauge, wherein, described pilot lamp is embedded on the top end face of described wedge-shaped body.
Automatic survey spacing clearance gauge of the present utility model adopts the height continually varying slope that is formed by contact panel to go to measure spacing, can accurately measure out 0～maximum any one numerical value of measuring between the spacing, and calculate by contact panel induction, processor when measuring, promptly measure automatically, therefore automatic survey spacing clearance gauge measuring accuracy height of the present utility model is simple to operate;
Automatic survey spacing clearance gauge of the present utility model is provided with pilot lamp, when gap to be measured just touches contact panel, this pilot lamp is reported to the police, inform the operator, can prevent effectively that the improper operation in the measuring process from damaging testee, and pilot lamp can be installed in the position of being convenient to observe, more help the convenience of operating.
Description of drawings
Automatic survey spacing clearance gauge of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the clearance gauge of prior art.
Fig. 2 is the structural representation that the utility model is surveyed spacing clearance gauge embodiment one automatically.
Fig. 3 is the circuit theory diagrams that the utility model is surveyed spacing clearance gauge embodiment one automatically.
Fig. 4 is the structural representation that the utility model is surveyed spacing clearance gauge embodiment two automatically.
Fig. 5 is the circuit theory diagrams that the utility model is surveyed spacing clearance gauge embodiment two automatically
Embodiment
Below with reference to Fig. 2～Fig. 5 automatic survey spacing clearance gauge of the present utility model is described in further detail.
Embodiment one:
Referring to Fig. 2 and Fig. 3, the automatic survey spacing clearance gauge of present embodiment comprises wedge-shaped body 21, display screen 22 and processor 23; The slope of described wedge-shaped body 21 is formed by contact panel 24 (touch panel), and described contact panel 24 is used to measure spacing; Described display screen 22 is arranged on the described wedge-shaped body 21, and described display screen 22 is used to show the spacing size that records; Described processor 23 is arranged in the described wedge-shaped body 21, and is connected with display screen 22 with described contact panel 24 respectively, and described processor 23 is used for obtaining the spacing size data according to the induced signal that described contact panel 24 sends.
In the present embodiment, described display screen 22 is embedded on the sidewall of described wedge-shaped body 21, and described display screen 22 for example adopts LED display.
In the present embodiment, processor 23 is Programmable Logic Controller (PLC).Certainly, in other specific embodiment of the utility model, processor 23 also can be other s operation control device, for example, and single-chip microcomputer.
Use the method for the automatic survey spacing clearance gauge measurement spacing of present embodiment to be, slowly promote the automatic survey spacing clearance gauge of present embodiment, make described contact panel 24 slowly insert gap to be measured, when gap to be measured touches described contact panel 24, stop to promote described contact panel 24, because gap to be measured touches described contact panel 24, described contact panel 24 will produce an induced signal (described induced signal has been put down in writing the touch position of gap to be measured and described contact panel 24), and described induced signal sent to described processor 23, the induced signal that 23 pairs of described contact panels 24 of described processor send carries out relevant treatment, obtain the spacing size data in gap to be measured, described processor 23 is sent to described display screen 22 with the spacing size data that obtains, and is shown by described display screen 22.
As from the foregoing, the automatic survey spacing clearance gauge of present embodiment can be measured the spacing size automatically, obtains measurement result automatically, and it is very simple, convenient to operate.
The contact panel 24 of the automatic survey spacing clearance gauge of present embodiment is a height continually varying slope, that is to say, the automatic survey spacing clearance gauge of present embodiment can accurately measure out 0～maximum any one numerical value of measuring between the spacing L, as shown in Figure 2, the described maximum spacing L that measures can design as required, therefore, the automatic survey spacing clearance gauge measuring accuracy height of present embodiment, simple to operate.
Embodiment two:
Referring to Fig. 4 and Fig. 5, embodiment two is with the difference of embodiment one, set up a pilot lamp 25 among the embodiment two, described pilot lamp 25 is arranged on the described wedge-shaped body 21, and be connected with described processor 23, described pilot lamp 25 is used to inform that operator gap to be measured has touched described contact panel 24.
When gap to be measured touches described contact panel 24, described contact panel 24 produces an induced signal, described contact panel 24 sends to described processor 23 with described induced signal, it is glittering immediately to drive described pilot lamp 25 by described processor 23, signal gives the alarm, inform that operator gap to be measured has touched described contact panel 24, alert operator stops to promote the automatic survey spacing clearance gauge of present embodiment immediately.
In the present embodiment, described pilot lamp 25 is embedded on the top end face of described wedge-shaped body 21.
The spacing that the automatic survey spacing clearance gauge of use present embodiment is measured is very little usually, the moment that gap to be measured just touches described contact panel 24 is difficult to the naked eye precisely judge, this will bring some problems, for example in the measuring process, gap to be measured has touched described contact panel 24, but naked eyes are not observed, the operator can continue to enforce automatic survey spacing clearance gauge, so automatic survey spacing clearance gauge can damage testee, and utilize pilot lamp 25 to report to the police among the embodiment two, be quick on the draw, speed is fast, the moment operator who just touches described contact panel 24 in gap to be measured just can be known, can prevent effectively that the improper operation in the measuring process from damaging testee, and described pilot lamp 25 can be installed in the position of being convenient to observe, more help the convenience of operating.
Claims (6)
1. survey the spacing clearance gauge automatically for one kind, it is characterized in that, comprise wedge-shaped body, display screen and processor;
The slope of described wedge-shaped body is formed by contact panel;
Described display screen is arranged on the described wedge-shaped body;
Described processor is arranged in the described wedge-shaped body, and is connected with display screen with described contact panel respectively.
2. automatic survey spacing clearance gauge as claimed in claim 1 is characterized in that described display screen is embedded on the sidewall of described wedge-shaped body.
3. automatic survey spacing clearance gauge as claimed in claim 1 is characterized in that described display screen is a LED display.
4. automatic survey spacing clearance gauge as claimed in claim 1 is characterized in that described processor is Programmable Logic Controller or single-chip microcomputer.
5. as any described automatic survey spacing clearance gauge in the claim 1 to 4, it is characterized in that also comprise pilot lamp, described pilot lamp is arranged on the described wedge-shaped body, and be connected with described processor.
6. automatic survey spacing clearance gauge as claimed in claim 4 is characterized in that described pilot lamp is embedded on the top end face of described wedge-shaped body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200964579U CN202057289U (en) | 2011-04-02 | 2011-04-02 | Automatic ranging filler gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200964579U CN202057289U (en) | 2011-04-02 | 2011-04-02 | Automatic ranging filler gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202057289U true CN202057289U (en) | 2011-11-30 |
Family
ID=45017260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200964579U Expired - Fee Related CN202057289U (en) | 2011-04-02 | 2011-04-02 | Automatic ranging filler gauge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202057289U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104210912A (en) * | 2014-08-11 | 2014-12-17 | 安徽理工大学 | Brake shoe clearance detection device for disc brake |
| CN106017277A (en) * | 2016-07-25 | 2016-10-12 | 芜湖协航测控技术有限公司 | Clearance measurement device |
-
2011
- 2011-04-02 CN CN2011200964579U patent/CN202057289U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104210912A (en) * | 2014-08-11 | 2014-12-17 | 安徽理工大学 | Brake shoe clearance detection device for disc brake |
| CN106017277A (en) * | 2016-07-25 | 2016-10-12 | 芜湖协航测控技术有限公司 | Clearance measurement device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130419 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130419 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111130 Termination date: 20180402 |