CN202053247U

CN202053247U - Manipulator

Info

Publication number: CN202053247U
Application number: CN2010205843769U
Authority: CN
Inventors: 杨兆旺
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2010-10-29
Filing date: 2010-10-29
Publication date: 2011-11-30
Anticipated expiration: 2020-10-29

Abstract

The utility model discloses a manipulator, which comprises a mechanical arm, mechanical fingers, and an elastic connecting device, wherein the elastic connecting device is connected with the mechanical arm and the mechanical fingers, so when the mechanical arm is collided, the collision force is borne by the elastic connecting device so as to reduce the collision on the mechanical fingers and a mask and protect the manipulator and the mask against damage.

Description

Manipulator

Technical field

The utility model relates to the semiconductor-fabricating device technical field, relates in particular to a kind of manipulator.

Background technology

In semiconductor fabrication, photoetching process is in the status at center, is most important processing step during integrated circuit is produced.The making of semiconductor chip is divided into multilayer usually, and the making of each layer all needs to carry out figure and limit, forming ad hoc structure, as, form contact hole or metal connecting line etc.The figure of these ad hoc structures limits normally and is realized by photoetching process, and photoetching is one and utilizes lay photoetching mask plate that the structure graph of design is transferred to technical process on the wafer.

Before chip manufacturing, the layout of first device according to each layer on the chip, metal wire, connection etc. designs and produces one or more lay photoetching mask plates, then, utilizes photoetching process that the figure on this lay photoetching mask plate is transferred on the wafer again.

Lay photoetching mask plate (reticle), be also referred to as mask or light shield, it is a kind of flat board that has light transmission for exposure light, has at least one geometric figure that exposure light is had light-proofness on it, can realize blocking selectively the light that shines on the wafer surface photoresist, and finally on the photoresist of wafer surface, form corresponding pattern.The quality of mask is the quality of the formed photoresist pattern of influence directly, and defective on it or pollutant may cause the defective that repeats in each semiconductor devices that forms on entire wafer.As, on mask, there is certain defective, make should printing opacity the zone when existing a points of contamination light tight, photoresist pattern on the wafer and not conforming to of designing in advance may cause open circuit or short circuit in the formed semiconductor devices in subsequent treatment, cause the performance and the decrease in yield of product, therefore, quality to mask tends to propose very high requirement, ideally, wishes to obtain flawless mask.

In order to guarantee the quality of mask, usually after making, mask to utilize testing tool that it is detected, for example, whether have particle (particle) on the mask in order to detect, the detection board that is called Zaris that uses Brooks (Brooks) company to produce usually carries out procuratorial work to the surface of mask.Simultaneously, in order to prevent that mask is polluted, mask transmits by manipulator usually.In the process of mask being carried out the surface particles detection, mask is delivered to Zaris detection board by manipulator and detects.

About the existing mechanical hand, please refer to Fig. 1, Fig. 1 is the front view of existing mechanical hand, as shown in Figure 1, the existing mechanical hand comprises mechanical arm (Robot) 101, and the mechanical finger (Robot Finger) 102 that links to each other with described mechanical arm 101, directly fixedly connected between wherein said mechanical finger 102 and the described mechanical arm 101; Described mechanical finger 102 is used to carry mask 300.And the type of described manipulator is generally five degree of freedom (5axis ' type) manipulator.The free degree of so-called manipulator is meant self-movement modes such as the lifting of the motion of manipulator, flexible, rotation.The free degree is the key parameter of manipulator design, and the free degree is many more, and the flexibility of manipulator is big more, and versatility is wide more, and its structure and control model are also complicated more.

Yet because the type of existing mechanical hand five degree of freedom manipulator normally, therefore its control model more complicated produces position of manipulator skew and collision through regular meeting; And owing to directly fixedly connected between the mechanical arm of existing mechanical hand and the mechanical finger, it is rigid connection, therefore, when collision takes place, reduce or absorbing forces of impact without any buffer gear, thereby very likely can damage manipulator and mask, cause heavy losses because of collision.

Therefore, be necessary the existing mechanical hand is improved.

The utility model content

The purpose of this utility model is to provide a kind of manipulator, is rigid the connection with between the mechanical arm that solves the existing mechanical hand and the mechanical finger, easily the problem that causes manipulator and mask to damage because of collision.

For addressing the above problem, the utility model proposes a kind of manipulator, described manipulator comprises mechanical arm and mechanical finger, also comprises elastic connecting device, described elastic connecting device connects described mechanical arm and described mechanical finger.

Optionally, described elastic connecting device comprises top plate, intermediate plate and lower plywood from top to bottom, and an end of described top plate links to each other with described mechanical finger, and the bottom of described top plate has a plurality of equally distributed pins; End away from described mechanical finger of described intermediate plate links to each other with described mechanical arm, has a plurality of through holes on the described intermediate plate equably, and has on the described intermediate plate that a plurality of and described pin is complementary and corresponding V-type groove; Link to each other the described through hole of described elastomeric element break-through by a plurality of elastomeric elements between described top plate and the described lower plywood.

Optionally, the quantity of described pin and described V-type groove is 3.

Optionally, the quantity of described through hole and described elastomeric element is 4.

Compared with prior art, the manipulator that the utility model provides comprises mechanical arm and mechanical finger, also comprises elastic connecting device, and described elastic connecting device connects described mechanical arm and described mechanical finger; Thereby when described mechanical finger is subjected to the external force collision, described impact force will be born by described elastic connecting device, thereby reduce the collision degree to mechanical finger and mask, help protecting described manipulator and mask not to be damaged.

Description of drawings

Fig. 1 is the front view of existing mechanical hand;

The front view of the manipulator that Fig. 2 provides for the utility model embodiment;

The manipulator that Fig. 3 provides for the utility model embodiment is in use by the schematic diagram after the collision.

The specific embodiment

Below in conjunction with the drawings and specific embodiments the manipulator that the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only be used for conveniently, the purpose of aid illustration the utility model embodiment lucidly.

Core concept of the present utility model is, a kind of manipulator is provided, and described manipulator comprises mechanical arm and mechanical finger, also comprises elastic connecting device, and described elastic connecting device connects described mechanical arm and described mechanical finger; Thereby when described mechanical finger is subjected to the external force collision, described impact force will be born by described elastic connecting device, thereby reduce the collision degree to mechanical finger and mask, help protecting described manipulator and mask not to be damaged.

Please refer to Fig. 2, the front view of the manipulator that Fig. 2 provides for the utility model embodiment, as shown in Figure 2, the kind manipulator that the utility model embodiment provides comprises mechanical arm 201 and mechanical finger 202, also comprise elastic connecting device, described elastic connecting device connects described mechanical arm 201 and described mechanical finger 202.Wherein, described mechanical finger 202 carrying masks 300.

Further, described elastic connecting device comprises top plate 410, intermediate plate 420 and lower plywood 430 from top to bottom, one end of described top plate 410 links to each other with described mechanical finger 202, and the bottom of described top plate 410 has a plurality of equally distributed pins 411 (only illustrating two among the figure); End away from described mechanical finger 202 of described intermediate plate 420 links to each other with described mechanical arm 201, have a plurality of through holes 421 (only illustrating two among the figure) on the described intermediate plate 420 equably, and have the V-type groove 422 (only illustrating two among the figure) that a plurality of and described pin 411 is complementary on the described intermediate plate 420, described pin 411 inserts in the described V-type groove 422; Link to each other the described through hole 421 of described elastomeric element 440 break-through by a plurality of elastomeric elements 440 (only illustrating two among the figure) between described top plate 410 and the described lower plywood 430.

Further, the quantity of described pin 411 and described V-type groove 422 is 3, and this is to consider that three pins 411 form triangles, and leg-of-mutton steadiness height, thus the better described support top plate 410 of twelve Earthly Branches.

Further, the quantity of described through hole 421 and described elastomeric element 440 is 4.

Please continue with reference to figure 3, in use by the schematic diagram after the collision, as shown in Figure 3, the use principle of the manipulator that the utility model embodiment provides is the manipulator that Fig. 3 provides for the utility model embodiment:

When described mechanical finger 202 was subjected to external force F collision, described mechanical finger 202 passed to described top plate 410 with external force F, and described top plate 410 shrinks back under the effect of external force F, thereby makes described pin 411 shift out described V-type groove 422; In this process, described elastomeric element 440 will be elongated, and described top plate 410 is produced pulling force, and when the component of described pulling force along continuous straight runs equates with described external force F, described top plate 410 will stop to move; Thereby external force F can be transferred on the elastic connecting device, bear, therefore, avoid mechanical finger 202 collision machine arm 201 under the situation that is subjected to external force F, cause manipulator and mask 300 to damage by elastic connecting device;

And after external force F disappeared, only need insert described pin 411 again in the described V-type groove 422 and get final product; Thereby it is simple and convenient.

In a specific embodiment of the present utility model, the quantity of described pin 411 and described V-type groove 422 is 3, yet should be realized that, according to actual conditions, the quantity of described pin 411 and described V-type groove 422 can also be worth for other.

In a specific embodiment of the present utility model, the quantity of described through hole 421 and described elastomeric element 440 is 4, yet should be realized that, according to actual conditions, the quantity of described through hole 421 and described elastomeric element 440 can also be worth for other.

In sum, the utility model provides a kind of manipulator, and this manipulator comprises mechanical arm and mechanical finger, also comprises elastic connecting device, and described elastic connecting device connects described mechanical arm and described mechanical finger; Thereby when described mechanical arm is collided, described impact force will be born by described elastic connecting device, thereby reduce the collision degree to mechanical finger and mask, help protecting described manipulator and mask not to be damaged.

Obviously, those skilled in the art can carry out various changes and modification to utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims

1. manipulator, described manipulator comprises mechanical arm and mechanical finger, it is characterized in that, also comprises elastic connecting device, described elastic connecting device connects described mechanical arm and described mechanical finger.

2. manipulator as claimed in claim 1, it is characterized in that, described elastic connecting device comprises top plate, intermediate plate and lower plywood from top to bottom, and an end of described top plate links to each other with described mechanical finger, and the bottom of described top plate has a plurality of equally distributed pins; End away from described mechanical finger of described intermediate plate links to each other with described mechanical arm, has a plurality of through holes on the described intermediate plate equably, and has on the described intermediate plate that a plurality of and described pin is complementary and corresponding V-type groove; Link to each other the described through hole of described elastomeric element break-through by a plurality of elastomeric elements between described top plate and the described lower plywood.

3. manipulator as claimed in claim 2 is characterized in that, the quantity of described pin and described V-type groove is 3.

4. manipulator as claimed in claim 2 is characterized in that, the quantity of described through hole and described elastomeric element is 4.