CN202034357U - Monocrystalline silicon piece cleaning device - Google Patents
Monocrystalline silicon piece cleaning device Download PDFInfo
- Publication number
- CN202034357U CN202034357U CN2011201514292U CN201120151429U CN202034357U CN 202034357 U CN202034357 U CN 202034357U CN 2011201514292 U CN2011201514292 U CN 2011201514292U CN 201120151429 U CN201120151429 U CN 201120151429U CN 202034357 U CN202034357 U CN 202034357U
- Authority
- CN
- China
- Prior art keywords
- tank
- water
- heater
- cleaning device
- water tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model relates to a monocrystalline silicon piece cleaning device; heaters are arranged in eight water tanks of the cleaning device, each heater is separately connected with a heater temperature control board, a third water tank and a fourth water tank are respectively provided with a cold water circulating pipes, one side of the third water tank and one side of the fourth water tank are respectively provided with a water storage tank, and the cold water circulating pipes are connected with the water storage tanks. By adopting the utility model, as cold water is stored in the water storage tanks, water temperature in the third water tank and the fourth water tank can be reduced by the flowing of the cold water in the cold water circulating pipes, the heaters are not needed to be switched off, the heater temperature control board can display the water temperature of the third water tank and the fourth water tank normally, so that water temperature is kept within a set temperature range, and the silicon piece is ensured not to be oxidized.
Description
Technical field
The utility model relates to a kind of monocrystalline silicon piece cleaning device.
Background technology
The cleaning device that cleaning silicon chip adopts is provided with eight tanks, is provided with heater in each tank, and by heater temperature control plate control water temperature.Carry out in order from first groove to the, eight grooves during cleaning, generally, for guaranteeing cleaning performance, the temperature of cleaning solution need be set in 45～60 ℃ in three-flute and the 4th groove, and because of the water in three-flute and the 4th groove is added with cleaning agent, state need remain unchanged, and because cleaning device and heater thereof are successively work, can cause water temperature in three-flute and the 4th groove to rise gradually and surpass 60 ℃, cause the silicon chip surface oxidation, form waste product.If close heater by the heater temperature control plate this moment, stop to heat, the heater temperature control plate just can not show the temperature of three-flute and the 4th trough inner water, and operating personnel can not finely be grasped, thereby influences the normal wash of silicon chip.
Summary of the invention
The purpose of this utility model provides and can make three-flute and the 4th trough inner water temperature remain on the interior a kind of monocrystalline silicon piece cleaning device of normal range of operation.
The technical scheme that the utility model is taked is: a kind of monocrystalline silicon piece cleaning device, comprise first tank, second tank, the 3rd tank, the 4th tank, the 5th tank, the 6th tank, the 7th tank, the 8th tank, in each tank, be provided with heater, each heater is connected separately with the heater temperature control plate, it is characterized in that in the 3rd tank and the 4th tank, being respectively equipped with cool water circulating pipe, side at the 3rd tank and the 4th tank is respectively equipped with hopper, and cool water circulating pipe is connected with hopper.
Adopt the utility model, because of having cold water in the hopper, by cold water flowing in cool water circulating pipe, reduce the water temperature in the 3rd tank and the 4th tank, can not close heater like this, the heater temperature control plate just can normally show the temperature of the 3rd tank and the 4th water trough inner water, and water temperature is remained in the range of set temperature, guarantees that silicon chip is not oxidized.
Description of drawings
Fig. 1 is a schematic diagram of the present utility model.
Sequence number is represented among the figure: first tank 1, second tank 2, the 3rd tank 3, the 4th tank 4, the 5th tank 5, the 6th tank 6, the 7th tank 7, the 8th tank 8, heater 9, heater temperature control plate 10, hopper 11 and cool water circulating pipe 12.
Embodiment
The utility model is described in further detail below in conjunction with specific embodiment.
With reference to Fig. 1, this monocrystalline silicon piece cleaning device comprises first tank 1, second tank 2, the 3rd tank 3, the 4th tank 4, the 5th tank 5, the 6th tank 6, the 7th tank 7, the 8th tank 8, in each tank, be provided with heater 9, each heater 9 is connected separately with heater temperature control plate 10, be respectively equipped with cool water circulating pipe 12 (being preferably the U type) in the 3rd tank 3 and the 4th tank 4, cool water circulating pipe 12 is connected with hopper 11.Because of having cold water in the hopper 11, by cold water flowing in cool water circulating pipe 12, reduce the water temperature in the 3rd tank 3 and the 4th tank 4, can not close heater 9 like this, heater temperature control plate 10 just can normally show the temperature of water in the 3rd tank 3 and the 4th tank 4, water temperature is remained in the range of set temperature, guarantee that silicon chip is not oxidized.
Claims (1)
1. monocrystalline silicon piece cleaning device, comprise first tank, second tank, the 3rd tank, the 4th tank, the 5th tank, the 6th tank, the 7th tank, the 8th tank, in each tank, be provided with heater, each heater is connected separately with the heater temperature control plate, it is characterized in that in the 3rd tank and the 4th tank, being respectively equipped with cool water circulating pipe, side at the 3rd tank and the 4th tank is respectively equipped with hopper, and cool water circulating pipe is connected with hopper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201514292U CN202034357U (en) | 2011-05-11 | 2011-05-11 | Monocrystalline silicon piece cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201514292U CN202034357U (en) | 2011-05-11 | 2011-05-11 | Monocrystalline silicon piece cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202034357U true CN202034357U (en) | 2011-11-09 |
Family
ID=44896645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201514292U Expired - Fee Related CN202034357U (en) | 2011-05-11 | 2011-05-11 | Monocrystalline silicon piece cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202034357U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104329801A (en) * | 2014-10-19 | 2015-02-04 | 镇江大成新能源有限公司 | Leftover leather soaking compartment |
-
2011
- 2011-05-11 CN CN2011201514292U patent/CN202034357U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104329801A (en) * | 2014-10-19 | 2015-02-04 | 镇江大成新能源有限公司 | Leftover leather soaking compartment |
| CN104329801B (en) * | 2014-10-19 | 2017-11-10 | 镇江大成新能源有限公司 | Edge skin material soaking compartment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202034357U (en) | Monocrystalline silicon piece cleaning device | |
| CN205085111U (en) | Cooler circulation belt cleaning device | |
| CN202061839U (en) | Steam heating and cleaning device | |
| CN202880191U (en) | Automatic temperature control type plastic anticorrosion storage tank | |
| CN202455977U (en) | Waste steam recovering and recycling device | |
| CN202125967U (en) | Multifunctional cooking bench | |
| CN201611182U (en) | Cold water eliminating and defreezing system of solar water heater pipeline | |
| CN201799428U (en) | Wash tank cooled and heated from external | |
| CN201940241U (en) | Circulating and cooling device for laboratory | |
| CN103808099A (en) | Automatic water replenishing device of cooling water supplying system | |
| CN202188638U (en) | Novel heat energy recycling device | |
| CN201876051U (en) | Cooling device | |
| CN202092350U (en) | Multi-chamber water tank inner container of solar water heater | |
| CN201987332U (en) | Pipeline type water dispenser storage box for preventing temperature mixing | |
| CN206113737U (en) | Fused salt energy storage, heat transfer and intelligence control system | |
| CN204344581U (en) | Hydraulic station | |
| CN205037665U (en) | High temperature is cooling water automatic control auto -change over device for hot oil pump | |
| CN203537173U (en) | Motor with independent liquid cooling system | |
| CN202778438U (en) | Circulating water supply device for kettle jacket | |
| CN204816466U (en) | Liquid phase reaction ware | |
| CN202775872U (en) | Water dispenser capable of supplying ice water | |
| CN202666853U (en) | Double-jacket reaction kettle | |
| CN104033429B (en) | Centrifugal main air blower charge air cooler on-line cleaning device and on-line cleaning method | |
| CN202653103U (en) | Ice water circulation system of cold drink digestion tank | |
| CN203122116U (en) | Water dispenser |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111109 Termination date: 20170511 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |