CN202032286U - Hyperpure ammonia large-flow vaporization constant-pressure gas supply system - Google Patents
Hyperpure ammonia large-flow vaporization constant-pressure gas supply system Download PDFInfo
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- CN202032286U CN202032286U CN2011200930074U CN201120093007U CN202032286U CN 202032286 U CN202032286 U CN 202032286U CN 2011200930074 U CN2011200930074 U CN 2011200930074U CN 201120093007 U CN201120093007 U CN 201120093007U CN 202032286 U CN202032286 U CN 202032286U
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- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The utility model relates to a hyperpure ammonia large-flow vaporization constant-pressure gas supply system which is structurally characterized in that a liquid phase pipeline of a liquid ammonia source is connected to an air-heated type vaporizer, the air-heated type vaporizer is provided with a gas return pipeline connected to the gas phase pipeline of the liquid ammonia source, the main pipeline of the air-heated type vaporizer is connected to a follow-up water-bath type vaporizer, the water inlet of the water-bath type vaporizer is connected with an air source heat pump hot water device used for supplying heat source for the water-bath type vaporizer, the outlet pipeline of the water-bath type vaporizer is connected to a pressure regulating system, the pressure and flow of the pressure regulating system are controlled and regulated by an automatic control system, and the pressure regulating system outputs vaporized constant pressure ammonia. The hyperpure ammonia large-flow vaporization constant pressure gas supply system can vaporize hyperpure liquid ammonia under larger flow state and can have the advantages of stable gas supply pressure and low energy consumption for vaporization process.
Description
Technical field
The utility model relates to a kind of air supply system of bulk gas, the big flow vaporization of particularly a kind of ultra-pure ammonia constant pressure air feeding system.
Background technique
The ultra-pure ammonia of electron level is more and more used in light emitting semiconductor device (LED), solar cell, semiconductor integrated circuit (IC) and liquid crystal display industries such as (LCD) as a kind of important industrial foundation raw material.Pay close attention in the whole world under the background of low-carbon economy pattern, LED of China and solar energy industry have had the growth of explosion type, and the monomer plant design production capacity in the industry is all considerably beyond the existing scale of our times.The current consumption scale to ultra-pure ammonia of the monomer factory in the whole world in the picture LED industry, the maximum flow of supply is no more than 100Nm
3/ h.And only currently the traffic demand of ultra-pure ammonia is surpassed 400 Nm what build in the C China
3The LED monomer factory of/h is existing a plurality of.
In the bulk gas provisioning technique of current application (BSGS system), as follows to the pattern of the on-the-spot air feed of vaporizing of three kinds of ammonia tanks (Y bottle, T bottle, ISO tank car) of ultra-pure ammonia:
Above-mentioned three kinds of vaporization plenum systems have following narrow limitation:
1, all be to adopt Electric heating to the vaporization of liquefied ammonia heating, power consumption is continuous in relatively large.
2, the flow of air feed promptly forms aerosol if super peak rate of flow will cause gas to carry metal and moisture content secretly at short notice, causes the purity of air feed to descend.
3, the flow of air feed is as if super peak rate of flow, and the pressure of air supply system descends rapidly, causes follow-up pressure surge with the gas system, and production process is caused more influence.
4, the air supply system internal pressure is influenced by heating source temperature, flow etc. to cause fluctuation, and gas has the possibility of potential liquefaction in the supply air line.
The mode of the ultrapure liquefied ammonia vaporization air feed that above-mentioned three kinds of patterns are canned, what can only be applicable to the current generation uses the gas demand, and power consumption is more.If need satisfy the air feed of more tolerance and steady pressure, can only repeated construction overlap above-mentioned system more, increase more construction cost and energy consumption.The needs of incompatibility industry usefulness gas development.
Summary of the invention
At the shortcoming of above-mentioned existence, the purpose of this utility model is: the demand that satisfies the bigger air demand in ultra-pure ammonia usefulness gas scene is provided, and be energy-conservation, not the current limliting amount, can constant voltage the big flow vaporization of a kind of ultra-pure ammonia constant pressure air feeding system of output.
The technical solution of the utility model is: the big flow vaporization of a kind of ultra-pure ammonia constant pressure air feeding system, this system has comprised the liquefied ammonia source, air temperature type vaporizer, the water-bath type vaporizer, heat pump hot-water system, voltage-regulating system and automatic control system, wherein the liquid phase pipeline in liquefied ammonia source inserts air temperature type vaporizer, air temperature type vaporizer is provided with on the gas phase pipeline that one tunnel vapor return line is connected to raw material source, the main line of air temperature type vaporizer inserts follow-up water-bath type vaporizer, the water intake of water-bath type vaporizer is connected to the air source heat pump hot water device that thermal source is provided for it, the outlet line of water-bath type vaporizer inserts voltage-regulating system, the pressure of voltage-regulating system and flow are by the automatic controlling system adjustment, by the ammonia of voltage-regulating system output through the constant voltage of gasification.
The beneficial effects of the utility model are:
Adopt the air source heat pump water heating system to obtain hot water and can save energy more than 2/3 than traditional electrical heated water bath formula vaporizer, the state of power consumption always is obviously energy-saving and cost-reducing in the full electric heating pattern before changing.The manufacturing and the heat exchange of hot water simultaneously is divided into two parts, has only heat exchanger to conduct heat between by water and liquefied ammonia at the water-bath heat-exchange system of ammonia, and no electric contact has been avoided the vaporize explosion-proof problem of mode of direct electric heating water-bath, and is safer.
The increase of air feed demand volume is adjusted required heat-exchange system and voltage-regulating system and just can be reached, and native system can be finished the requirement of big flow air feed.
The control of the pressure of air feed is more stable, to the fluctuation of flow and the pressure surge that causes has better adjusting control action.
All measurement controls of system are finished by automatic control system, and Control Parameter is carried out by computer, has avoided the deviation of artificial governing factor, and the stability of system is stronger.
Description of drawings
Fig. 1 is the utility model structural representation;
Among the figure: 1. raw material ultra-pure ammonia tank car, 2. air temperature type vaporizer, 3. air source heat pump hot water device, 4. water-bath type vaporizer, 5. constant pressure regulating valve group, 6. automatic control system.
Embodiment
The big flow vaporization of a kind of ultra-pure ammonia as shown in Figure 1 constant pressure air feeding system, solid line is represented pipeline among the figure, and dotted line is represented control wiring.Raw material ultra-pure ammonia tank car (1) liquid phase pipeline is connected to air temperature type vaporizer (2), and the gas phase pipeline of raw material ultra-pure ammonia tank car (1) is connected to the muffler of follow-up system, the pressure when guaranteeing the tank car feed flow.
Liquefied ammonia is all vaporized in air-heating type gasifier (2) or exhausted most vaporization, air temperature type vaporizer (2) is according to gas supply flow, the heat exchange area of vaporization liquefied ammonia keeps the surplus more than 100%, the heat exchange poor effect problem that can avoid the four seasons temperature difference and the outside frosting of long-time vaporization to cause.
The thermometry point is set on the pipeline of air temperature type vaporizer (2), and draws one tunnel vapor return line and be connected on raw material ultra-pure ammonia tank car (1) the gas phase pipeline.Air temperature type vaporizer (2) main line inserts follow-up water-bath type vaporizer (4), be connected to instrument such as temperature, pressure on water-bath type vaporizer (4) pipeline, water temperature in the control water-bath type vaporizer guarantees out that in the pipeline behind the water-bath type vaporizer be full gaseous ammonia.
The thermal water source of water-bath type vaporizer (4) is provided by air source heat pump hot water device (3), and water heating system circulates with pump for what seal.Air source heat pump hot water device (3) adopts electric energy to drive according to contrary Carnot's cycle principle, by the refrigeration agent variation of state after compression, natural air heat energy is absorbed, endlessly the equipment that water is heated.In the water heating system to water temperature control to ± 1 ℃, guaranteed the pressure stability of gas ammonia.The Energy Efficiency Ratio of native system is up to 300%-400%, and energy consumption is below 1/3 of traditional direct electric heating type water-bath system.
The desirable value that water-bath type vaporizer (4) and thermal water source are pressed under the full liquefied ammonia state of full flow by the heat load of air source heat pump hot water device (3) designs.
The ammonia outlet pipeline of water-bath type vaporizer (4) inserts voltage-regulating system, voltage-regulating system comprises constant pressure regulating valve group (5) and temperature, pressure, flow instrument, the constant pressure regulating valve group is provided with automatic regulating valve in (5), temperature, pressure, the signal of flow instrument inputs to automatic control system (6), automatic control system (6) is according to the temperature of input, pressure, flux signal regulating and controlling constant pressure regulating valve group (5), thereby pressure and flow to whole voltage-regulating system are adjusted, automatic control system (6) is the PLC controller, and the ammonia pressure that native system is confessed in assurance is constant.The automatic regulating valve pipeline is provided with the standby manual adjustment system of bypass, finishes the requirement of adjusting in short-term when the automatic system repair and maintenance.
The 316L stainless steel that the pipeline of ultra-pure ammonia contact and parts are selected electropolishing for use in the system is made.
That practical the utility model can be accomplished is energy-conservation, big flow to the electron level ultra-pure ammonia air feed of vaporizing.
Claims (3)
1. the big flow vaporization of ultra-pure ammonia constant pressure air feeding system, it is characterized in that this system has comprised the liquefied ammonia source, air temperature type vaporizer, the water-bath type vaporizer, heat pump hot-water system, voltage-regulating system and automatic control system, wherein the liquid phase pipeline in liquefied ammonia source inserts air temperature type vaporizer, air temperature type vaporizer is provided with on the gas phase pipeline that one tunnel vapor return line is connected to raw material source, the main line of air temperature type vaporizer inserts follow-up water-bath type vaporizer, the water intake of water-bath type vaporizer is connected to the air source heat pump hot water device that thermal source is provided for it, the outlet line of water-bath type vaporizer inserts voltage-regulating system, the pressure of voltage-regulating system and flow are by the automatic controlling system adjustment, by the ammonia of voltage-regulating system output through the constant voltage of gasification.
2. the big flow vaporization of ultra-pure ammonia according to claim 1 constant pressure air feeding system, it is characterized in that described voltage-regulating system comprises constant pressure regulating valve group and temperature, pressure, flow instrument, be provided with automatic regulating valve in this constant pressure regulating valve group, the signal of temperature, pressure, flow instrument inputs to automatic control system, and automatic control system is according to temperature, pressure, the flux signal regulating and controlling constant pressure regulating valve group of input.
3. the big flow vaporization of ultra-pure ammonia according to claim 1 and 2 constant pressure air feeding system is characterized in that described automatic control system is the PLC controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200930074U CN202032286U (en) | 2011-04-01 | 2011-04-01 | Hyperpure ammonia large-flow vaporization constant-pressure gas supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200930074U CN202032286U (en) | 2011-04-01 | 2011-04-01 | Hyperpure ammonia large-flow vaporization constant-pressure gas supply system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202032286U true CN202032286U (en) | 2011-11-09 |
Family
ID=44894583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200930074U Expired - Lifetime CN202032286U (en) | 2011-04-01 | 2011-04-01 | Hyperpure ammonia large-flow vaporization constant-pressure gas supply system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202032286U (en) |
-
2011
- 2011-04-01 CN CN2011200930074U patent/CN202032286U/en not_active Expired - Lifetime
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20111109 |