CN202028324U - Chlorosilane hydrolysis absorption tower - Google Patents
Chlorosilane hydrolysis absorption tower Download PDFInfo
- Publication number
- CN202028324U CN202028324U CN201120077093XU CN201120077093U CN202028324U CN 202028324 U CN202028324 U CN 202028324U CN 201120077093X U CN201120077093X U CN 201120077093XU CN 201120077093 U CN201120077093 U CN 201120077093U CN 202028324 U CN202028324 U CN 202028324U
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- tower body
- tower
- absorption tower
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- model
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Abstract
The utility model discloses a chlorosilane hydrolysis absorption tower, which comprises a tower body (1), an inlet pipe (2) and a tail gas outlet pipe (3), wherein the inlet pipe (2) is arranged at the lower part of the tower body (1), the tail gas outlet pipe (3) is arranged on the top of the tower body (1), one end of the tower body (1) is opened, and the tower body (1) is also provided with a spray liquid inlet pipe (4). The chlorosilane hydrolysis absorption tower has ingenious conception and a reasonable design, and effectively avoids explosion danger and the problem that solid substances block the tower.
Description
Technical field
The utility model belongs to silication worker field, relates to a kind of chlorosilane hydrolysis absorption tower.
Background technology
Polysilicon is a kind of form of elemental silicon, is very important defect semiconductor material.Polysilicon is to be widely used in the basic material of making transistor radio, recorder, refrigerator, colour TV, video recorder, electronic computer etc. in the electronics industry.
The chlorosilane raffinate, the waste gas that produce in the polysilicon production process belong to inflammable, explosive danger medium, and the way that often adopts hydrolysis to add the alkali lye neutralization is handled, and have the danger of blast in the processing procedure; Also can produce a large amount of silica solid materials in addition when chlorosilane raffinate, waste gas hydrolysis.Common stuffing washing tower can't satisfy the needs of this technical process, can not effectively avoid the danger of exploding, the situation that solid matter stops up tower.
The utility model content
Goal of the invention of the present utility model is: at the problem of above-mentioned existence, provide a kind of chlorosilane hydrolysis absorption tower.This hydrolysis absorption tower is skillfully constructed, reasonable in design, effectively avoided the danger of blast and the problem that solid matter stops up tower.
For achieving the above object, the utility model solves the technical scheme that its technical problem adopts and is:
A kind of chlorosilane hydrolysis absorption tower comprises tower body, inlet tube and tail gas outlet, and described inlet tube is arranged on the bottom of tower body, and described tail gas outlet is arranged on the top of tower body, and an end of described tower body opens wide, and also is provided with the spray liquid inlet tube on the described tower body.
As optimal way, the open end of described tower body is arranged in the circulation fluid geosyncline.
As optimal way, described spray liquid inlet tube is provided with spiral nozzle.
The utility model chlorosilane hydrolysis absorption tower lower port is opened wide, do not adorn any filler in the tower, can the tower open end be immersed in the circulation fluid geosyncline according to process conditions during use, can be outstanding when occurring unusual superpressure like this in the tower from the tower open end, effectively avoided the danger of blast; Simultaneously, the solid matter that produces in the chlorosilane hydrolytic process also can directly be discharged from tower bottom, is unlikely to the situation that occurs stopping up; Adopt the stainless steel spiral nozzle, the cleaning solution that evenly distributes fully contacts gas-liquid, and has solved the susceptible to plugging problem of spray thrower, has guaranteed clean result.
Owing to adopted technique scheme, the beneficial effects of the utility model are:
The utility model is skillfully constructed, reasonable in design, effectively avoided the danger of blast and the problem that solid matter stops up tower.
Description of drawings
Fig. 1 is the utility model structural representation.
Mark among the figure: 1 tower body, 2 inlet tubes, 3 tail gas outlets, 4 spray liquid inlet tubes, 5 spiral nozzles.
The specific embodiment
Below in conjunction with accompanying drawing, the utility model is done detailed explanation.
In order to make the purpose of this utility model, technical scheme and advantage clearer,, the utility model is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the utility model, and be not used in qualification the utility model.
Embodiment: as shown in Figure 1, a kind of chlorosilane hydrolysis absorption tower, comprise tower body 1, inlet tube 2 and tail gas outlet 3, described inlet tube 2 is arranged on the bottom of tower body 1, described tail gas outlet 3 is arranged on the top of tower body 1, one end of described tower body 1 opens wide, and also is provided with spray liquid inlet tube 4 on the described tower body 1.
The open end of described tower body 1 is arranged in the circulation fluid geosyncline.Described spray liquid inlet tube 4 is provided with spiral nozzle 5.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (3)
1. chlorosilane hydrolysis absorption tower, it is characterized in that: comprise tower body (1), inlet tube (2) and tail gas outlet (3), described inlet tube (2) is arranged on the bottom of tower body (1), described tail gas outlet (3) is arranged on the top of tower body (1), one end of described tower body (1) opens wide, and also is provided with spray liquid inlet tube (4) on the described tower body (1).
2. a kind of chlorosilane hydrolysis as claimed in claim 1 absorption tower, it is characterized in that: the open end of described tower body (1) is arranged in the circulation fluid geosyncline.
3. a kind of chlorosilane hydrolysis as claimed in claim 1 absorption tower, it is characterized in that: described spray liquid inlet tube (4) is provided with spiral nozzle (5).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201120077093XU CN202028324U (en) | 2011-03-23 | 2011-03-23 | Chlorosilane hydrolysis absorption tower |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201120077093XU CN202028324U (en) | 2011-03-23 | 2011-03-23 | Chlorosilane hydrolysis absorption tower |
Publications (1)
Publication Number | Publication Date |
---|---|
CN202028324U true CN202028324U (en) | 2011-11-09 |
Family
ID=44890636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201120077093XU Expired - Fee Related CN202028324U (en) | 2011-03-23 | 2011-03-23 | Chlorosilane hydrolysis absorption tower |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN202028324U (en) |
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2011
- 2011-03-23 CN CN201120077093XU patent/CN202028324U/en not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111109 Termination date: 20200323 |