CN202007282U - Diffusion furnace - Google Patents

Diffusion furnace Download PDF

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Publication number
CN202007282U
CN202007282U CN2011200480975U CN201120048097U CN202007282U CN 202007282 U CN202007282 U CN 202007282U CN 2011200480975 U CN2011200480975 U CN 2011200480975U CN 201120048097 U CN201120048097 U CN 201120048097U CN 202007282 U CN202007282 U CN 202007282U
Authority
CN
China
Prior art keywords
heater
diffusion furnace
furnace
metaphosphoric acid
fire door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011200480975U
Other languages
Chinese (zh)
Inventor
钱大富
叶雄新
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSG Holding Co Ltd
Original Assignee
CSG Holding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSG Holding Co Ltd filed Critical CSG Holding Co Ltd
Priority to CN2011200480975U priority Critical patent/CN202007282U/en
Application granted granted Critical
Publication of CN202007282U publication Critical patent/CN202007282U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a diffusion furnace, which comprises a furnace body, a tray and a hook, wherein the furnace body is provided with a furnace mouth; the tray is arranged below the furnace mouth, and is used for receiving metaphosphoric acid flowing out of the furnace mouth; and the hook can extend into the furnace body, and is used for clearing the metaphosphoric acid produced in the furnace body. In the diffusion furnace, metaphosphoric acid flowing out of the furnace mouth is received by the tray, and metaphosphoric acid produced in the furnace body is cleared by the hook, so that the inside of the diffusion furnace is kept clean, and metaphosphoric acid is prevented from corroding metal components in the diffusion furnace.

Description

Diffusion furnace
[technical field]
The utility model relates to area of solar cell, relates in particular to a kind of diffusion furnace that is used for solar cell.
[background technology]
The diffusion furnace that is used for the stopped pipe solar cell is in secular use, can produce a large amount of metaphosphoric acids in diffusion furnace fire door and stove owing to contact with outside air and high temperature, moist environment, and the metaphosphoric acid of these generations can corrode the metal parts in the diffusion furnace.
[utility model content]
Based on this, be necessary to provide a kind of diffusion furnace that can collect and remove the metaphosphoric acid in diffusion furnace fire door and the stove.
A kind of diffusion furnace comprises body of heater with fire door, is arranged on described fire door below and is used to access the pallet of the effusive metaphosphoric acid of described fire door and can stretch in the described body of heater and be used to remove the hook of the metaphosphoric acid that produces in the described body of heater.
Preferably, described pallet is and described fire door quartzy pallet of the same size.
Preferably, described pallet thickness is 2mm.
Preferably, described hook comprises quartz rod and is fixed on the quartz plate of described quartz rod one end, the arcuate structure that described quartz plate and described body of heater contact position are complementary for the inner chamber with described body of heater.
Preferably, also comprise the offgas duct that is used to discharge waste gas in the described body of heater, described offgas duct one end links to each other with the external world, and the other end is arranged on the inner chamber of described body of heater.
This diffusion furnace accesses the effusive metaphosphoric acid of fire door by pallet, removes the metaphosphoric acid that produces in the body of heater by hook, thereby keeps the cleaning in the diffusion furnace, avoids the metal parts in the metaphosphoric acid corrosion diffusion furnace.
[description of drawings]
Fig. 1 is the cross-sectional view of the diffusion furnace of an embodiment;
Fig. 2 is the schematic top plan view of the pallet of diffusion furnace shown in Figure 1;
Fig. 3 is the schematic side view of pallet shown in Figure 2;
Fig. 4 is the structural representation of the hook of diffusion furnace shown in Figure 1;
Fig. 5 is the schematic cross-section of hook shown in Figure 4.
[embodiment]
Below in conjunction with drawings and Examples diffusion furnace is further described.
As shown in Figure 1, diffusion furnace comprises body of heater 10, pallet 30, hook 40 and offgas duct 50.Body of heater 10 has inner chamber 12, and an end is provided with fire door 20.Pallet 30 is arranged on fire door 20 belows, is used to access fire door 20 effusive metaphosphoric acids.One end of hook 40 can stretch into the inner chamber 12 of body of heater 10, is used to remove the metaphosphoric acid that produces in the body of heater 10.One end 52 of offgas duct 50 links to each other with the external world, and the other end 54 is arranged on body of heater 10 inner chambers 12, is used to discharge waste gas in the body of heater 10.
As shown in Figures 2 and 3, pallet 30 is and fire door 20 quartzy pallets of the same size, is square box shape, and specification is 250mm*200mm*40mm, and thickness is 2mm.
As shown in Figure 4 and Figure 5, hook 40 comprises quartz rod 42 and is fixed on the quartz plate 44 of quartz rod 42 1 ends that quartz plate 44 is arranged on body of heater 10 inner chambers 12.Quartz plate 44 is the arcuate structure 46 that is complementary with body of heater 10 inner chambers 12 with body of heater 10 contact positions.
Above-mentioned diffusion furnace accesses fire door 20 effusive metaphosphoric acids by pallet 30, removes the metaphosphoric acid that produces in the body of heater 10 by hook 40, thereby keeps the cleaning in the diffusion furnace, avoids the metal parts in the metaphosphoric acid corrosion diffusion furnace.
The above embodiment has only expressed one or more embodiments of the present utility model, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the utility model claim.Should be pointed out that for the person of ordinary skill of the art under the prerequisite that does not break away from the utility model design, can also make some distortion and improvement, these all belong to protection domain of the present utility model.Therefore, the protection domain of the utility model patent should be as the criterion with claims.

Claims (5)

1. a diffusion furnace is characterized in that, comprises body of heater with fire door, is arranged on described fire door below and is used to access the pallet of the effusive metaphosphoric acid of described fire door and can stretch in the described body of heater and be used to remove the hook of the metaphosphoric acid that produces in the described body of heater.
2. diffusion furnace as claimed in claim 1 is characterized in that, described pallet is and described fire door quartzy pallet of the same size.
3. diffusion furnace as claimed in claim 1 or 2 is characterized in that, described pallet thickness is 2mm.
4. diffusion furnace as claimed in claim 1 is characterized in that, described hook comprises quartz rod and is fixed on the quartz plate of described quartz rod one end, the arcuate structure that described quartz plate and described body of heater contact position are complementary for the inner chamber with described body of heater.
5. diffusion furnace as claimed in claim 1 is characterized in that, also comprises the offgas duct that is used to discharge waste gas in the described body of heater, and described offgas duct one end links to each other with the external world, and the other end is arranged on the inner chamber of described body of heater.
CN2011200480975U 2011-02-25 2011-02-25 Diffusion furnace Expired - Fee Related CN202007282U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011200480975U CN202007282U (en) 2011-02-25 2011-02-25 Diffusion furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011200480975U CN202007282U (en) 2011-02-25 2011-02-25 Diffusion furnace

Publications (1)

Publication Number Publication Date
CN202007282U true CN202007282U (en) 2011-10-12

Family

ID=44748939

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011200480975U Expired - Fee Related CN202007282U (en) 2011-02-25 2011-02-25 Diffusion furnace

Country Status (1)

Country Link
CN (1) CN202007282U (en)

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111012

Termination date: 20160225

CF01 Termination of patent right due to non-payment of annual fee