CN201993335U

CN201993335U - Nanofluidic chip

Info

Publication number: CN201993335U
Application number: CN2010206901155U
Authority: CN
Inventors: 焦念东; 王志迁; 董再励
Original assignee: Shenyang Institute of Automation of CAS
Current assignee: Shenyang Institute of Automation of CAS
Priority date: 2010-12-30
Filing date: 2010-12-30
Publication date: 2011-09-28
Anticipated expiration: 2020-12-30

Abstract

The utility model discloses a nanofluidic chip. Two liquid storage tanks are arranged at two ends of the chip, each liquid storage tank is connected with a micro pipeline, a nano pipeline is disposed between the two micro pipelines, and electrodes which are perpendicular to the nano pipeline are respectively disposed on two sides of the nano pipeline. The nano pipeline which is communicated with the micro pipelines is processed by the aid of an AFM (antifrictional metal) probe. Certain voltage is applied to a space between the liquid storage tanks of the chip, simultaneously, small voltage is applied onto the electrodes on two sides of the pipeline, the change of current signals is measured, when fluid flows through the electrodes in the nano pipeline, change of current can be generated, and signal detection can be used for analyzing structural and physical characteristics of nano materials. A processing and signal detection method of the nanofluidic chip can be applied to low-cost and fast sequencing of DNA (deoxyribonucleic acid) molecules.

Description

A kind of nano-fluidic control chip

Technical field

The utility model belongs to nanoprocessing and receives the flow control signal detection range, specifically processes the nano-fluidic control chip of the pipeline of the nanoscale degree of depth and width by AFM.

Background technology

Nanotubes is meant to have the one dimension size at least at nano level microtubule, and nanotubes has many advantages in the Flow Control research field receiving.Because the size of nanotubes is at nanoscale, thereby can be used for studying the novel physical characteristics of liquids and gases in so tiny pipeline.Nanotubes is compared nano-pore, has long unidimensional scale, makes that liquid can have slower flowing velocity in the pipeline, thereby can improve the resolution of detection.Simultaneously in the nanotubes both sides a plurality of check points can be set, these help object characteristic in the pipeline is carried out high sensitivity, multiple spot detection.The nano-fluidic control chip that comprises nanotubes can be widely used in tiny nano object is carried out high-sensitivity detection and operation, as biomolecule detection and single DNA operation etc.

The job operation of nanotubes mainly contains focused ion beam method, chemical corrosion method at present.The focused ion beam job operation utilizes the plasma bombardment sample to remove sample surface material, forms raceway groove.But this method costs an arm and a leg, and damages sample easily, and the process of preparation sample is very slow.Chemical corrosion method erodes the formation raceway groove by chemical solution and sample generation chemical reaction with certain sample, but this method is difficult to control the parameter and the homogeneity of corrosion raceway groove, and stays residue easily, pollutes.

The utility model content

For solving the problems of the technologies described above, the purpose of this utility model provides a kind of nano-fluidic control chip and based on job operation and the application of AFM.

(Atomic force microscopy AFM) becomes the strong instrument of nanoprocessing to atomic force microscope, and AFM nanoprocessing method has the machining precision height in recent years, do not need harsh operating environment (as vacuum, low temperature etc.), flexible operation, advantage such as with low cost.Utilize the probe of AFM to control technology and can realize operations such as pushing away, draw, carve, draw under the nanoscale.By probe delineation operation, can on sample, process the nanostructureds such as nanometer groove, raceway groove of various ways.The AFM process technology is applied to receives the Flow Control field and also do not have relevant report at present, we will be in conjunction with the advantage of AFM nanoprocessing, it is combined with the processing and fabricating of nano-fluidic control chip, process nanotubes, utilize that this pipeline can measure nano object (particle, biomolecule etc.), size detection and characteristic test.Concrete scheme of the present utility model is as follows:

A kind of nano-fluidic control chip is characterized in that: two liquid storage tanks are set at the two ends of chip, and each liquid storage tank is connected with a micron pipeline, and described two micron pipeline enclosures are provided with nanotubes, and each setting of described nanotubes both sides becomes vertical electrode with nanotubes.

For obtaining the best-of-breed technology effect, the described nanotubes degree of depth is 1-20nm, wide 1-200nm, long 15-25mm; The quantity of described electrode is 5 pairs.

The invention also discloses the job operation of described nano-fluidic control chip:

1) Design and Machining goes out the nano-fluidic control chip structure, chip is by MEMS (micro electro mechanical system) (Micro Electro Mechanical Systems, MEMS) processing technology is finished, chip structure is: contain two liquid storage tanks, be connected with a micron pipeline between liquid storage tank, described micron pipeline enclosure leaves 20 microns zones to be processed, be used to utilize the AFM delineation to process nanotubes, the AFM probe cuts off electrode the electrode pair that forms self registration simultaneously in processing nanotubes process, can carry out input to object physical characteristics in the pipeline by this electrode pair;

2) utilize the mechanical scratching function of AFM probe, be pressed into the chip certain depth by the control probe, and control probe rectilinear motion, it is 1-20nm that the zone to be processed that can reserve on chip processes the degree of depth, wide 1-200nm, long 15-25mm raceway groove; The nanotubes both sides respectively have 5 to become vertical electrode with nanotubes;

3) chip that processes nanotubes is carried out anode linkage encapsulation (anode linkage is that a kind of utilization electricity is realized solid electrolyte glass (pottery) and the solid-state a kind of method that is connected of semiconductor (metal) material with thermal interaction), and above the chip liquid storage tank after the encapsulation, respectively process aperture, feed the charged particle solution or the dna solution of the several nanometers of diameter.

The utility model further discloses a kind of application process of described nano-fluidic control chip, applies certain voltage between the chip liquid storage tank, the variation that applies a small voltage and measure current signal on pipeline two lateral electrodes simultaneously; When object flows through electrode,, this input be can be used for analyzing nano material's structure and physical characteristics with producing the variation of electric current in nanotubes.

Principle of the present utility model:

Design and Machining goes out to have the ad hoc structure nano-fluidic control chip of transverse electrode, and utilizes AFM to process the degree of depth and width all at nano level nanotubes.By applying certain voltage, can drive the interior charged nano object (particle, biomolecule etc.) of pipeline and in pipeline, move at entrance and outlet liquid storage tank.When charged nano object in the pipeline will cause that the current signal that electrode records changes during through the microelectrode of piping both sides, and then utilize this signal to change and to analyze the structure and the physical characteristics of nano object (particle, biomolecule etc.).

The utlity model has following advantage:

The AFM job operation of nanotubes is quick, accurately and also cost not high.Driven nano object (particle, biomolecule etc.) method by pipeline can change nano object (particle effectively, neatly by changing voltage swing and polarity of voltage, biomolecule etc.) movement velocity in nanotubes, direction, help carrying out high-sensitivity detection by the structure and the physical characteristics of electrode pair nano object (particle, biomolecule etc.).The utility model can be used for the low cost of dna molecular, order-checking fast, thereby biomedicine and biological detection are had important scientific meaning.

Description of drawings

Fig. 1 is a nano-fluidic control chip structural drawing of the present utility model;

Fig. 2 is the nanotubes photo of the actual processing of AFM;

Fig. 3 a-Fig. 3 b is the fluorescence photo of nano object solution by nanotubes;

Fig. 4 be electrode detection to nano object by the electric signal curve in the nanotubes process.

Embodiment

Specify the utility model below in conjunction with accompanying drawing.

Fig. 1 is the utility model nano-fluidic control chip structure, and wherein 1 indicated part is an electrode, has designed 5 pairs of electrodes on the chip, 2 nanotubes that process for AFM, and 3 is a micron pipeline, 4 is liquid storage tank.

Job operation is

1) design nano-fluidic control chip: Design and Machining goes out nano-fluidic control chip as shown in Figure 1, and wherein the not join domain in the middle of the micron pipeline 3 is zone to be processed, is used for later use AFM job operation and processes nanotubes 2.Can utilize the nano object solution in 1 pair of nanotubes 2 of electrode to carry out the input analysis in this chip structure;

2) AFM processing nanotubes: be pressed into the chip surface certain depth by control AFM probe, and control probe rectilinear motion, the zone to be processed that can reserve on chip processes the degree of depth and width all at nano level nanotubes 2, and the effect of the actual processing of AFM as shown in Figure 2.The AFM probe cuts off electrode 1 electrode pair that forms self registration simultaneously in processing nanotubes 2 processes, be used for the nano object of nanotubes 2 is carried out input.

3) bonding of chip encapsulates and feeds charged nano object solution: the chip that processes nanotubes is carried out the anode linkage encapsulation,

Described anode linkage encapsulation is meant: utilize electricity and thermal interaction to realize the solid-state capping of electrolyte glass to micro-fluidic chip, make nanotubes become the dredging pipeline of a hollow in micro-fluidic chip inside, be used to feed nano object solution.

Above the chip liquid storage tank 4 after the encapsulation, process aperture, under the condition of vacuumizing, feed charged nano object solution 5 (particles, biomolecule etc.), shown in Fig. 3 a-Fig. 3 b, in Fig. 3 a, micron pipeline 3 does not have liquid, can't show, when liquid passes through (shown in Fig. 3 b), a micron pipeline 3 has liquid flow, and a micron pipeline 3 can show.Liquid flow direction is to flow to the left side by the right side among the figure.

The electric field driven of nano object solution and input in the nanotubes: two liquid storage tanks 4 at chip apply certain voltage respectively, then shown in Fig. 3 a, nano object solution in the right side micron pipeline 3 is under electric field driven, and charged nano object flow to left side micron pipeline 3 by right side micron pipeline 3 through nanotubes 2.Can see that from Fig. 3 b the nano object solution 5 on right side has flow to the micron pipeline in left side.In this process, by the variation of measuring electric current at electrode 1.When nano object is arranged in the nanotubes through electrode 1, will cause that electric current produces sudden change, as shown in Figure 4.Utilize this signal to analyse in depth to the structure and the physical characteristics of nano object.

Claims

1. nano-fluidic control chip, it is characterized in that: two liquid storage tanks are set at the two ends of chip, and each liquid storage tank is connected with a micron pipeline, and described two micron pipeline enclosures are provided with nanotubes, and each is provided with described nanotubes both sides and becomes vertical electrode with nanotubes.

2. nano-fluidic control chip according to claim 1 is characterized in that: the described nanotubes degree of depth is 1-20nm, wide 1-200nm, long 15-25mm.

3. nano-fluidic control chip according to claim 1 is characterized in that: the quantity of described electrode is 5 pairs.