CN201981252U - Novel transmission rotating end - Google Patents
Novel transmission rotating end Download PDFInfo
- Publication number
- CN201981252U CN201981252U CN2011200235579U CN201120023557U CN201981252U CN 201981252 U CN201981252 U CN 201981252U CN 2011200235579 U CN2011200235579 U CN 2011200235579U CN 201120023557 U CN201120023557 U CN 201120023557U CN 201981252 U CN201981252 U CN 201981252U
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- CN
- China
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- drive unit
- target
- rotating end
- termination
- foerderanlage
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Abstract
The utility model relates to a transmission rotating end, in particular to a transmission rotating end adopting a multilayer water sealing device and a vacuum sealing device, which comprises a machine seat device, a driving shaft device, a middle water flow conveyor, a casing and a target. The transmission rotating end is characterized in that the water sealing device is arranged between the middle water flow conveyor and a driving device, and the vacuum sealing device is arranged between the driving device and the machine seat device. The transmission rotating end has the technical effects that the nonuniform film coating phenomenon and the water leakage and gas leakage phenomenon are prevented, the target is convenient to replace, and the target replacement flexibility, the rotating end sealing performance, the sputtering power and the integral stability of a rotating cathode are improved.
Description
Technical field
The utility model relates to a kind of transmission rotation termination, refers more particularly to a kind of transmission rotation termination of adopting multilayer water sealing device and vacuum seal.
Background technology
The vacuum magnetic-control sputtering plated film is that coating quality is best in the current coating process, and a kind of coating process that is most widely used, what generally use at present is the plane sputter cathode, a because plane sputter cathode sputter fixed target zone, runway shape sputter area can be formed behind the certain hour, the homogeneity and the stability of later stage plated film can be influenced.Though also invented the sputter cathode that a kind of sputtering target material can rotate at present, but because that this rotatable sputtering cathode construction complexity, target are changed is difficult, the gas leakage of leaking easily, cause the production cycle long, maintenance times is frequent, the unstable product quality that obtains, production capacity efficient is low, and the use cost height can not satisfy the requirement that present high quality coating process is produced.
The utility model content
Change difficult, the leak technological deficiency of gas leakage easily in order to overcome rotatable sputtering cathode construction complexity, target, the present utility model a kind of novel transmission rotation termination.
In order to reach above-mentioned technical purpose, the technical solution of the utility model is for providing a kind of novel transmission rotation termination, comprise support device, drive shaft device, middle current e Foerderanlage, housing, target, it is characterized in that, between current e Foerderanlage and the drive unit water sealing device is set in the middle of described, is provided with vacuum seal between described drive unit and the support device.
According to above-mentioned transmission rotation termination, wherein, the outer rim of described middle current delivery device tip is provided with clasp nut, makes target be fixed on the end of drive unit by clasp nut.
Transmission rotation termination according to above-mentioned wherein, is provided with the axle sleeve bracing or strutting arrangement between described drive unit and the housing.
According to above-mentioned transmission rotation termination, wherein, the side of described support device also is provided with a band synchronously, and the end of described synchronous band is connected with the water power coupling device.
A kind of novel transmission rotation termination, comprise support device, drive shaft device, middle current e Foerderanlage,, housing, target, it is characterized in that, between current e Foerderanlage and the drive unit double water sealing device is set in the middle of described, is provided with double vacuum seal between described drive unit and the support device.
Technique effect of the present utility model is to be provided with rotatable drive shaft device, so just can prevent the uneven phenomenon of plated film, adopt multiple tracks water sealing device and vacuum seal, can prevent the gas leak phenomenon that leaks, adopt clasp nut, can change target very easily, this just feasible replacing handiness that has improved target, improve the stopping property of rotation termination, the more important thing is the sputtering power that has improved rotating cathode in addition, improved the resistance to overturning of rotating cathode.
For clearer statement the present invention, the utility model is done further explanation below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is first cut-away view of the present utility model;
Fig. 2 is second cut-away view of the present utility model;
1-support device; The 2-water sealing device; The 3-vacuum seal; The 4-drive unit; 5-current e Foerderanlage; 6-water power coupling device, the 7-housing; The 8-clasp nut; The double water sealing device of 9-; The double vacuum seal of 10-; The 11-axle sleeve supports; The 12-target; 13-is with synchronously.
Embodiment
What the present invention protected is a kind of novel transmission rotation termination, so long as those skilled in the art understand the embodiment of the invention, without performing creative labour, only is the replacement of equivalent technology, all belongs to protection scope of the present invention.
As shown in Figure 1, in housing 7, be provided with support device 1, support device 1, described support device 1 is by being bolted on the housing 7, in support device 1, be provided with drive unit 4, also be provided with axle sleeve between described drive unit 4 and the support device 1 and support 11, described drive unit 4 is arranged on axle sleeve and supports on 11, wherein drive unit 4 can support 11 internal rotation at axle sleeve, the axial centre position also is provided with current e Foerderanlage 5 in drive unit 4, an end of described current e Foerderanlage 5 and an end of drive unit 4 are by being bolted on the support device 1, the other end of described drive unit 4 is terminal to connect target 12 by clasp nut 8, described target 12, the other end end of described current e Foerderanlage 5 also is arranged on the inside of target 12.
As illustrated in fig. 1 and 2, junction at drive unit 4 and support device 1 also is provided with vacuum seal 3 and double vacuum seal 10, acting as of described vacuum seal 3 and double vacuum seal 10 prevents gas leakage, keep the vacuum tightness in the plated film negative electrode, junction at drive unit 4 and current e Foerderanlage 5 also is provided with water sealing device 2 and double water sealing device 9, acting as of described water sealing device 2 and double water sealing device 9 prevents to leak, and influences coating effects.
As shown in Figure 1, also be connected with at the side of drive unit 4 and be with 13 synchronously, be connected with water power coupling device 6 with 13 the other end synchronously, described water power coupling device 6 with 13 drive unit 4 and current e Foerderanlages 5 in sputter cathode, is used to drive the work of sputter cathode by synchronously.
Claims (5)
1. the termination is rotated in a novel transmission, comprise support device, drive shaft device, middle current e Foerderanlage, water coupling device, housing, target, it is characterized in that, between current e Foerderanlage and the drive unit water sealing device is set in the middle of described, is provided with vacuum seal between described drive unit and the support device.
2. transmission rotation according to claim 1 termination is characterized in that the outer rim of described middle current delivery device tip is provided with clasp nut, and described clasp nut is fixed on target the end of drive unit.
3. transmission rotation according to claim 1 termination is characterized in that, is provided with the axle sleeve bracing or strutting arrangement between described drive unit and the housing.
4. transmission rotation according to claim 1 termination is characterized in that the side of described support device also is provided with a band synchronously, and the end of described synchronous band is connected with the water power coupling device.
5. the termination is rotated in a novel transmission, comprise support device, drive shaft device, middle current e Foerderanlage, water coupling device, housing, target, it is characterized in that, between current e Foerderanlage and the drive unit double water sealing device is set in the middle of described, is provided with double vacuum seal between described drive unit and the support device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200235579U CN201981252U (en) | 2011-01-25 | 2011-01-25 | Novel transmission rotating end |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200235579U CN201981252U (en) | 2011-01-25 | 2011-01-25 | Novel transmission rotating end |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201981252U true CN201981252U (en) | 2011-09-21 |
Family
ID=44608716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200235579U Expired - Lifetime CN201981252U (en) | 2011-01-25 | 2011-01-25 | Novel transmission rotating end |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201981252U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357802A (en) * | 2014-11-06 | 2015-02-18 | 邵海平 | Fluoride shaft seal ultrathin rotating cathode end |
| CN105401126A (en) * | 2015-12-17 | 2016-03-16 | 安徽方兴光电新材料科技有限公司 | Magnetron-sputtered rotating cathode supporting end |
| CN110375058A (en) * | 2019-01-09 | 2019-10-25 | 合肥晞隆光电有限公司 | Retarder assembly method and center adjusting device |
-
2011
- 2011-01-25 CN CN2011200235579U patent/CN201981252U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357802A (en) * | 2014-11-06 | 2015-02-18 | 邵海平 | Fluoride shaft seal ultrathin rotating cathode end |
| CN105401126A (en) * | 2015-12-17 | 2016-03-16 | 安徽方兴光电新材料科技有限公司 | Magnetron-sputtered rotating cathode supporting end |
| CN110375058A (en) * | 2019-01-09 | 2019-10-25 | 合肥晞隆光电有限公司 | Retarder assembly method and center adjusting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110921 |
|
| CX01 | Expiry of patent term |