CN201971890U - Coating structure capable of improving hardness and corrosion resistance of metal alloy matrix - Google Patents
Coating structure capable of improving hardness and corrosion resistance of metal alloy matrix Download PDFInfo
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- CN201971890U CN201971890U CN2011200234453U CN201120023445U CN201971890U CN 201971890 U CN201971890 U CN 201971890U CN 2011200234453 U CN2011200234453 U CN 2011200234453U CN 201120023445 U CN201120023445 U CN 201120023445U CN 201971890 U CN201971890 U CN 201971890U
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Abstract
The utility model discloses a coating structure capable of improving hardness and corrosion resistance of metal alloy matrix. The coating structure consists of a first TiN film, a CrN film, a second TiN film and a TiAIN film which are sequentially arranged on the matrix from bottom to top. Bonding force of the coating structure with the matrix is increased, the coating structure is convenient in use and difficult to be stripped off, hardness and excellent corrosion resistance of the coating structure are better, and the service life of the coating structure is prolonged.
Description
Technical field
The utility model relates at nano-composite coating on the metal or metal alloy matrix especially on the matrix, particularly relates to a kind of coating structure that improves metallic matrix or alloy base hardness and corrosion resistance.
Background technology
Since the last century the eighties,, be commonly called as titanium with the TiN(titanium nitride) be the PVD technology and the equipment of the raising metallic substance performance of representative, as one of modification technology of material surface, in production, obtained using widely.The TiN coated material has the hardness height, and frictional coefficient is little, good wear resistance and corrosion stability, and its appearance has realized the revolution of tool and mould industry.Yet, individual layer TiN exist have only medium hardness (being lower than 25GPa), fragility greatly, the not shock-resistant and not high shortcoming of oxidation resistance temperature.Along with mechanical workout to more at a high speed and serialization production and the extreme environment increase of the tool and mould demand of use down, people are to the demands for higher performance of tool and mould coating, as higher coating hardness, toughness and friction resistant, polishing machine, corrosion resistance nature, coating and layer-substrate interface binding performance etc.Therefore TiAlN, AlTiN, AlCrN, TiSiN, CrN, A1 have appearred
2O
3Deng wear-resistant coating, also has MoS
2, various slip coatings such as DLC, WC/C, and new coating structure such as gradient cladding, nano-composite coating greatly improves the performance of coating.Composite multilayer membrane, nano composite multiple layer film become the important directions of present superhard coating technical development.These coatings not only are applied to cutting tool, die industry, also obtain application to a certain degree in the structural part field.China has developed relevant PVD equipment and technology at the late nineteen eighties in last century, mainly is used in the decoration industry aspect at present, and instrument and structural part industry have also obtained certain application.
At present in the world the PVD technology oneself develop into and can carry out titanium carbonitride (TiCN), titanium nitride (TiAlN) and the more high performance plated film of quasi-diamond (DLC) geometric ratio TiN.For example the MZR-373 and the MZR-323 type cathode arc target vacuum plating stove of the production of MetaPlas Ionon company are mainly produced TiAlN individual layer plated film; The CC8OO/9 type magnetron sputtering target vacuum plating stove that Germany CemeCon company produces can be produced diamond and other multiple individual layer plated films.State-of-the-art plated film is " super nitride-AlTiN " individual layer plated film in tool industry at present, and its performance is better than TiAlN coating.CemeCon company oneself through multilayer film coating product is arranged, but only be outside TiAlN coating, to plate one deck A1 again
2O
3, form so-called TIALNOX " shell ", improved the hardness and the structure of TiAlN plated film.Add the Al element and form TiAlN in the TiN coating, performance is greatly improved, and being oxidation resistance temperature is the most significantly brought up to more than 800 ℃ by 600 ℃ of TiN.Good characteristic such as the TiAlN coating has hardness height, oxidizing temperature height, thermohardening is good, frictional coefficient is little and thermal conductivity is low progressively becomes the equivalent material of TiN coating.But the bonding force between TiAlN coating and the body material still can not be satisfactory at present, thereby cause the TiAlN coating on the film-coating workpiece easily to be peeled off, and wears no resistance, and the life-span is low.Present domestic minority tools factory oneself through import new vacuum plating stove carry out plated film productions such as TiAlN, but because of the equipment price costliness, application is restricted.Also have some foreign enterprises to establish the plated film business such as TiAlN that cutter is carried out at the plated film center at home, but its scale is still little." novel pulse PCVD die surface strengthening equipment and the technology " of reporting Shanghai Communications University, Xi'an and BJ University of Aeronautics ﹠ Astronautics's cooperative development arranged, can produce multilayer complex films, but not see the report that nanostructured multilayer film is arranged.
The CrN film is compared with TiN, its internal stress is low, good toughness, wear resistance are good, simultaneously it has the fine grained structure, bonding force is strong, chemical stability is high, good thermostability below 700 ℃, and have better corrosion resistance nature than TiN, at certain Application Areas CrN film potential replacement TiN and TiCN film.In addition, CrN film yield ratio is higher, helps large batch of industrial production, therefore has more practical significance.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned the deficiencies in the prior art, provides a kind of at a kind of coating structure that improves metallic matrix or alloy base hardness and corrosion resistance on the metal or metal alloy matrix especially on the matrix.Improved the bonding force of itself and matrix, incrust, and have higher hardness and good corrosion resistance.
In order to solve the problems of the technologies described above, the technical solution adopted in the utility model is as follows:
A kind of coating structure that improves alloy base hardness and corrosion resistance is characterized in that comprising from bottom to top a TiN film, CrN film, the 2nd TiN film and four layers of formation of TiAlN film on this matrix.
The utility model adopts multi-arc ion coating deposition techniques TiN/ (TiN+CrN)/TiAlN nano-composite coating, is 99.9% with metal Ti (purity is 99.95%), Cr(purity) and Al(purity be 99.995%) as target, N
2(purity is 99.995%) as reactant gases, Ar(purity is 99.995%) make sputter gas depositing TiN/(TiN+CrN)/TiAlN nano-composite coating.Sedimentary sequence is: with Ti target bombardment workpiece depositing TiN film, with Cr target bombardment workpiece deposition CrN film, again with Ti target bombardment workpiece depositing TiN film, at last with Al target bombardment workpiece depositing Ti AlN film.The thickness of the one TiN film and the 2nd TiN film is respectively 1～5 μ m.The thickness of CrN film is 1～10 μ m.The thickness of TiAlN film is 1～5 μ m., the thickness of whole TiN/ (TiN+CrN)/TiAlN nano-composite coating is 1-30 μ m.
With respect to prior art, the utlity model has following advantage:
(1) show at the metal or metal alloy matrix and be provided with two-layer TiN film that the one TiN film has effectively improved the bonding force of CrN and matrix, the 2nd TiN film has effectively improved the bonding force of TiAlN and CrN layer.
(2) because low, the good toughness of CrN film internal stress, wear resistance are good, simultaneously it has the fine grained structure, bonding force is strong, chemical stability is high, good thermostability below 700 ℃, adopt the CrN film to eliminate residualinternal stress, improve bonding force, wear resistance and corrosion resistance.
(3) owing between a TiN film is with TiAlN, accompany the 2nd TiN film and CrN film elimination residualinternal stress, improve shock resistance, avoided breaking in the use.
(4) owing to " nano effect ", the vickers hardness hv of coating 〉=2800.
Description of drawings
Fig. 1 is a kind of coating structure sectional view that improves alloy base hardness and corrosion resistance of the utility model.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described in further details; present embodiment is implemented under with the technical solutions of the utility model prerequisite; provided detailed embodiment and concrete operating process, but protection domain of the present utility model is not limited to following embodiment.
See also Fig. 1; as shown in the figure; a kind of coating structure that improves alloy base hardness and corrosion resistance, material be comprise on the alloy structure steel matrix 5 from bottom to top a TiN film 1 as prime coat, CrN film 2 as transition layer, the 2nd TiN film 3 and TiAlN film 4 for showing four layers of formation of protective layer.The thickness of a described TiN film and the 2nd TiN film is respectively 1～5 μ m.The thickness of described CrN film is 1～10 μ m.The thickness of described TiAlN film is 1～5 μ m.Structural alloy steel can be modified structure iron and surface hardening structure iron.
The coating structure method that preparation the utility model improves metallic matrix or alloy base hardness and corrosion resistance comprises the steps:
1. plate pre-treatment: at first select or preparation 25mm * 25mm * 3mm structural alloy steel substrate, polish to W04(04 step by step with abrasive paper for metallograph), polishing then, ultrasonic cleaning 10min is successively carried out in the polishing back in anhydrous propanone and dehydrated alcohol, go into the coating chamber vacuum chamber after the drying.
2. prepare before the plating: three metal targets are installed respectively: Ti(purity is 99.95%) target, Cr(purity be 99.9%) target and Al(purity is 99.995%) target, make between three targets to be hexagonal angle; Structural alloy steel substrate after will handling then is installed on sample bench, and compresses with slip-off preventing.
3. multi-arc ion coating membrane process:
(1) vacuum to 5 * 10 of finding time
-3Pa feeds argon gas to 8 * 10
-2Pa, matrix loads negative bias-800V, carries out argon gas sputter clean specimen surface 10min, is evacuated to 5 * 10 again
-3Pa;
(2) feed nitrogen to 6 * 10
-1Pa applies-the matrix negative bias of 400V for the structural alloy steel substrate.Heating 1min;
(3) feed nitrogen to 8 * 10
-1Pa applies-the matrix negative bias of 200V for the structural alloy steel substrate, opens the Ti target, and target current is 60A, and Alloy Constructional Steel substrate bombardment 140min realizes TiN film deposition, and the TiN layer thickness is 3 μ m;
(4) keep nitrogen 8 * 10
-1Pa atmosphere is closed the Ti target, opens the Cr target, and target current is 60A, and Alloy Constructional Steel substrate bombardment 230min realizes CrN film deposition, and the CrN layer thickness is 5 μ m;
(5) keep nitrogen 8 * 10
-1Pa atmosphere is closed the Cr target, opens the Ti target, and target current is 60A, and Alloy Constructional Steel substrate bombardment 90min realizes TiN film deposition, and the TiN layer thickness is 2 μ m;
(6) keep nitrogen 8 * 10
-1Pa atmosphere is closed the Ti target, opens the Al target, and target current is 70A, and Alloy Constructional Steel substrate bombardment 210min realizes TiAlN film deposition, and the TiAlN layer thickness is 5 μ m.
The results showed that the utility model TiN/ (TiN+CrN)/TiAlN nano-composite coating has improved the bonding force with matrix, and is easy to use, incrust, have higher hardness and good corrosion resistance, prolonged work-ing life.
Claims (5)
1. a coating structure that improves alloy base hardness and corrosion resistance is characterized in that comprising from bottom to top a TiN film, CrN film, the 2nd TiN film and four layers of formation of TiAlN film on this matrix.
2. a kind of coating structure that improves alloy base hardness and corrosion resistance according to claim 1 is characterized in that the thickness of a described TiN film and the 2nd TiN film is respectively 1～5 μ m.
3. a kind of coating structure that improves alloy base hardness and corrosion resistance according to claim 1, the thickness that it is characterized in that described CrN film are 1～10 μ m.
4. a kind of coating structure that improves alloy base hardness and corrosion resistance according to claim 1, the thickness that it is characterized in that described TiAlN film are 1～5 μ m.
5. a kind of coating structure that improves alloy base hardness and corrosion resistance according to claim 5 is characterized in that described alloy base is the alloy structure steel matrix.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200234453U CN201971890U (en) | 2011-01-25 | 2011-01-25 | Coating structure capable of improving hardness and corrosion resistance of metal alloy matrix |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011200234453U CN201971890U (en) | 2011-01-25 | 2011-01-25 | Coating structure capable of improving hardness and corrosion resistance of metal alloy matrix |
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| CN2011200234453U Expired - Fee Related CN201971890U (en) | 2011-01-25 | 2011-01-25 | Coating structure capable of improving hardness and corrosion resistance of metal alloy matrix |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102676991A (en) * | 2012-06-13 | 2012-09-19 | 东莞理工学院 | Process for preparing superhard nanocomposite laminated coating by PVD (plating vacuum deposition) technology |
| CN103707568A (en) * | 2012-10-04 | 2014-04-09 | 现代自动车株式会社 | Coating material for parts of engine exhaust system and method for manufacturing the same |
| CN103935076A (en) * | 2013-01-23 | 2014-07-23 | 深圳富泰宏精密工业有限公司 | Shell and manufacturing method thereof |
| CN105385999A (en) * | 2015-11-25 | 2016-03-09 | 哈尔滨工业大学 | Method for prolonging cycle service life of lens die steel |
-
2011
- 2011-01-25 CN CN2011200234453U patent/CN201971890U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102676991A (en) * | 2012-06-13 | 2012-09-19 | 东莞理工学院 | Process for preparing superhard nanocomposite laminated coating by PVD (plating vacuum deposition) technology |
| CN102676991B (en) * | 2012-06-13 | 2014-01-15 | 东莞理工学院 | Process for preparing superhard nanocomposite laminated coating by PVD (plating vacuum deposition) technology |
| CN103707568A (en) * | 2012-10-04 | 2014-04-09 | 现代自动车株式会社 | Coating material for parts of engine exhaust system and method for manufacturing the same |
| CN103707568B (en) * | 2012-10-04 | 2017-07-11 | 现代自动车株式会社 | For the coating material and its manufacture method of engine exhaust system part |
| CN103935076A (en) * | 2013-01-23 | 2014-07-23 | 深圳富泰宏精密工业有限公司 | Shell and manufacturing method thereof |
| CN103935076B (en) * | 2013-01-23 | 2018-04-20 | 深圳富泰宏精密工业有限公司 | Housing and preparation method thereof |
| CN105385999A (en) * | 2015-11-25 | 2016-03-09 | 哈尔滨工业大学 | Method for prolonging cycle service life of lens die steel |
| CN105385999B (en) * | 2015-11-25 | 2018-03-30 | 哈尔滨工业大学 | Extend the method for camera lens mould steel service life cycle |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110914 Termination date: 20190125 |