CN201954184U - Liquid return conduit - Google Patents
Liquid return conduit Download PDFInfo
- Publication number
- CN201954184U CN201954184U CN2010206298539U CN201020629853U CN201954184U CN 201954184 U CN201954184 U CN 201954184U CN 2010206298539 U CN2010206298539 U CN 2010206298539U CN 201020629853 U CN201020629853 U CN 201020629853U CN 201954184 U CN201954184 U CN 201954184U
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- CN
- China
- Prior art keywords
- hollow tube
- tube
- joint
- liquid
- liquid return
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model discloses a liquid return conduit including a gas buffer tank (7), a connecting tube (5) and a hollow pipe (2), wherein, a plurality of liquid feeding joint (3) are arranged on the hollow pipe (2), therefore, the liquid can be smoothly discharged and is free of splashing, and secondary pollution on silicon chips is prevented.
Description
Technical field
The utility model relates to semiconductor wet cleaning technique field, particularly a kind of liquid return tube.
Background technique
In the present semiconductor wet cleaning equipment, silicon chip is carried out that mode that cleaned cleaning solution all adopts deadweight to reflux reclaims or directly outside the device for transferring, its basic principle is for being arranged at the liquid return pipeline silicon chip puocessing module below, with a flexible pipe it is connected with the processing of wafers module, gravity by liquid self makes cleaning solution flow into reflow pipe, owing to do not consider that liquid flows into from top to bottom, can cause the moment compression to the gas in the reflow pipe, cause gas upwards to be gushed out, cause liquid splash, to the silicon chip secondary pollution.
The model utility content
(1) technical problem that will solve
The technical problems to be solved in the utility model is that liquid is discharged smoothly, does not produce liquid splash, avoids the silicon chip secondary pollution.
(2) technological scheme
For solving the problems of the technologies described above, the utility model provides a kind of liquid return tube, comprising: gas buffer jar, connecting tube and the hollow tube of Lian Jieing successively, described hollow tube is provided with some liquid inlet joint.
Wherein, described gas buffer jar bottom is provided with air input joint, and described hollow tube one end is provided with second exhaust joint, and described air input joint is communicated with by described connecting tube with described second exhaust joint.
Wherein, described gas buffer upper end is provided with first exhaust joint, and the described hollow tube the other end is provided with draining connector.
Wherein, described some liquid inlet joint are welded on the described hollow tube.
Wherein, described hollow tube is made by polypropylene or PVC.
(3) beneficial effect
The utility model can make liquid discharge smoothly by the cooperation of hollow tube and gas knock out drum, does not produce liquid splash, avoids the silicon chip secondary pollution.
Description of drawings
Fig. 1 is the structural representation according to a kind of mode of execution of liquid return tube of the present utility model.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples are used to illustrate the utility model, but are not used for limiting scope of the present utility model.
Fig. 1 is the structural representation according to a kind of mode of execution of liquid return tube of the present utility model, comprise: gas buffer jar 7 and the hollow tube 2 that is positioned at gas buffer jar 7 belows, gas buffer jar 7 is provided with the air input joint 6 and first exhaust joint 8, hollow tube 2 two ends are respectively equipped with draining connector 1, second exhaust joint 4, also be welded with some liquid inlet joint 3 of the pipeline that connects other small size liquid inflows on the hollow tube 2, second exhaust joint 4 is communicated with by connecting tube 5 with air input joint 6, for making hollow tube 2 welding back distortion minimum, these some liquid inlet joint 3 spread all over all directions of the periphery that is arranged at hollow tube 2, preferably, as shown in Figure 1, during hollow tube 2 horizontal positioned, liquid inlet joint 3 be arranged at hollow tube on, following both sides, comprise upside liquid inlet joint and downside liquid inlet joint, hollow tube 2 is made for etch-proof plastic material, as PP (polypropylene), PVC (Polyvinylchloride, PVC) etc., first exhaust joint 8 is connected with the exhaust system of cleaning equipment, upside liquid inlet joint and downside liquid inlet joint all with cleaning equipment on be used to receive cleaning solution flexible pipe be connected, draining connector 1 links to each other with the withdrawing fluid discharge conduit of cleaning equipment.
The working principle of aforesaid liquid reflow pipe is: when reclaiming cleaning solution, cleaning solution enters hollow tube 2 by flexible pipe from upside liquid inlet joint and downside liquid inlet joint, this moment, hollow tube 2 interior gas pressures increased, owing in the withdrawing fluid discharge conduit that draining connector 1 connects gas is arranged equally, and the cross-section area of gas buffer jar 7 is bigger, pressure is less, gas is fed in the gas buffer jar 7 through connecting tube 5 by hollow tube 2, cleaning solution enters the withdrawing fluid discharge conduit of described cleaning equipment from draining connector 1, and the gas in the gas buffer jar 7 can be discharged by the exhaust system on the cleaning equipment.When the cleaning solution recovery was finished, the gas pressure in the hollow tube 2 reduced, and gas can enter hollow tube 2 by hollow tube upside liquid inlet joint and downside liquid inlet joint, made gas pressure maintenance normal pressure in the hollow tube 2.
Above mode of execution only is used to illustrate the utility model; and be not to restriction of the present utility model; the those of ordinary skill in relevant technologies field; under the situation that does not break away from spirit and scope of the present utility model; can also make various variations and modification; therefore all technological schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (5)
1. a liquid return tube is characterized in that, comprising: the gas buffer jar (7) of Lian Jieing, connecting tube (5) and hollow tube (2) successively, described hollow tube (2) is provided with some liquid inlet joint (3).
2. liquid return tube as claimed in claim 1, it is characterized in that, described gas buffer jar (7) bottom is provided with air input joint (6), described hollow tube (2) one ends are provided with second exhaust joint (4), and described air input joint (6) is communicated with by described connecting tube (5) with described second exhaust joint (4).
3. liquid return tube as claimed in claim 2 is characterized in that, described gas buffer jar (7) top is provided with first exhaust joint (8), and described hollow tube (2) the other end is provided with draining connector (1).
4. as each described liquid return tube of claim 1-3, it is characterized in that described some liquid inlet joint (3) are welded on the described hollow tube (2).
5. as each described liquid return tube of claim 1-3, it is characterized in that described hollow tube (2) is made by polypropylene or PVC.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206298539U CN201954184U (en) | 2010-11-23 | 2010-11-23 | Liquid return conduit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206298539U CN201954184U (en) | 2010-11-23 | 2010-11-23 | Liquid return conduit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201954184U true CN201954184U (en) | 2011-08-31 |
Family
ID=44498294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206298539U Expired - Lifetime CN201954184U (en) | 2010-11-23 | 2010-11-23 | Liquid return conduit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201954184U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102847480A (en) * | 2012-09-19 | 2013-01-02 | 北京七星华创电子股份有限公司 | Chemical liquid mixing device and method |
-
2010
- 2010-11-23 CN CN2010206298539U patent/CN201954184U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102847480A (en) * | 2012-09-19 | 2013-01-02 | 北京七星华创电子股份有限公司 | Chemical liquid mixing device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100016, No. 1, Jiuxianqiao East Road, Beijing, Chaoyang District, building No. 2, M2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20170906 Address after: 101312 Beijing city Shunyi District Zhu Yuan three Street No. 6 (Tianzhu Free Trade Zone) Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO.,LTD. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
|
| TR01 | Transfer of patent right | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110831 |
|
| CX01 | Expiry of patent term |