CN201940383U - Oscillating arm type wafer sorting device - Google Patents

Oscillating arm type wafer sorting device Download PDF

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Publication number
CN201940383U
CN201940383U CN 201020618154 CN201020618154U CN201940383U CN 201940383 U CN201940383 U CN 201940383U CN 201020618154 CN201020618154 CN 201020618154 CN 201020618154 U CN201020618154 U CN 201020618154U CN 201940383 U CN201940383 U CN 201940383U
Authority
CN
China
Prior art keywords
oscillating arm
sucking
sorting device
swing arm
type wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 201020618154
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Chinese (zh)
Inventor
卢巍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHINTELE QUARTZ TECHNOLOGY Co Ltd
Original Assignee
CHINTELE QUARTZ TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHINTELE QUARTZ TECHNOLOGY Co Ltd filed Critical CHINTELE QUARTZ TECHNOLOGY Co Ltd
Priority to CN 201020618154 priority Critical patent/CN201940383U/en
Application granted granted Critical
Publication of CN201940383U publication Critical patent/CN201940383U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model provides an oscillating arm type wafer sorting device which comprises a loading table, material receiving tanks, a servo motor and a material-sucking oscillating arm, wherein the material-sucking oscillating arm is driven by the servo motor; and the oscillating arm type wafer sorting device is characterized in that the material receiving tanks are distributed on the rotating circumference of the material-sucking oscillating arm. In the oscillating arm type wafer sorting device, as the rotation of the material-sucking oscillating arm is controlled by the servo motor, and the material receiving tanks are distributed on the rotating circumference of the material-sucking oscillating arm, a detecting device only needs to transmit data of a detected wafer to a singlechip which outputs a corresponding control signal for the rotating angle of the servo motor, and the oscillating arm can put the wafer into a corresponding material receiving tank after sucking the wafer on the loading table and rotating a corresponding angle; therefore, the oscillating arm type wafer sorting device has the characteristics of simple structure and convenience for use.

Description

Swing arm wafer separation device
Technical field
The utility model relates to wafer inspection equipment, a kind of specifically swing arm wafer separation device.
Background technology
After wafer process is finished, need carry out sorting to the wafer of different thickness ranges, satisfy the needs of different user, it is very big manually to carry out the sorting work amount according to the result who detects.
The utility model content
The purpose of this utility model is at the problems referred to above, proposes a kind of swing arm wafer separation device simple in structure, easy to use.
The purpose of this utility model is achieved in that a kind of swing arm wafer separation device of the present utility model, it comprises feeding platform, blanking jar, servomotor and suction swing arm, the suction swing arm is driven by servomotor, it is characterized in that the blanking jar is distributed on the rotation circumference of suction swing arm.
Swing arm wafer separation device of the present utility model, because being servomotor control, the suction swing arm rotates, the blanking jar is distributed on the rotation circumference of suction swing arm, checkout gear is as long as be transported to single-chip microcomputer to the data of detected wafer, single-chip microcomputer is exported the angle control signal that corresponding servomotor rotates, and swing arm can be drawn the wafer on the feeding platform and be put into corresponding blanking jar after respective angles is rotated in the back.Therefore, the utlity model has characteristics simple in structure, easy to use.
Description of drawings
Fig. 1 is the structural representation of swing arm wafer separation device of the present utility model.
The specific embodiment
The utility model is described in further detail by embodiment below in conjunction with accompanying drawing:
As shown in Figure 1, a kind of swing arm wafer separation device of the present utility model, it comprises feeding platform 4, blanking jar 1, servomotor 3 and suction swing arm 2, and suction swing arm 2 is driven by servomotor 3, it is characterized in that blanking jar 1 is distributed on the rotation circumference of suction swing arm 2.

Claims (1)

1. swing arm wafer separation device, it comprises feeding platform (4), blanking jar (1), servomotor (3) and suction swing arm (2), suction swing arm (2) is driven by servomotor (3), it is characterized in that blanking jar (1) is distributed on the rotation circumference of suction swing arm (2).
CN 201020618154 2010-11-23 2010-11-23 Oscillating arm type wafer sorting device Expired - Fee Related CN201940383U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201020618154 CN201940383U (en) 2010-11-23 2010-11-23 Oscillating arm type wafer sorting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201020618154 CN201940383U (en) 2010-11-23 2010-11-23 Oscillating arm type wafer sorting device

Publications (1)

Publication Number Publication Date
CN201940383U true CN201940383U (en) 2011-08-24

Family

ID=44467734

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201020618154 Expired - Fee Related CN201940383U (en) 2010-11-23 2010-11-23 Oscillating arm type wafer sorting device

Country Status (1)

Country Link
CN (1) CN201940383U (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103071630A (en) * 2013-02-01 2013-05-01 浙江大学台州研究院 Quartz wafer frequency sorting machine and sorting method
CN103721954A (en) * 2012-10-10 2014-04-16 旺矽科技股份有限公司 Element material-distributing method and material-distributing device using element material-distributing method
CN104826803A (en) * 2014-02-12 2015-08-12 旺矽科技股份有限公司 Sorting machine and operation method thereof
CN105772409A (en) * 2016-05-17 2016-07-20 上海畅潇实业有限公司 52-grade biological reagent centrifuge tube automatic bar code-reading sorting equipment
CN107433263A (en) * 2016-05-25 2017-12-05 山东新北洋信息技术股份有限公司 Sorting unit and intelligent sorting equipment
CN107649398A (en) * 2016-07-25 2018-02-02 山东新北洋信息技术股份有限公司 Sorting device sorts the method and device of express mail

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103721954A (en) * 2012-10-10 2014-04-16 旺矽科技股份有限公司 Element material-distributing method and material-distributing device using element material-distributing method
CN103721954B (en) * 2012-10-10 2016-12-21 旺矽科技股份有限公司 Element distribution method and the feeding-distribution device of use the method
CN103071630A (en) * 2013-02-01 2013-05-01 浙江大学台州研究院 Quartz wafer frequency sorting machine and sorting method
CN104826803A (en) * 2014-02-12 2015-08-12 旺矽科技股份有限公司 Sorting machine and operation method thereof
CN105772409A (en) * 2016-05-17 2016-07-20 上海畅潇实业有限公司 52-grade biological reagent centrifuge tube automatic bar code-reading sorting equipment
CN107433263A (en) * 2016-05-25 2017-12-05 山东新北洋信息技术股份有限公司 Sorting unit and intelligent sorting equipment
CN107649398A (en) * 2016-07-25 2018-02-02 山东新北洋信息技术股份有限公司 Sorting device sorts the method and device of express mail
CN107649398B (en) * 2016-07-25 2019-08-02 山东新北洋信息技术股份有限公司 The method and device of sorting device sorting express mail

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110824

Termination date: 20121123