CN201925165U - Shaft seal structure for vacuum pump - Google Patents

Shaft seal structure for vacuum pump Download PDF

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Publication number
CN201925165U
CN201925165U CN2011200562231U CN201120056223U CN201925165U CN 201925165 U CN201925165 U CN 201925165U CN 2011200562231 U CN2011200562231 U CN 2011200562231U CN 201120056223 U CN201120056223 U CN 201120056223U CN 201925165 U CN201925165 U CN 201925165U
Authority
CN
China
Prior art keywords
oil sealing
oil seal
cover
vacuum pump
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011200562231U
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Chinese (zh)
Inventor
张振厚
王光玉
秦柏林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sky Technology Development Co Ltd
Original Assignee
Shenyang Scientific Instrument R&D Center of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Scientific Instrument R&D Center of CAS filed Critical Shenyang Scientific Instrument R&D Center of CAS
Priority to CN2011200562231U priority Critical patent/CN201925165U/en
Application granted granted Critical
Publication of CN201925165U publication Critical patent/CN201925165U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a vacuum pump unit, in particular to a shaft seal structure for a vacuum pump. The shaft seal structure comprises a bearing oil seal outer ring, an oil seal, an oil seal cover, an outer oil seal sleeve and an inner oil seal sleeve, wherein the bearing oil seal outer ring, the outer oil seal sleeve and the inner oil seal sleeve are sequentially arranged between a casing and a shaft of the vacuum pump, the oil seal is a double oil seal including a first oil seal and a second oil seal, the first oil seal is arranged between the bearing oil seal outer ring and the inner oil seal sleeve, the second oil seal is arranged between the outer oil seal sleeve and the inner oil seal sleeve, and the oil seal cover connected with the outer oil seal sleeve in a matching manner is further arranged between the bearing oil seal outer ring and the inner oil seal sleeve. The shaft seal structure for the vacuum pump solves the problem of leakage of an existing shaft sleeve thoroughly and is compact in structure, position of a bearing can be adjusted freely so as to be favorable for adjustment of positions of rotors in the vacuum pump during assembly, and the shaft seal structure is great significant in guaranteeing clearance among the rotors effectively, improving extraction performance of the pump and increasing limit vacuum degree.

Description

The vacuum pump shaft seal structure
Technical field
The utility model relates to the vacuum pump set, specifically a kind of vacuum pump shaft seal structure.
Background technique
Homemade vacuum pump is through vicennial fast development, and its main performance index (as pumping speed, ultimate pressure, energy consumption, zero delivery compression ratio, pressure reduction) all reaches or approaching external advanced level; But still gap is bigger for pump operation stability, operational safety and external advanced pump, and wherein crucial a bit is exactly sealing technique.Oil sealing is a kind of accurate rubber part of high technology content, and it is by the contact leakage that prevent bearing oil of flexible rubber sealing lip with axle.Early stage oil sealing is to form with the leather typing, oil sealing use amount with synthetic rubber production after the World War II increases gradually, particularly near twenty or thirty is over year, because the develop rapidly of industry such as machine-building, vehicle, Aeronautics and Astronautics, oil sealing high-low temperature resistant, high pressure resistant, anti-special media have been proposed, the requirement of a series of harshnesses such as adapting to high speed, shake and increase the service life, thereby researchs extensively and profoundly such as oil sealing material, structure, performance test, quality control method and sealing mechanism have been promoted, the sealability and the working life of having improved oil sealing greatly.Succeeded in developing hydrodynamic seal the beginning of the sixties abroad, more made the technology of oil sealing that big leap has been arranged, made the sealing problem at some very difficult sealing positions obtain solution with backflow effeet.The eighties, the U.S. produced teflon seal again, and it is not only applicable to ultra high speed, and high-low temperature resistant, anti-multiple Korrosionsmedium, and was applicable to the occasion of dry friction.The eighties oil sealing international standard issuing and implementation, more make oil sealing worldwide have versatility, interchangeability.Each country reformulates new NBS with reference to international standard one after another.
China is starting late aspect the oil sealing research, although considerable progress has been arranged in recent ten years, but compare with world level, on product structure design, rubber compounding technique, production technology, production equipment, Mould Machining, quality control method, also have very big gap.The production of China's oil sealing is distributed in the simpler and cruder small enterprise of condition mostly at present.The production technology and the equipment that fall behind, in addition inwardly to the high technology content and the enough understanding of high-accuracy property shortage of oil sealing, technically the complexity of performance requirement and the stringency of processes are underestimated, add the investment deficiency of fund, cause that China's oil sealing is of poor quality, sealability is unreliable, working life is short.The level of production of most of manufacturer only rests on the level in external five sixties.Most of high-performance oil sealing of China mainly depends on import.On existing basis, transform sealing configuration, the sealing of against vacuum pump, because dither and material cause wearing and tearing are very fast, phenomenons such as leakage of oil, gas leakage have crucial meaning.
The model utility content
In order to solve the problem that prior art axis envelope is revealed, the purpose of this utility model is to provide a kind of vacuum pump shaft seal structure.This shaft seal structure can guarantee that lubricant oil does not enter in the vacuum chamber in the bearing bore, avoids polluting vacuum chamber.
The purpose of this utility model is achieved through the following technical solutions:
The utility model comprises cover in bearing enclosure outer shroud, oil sealing, oil sealing cover, oil sealing overcoat and the oil sealing, and wherein cover is located between the housing and axle of vacuum pump successively in bearing enclosure outer shroud, oil sealing overcoat and the oil sealing; Described oil sealing is dual oil sealing, comprises first oil sealing and second oil sealing, between first oil sealing overlaps in bearing enclosure outer shroud and oil sealing, between second oil sealing overlaps in oil sealing overcoat and oil sealing; In bearing enclosure outer shroud and oil sealing, also be provided with the oil sealing cover that is connected with the oil sealing overcoat between the cover.
Wherein: the side that described bearing enclosure outer shroud is positioned at bearing bore has groove, is equipped with the bearing that is set on the axle in the groove; Fitting surface in described first oil sealing and the oil sealing between the cover is provided with the glossy synovial membrane that reduces to reveal, and the surface of cover is the surface of handling through nitriding in this oil sealing; One end and the oil sealing cover of described oil sealing overcoat are connected, and the other end connects with the hole card that is embedded on the bearing enclosure outer shroud inwall; Have square type thread groove on the circumferential surface vertically in oil sealing overcoat and cooperating of oil sealing cover; Cover can axially moving back and forth along axle in described oil sealing cover and the oil sealing; Between described second oil sealing and the oil sealing overcoat, between first oil sealing and the bearing enclosure outer shroud, in oil sealing cover and the oil sealing between the cover, be interference fit between oil sealing overcoat and the bearing enclosure outer shroud; Be equipped with the O RunddichtringO that carries out static seal between cover and the axle and between bearing enclosure outer shroud and the housing in the described oil sealing.
Advantage of the present utility model and good effect are:
1. the utility model has thoroughly solved axle envelope leakage problem, compact structure can the free adjustment position of bearings, helps the adjustment of vacuum pump assembling rotor position, to gap between effective assurance rotor, the pumping performance and the ultimate vacuum that improve pump play very important function.
2. the utility model adopts dual oil sealing sealing and class labyrinth seal to carry out motive sealing, and 0 RunddichtringO carries out static seal, and motive sealing combines with static seal, adopts multi-sealed form, thoroughly solves pump oil seepage problem.
3. the utility model can guarantee that lubricant oil does not enter in the vacuum chamber in the bearing bore, avoids polluting vacuum chamber; Oil sealing and bearing are combined, and small and exquisite easy for installation, cost is low flexibly, is fit to produce in batches.
Description of drawings
Fig. 1 is a structural front view of the present utility model;
Fig. 2 is the A-A sectional view of Fig. 1;
Wherein: 1 is axle, and 2 is bearing, and 3 are the bearing enclosure outer shroud, and 4 is first oil sealing, and 5 is the oil sealing cover, and 6 is second oil sealing, and 7 is the oil sealing overcoat, and 8 is cover in the oil sealing, and 9 is the hole card, and 10 is housing, and 11 is the O RunddichtringO.
Embodiment
The utility model is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, the utility model adopts dual oil sealing sealing and class labyrinth seal to carry out motive sealing, adopts the O RunddichtringO to carry out static seal, thereby guarantees that the thorough shielding of lubricant oil quilt is outside vacuum chamber in the bearing bore.Concrete structure is:
Vacuum pump shaft seal structure of the present utility model, comprise cover 8 in bearing enclosure outer shroud 3, first oil sealing 4, oil sealing cover 5, second oil sealing 6, oil sealing overcoat 7 and the oil sealing, between the housing 10 of vacuum pump and axle 1, by housing 10, be provided with successively in bearing enclosure outer shroud 3, oil sealing overcoat 7 and the oil sealing and overlap 8 to the direction of axle 1, wherein bearing enclosure outer shroud 3 side that is positioned at the bearing bore high voltage terminal has groove, be equipped with the bearing 2 that is set on the axle 1 in the groove, lubricant oil in the bearing bore can sufficient lubrication bearing 2, and this bearing 2 is a roller bearing NU210E type; Bearing enclosure outer shroud 3 is positioned on the inwall of a side of high vacuum low voltage terminal and inlays porose card 9.
First oil sealing 4 overlaps 8 in bearing enclosure outer shroud 3 and oil sealing between, in the inboard of bearing 2, the fitting surface in first oil sealing 4 and the oil sealing between the cover 8 is provided with the glossy synovial membrane of one deck, can effectively reduce leakage, and handle through nitriding on the surface of cover 8 in the oil sealing.Between first oil sealing 4 and hole card 9, be respectively equipped with oil sealing cover 5 and oil sealing overcoat 7, oil sealing cover 5 and oil sealing overcoat 7 are set in respectively and overlap on 8 in the oil sealing, one end and the oil sealing cover 5 of oil sealing overcoat 7 are connected, and the other end and hole card 9 butts prevent that by hole card 9 oil sealing overcoat 7 from coming off; Between end that oil sealing overcoat 7 matches with oil sealing cover 5 and oil sealing inner chamber 8, be provided with second oil sealing 6.Oil sealing overcoat 7 has square type thread groove vertically with cooperating of oil sealing cover 5 on the circumferential surface, effectively carry out the sealing of seepage gas.Cover 12 can be along axially the moving back and forth of axle 1 in oil sealing cover 5 and the oil sealing, and then adjust bearing 2 position gap.
Between second oil sealing 6 of the present utility model and the oil sealing overcoat 7, between first oil sealing 4 and the bearing enclosure outer shroud 3, in oil sealing cover 5 and the oil sealing between the cover 8, be interference fit between oil sealing overcoat 7 and the bearing enclosure outer shroud 3; Be equipped with the O RunddichtringO 11 that carries out static seal between cover 12 and the axle 1 and between bearing enclosure outer shroud 3 and the housing 10 in the oil sealing.
Working principle of the present utility model is:
As shown in Figure 2, the left side of bearing 2 (bearing side) is high voltage terminal, and the right side of bearing 2 (high vacuum one side) is low voltage terminal; During use, the utility model shaft seal structure as in the vacuum pump housing 10, and is adopted the sealing of O type circle between the housing 10, compact structure lumps together bearing lubrication and pump housing sealed junction, is convenient to assembling and setting, can thoroughly solve pump oil leakage problem.

Claims (7)

1. vacuum pump shaft seal structure, it is characterized in that: comprise cover (8) in bearing enclosure outer shroud (3), oil sealing, oil sealing cover (5), oil sealing overcoat (7) and the oil sealing, wherein cover (8) is located between the housing (10) and axle (1) of vacuum pump successively in bearing enclosure outer shroud (3), oil sealing overcoat (7) and the oil sealing; Described oil sealing is dual oil sealing, comprises first oil sealing (4) and second oil sealing (6), and first oil sealing (4) is positioned between bearing enclosure outer shroud (3) and the oil sealing cover (8), and second oil sealing (6) is positioned between oil sealing overcoat (7) and the oil sealing cover (8); In bearing enclosure outer shroud (3) and oil sealing, also be provided with the oil sealing cover (5) that is connected with oil sealing overcoat (7) between the cover (8).
2. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: the side that described bearing enclosure outer shroud (3) is positioned at bearing bore has groove, is equipped with the bearing (2) that is set on the axle (1) in the groove.
3. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: the fitting surface in described first oil sealing (4) and the oil sealing between the cover (8) is provided with the glossy synovial membrane that reduces to reveal, and the surface of cover (8) is the surface of handling through nitriding in this oil sealing.
4. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: an end of described oil sealing overcoat (7) and oil sealing cover (5) are connected, and the other end connects with the hole card (9) that is embedded on bearing enclosure outer shroud (3) inwall; Have square type thread groove on the circumferential surface vertically in oil sealing overcoat (7) and cooperating of oil sealing cover (5).
5. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: cover (12) can axially moving back and forth along axle (1) in described oil sealing cover (5) and the oil sealing.
6. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: between described second oil sealing (6) and the oil sealing overcoat (7), between first oil sealing (4) and the bearing enclosure outer shroud (3), oil sealing cover (5) and oil sealing interiorly overlap between (8), be interference fit between oil sealing overcoat (7) and the bearing enclosure outer shroud (3).
7. by the described vacuum pump shaft seal structure of claim 1, it is characterized in that: be equipped with the O RunddichtringO (11) that carries out static seal between cover (12) and the axle (1) and between bearing enclosure outer shroud (3) and the housing (10) in the described oil sealing.
CN2011200562231U 2011-03-04 2011-03-04 Shaft seal structure for vacuum pump Expired - Fee Related CN201925165U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011200562231U CN201925165U (en) 2011-03-04 2011-03-04 Shaft seal structure for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011200562231U CN201925165U (en) 2011-03-04 2011-03-04 Shaft seal structure for vacuum pump

Publications (1)

Publication Number Publication Date
CN201925165U true CN201925165U (en) 2011-08-10

Family

ID=44429016

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011200562231U Expired - Fee Related CN201925165U (en) 2011-03-04 2011-03-04 Shaft seal structure for vacuum pump

Country Status (1)

Country Link
CN (1) CN201925165U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102654127A (en) * 2011-03-04 2012-09-05 中国科学院沈阳科学仪器研制中心有限公司 Shaft sealing structure for vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102654127A (en) * 2011-03-04 2012-09-05 中国科学院沈阳科学仪器研制中心有限公司 Shaft sealing structure for vacuum pump

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110810

Termination date: 20160304

CF01 Termination of patent right due to non-payment of annual fee