CN201924071U - Directly water-cooled powder-sintering multielement alloy coating target - Google Patents
Directly water-cooled powder-sintering multielement alloy coating target Download PDFInfo
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- CN201924071U CN201924071U CN2010206893801U CN201020689380U CN201924071U CN 201924071 U CN201924071 U CN 201924071U CN 2010206893801 U CN2010206893801 U CN 2010206893801U CN 201020689380 U CN201020689380 U CN 201020689380U CN 201924071 U CN201924071 U CN 201924071U
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Abstract
The utility model provides a directly water-cooled powder-sintering multielement alloy coating target, which aims to solve the problem that a powder-sintering target material can only be indirectly water-cooled as water leakage is caused by internal micro gaps. The coating target is characterized in that a metal rolled target base is compounded below a target block; and during manufacturing, the base and the target material are sintered together through red copper soldering flux in a vacuum sintering furnace. The coating target has the benefits that the waterproof target material base is arranged on the bottom surface of the alloy target material, so as to be directly water-cooled, which can improve the cooling effect and the filming quality; and about 1/3 of valuable multielement powdered metal materials can be saved, so that the target material manufacturing cost is reduced.
Description
Technical field
The utility model relates to a kind of vacuum ion plating, but is that direct water-cooling a kind of has composite structure powder sintered multicomponent alloy plated film target and manufacture method thereof specifically.
Background technology
In present vacuum ionic coating technology, a lot of retes need be coated with multicomponent alloy plated film target.General technology of making the plated film target is as shown in Figure 1, the required metal powder 5 of this target will be made, as two or more the powder in titanium Ti powder, aluminium Al powder, the chromium Cr powder, proportioning is mixed into alloy powder on request, the graphite jig 4 of packing into, put between the pressure assembly 6,7 of vacuum sintering furnace 1, be evacuated to 1 * 10 earlier
-2~ 1 * 10
-3Pa, again graphite jig is pressurizeed, heat by well heater 2, after being heated to 1250-1300 ℃, insulation also continues pressurization 2-3 hour, cooling then, the vacuum chamber inflation is taken out mould, with the solid-state target demoulding that sinters, according to drawing solid-state target is carried out mechanical workout, as the target that is placed on the vacuum ion plating arc source.The 3rd, thermopair.
The target of above-mentioned multicomponent alloy coating all must be made of this powder sintered method.There is fine voids in its inside of powder sintered target, and this microcosmic slit can leak, so the metallurgical target of integrated powder can not direct water-cooling, can only adopt the mode of indirect water-cooling.All there is a gap usually in the mode of indirect water-cooling between target and water-cooling subbase.
And according to the characteristic of coating, the target cooling is good more, and surface temperature is low more, and the big drop that electric arc splashes is just few more, and the film quality of coating is just good more, and the gap of the structure of indirect water-cooling can reduce cooling performance, thereby influences quality of forming film.
Summary of the invention
For solving the problems of the technologies described above, the purpose of this utility model is to provide a kind of powder sintered multicomponent alloy plated film target and manufacture method thereof of direct water-cooling.
The purpose of this utility model is achieved in that the alloy target material piece (to call the target piece in the following text) that comprises powder metallurgy, it is characterized in that: a compound metal rolled target base (to call target stand in the following text) below the target piece, there is threaded hole at the center of outside at the bottom of target stand.
Manufacture method of the present utility model is:
(1), the target raw material is promptly packed in the graphite jig through two or more the metal powder material that mixes;
(2), graphite jig is placed in the middle of the pressure assembly of vacuum sintering furnace, to mould pressurization, heating, insulation;
(3), after the cooling, the entire target piece blank that sinters is taken out from mould, this target piece blank is cut into several target pieces of desired thickness with line cutting technology, and with top, the following polishing of each target piece, polish, become the target piece;
(4), metal rolled target stand is pond shape, puts into red copper spelter solder and a target piece in the pond of target stand successively, promptly the red copper spelter solder is placed between target piece and the target stand, becomes the plated film target before the hot pressing;
(5), the plated film target before several hot pressing is stacked, be placed in the middle of the pressure assembly in the vacuum sintering furnace brazier, vacuumize post-heating, pressurization, heating, insulation to 800-1100 ℃; At this moment, target stand and target piece closely stick together by scolder, become as a whole, and between two plated film targets because there is not scolder, still keep separate stage.Cooling charges into gas in the sintering oven then, and several plated film target blanks are taken out;
(6), each plated film target blank is carried out mechanical workout, specifically: process the arc source connection threaded hole that is used for fixing on water cooling plant at the center of outside at the bottom of the target stand, cooperate with the bolt of the arc source mount pad of vacuum ion plating, use but be installed on the arc source of direct water-cooling structure; On the target piece, be machined for the working face of plated film ionization; The pool side of target stand is machined away, make target stand consistent, become plated film target finished product with the outward flange of target piece.
Compared with prior art, the beneficial effects of the utility model are: owing to be provided with fluid-tight target stand below the target piece, can be directly the base of plated film target be carried out water-cooled, improved cooling performance and cooling efficiency, also improved quality of forming film; Next saves about 1/3 valuable powder metallic substance; Solved the bad problem of thermal conductivity between water-cooling subbase and the target piece at last.
Description of drawings
Further specify the utility model below in conjunction with accompanying drawing.
Fig. 1 is the synoptic diagram at vacuum sintering furnace sintering target piece blank.
Fig. 2 is the synoptic diagram that target piece blank is cut into several target pieces.
Fig. 3 is a synoptic diagram of putting into scolder and target piece in target stand successively.
Fig. 4 stacks the plated film target before several hot pressing to be placed in agglomerating synoptic diagram in the vacuum sintering furnace brazier.
Fig. 5 is the synoptic diagram of the product that provides of the utility model.
Embodiment
Making method of the present utility model is:
(1), the target raw material is promptly even by required mixed through two or more the metal powder 5 that mixes, 4 li of the graphite jigs of packing into.
(2), graphite jig is placed between the pressure assembly 6,7 of vacuum sintering furnace, to the mould pressurization, and to the vacuum sintering stove evacuation, behind the specified vacuum degree, between 1250-1500 ℃, concrete sintering temperature will be chosen according to the composition and the ratio of metal-powder to mold heated.To mould under the vacuum state, pressurize, be incubated 2-3 hour after, powder forms solid boule 5, referring to Fig. 1.
(3), mould is taken out after the cooling, and to take out solid boule from mould be target blank 5, and blank is carried out mechanical workout or line cutting processing, makes several target pieces 8 of desired height, and with two surface grindings up and down of each target piece, polish, referring to Fig. 2.
(4), the target stand 10 of stainless steel or No. 45 steel rollings is pond shape, puts into red copper spelter solder 9 and a target piece 8 in the pond of target stand successively, promptly the red copper spelter solder is placed between target piece and the target stand, becomes the plated film target before the hot pressing, referring to Fig. 3.
(5), the plated film target before several hot pressing is stacked, be placed in the middle of the pressure assembly in the vacuum sintering furnace brazier, referring to Fig. 4, be evacuated to 1-2pa pressure after, be heated to 800-1100 ℃, be incubated 5-10 minute; At this moment, target stand and target piece closely stick together by scolder, become as a whole, and between two plated film targets because there is not scolder, still keep separate stage.Cooling charges into gas in the sintering oven then, and several plated film target blanks are taken out.
(6), referring to Fig. 5, each plated film target blank is carried out mechanical workout, specifically: the arc source that is used for fixing on water cooling plant in the processing of the center of circle of outside at the bottom of the target stand connects with threaded hole 13, is machined for the cooling surface 12 that is fixed on direct contact water on the water cooling plant in outside at the bottom of the target stand; On the target piece, be machined for the working face 14 of plated film ionization; The pool side of target stand is machined away, make target stand consistent with the outward flange of target piece; Become plated film target finished product.
Above-mentioned sintering target blank and making plated film target blank use a vacuum sintering furnace.
Claims (2)
1. the powder sintered multicomponent alloy plated film target of a direct water-cooling comprises the alloys target piece of powder metallurgy, and it is characterized in that: a compound metal rolled target stand below the target piece, there is threaded hole at the center of outside at the bottom of target stand.
2. according to the powder sintered multicomponent alloy plated film target of the described direct water-cooling of claim 1, it is characterized in that: there is the working face of direct contact cooling water the outside at the bottom of target stand.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206893801U CN201924071U (en) | 2010-12-30 | 2010-12-30 | Directly water-cooled powder-sintering multielement alloy coating target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206893801U CN201924071U (en) | 2010-12-30 | 2010-12-30 | Directly water-cooled powder-sintering multielement alloy coating target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201924071U true CN201924071U (en) | 2011-08-10 |
Family
ID=44427935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206893801U Expired - Fee Related CN201924071U (en) | 2010-12-30 | 2010-12-30 | Directly water-cooled powder-sintering multielement alloy coating target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201924071U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102094175A (en) * | 2010-12-30 | 2011-06-15 | 沈阳金锋特种刀具有限公司 | Powder sintering multicomponent alloy coated target adopting direct water cooling and preparation method thereof |
-
2010
- 2010-12-30 CN CN2010206893801U patent/CN201924071U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102094175A (en) * | 2010-12-30 | 2011-06-15 | 沈阳金锋特种刀具有限公司 | Powder sintering multicomponent alloy coated target adopting direct water cooling and preparation method thereof |
| CN102094175B (en) * | 2010-12-30 | 2012-11-21 | 沈阳金锋特种刀具有限公司 | Powder sintering multicomponent alloy coated target adopting direct water cooling and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110810 Termination date: 20151230 |
|
| EXPY | Termination of patent right or utility model |