CN201923951U - Matrix-arrangement type chemical etching device for quartz pendulous sheets - Google Patents
Matrix-arrangement type chemical etching device for quartz pendulous sheets Download PDFInfo
- Publication number
- CN201923951U CN201923951U CN2010205981754U CN201020598175U CN201923951U CN 201923951 U CN201923951 U CN 201923951U CN 2010205981754 U CN2010205981754 U CN 2010205981754U CN 201020598175 U CN201020598175 U CN 201020598175U CN 201923951 U CN201923951 U CN 201923951U
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- CN
- China
- Prior art keywords
- chemical corrosion
- quartz pendulous
- disposed
- pendulous reed
- anchor clamps
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a matrix-arrangement type chemical etching device for quartz pendulous sheets. An air area and an electrical area are disposed on the upper portion of a device body, a folding door is disposed on the side of the electrical area, a chemical etch tank body is arranged on the lower portion of the device body, a rotating spindle is disposed inside chemical etch tank body and connected with the bottom of a chemical etch tank shell via a bearing, an air compression system pipeline is arranged at the bottom of the chemical etch tank shell, a transparent glass cover is disposed at the upper end of the chemical etch tank shell, the lower end of the rotating spindle is connected with a stepping motor, a frame is disposed on the upper portion of the rotating spindle and provided with a flower basket, a clamp is disposed at the bottom of the flower basket and consists of a compression nut, a quartz pendulous sheet, a clamp body and two protecting films, the two protecting films are adhered to the front surface and the back surface of the quartz pendulous sheet, and the quartz pendulous sheet together with the protecting films is placed into the clamp body. The matrix-arrangement type chemical etching device realizes complete homogenization of mixture of acid liquids of different components, is fine in scattering effect, and can solve the problem of treatment precision errors of products of the same batch due to inhomogeneous mixture of etchant liquor during chemical etching production.
Description
Technical field
The utility model relates to the chemical corrosion device, relates in particular to a kind of quartz pendulous reed matrix array type chemical corrosion device.
Background technology
Quartz pendulous reed is the core parts of quartz flexible accelerometer, and the quartz pendulous reed flexible bridges needs accurately corrosion.For a long time, there are problems such as chemical reaction field, temperature field be inhomogeneous in the process of chemical corrosion, causes with a collection of corrosive accessory size inconsistently, influences the performance of product.
In the chemical corrosion process, the acid solution of several compositions is mixed by mechanical stirring at present, because stirring is insufficient, reacting field gradient inequality causes the speed of same batch products processing accurately to control.Etchant solution is flowed and location of workpiece conversion by the gaily decorated basket in the revolving reaction groove, input pressurized air, can make the liquid mixing of different densities, different components even, for a long time, continuously, stable, work reliably, the time of same batch products required chemical reaction in the chemical corrosion course of processing can effectively be controlled.Simultaneously, compressed-air actuated agitaion also can be peeled off cleaning to the throw out of corrosive fluid and the generation of processing work chemical reaction.
Summary of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art, and a kind of quartz pendulous reed matrix array type chemical corrosion device is provided.
Quartz pendulous reed matrix array type chemical corrosion device comprises exhausting district, electric district, accordion door, transparent glass cover, chemical corrosion slot shell, stepper-motor, pneupress system pipeline, bearing, shelf, anchor clamps, live spindle, the gaily decorated basket, chemical corrosion groove cell body, anchor clamps lid, quartz pendulous reed, clamping fixture seat, protective membrane; Device body top is provided with wind district and electric district; electric district side is provided with accordion door; the device body bottom is provided with the chemical corrosion groove cell body; be provided with live spindle in the chemical corrosion groove cell body; live spindle links to each other with the chemical corrosion groove housing bottom by bearing; the chemical corrosion groove housing bottom is provided with the pneupress system pipeline; chemical corrosion slot shell upper end is provided with transparent glass cover; the live spindle lower end links to each other with stepper-motor; live spindle top is provided with shelf; shelf is provided with the gaily decorated basket; gaily decorated basket bottom is provided with anchor clamps, and anchor clamps are by hold-down nut; quartz pendulous reed; clamp body and two protective membranes are formed, and two protective membranes are attached on the positive and negative surface of quartz pendulous reed; put into clamp body, compress quartz pendulous reed and two protective membranes with hold-down nut.
The utility model homogenizes the acid solution blended of different components fully, and dispersion effect is good, can solve same batch products in chemical corrosion is produced because etchant solution mixes the uneven working accuracy error that causes.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is a matrix array type chemical corrosion apparatus structure front view;
Fig. 2 is a matrix array type chemical corrosion apparatus structure side-view;
Fig. 3 is a chemical corrosion trough body structure front view of the present utility model;
Fig. 4 is a chemical corrosion trough body structure vertical view of the present utility model;
Fig. 5 is a chemical corrosion trough body structure right view of the present utility model;
Fig. 6 is a chemical corrosion anchor clamps synoptic diagram of the present utility model;
Fig. 7 (a) is the original station synoptic diagram of quartz pendulous reed of the present utility model;
Fig. 7 (b) is that quartz pendulous reed of the present utility model revolves and turn 90 degrees the station synoptic diagram;
Fig. 7 (c) is a quartz pendulous reed Rotate 180 degree station synoptic diagram of the present utility model;
Fig. 7 (d) is quartz pendulous reed rotation 270 degree station synoptic diagram of the present utility model;
Among the figure, exhausting district 1, electric district 2, accordion door 3, transparent glass cover 4, chemical corrosion cell body 5, stepper-motor 6, pneupress system pipeline 7, bearing 8, shelf 9, anchor clamps 10, live spindle 11, the gaily decorated basket 12, chemical corrosion groove cell body 13, anchor clamps lid 14, quartz pendulous reed 15, clamping fixture seat 16, protective membrane 17.
Embodiment
Quartz pendulous reed matrix array type chemical corrosion device comprises exhausting district 1, electric district 2, accordion door 3, transparent glass cover 4, chemical corrosion slot shell 5, stepper-motor 6, pneupress system pipeline 7, bearing 8, shelf 9, anchor clamps 10, live spindle 11, the gaily decorated basket 12, chemical corrosion groove cell body 13, anchor clamps lid 14, quartz pendulous reed 15, clamping fixture seat 16, protective membrane 17; Device body top is provided with wind district 1 and electric district 2; electric district 2 sides are provided with accordion door 3; the device body bottom is provided with chemical corrosion groove cell body 13; be provided with live spindle 11 in the chemical corrosion groove cell body 13; live spindle 11 links to each other with chemical corrosion slot shell 5 bottoms by bearing 8; chemical corrosion slot shell 5 bottoms are provided with pneupress system pipeline 7; chemical corrosion slot shell 5 upper ends are provided with transparent glass cover 4; live spindle 11 lower ends link to each other with stepper-motor 6; live spindle 11 tops are provided with shelf 9; shelf 9 is provided with the gaily decorated basket 12; the gaily decorated basket 12 bottoms are provided with anchor clamps 10, and anchor clamps 10 are by hold-down nut 14; quartz pendulous reed 15; clamp body 16 and two protective membranes 17 are formed, and two protective membranes 17 are attached on the quartz pendulous reed 15 positive and negative surfaces; put into clamp body 16, compress quartz pendulous reed 15 and two protective membranes 17 with hold-down nut 14.
The step of quartz pendulous reed matrix array type chemical corrosion method is as follows:
1) earlier two protective membranes 17 is attached on the quartz pendulous reed 15 positive and negative surfaces, puts into clamp body 16, compress quartz pendulous reed 15 and two protective membranes 17 with hold-down nut 14 again;
2) multiple etchant solution is poured in the chemical corrosion groove cell body 13, start stepper-motor 6 high speed rotating, etchant solution is mixed, start pneupress system, to groove 13 input pressurized air, make etchant solution be in unordered turbulent state by four compressed air apertures, after 10 minutes, etchant solution is stirred, and then, starts warming apparatus and makes etchant solution be warming up to 40-50 ℃.
Air compression system is made up of air compressor machine, pipeline, valve and shower nozzle etc.
Air compressor machine adopts two point form control (upper and lower limit control), just prescribes a time limit when the pressurized gas inner pressure of air cylinder reaches on the set(ting)value, and air compressor machine is closed intake valve by air pressure own or oil pressure, and mini air compressor is then shut down.Prescribe a time limit when pressure drops under the set(ting)value, air compressor machine is opened intake valve, and small-sized air compressor then starts again.
The etchant solution warming apparatus is made up of well heater, temperature sensor and Controlling System.Set etching process optimum temps T earlier
0, start warming apparatus and make etchant solution be warming up to T.If | T
0-T|>δ (δ is the temperature error permissible value of setting in advance), then warming apparatus works on etchant solution is heated up.If
| T
0-T|≤δ, then warming apparatus quits work.
3) anchor clamps 10 that will install quartz pendulous reed 15 are put into the elongate slots of Hua Lan 12, and are the arrangement of 4X4 matrix-style;
4) will fill the gaily decorated basket 12 that 4X4 quartz pendulous reed matrix-style is arranged in the anchor clamps and put into chemical corrosion groove cell body 13, react after 15 minutes, form by air compressor machine, pipeline, valve and shower nozzle etc. every 15 fens air compression systems.
Air compressor machine adopts two point form control (upper and lower limit control), just prescribes a time limit when the pressurized gas inner pressure of air cylinder reaches on the set(ting)value, and air compressor machine is closed intake valve by air pressure own or oil pressure, and mini air compressor is then shut down.Prescribe a time limit when pressure drops under the set(ting)value, air compressor machine is opened intake valve, and small-sized air compressor then starts again.
The same well heater of etchant solution warming apparatus, temperature sensor and Controlling System are formed.Set etching process optimum temps T earlier
0, start warming apparatus and make etchant solution be warming up to T.If | T
0-T|>δ (δ is the temperature error permissible value of setting in advance), then warming apparatus works on etchant solution is heated up.If
| T
0-T|≤δ, then warming apparatus quits work.15 minutes relief stepper-motor low speed rotation 90 degree after 4 one weeks of transposition, feed pressurized air; And then allowed stepping motor low speed rotation 90 degree every 15 minutes, after 4 one weeks of transposition, feed pressurized air again; So circulation by 4N rotation, makes workpiece all arrive N time in four orientation, feeds empty N+1 time of compression.
To there be the gaily decorated basket 12 of 4X4 quartz pendulous reed, anchor clamps in etchant solution, to rotate 90 degree once, and drag Hua Lan by the stepper-motor low speed rotation and realize that 90 degree rotate every 15 minutes.The Controlling System control that stepper-motor is made up of loop pulse, power magnification etc.Under the situation of non-overload, the frequency and the umber of pulse of pulse signal are only depended in rotating speed of motor, the position that stops, and are not subjected to the influence of load variations, promptly add a pulse signal to motor, and motor then turns over a step angle.
Pulse signal is generally produced by micro-chip or CPU, and the dutycycle of general pulse signal is about 0.3-0.4, and motor speed is high more, and dutycycle is then big more.
Power magnification is the of paramount importance part of drive system.Its consecutive mean electric current is depended in the torque of stepper-motor under certain rotating speed.Type of drive generally has several modes such as constant voltage, constant voltage crosstalk resistance, high-low pressure driving, constant current, segmentation number.
The utility model can solve chemical corrosion speed and the finished product accuracy problem of same batch products in different spatial.
Claims (1)
1. a quartz pendulous reed matrix array type chemical corrosion device is characterized in that comprising exhausting district (1), electric district (2), accordion door (3), transparent glass cover (4), chemical corrosion slot shell (5), stepper-motor (6), pneupress system pipeline (7), bearing (8), shelf (9), anchor clamps (10), live spindle (11), the gaily decorated basket (12), chemical corrosion groove cell body (13), anchor clamps lid (14), quartz pendulous reed (15), clamping fixture seat (16), protective membrane (17); Device body top is provided with wind district (1) and electric district (2); electric district (2) side is provided with accordion door (3); the device body bottom is provided with chemical corrosion groove cell body (13); be provided with live spindle (11) in the chemical corrosion groove cell body (13); live spindle (11) links to each other with chemical corrosion slot shell (5) bottom by bearing (8); chemical corrosion slot shell (5) bottom is provided with pneupress system pipeline (7); chemical corrosion slot shell (5) upper end is provided with transparent glass cover (4); live spindle (11) lower end links to each other with stepper-motor (6); live spindle (11) top is provided with shelf (9); shelf (9) is provided with the gaily decorated basket (12); the gaily decorated basket (12) bottom is provided with anchor clamps (10); anchor clamps (10) are by hold-down nut (14); quartz pendulous reed (15); clamp body (16) and two protective membranes (17) are formed; two protective membranes (17) are attached on the positive and negative surface of quartz pendulous reed (15); put into clamp body (16), compress quartz pendulous reed (15) and two protective membranes (17) with hold-down nut (14).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205981754U CN201923951U (en) | 2010-11-09 | 2010-11-09 | Matrix-arrangement type chemical etching device for quartz pendulous sheets |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010205981754U CN201923951U (en) | 2010-11-09 | 2010-11-09 | Matrix-arrangement type chemical etching device for quartz pendulous sheets |
Publications (1)
Publication Number | Publication Date |
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CN201923951U true CN201923951U (en) | 2011-08-10 |
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ID=44427815
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CN2010205981754U Expired - Lifetime CN201923951U (en) | 2010-11-09 | 2010-11-09 | Matrix-arrangement type chemical etching device for quartz pendulous sheets |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102092954A (en) * | 2010-11-09 | 2011-06-15 | 杭州电子科技大学 | Quartz pendulum sheet matrix arranged chemical corrosion device and method |
CN104496193A (en) * | 2014-11-25 | 2015-04-08 | 中国建筑材料科学研究总院 | Acid etching equipment for quartz pendulous reed flexible beam |
-
2010
- 2010-11-09 CN CN2010205981754U patent/CN201923951U/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102092954A (en) * | 2010-11-09 | 2011-06-15 | 杭州电子科技大学 | Quartz pendulum sheet matrix arranged chemical corrosion device and method |
CN102092954B (en) * | 2010-11-09 | 2012-09-05 | 杭州电子科技大学 | Quartz pendulum sheet matrix arranged chemical corrosion device and method |
CN104496193A (en) * | 2014-11-25 | 2015-04-08 | 中国建筑材料科学研究总院 | Acid etching equipment for quartz pendulous reed flexible beam |
CN104496193B (en) * | 2014-11-25 | 2017-06-06 | 中国建筑材料科学研究总院 | A kind of acid etch quartz pendulous reed flexible beam equipment |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20110810 Effective date of abandoning: 20120905 |