CN201878428U - Vacuumizing device - Google Patents

Vacuumizing device Download PDF

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Publication number
CN201878428U
CN201878428U CN2010206685349U CN201020668534U CN201878428U CN 201878428 U CN201878428 U CN 201878428U CN 2010206685349 U CN2010206685349 U CN 2010206685349U CN 201020668534 U CN201020668534 U CN 201020668534U CN 201878428 U CN201878428 U CN 201878428U
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CN
China
Prior art keywords
oil
temperature
water pipe
cooling water
sensing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010206685349U
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Chinese (zh)
Inventor
龙生才
孙万兴
喻大群
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUSHAN BRANCH ZHUHAI FOUNDER PCB Co Ltd
Peking University Founder Group Co Ltd
Original Assignee
FUSHAN BRANCH ZHUHAI FOUNDER PCB Co Ltd
Peking University Founder Group Co Ltd
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Application filed by FUSHAN BRANCH ZHUHAI FOUNDER PCB Co Ltd, Peking University Founder Group Co Ltd filed Critical FUSHAN BRANCH ZHUHAI FOUNDER PCB Co Ltd
Priority to CN2010206685349U priority Critical patent/CN201878428U/en
Application granted granted Critical
Publication of CN201878428U publication Critical patent/CN201878428U/en
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Abstract

The utility model discloses a vacuumizing device for solving the problems that the service life of the vacuumizing device is shortened, the maintenance cost is increased and the working quality is lowered due to over-high temperature of oil in the vacuumizing device. In the utility model, a cooling pipe is arranged in an oil cavity of the vacuumizing device; and coolant enters the cooling pipe and then exchanges heat with the oil in the oil cavity so as to achieve the purpose of lowering the temperature of the oil in the oil cavity and further avoid the problems that the service life of the vacuumizing device is shortened, the maintenance cost is increased and the working quality is lowered due to the over-high temperature of the oil in the vacuumizing device.

Description

Vacuum extractor
Technical field
The utility model relates to the printing circuit board field, relates in particular to a kind of vacuum extractor.
Background technology
In the process of printed circuit board, need use vacuum pump to vacuumize when carrying out the circuit board lamination to pressing layer.
The vacuum pump structure is equipped with in the oil pocket 10 of vacuum pump and plays oil lubricated, sealing function as shown in Figure 1.
Vacuum pump can constantly heat up in vacuum, because radiating effect is not good in the vacuum pump oil pocket, the oil temperature in the vacuum pump can surpass design temperature (for example 90 ℃), makes vacuum pump move under the overtemperature state.
Vacuum pump operation under the overtemperature state can bring following problem:
The first, increase the wearing and tearing of vacuum pump, shorten the useful life of vacuum pump;
The second, pumping fluid emulsification is too fast, and the maintenance consumptive material is changed frequent, makes cost of upkeep soar;
The 3rd, to surpass design temperature high more when temperature, and vacuum pump vacuumizes the vacuum degree that reaches can be low more, thereby cause the lamination quality abnormal.
The utility model content
The utility model provides a kind of vacuum extractor, is used to solve the too high problem that causes the vacuum extractor lost of life, cost of upkeep lifting and craftmanship to descend of oil temperature in the vacuum extractor.
A kind of vacuum extractor, this vacuum extractor comprises oil pocket, be provided with cooling water pipe in the described oil pocket, outside cooling agent enters cooling water pipe by the inlet of cooling water pipe, and the cooling agent and the oil in the oil pocket that enter cooling water pipe carry out flowing out from the outlet of cooling water pipe after the heat exchange.
Preferable, also being provided with temperature sensing device in the described oil pocket, the described temperature sensing device control device outer with being arranged on oil pocket links to each other, and described control device links to each other with the inlet valve of the inlet that is arranged on cooling water pipe;
Described temperature sensing device is used to measure the oil temperature in the oil pocket;
Described control device is used for controlling described inlet valve according to the oil temperature that described temperature sensing device measures and opens or closes.
Preferable, described control device comprises thermostat and variable program formula controller PLC;
Described thermostat when being used for the oil temperature that measures at described temperature sensing device greater than predefined temperature threshold, sends enabling signal to described PLC; The oil temperature that measures at described temperature sensing device sends stop signal to described PLC during less than described temperature threshold;
Described PLC is used for when receiving the enabling signal that described thermostat sends, to described inlet valve output OPEN; When receiving the stop signal that described thermostat sends, to described inlet valve output out code;
Described inlet valve is used for:
When receiving the OPEN of described PLC output, carry out opening action; When receiving the out code of described PLC output, carry out closing motion.
Preferable, described control device comprises thermostat and charger;
Described thermostat is when being used for the oil temperature that measures at described temperature sensing device greater than predefined temperature threshold, to described charger power supply; The oil temperature that measures at described temperature sensing device stops to described charger power supply during less than described temperature threshold;
Described charger is used for to described inlet valve power supply.
In the scheme that the utility model provides, in the oil pocket of vacuum extractor, be provided with cooling water pipe, cooling agent enter behind the cooling water pipe with oil pocket in oil carry out heat exchange, thereby reach the purpose that reduces the oily temperature in the oil pocket, and then avoid the too high problem that causes the vacuum extractor lost of life, cost of upkeep lifting and craftmanship to descend of oil temperature in the vacuum extractor.
Description of drawings
Fig. 1 is a vacuum pump structure schematic diagram of the prior art;
The vacuum extractor structural representation that Fig. 2 provides for the utility model embodiment one;
The vacuum extractor structural representation that Fig. 3 provides for the utility model embodiment two;
The vacuum extractor structural representation that Fig. 4 provides for the utility model embodiment three and embodiment four;
The vacuum extractor structural representation that Fig. 5 provides for the utility model embodiment five and embodiment six.
Embodiment
In order to solve the too high problem that causes the vacuum extractor lost of life, cost of upkeep lifting and craftmanship to descend of oil temperature in the vacuum extractor, the utility model provides a kind of vacuum extractor, in the oil pocket of vacuum extractor, be provided with cooling water pipe, cooling agent enter behind the cooling water pipe with oil pocket in oil carry out heat exchange, thereby reach the purpose of the oil temperature that reduces in the oil pocket.
Below in conjunction with specific embodiment the utility model is described:
Embodiment one:
Referring to Fig. 2, the vacuum extractor that present embodiment provides comprises oil pocket 20, is provided with cooling water pipe 21 in this oil pocket 20, and outside cooling agent enters cooling water pipe by the inlet 22 of cooling water pipe 21.The inlet 22 of cooling water pipe 21 can provide the equipment of cooling agent to link to each other with the outside, imports cooling agents by this equipment to cooling water pipe 21, perhaps by manually cooling agent being beaten in the cooling water pipe 21.
In the present embodiment, after entering the cooling agent of cooling water pipe 21 and the oil in the oil pocket and carrying out heat exchange, can flow out from the outlet 23 of cooling water pipe 21.
In the present embodiment, enter the cooling agent of cooling water pipe 21 and the oil in the oil pocket 20 and carry out heat exchange, make the temperature of cooling agent raise, the temperature of oil reduces in the oil pocket 20, thereby reaches the purpose that reduces oil temperature in the oil pocket.
Embodiment two:
Referring to Fig. 3, the vacuum extractor that present embodiment provides comprises oil pocket 30, is provided with cooling water pipe 31 in this oil pocket 30, and outside cooling agent enters cooling water pipe by the inlet 32 of cooling water pipe 31.
Also be provided with temperature sensing device 33 in the oil pocket 30, temperature sensing device 33 control device 34 outer with being arranged on oil pocket links to each other, and control device 34 links to each other with the inlet valve 35 of the inlet that is arranged on cooling water pipe;
Temperature sensing device 33 is used to measure the oil temperature in the oil pocket 30;
Control device 34, the oil temperature control inlet valve 35 that is used for measuring according to temperature sensing device 33 opens or closes.When inlet valve 35 was opened, cooling agent can 32 enter cooling water pipe 31 by entering the mouth, and when inlet valve 35 was closed, cooling agent can not 32 enter cooling water pipe 31 by entering the mouth;
In the present embodiment, after entering oil in the cooling agent of cooling water pipe 31 and the oil pocket 30 and carrying out heat exchange, can flow out from the outlet 36 of cooling water pipe 31.
In the present embodiment, the cooling agent that enters cooling water pipe 31 can carry out heat exchange with the oil in the oil pocket 30, makes the temperature of cooling agent raise, and the temperature of oil reduces in the oil pocket 30, thereby reaches the purpose that reduces oil temperature in the oil pocket 30.
And, control device 34 opens or closes according to the oil temperature control inlet valve 35 that temperature sensing device 33 measures, promptly whether enter cooling water pipe 31 according to the oily temperature control cooling agent in the oil pocket 30, as seen, adopt present embodiment can reach the purpose that whether reduces oil temperature in the oil pocket 30 according to the oil temperature decision in the oil pocket 30.
Embodiment three:
Referring to Fig. 4, the vacuum extractor that present embodiment provides comprises oil pocket 40, is provided with cooling water pipe 41 in this oil pocket 40, and outside cooling agent enters cooling water pipe 41 by the inlet 42 of cooling water pipe 41.
Also be provided with temperature sensing device 43 in the oil pocket 40, temperature sensing device 43 control device 44 outer with being arranged on oil pocket 40 links to each other, and control device 44 links to each other with the inlet valve 45 of the inlet 42 that is arranged on cooling water pipe 41;
Temperature sensing device 43 is used to measure the oil temperature in the oil pocket 40;
Control device 44, the oil temperature control inlet valve 45 that is used for measuring according to temperature sensing device 43 opens or closes.
Concrete, control device 44 comprises thermostat 440 and variable program formula controller (PLC) 441;
Thermostat 440 is used for determining that oil temperature that temperature sensing device 43 measures whether greater than predefined temperature threshold, when being defined as being, sends enabling signal to PLC441;
PLC441 is used for when receiving the enabling signal that thermostat 440 sends, to inlet valve 45 output OPENs;
Accordingly, inlet valve 45 is used for: when receiving the OPEN of PLC441 output, carry out opening action.
In the present embodiment, after entering oil in the cooling agent of cooling water pipe 41 and the oil pocket 40 and carrying out heat exchange, can flow out from the outlet 46 of cooling water pipe 41.
In the present embodiment, the cooling agent that enters cooling water pipe 41 can carry out heat exchange with the oil in the oil pocket 40, makes the temperature of cooling agent raise, and the temperature of oil reduces in the oil pocket 40, thereby reaches the purpose that reduces oil temperature in the oil pocket 40.
And, the oil temperature that thermostat 440 measures at temperature sensing device 43 is during greater than predefined temperature threshold, send enabling signal to PLC441, PLC441 exports OPENs to inlet valve 45 when receiving enabling signal, inlet valve 45 is carried out opening action when receiving OPEN.As seen, adopt present embodiment, reduce the purpose of the oil temperature in the oil pocket 40 in the time of can reaching oil temperature oil pocket 40 in greater than predefined temperature threshold, thereby avoided the oil in the oil pocket 40 warm above design temperature.
Embodiment four:
Still referring to Fig. 4, the vacuum extractor that present embodiment provides comprises oil pocket 40, is provided with cooling water pipe 41 in this oil pocket 40, and outside cooling agent enters cooling water pipe 41 by the inlet 42 of cooling water pipe 41.
Also be provided with temperature sensing device 43 in the oil pocket 40, temperature sensing device 43 control device 44 outer with being arranged on oil pocket links to each other, and control device 44 links to each other with the inlet valve 45 of the inlet 42 that is arranged on cooling water pipe 41;
Temperature sensing device 43 is used to measure the oil temperature in the oil pocket 40;
Control device 44, the oil temperature control inlet valve 45 that is used for measuring according to temperature sensing device 43 opens or closes.
Concrete, control device 44 comprises thermostat 440 and PLC441;
Thermostat 440 is used for determining that oil temperature that temperature sensing device 43 measures whether greater than predefined temperature threshold, when being defined as being, sends enabling signal to PLC441;
PLC441 is used for when receiving the enabling signal that thermostat 440 sends, to inlet valve 45 output OPENs;
Accordingly, inlet valve 45 is used for: when receiving the OPEN of PLC441 output, carry out opening action.
Thermostat 440 also is used for: determine that oil temperature that temperature sensing device 43 measures whether less than described temperature threshold, when being defined as being, sends stop signal to PLC441;
PLC441 also is used for: when receiving the stop signal that thermostat 440 sends, to inlet valve 45 output out codes;
Accordingly, inlet valve 45 also is used for: when receiving the out code of PLC441 output, carry out closing motion.
In the present embodiment, after entering oil in the cooling agent of cooling water pipe 41 and the oil pocket 40 and carrying out heat exchange, can flow out from the outlet 46 of cooling water pipe.
In the present embodiment, in the present embodiment, the cooling agent that enters cooling water pipe 41 can carry out heat exchange with the oil in the oil pocket 40, makes the temperature of cooling agent raise, and the temperature of oil reduces in the oil pocket 40, thereby reaches the purpose that reduces oil temperature in the oil pocket.
And, the oil temperature that thermostat 440 measures at temperature sensing device 43 is during greater than predefined temperature threshold, send enabling signal to PLC441, PLC441 exports OPENs to inlet valve 45 when receiving enabling signal, inlet valve 45 is carried out opening action when receiving OPEN.The oil temperature that thermostat 440 measures at temperature sensing device 43 is during less than predefined temperature threshold, send stop signal to PLC441, to inlet valve 45 output out codes, inlet valve 45 is carried out closing motion to PLC441 when receiving out code when receiving stop signal.As seen, adopt present embodiment, the oil that reduces in the time of can reaching oil temperature in oil pocket 40 greater than predefined temperature threshold in the oil pocket 40 is warm, and the oil temperature in oil pocket 40 stops to reduce the purpose of the oil temperature in the oil pocket 40 during less than predefined temperature threshold, thereby not only avoided the oil temperature in the oil pocket 40 to surpass design temperature, it is too many to make that also oil pocket 40 interior oily Wen Buhui are lower than design temperature.
Embodiment five:
Referring to Fig. 5, the vacuum extractor that present embodiment provides comprises oil pocket 50, is provided with cooling water pipe 51 in this oil pocket, and outside cooling agent enters cooling water pipe 51 by the inlet 52 of cooling water pipe 51.
Also be provided with temperature sensing device 53 in the oil pocket 50, temperature sensing device 53 control device 54 outer with being arranged on oil pocket links to each other, and control device 54 links to each other with the inlet valve 55 of the inlet 52 that is arranged on cooling water pipe 51;
Temperature sensing device 53 is used to measure the oil temperature in the oil pocket 50;
Control device 54, the oil temperature control inlet valve 55 that is used for measuring according to temperature sensing device 53 opens or closes.
Concrete, control device 54 comprises thermostat 540 and charger 541;
Thermostat 540 is when being used for the oil temperature that measures at temperature sensing device 53 greater than predefined temperature threshold, to charger 541 power supplies;
Charger 541 is used for to inlet valve 55 power supplies, and inlet valve 55 obtains opening after the power supply.
In the present embodiment, after entering oil in the cooling agent of cooling water pipe 51 and the oil pocket 50 and carrying out heat exchange, can flow out from the outlet 56 of cooling water pipe 51.
In the present embodiment, the cooling agent that enters cooling water pipe 51 can carry out heat exchange with the oil in the oil pocket 50, makes the temperature of cooling agent raise, and the temperature of oil reduces in the oil pocket 50, thereby reaches the purpose that reduces oil temperature in the oil pocket 50.
And the oil temperature that thermostat 540 measures at temperature sensing device 53 to charger 541 power supplies, thereby makes that charger 541 can be to inlet valve 55 power supplies during greater than predefined temperature threshold, and inlet valve 55 obtains opening after the power supply.As seen, adopt present embodiment, reduce the purpose of the oil temperature in the oil pocket 50 in the time of can reaching oil temperature oil pocket 50 in greater than predefined temperature threshold, thereby avoided the oil in the oil pocket 50 warm above design temperature.
Embodiment six:
Still referring to Fig. 5, the vacuum extractor that present embodiment provides comprises oil pocket 50, is provided with cooling water pipe 51 in this oil pocket, and outside cooling agent enters cooling water pipe 51 by the inlet 52 of cooling water pipe 51.
Also be provided with temperature sensing device 53 in the oil pocket 50, temperature sensing device 53 control device 54 outer with being arranged on oil pocket links to each other, and control device 54 links to each other with the inlet valve 55 of the inlet 52 that is arranged on cooling water pipe 51;
Temperature sensing device 53 is used to measure the oil temperature in the oil pocket 50;
Control device 54, the oil temperature control inlet valve 55 that is used for measuring according to temperature sensing device 53 opens or closes.
Concrete, control device 54 comprises thermostat 540 and charger 541;
Thermostat 540 is when being used for the oil temperature that measures at temperature sensing device 53 greater than predefined temperature threshold, to charger 541 power supplies;
Charger 541 is used for to inlet valve 55 power supplies, and inlet valve 55 obtains opening after the power supply.
Thermostat 540 also is used for, and the oil temperature that measures at temperature sensing device 53 stops to charger 541 power supplies during less than described temperature threshold.Thermostat 540 stops after charger 541 power supplies, and charger 541 also just stops to close after inlet valve 55 outages to inlet valve 55 power supplies.
In the present embodiment, after entering oil in the cooling agent of cooling water pipe 51 and the oil pocket 50 and carrying out heat exchange, can flow out from the outlet 56 of cooling water pipe 51.
In the present embodiment, the cooling agent that enters cooling water pipe 51 can carry out heat exchange with the oil in the oil pocket 50, makes the temperature of cooling agent raise, and the temperature of oil reduces in the oil pocket 50, thereby reaches the purpose that reduces oil temperature in the oil pocket 50.
And the oil temperature that thermostat 540 measures at temperature sensing device 53 to charger 541 power supplies, thereby makes that charger 541 can be to inlet valve 55 power supplies during greater than predefined temperature threshold, and inlet valve 55 obtains opening after the power supply.The oil temperature that thermostat 540 measures at temperature sensing device 53 stops to charger 541 power supplies during less than temperature threshold, makes to close after inlet valve 55 outages.As seen, adopt present embodiment, the oil that reduces in the time of can reaching oil temperature in oil pocket 50 greater than predefined temperature threshold in the oil pocket 50 is warm, and the oil temperature in oil pocket 50 stops to reduce the purpose of the oil temperature in the oil pocket 50 during less than predefined temperature threshold, thereby not only avoided the oil temperature in the oil pocket 50 to surpass design temperature, it is too many to make that also oil pocket 50 interior oily Wen Buhui are lower than design temperature.
In embodiment five and embodiment six, charger can be relay, or contactor.
In embodiment three~embodiment six, predefined temperature threshold can be 90 degrees centigrade, can certainly be other any temperature values.
In embodiment two~embodiment six, temperature sensing device can be sensing rod for temperature or heat detector, can certainly be other any devices with temperature detection function.
In embodiment two~embodiment six, inlet valve can be electromagnetically operated valve or mechanical valve.
In embodiment one~embodiment six, vacuum extractor can be vacuum pump, can also be other any devices with the function of vacuumizing.
In embodiment one~embodiment six, cooling agent can be cooling water, also can be other any materials with refrigerating function.
In embodiment one~embodiment six, the material of cooling water pipe can adopt copper or stainless steel etc.
In embodiment one~embodiment six, cooling water pipe can be plate-like, circle shape or linearity etc.
In embodiment one~embodiment six, in cooling water pipe, also be provided with the coolant flow speed control valve, this coolant flow speed control valve is used to control the flowing velocity of cooling agent in cooling water pipe.
To sum up, the beneficial effects of the utility model comprise:
In the scheme that the utility model provides, in the oil pocket of vacuum extractor, be provided with cooling water pipe, cooling agent enter behind the cooling water pipe with oil pocket in oil carry out heat exchange, thereby reach the purpose that reduces the oily temperature in the oil pocket, and then avoid the too high problem that causes the vacuum extractor lost of life, cost of upkeep lifting and craftmanship to descend of oil temperature in the vacuum extractor.
Further, in the scheme that the utility model provides, control device opens or closes according to the oil temperature control inlet valve that temperature sensing device 33 measures, promptly whether enter cooling water pipe, thereby reach the purpose that whether reduces oil temperature in the oil pocket according to the oil temperature decision in the oil pocket according to the oily temperature control cooling agent in the oil pocket.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims (10)

1. a vacuum extractor that is used for the printed wiring board lamination process comprises oil pocket, it is characterized in that, is provided with cooling water pipe in the described oil pocket, and outside cooling agent enters cooling water pipe by the inlet of cooling water pipe.
2. vacuum extractor as claimed in claim 1 is characterized in that, also is provided with temperature sensing device in the described oil pocket, and the described temperature sensing device control device outer with being arranged on oil pocket links to each other, and described control device links to each other with the inlet valve of the inlet that is arranged on cooling water pipe;
Described temperature sensing device is used to measure the oil temperature in the oil pocket;
Described control device is used for controlling described inlet valve according to the oil temperature that described temperature sensing device measures and opens or closes.
3. vacuum extractor as claimed in claim 2 is characterized in that, described control device comprises thermostat and variable program formula controller PLC;
Described thermostat when being used for the oil temperature that measures at described temperature sensing device greater than predefined temperature threshold, sends enabling signal to described PLC; The oil temperature that measures at described temperature sensing device sends stop signal to described PLC during less than described temperature threshold;
Described PLC is used for when receiving the enabling signal that described thermostat sends, to described inlet valve output OPEN; When receiving the stop signal that described thermostat sends, to described inlet valve output out code;
Described inlet valve is used for:
When receiving the OPEN of described PLC output, carry out opening action; When receiving the out code of described PLC output, carry out closing motion.
4. vacuum extractor as claimed in claim 2 is characterized in that described control device comprises thermostat and charger;
Described thermostat, when being used for the oil temperature that measures at described temperature sensing device greater than predefined temperature threshold, control is to described charger power supply; The oil temperature that measures at described temperature sensing device stops to described charger power supply during less than described temperature threshold;
Described charger is used for to described inlet valve power supply.
5. vacuum extractor as claimed in claim 4 is characterized in that, described charger is:
Relay, or contactor.
6. as arbitrary described vacuum extractor among the claim 2-5, it is characterized in that described temperature sensing device is: sensing rod for temperature or heat detector.
7. as arbitrary described vacuum extractor among the claim 2-5, it is characterized in that described inlet valve is: electromagnetically operated valve or mechanical valve.
8. as arbitrary described vacuum extractor among the claim 1-5, it is characterized in that this vacuum means is changed to vacuum pump.
9. as arbitrary described vacuum extractor among the claim 1-5, it is characterized in that the cooling agent that enters cooling water pipe flows out from the outlet of described cooling water pipe.
10. as arbitrary described vacuum extractor among the claim 1-5, it is characterized in that also be provided with the coolant flow speed control valve in described cooling water pipe, this coolant flow speed control valve is used to control the flowing velocity of described cooling agent in described cooling water pipe.
CN2010206685349U 2010-12-09 2010-12-09 Vacuumizing device Expired - Lifetime CN201878428U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010206685349U CN201878428U (en) 2010-12-09 2010-12-09 Vacuumizing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010206685349U CN201878428U (en) 2010-12-09 2010-12-09 Vacuumizing device

Publications (1)

Publication Number Publication Date
CN201878428U true CN201878428U (en) 2011-06-22

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010206685349U Expired - Lifetime CN201878428U (en) 2010-12-09 2010-12-09 Vacuumizing device

Country Status (1)

Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105065269A (en) * 2015-07-29 2015-11-18 浙江格凌实业有限公司 Rotary-vane vacuum pump
CN105597848A (en) * 2014-11-18 2016-05-25 潍坊医学院 Vacuum rotary evaporation apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105597848A (en) * 2014-11-18 2016-05-25 潍坊医学院 Vacuum rotary evaporation apparatus
CN105065269A (en) * 2015-07-29 2015-11-18 浙江格凌实业有限公司 Rotary-vane vacuum pump
CN105065269B (en) * 2015-07-29 2017-03-15 浙江格凌实业有限公司 Rotary-vane vaccum pump

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Granted publication date: 20110622

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