CN201864576U - Device comprehensively utilizing waste silica powder for producing trichlorosilane - Google Patents

Device comprehensively utilizing waste silica powder for producing trichlorosilane Download PDF

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Publication number
CN201864576U
CN201864576U CN2010205501403U CN201020550140U CN201864576U CN 201864576 U CN201864576 U CN 201864576U CN 2010205501403 U CN2010205501403 U CN 2010205501403U CN 201020550140 U CN201020550140 U CN 201020550140U CN 201864576 U CN201864576 U CN 201864576U
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China
Prior art keywords
trichlorosilane
cyclone separator
slag
silica flour
withdrawing
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Expired - Fee Related
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CN2010205501403U
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Chinese (zh)
Inventor
张世斌
秦永红
王良珣
王市民
张丽娜
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HENAN SHANGYU NEW ENERGY CO Ltd
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HENAN SHANGYU NEW ENERGY CO Ltd
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Priority to CN2010205501403U priority Critical patent/CN201864576U/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00Technologies relating to chemical industry
    • Y02P20/10Process efficiency

Abstract

A device comprehensively utilizing waste silica powder for producing trichlorosilane comprises the following structure that a gas mixture outlet pipeline of a trichlorosilane synthetic furnace is connected with a high-efficiency cyclone separator, and a material outlet of the high-efficiency cyclone separator is connected with a silica powder recycling tank; a gas outlet of the high-efficiency cyclone separator is connected with a primary cyclone separator, a slag storing tank is arranged below the primary cyclone separator, a gas outlet of the primary cyclone separator is connected with a secondary cyclone separator, and a secondary slag storing tank is arranged below the secondary cyclone separator; a gas outlet of the secondary cyclone separator is connected with a primary bag-type dust remover and a secondary bag-type dust remover in sequence, and material outlets of the primary bag-type dust remover and the secondary bag-type dust remover are all connected with the silica powder recycling tank by a slag blowing pipeline; and a material outlet of the silica powder recycling tank is connected with a recycling port of the trichlorosilane synthetic furnace. The device is characterized by being obvious in energy-saving effect, high in environment-friendly benefits and safety factors, unique in process, easy to operate, simple in device, long in service life and the like.

Description

The comprehensive utilization waste silicon powder is produced the equipment of trichlorosilane
Technical field
The utility model belongs to the trichlorosilane production technical field, is specifically related to a kind of equipment that waste silicon powder is produced trichlorosilane that fully utilizes.
Background technology
From China's trichlorosilane industry development situation, all not supporting installation waste silicon powder retrieving arrangement of most of enterprises.The waste silicon powder that produces after the mixed gas dedusting during most of enterprises produce directly is discharged into eluting column, has the employing of minority producer that waste silicon powder is entered a big volumetrical and deposits in the ash can, is regularly discharged by artificial again.
First method is equivalent to wet dedusting, by water circulating pump the moisture multilayer is squeezed in the eluting column, contains silica flour gas and enters from the tower middle and lower part, is sprayed the liquid-absorbent of getting off by multilayer spray equipment in tower, makes silicon powder deposit in the pond at the bottom of the tower.This method can guarantee the regeneration effect of dust removal installation, but because of dusty gas contains a small amount of trichlorosilane, and trichlorosilane is met water generation silica solid and hydrogen chloride gas.Silicon-dioxide can stop up the shower nozzle of spray equipment in the tower, can cause the anhydrous spray of eluting column when serious, and silica flour is directly discharged from the eluting column top, causes serious environmental pollution; It is acid that the water-soluble hydrochloric acid that promptly forms of hydrogen chloride gas that generates, eluting column spray liquid are, and water circulating pump is caused certain corrosion, and the hydrochloric acid that generates need handle back discharging discharging again, produced secondary pollutant.By blowing slag waste silicon powder is discharged into eluting column, not only contaminate environment causes raw-material a large amount of waste simultaneously.Second method is that waste silicon powder is temporary in a big volumetrical and deposits in the ash can by blowing slag, more regularly by manual emission.Because the waste silicon powder surface speckles with gases such as a spot of hydrogenchloride, trichlorosilane, and trichlorosilane is met water in air part and is generated pungent hydrogen chloride gas, influences the healthy of the environment of plant area and worker; Owing to the waste silicon powder fine size, have 100 ~ 200 ℃ of temperature, surface attachment that reasons such as trichlorosilane inflammable gas are arranged, there is certain potential safety hazard in waste silicon powder discharging and easily catching fire when stacking.
The utility model content
The purpose of this utility model is to solve the above-mentioned problems in the prior art, and a kind of equipment that waste silicon powder is produced trichlorosilane that fully utilizes is provided.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is as follows:
Comprehensive utilization waste silicon powder of the present utility model is produced the equipment of trichlorosilane, comprises trichlorosilane synthetic furnace mixed gas outlet pipe connection efficient cyclone separator, and the discharge port of efficient cyclone separator is connected with the silica flour withdrawing can; The air outlet of efficient cyclone separator connects primary cyclone, and the below of primary cyclone is provided with one-level and deposits slag ladle, and the air outlet of primary cyclone connects secondary cyclone, and the below of secondary cyclone is provided with secondary and deposits slag ladle; The air outlet of secondary cyclone connects one-level sack cleaner and secondary sack cleaner successively, the one-level sack cleaner all is connected with the silica flour withdrawing can by blowing the slag pipeline with secondary sack cleaner discharge port, and the discharge port of silica flour withdrawing can reclaims mouth with trichlorosilane synthetic furnace and is connected.
This equipment also is provided with the gas buffer jar, and the gas buffer jar is connected with the silica flour withdrawing can.
Preferably be provided with balance relief tube and nitrogen ftercompction pipe in the utility model at silica flour withdrawing can top.
Preferably between silica flour withdrawing can and trichlorosilane synthetic furnace recovery mouth, be provided with star feeder in the utility model.
Preferably be provided with and blow slag tonifying Qi valve blowing the slag pipe end in the utility model.
A large amount of silica flours that gas mixtures such as the trichlorosilane that the utility model can generate reaction by efficient cyclone separator, silicon tetrachloride carry when come out in the synthetic furnace top separate, be deposited in the silica flour withdrawing can below the efficient cyclone separator, this operation has alleviated burden for the postorder dedusting, after the sack cleaner burden reduces in the postorder dust removal installation, effectively increased the work-ing life of cloth bag.Store compressed gas (blow slag pressure and be generally 180 ~ 200 Kpa) when the gas buffer jar is used to blow slag, unnecessary gas is effectively cushioned, the pressure requirement when guaranteeing to blow slag is to reach the good slag effect of blowing.Star feeder has changed the drawback of gravity filling, carries and silica flour can be added in the synthetic furnace smoothly by power.The pipeline tonifying Qi, blow the problem that block apparatus can solve line clogging.
Owing to adopted technique scheme, the beneficial effects of the utility model are as follows:
1, energy-saving effect is remarkable: waste silicon powder obtains recycling, and has reduced silica flour consumption, has reduced the trichlorosilane production cost, has improved the business economic benefit.
2, environmental benefit height: the discharging of silica flour and hydrogen chloride gas has been stopped in this project implementation, has reduced environmental pollution, has improved the production environment of plant area, has improved technology level, has promoted enterprise further fast-developing.
3, safety coefficient improves: the waste silicon powder particle of recovery is very thin and adhere to the trichlorosilane inflammable gas, and temperature has 100 ~ 200 ℃ when blowing off system, runs into the air pole easy firing, has certain potential safety hazard.After reclaiming the project implementation, waste silicon powder can be reclaimed in closed system fully, participates in reaction again and generates trichlorosilane.Stopped the generation of security incidents such as fire.
4, reduce worker's labour intensity: former technology is waste silicon powder to be blown into deposit in the ash can, and regularly by manually emitting pack then, the work on the spot environment is poor, and labour intensity is big.Novel process has alleviated worker's labour intensity after improving, and has protected worker's Occupational health.
5, easy handling, equipment is simple, characteristics such as service life of equipment length.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Among the figure, 1. synthetic furnace; 2. synthetic furnace mixed gas outlet pipeline; 3. efficient cyclone separator; 4. primary cyclone; 5. one-level is deposited slag ladle; 6. secondary cyclone; 7. secondary is deposited slag ladle; 8. one-level cloth envelop collector; 9. secondary cloth envelop collector; 10. pure gas discharge outlet; 11. blow the slag pipeline; 12. silica flour withdrawing can; 13. star feeder; 14. balance relief tube; 15. nitrogen ftercompction pipe; 16. blow block apparatus; 17. gas buffer jar; 18. blow slag tonifying Qi valve.
Embodiment
Comprehensive utilization waste silicon powder of the present utility model is produced the equipment of trichlorosilane, comprises that trichlorosilane synthetic furnace trichlorosilane synthetic furnace mixed gas outlet pipeline 2 connects efficient cyclone separator 3, and the discharge port of efficient cyclone separator 3 is connected with silica flour withdrawing can 12; This equipment also is provided with gas buffer jar 17, and gas buffer jar 17 is connected with silica flour withdrawing can 12.Be provided with balance relief tube 14 and nitrogen ftercompction pipe 15 at silica flour withdrawing can 12 tops.The air outlet of efficient cyclone separator 3 connects primary cyclone 4, the below of primary cyclone 4 is provided with one-level and deposits slag ladle 5, the air outlet of primary cyclone 4 connects secondary cyclone 6, and the below of secondary cyclone 6 is provided with secondary and deposits slag ladle 7; The air outlet of secondary cyclone 6 connects one-level sack cleaner 8 and secondary sack cleaner 9 successively, one-level sack cleaner 8 all is connected with silica flour withdrawing can 12 by blowing slag pipeline 11 with secondary sack cleaner 9 discharge ports, is provided with and blows slag tonifying Qi valve 18 blowing slag pipeline 11 ends.The discharge port of silica flour withdrawing can 12 reclaims mouth with trichlorosilane synthetic furnace and is connected.Between silica flour withdrawing can 12 and trichlorosilane synthetic furnace recovery mouth, be provided with star feeder 13.
Principle of work of the present utility model is as follows:
The mixed gas that generates in the synthetic furnace enters efficient cyclone separator 3 by synthetic furnace mixed gas outlet pipeline 2, and the top hole pressure of efficient cyclone separator 3 is 30 ~ 35 Kpa, and the silicon powder particle that separates enters silica flour withdrawing can 12.The gas that comes out from efficient cyclone separator 3 passes through primary cyclone 4 and secondary cyclone 6 successively, and the top hole pressure 28 ~ 33Kpa of primary cyclone, the top hole pressure of secondary cyclone are 26 ~ 30 Kpa.The silicon powder particle that separates enters respectively that one-level is deposited slag ladle 5 and secondary is deposited slag ladle 7, enters silica flour withdrawing can 12 by blowing slag pipeline 11 then; The mixed gas that comes out from secondary cyclone 6 passes through one-level sack cleaner 8 and secondary sack cleaner 9 successively, and the top hole pressure of one-level sack cleaner is 20 ~ 25Kpa, and the top hole pressure of secondary sack cleaner is 15 ~ 20 Kpa.Mixed gas after the dedusting is got rid of by the air outlet 10 of secondary sack cleaner 9, silica flour on one-level sack cleaner and the secondary sack cleaner enters silica flour withdrawing can 12 by blowing slag pipeline 11, and the silica flour in the silica flour withdrawing can enters synthetic furnace by star feeder 13 and reclaims mouth.
Along with mixed gas passes through serial dust removal installation, bag-type dust equipment itself can influence dust removing effects because of being covered with tiny silica flour on the cloth bag, and depositing in slag ladle 5 and 7 below dust removal installation also can deposit a large amount of silica flours in addition, in order to guarantee ordinary production, need regularly blow slag, reduce systemic resistance.Operation steps is as follows;
The required production line that blows slag is closed in master control when 1, blowing slag, and the scene will be advanced the DN150 ball valve of silica flour withdrawing can 12 and open, and closes slag valve under the DN100 of three building efficient cyclone separators, 3 belows.
2, blow the slag order: one-level is deposited slag ladle (primary cyclone), secondary is deposited slag ladle (secondary cyclone), one-level cloth envelop collector, secondary cloth envelop collector.
3, pressurising will be blown the slag filling apparatus and will be depressed into 0.2Mpa.
4, all pressure is opened the required following slag valve that blows slag equipment, blows slag to silica flour withdrawing can 12.
5, pressure release is required blows when being higher than the secondary cloth bag pressure of producing after slag equipment is all pressed, and opens under the secondary cloth bag slag valve and system and all presses, and each equipment repeats to blow three times.
6, during ordinary production, will blow slag house steward valve closes, and advance the DN150 ball valve of silica flour withdrawing can 12 and close, open the DN100 ball valve of three building cyclonic separators, 3 belows, and blow slag and finish.
7, after silica flour reclaimed and to blow slag and finish, all waste silicon powders can enter in the silica flour withdrawing can 12, open star-like feeder 13 waste silicon powder is added in the synthetic furnace.
The 17 main effects of gas buffer jar are unnecessary gas effectively can be cushioned when blowing slag, and the pressure when guaranteeing to blow slag is enough high, guarantees to blow the slag effect.Star feeder 13 has changed the drawback of gravity filling, carries and silica flour can be added in the synthetic furnace smoothly by power.14 balance relief tubes, 15 nitrogen ftercompction pipes, 16 blow block apparatus, 18, and to blow slag making-up air device etc. mainly be the problem that solves the silica flour blocking pipe.

Claims (5)

1. one kind fully utilizes the equipment that waste silicon powder is produced trichlorosilane, comprise trichlorosilane synthetic furnace (1), it is characterized in that: trichlorosilane synthetic furnace mixed gas outlet pipeline (2) connects efficient cyclone separator (3), and the discharge port of efficient cyclone separator (3) is connected with silica flour withdrawing can (12); The air outlet of efficient cyclone separator (3) connects primary cyclone (4), the below of primary cyclone (4) is provided with one-level and deposits slag ladle (5), the air outlet of primary cyclone (4) connects secondary cyclone (6), and the below of secondary cyclone (6) is provided with secondary and deposits slag ladle (7); The air outlet of secondary cyclone (6) connects one-level sack cleaner (8) and secondary sack cleaner (9) successively, one-level sack cleaner (8) all is connected with silica flour withdrawing can (12) by blowing slag pipeline (11) with secondary sack cleaner (9) discharge port, and the discharge port of silica flour withdrawing can (12) reclaims mouthful (19) with trichlorosilane synthetic furnace and is connected.
2. comprehensive utilization waste silicon powder according to claim 1 is produced the equipment of trichlorosilane, and it is characterized in that: this equipment also is provided with gas buffer jar (17), and gas buffer jar (17) is connected with silica flour withdrawing can (12).
3. comprehensive utilization waste silicon powder according to claim 2 is produced the equipment of trichlorosilane, it is characterized in that: be provided with balance relief tube (14) and nitrogen ftercompction pipe (15) at silica flour withdrawing can (12) top.
4. comprehensive utilization waste silicon powder according to claim 1 and 2 is produced the equipment of trichlorosilane, it is characterized in that: be provided with star feeder (13) between silica flour withdrawing can (12) and trichlorosilane synthetic furnace recovery mouthful (19).
5. comprehensive utilization waste silicon powder according to claim 4 is produced the equipment of trichlorosilane, it is characterized in that: blow slag pipeline (11) end and be provided with and blow slag tonifying Qi valve (18).
CN2010205501403U 2010-09-30 2010-09-30 Device comprehensively utilizing waste silica powder for producing trichlorosilane Expired - Fee Related CN201864576U (en)

Priority Applications (1)

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CN2010205501403U CN201864576U (en) 2010-09-30 2010-09-30 Device comprehensively utilizing waste silica powder for producing trichlorosilane

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Application Number Priority Date Filing Date Title
CN2010205501403U CN201864576U (en) 2010-09-30 2010-09-30 Device comprehensively utilizing waste silica powder for producing trichlorosilane

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102897770A (en) * 2011-10-27 2013-01-30 内蒙古锋威硅业有限公司 Method and device for improving hydrogenation of silicon tetrachloride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102897770A (en) * 2011-10-27 2013-01-30 内蒙古锋威硅业有限公司 Method and device for improving hydrogenation of silicon tetrachloride

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110615

Termination date: 20150930

EXPY Termination of patent right or utility model