CN201864558U - Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester - Google Patents
Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester Download PDFInfo
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- CN201864558U CN201864558U CN201020629604XU CN201020629604U CN201864558U CN 201864558 U CN201864558 U CN 201864558U CN 201020629604X U CN201020629604X U CN 201020629604XU CN 201020629604 U CN201020629604 U CN 201020629604U CN 201864558 U CN201864558 U CN 201864558U
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Abstract
The utility model discloses a photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester, which comprises an upper layer substrate, a lower layer substrate and a liquid cavity, wherein the upper layer substrate is provided with an upper conductive film layer; the lower layer substrate is provided a photoconductive film layer and a lower conductive film layer which are based on P3HT: PCBM; the upper conductive film layer and the lower conductive film layer are respectively provided with a lead connected with an external alternating voltage; the upper surface of the photoconductive film layer is provided with an insulation layer; and the lower surface of the photoconductive film layer is provided with a transition layer. The utility model has the characteristics that (1) a preparation process is very simple, can be carried out at room temperature and does not have special requirements on a preparation environment, therefore, the preparation period and the preparation cost of the chip is greatly reduced; (2) because the photoconductive property of a photosensitive material is utilized to reduce the preparation cost of the chip is reduced; and (3) a projected image is controlled to be irradiated to the chip by a computer to generate a virtual electrode, and fully digitized operation can be implemented.
Description
Technical field
The utility model relates to micro-nano automated manufacturing field, micro-fluidic field and micro-nano biological technical field; be a kind of scale, automation specifically, can repeat, micro-and nano-particles operation cheaply and mounting technology, be that a kind of photo-conductive film is controlled chip and preparation method furtherly.
Background technology
Micro-nano Science and Technology is the characteristic and the interaction of research material on micro-nano-scale, and utilizes a novel science of these characteristics.Its final goal is the characteristic that directly shows on micro-nano-scale with material, makes the product with specific function.Material under the micro-nano-scale, as inorganic nanometer pipeline, nano particle, physics such as electricity, magnetic, light, power, heat and chemical aspect have many novel performances, with the nano electron device of these nano materials, will provide new opportunity and technological approaches for the technical development in fields such as electronics, information, material, advanced manufacturing, biomedicine as construction unit; And organically cell, protein, DNA etc. are the basic composition unit of life, to its nano biological system of studying and constituting, will bring revolutionary breakthrough to biomedicine, also will promote human life and the research secrets of life on more small yardstick, explored simultaneously.Automations such as the batch of micro Nano material/monomer transmission, screening, carrying, location and assembling are controlled technology to the micro-nano sample preparation of scale; especially towards the manipulation of biological entities; the development that promotes micro-nano technical development, particularly biomedical technology is had very important significance.The technology of controlling of micro-nano material (as particle, pipeline, molecule etc.) has become the micro-nano science of research and has realized one of core technology of nano-fabrication technique, also is an important difficult problem that needs to be resolved hurrily in the research of current extremely manufacturing technical field.It is not only the technological means of micro-nano scientific research and expansion, and is that micro-nano science and technology is moved towards application, the pillar of micro-nano high-tech industry.
For over ten years, domestic and international large quantities of scholars have attempted several different methods, develop multiple micro-/ nano and control technology.Wherein, can realize that the micro-/ nano material mainly comprises in the technology of ad-hoc location operation with assembling: carry out the scanning probe microscopy of nano collimation and operation (AFM) technology by controlling probe motion and applying power.Although AFM can controlled, repeatably finish various high accuracy nano-manipulation tasks under the condition; yet the scanning imagery of this method all must be realized by probe with operation; operating efficiency is very low; and; sweep limits is very little, therefore is difficult to realize the nanoprocessing of scale automation and control.Utilize magnetic field gradient that the magnetic micro-and nano-particles is produced enough strong static state or dynamic force, and then realize stretching or magnetic tweezer (Magnetic tweezers) technology of catching.Because problems such as the magnetic tweezer technology can only manipulation of magnetic particles, and the accumulation behavior of magnetic particle and the magnetic torque that brings out are very little have usually limited the development and the application of this kind technology greatly.Utilize light field brake force principle to be embodied as light tweezer (Optical tweezers) technology of the clamping and the operation of small items; The operation of light tweezer is considered to a kind of potential nanoprocessing method, but when using it for the biological sample operation, because light source power is very big, the heat that is produced can cause very big infringement to sample, even kill the active bio sample because heat is too high, therefore, still there is a lot of limitation in this technology.Utilize the operating technology of the electric field dielectrophoresis (DEP) that is otherwise known as, be meant the neutral particle that is in the inhomogeneous field of space, owing to the polarized effect that is subjected to electric field force produces the phenomenon of motion.Its characteristics of motion is by the decision of the induced dipole moment of the frequency of applying electric field and particle.Although dielectrophoresis technology has obtained using widely in a lot of fields, along with micro-nano technology constantly develops to application, the shortcoming of this technology reveals gradually.Dielectrophoresis technology must just can be realized by the physics microelectrode, and existing microelectrode making all is through complicated MEMS technology, and, exercisable sample type of a kind of micro-electrode chip of physical dimension and size are limited, when being operated object variation, just need re-design electrode chip.Therefore, this will spend a large amount of time and cost of manufacture.Light-induction dielectrophoresis technology (ODEP) is a kind of emerging operating technology that optical technology is combined with dielectrophoresis technology, it is at first depositing the tin indium oxide of light-sensitive material (ITO) AC of applying voltage on glass, when illumination is mapped on it, the zone that is mapped to by illumination just is conducting state, thereby induce the production dummy electrodes in this zone, and then produce the dielectrophoresis phenomenon.The light-induction dielectrophoresis technology is owing to no longer need to prepare physical electrode, induce the generation dummy electrodes by the projected light of real time computer control fully, therefore be a kind of digitlization that realized, the micro-/ nano method of operating of restructural, automation, once occurring causing very big repercussion and strong interest, be considered to realize nanometer automated manufacturing one of the most promising technology in micro-/ nano operating technology field.
Light-sensitive material is the core of light-induction dielectrophoresis system.The realization of light-induction dielectrophoresis technology mainly is by the photoconductive property that light-sensitive material had, and is not promptly having under the condition of illumination, and the light-sensitive material electrical conductivity is very little, becomes complete cut-off state; Under the illumination condition, the light-sensitive material electrical conductivity is very big, becomes conducting state, and then form inhomogeneous field on liquid level, and the particle in the liquid is produced dielectrophoretic force.Existing light-induction dielectrophoresis operation chip and the light-sensitive material that system adopted mainly all are amorphous silicon hydrides, its photoconductive 1000 times of being about dark conductance.The preparation method of at present conventional, the most ripe amorphous silicon hydride (a:Si-H) film is plasma enhanced chemical vapor deposition method (PECVD).Amorphous silicon hydride (a:Si-H) film of this method preparation has uniform structure, tack and good photoconductive property preferably.But the preparation of a:Si-H need be carried out in special super clean clean room, and preparation equipment and its cost are very high, complicated process of preparation, and also that use is poisonous explosive gas (SiH
4, BH
3, PH
3), the operating temperature of equipment is 300 ~ 450 ° of C in the preparation process.These have all hindered the light-induction dielectrophoresis The Application of Technology in popularization greatly.
Therefore, carry out when micro-nano sample controls utilizing the light-induction dielectrophoresis technology, can adopt a kind of novel light-sensitive material, not only has higher light dark conductance ratio, simultaneously, preparation technology is simple, preferably can at room temperature carry out, and the ordinary laboratory environment both can satisfy the preparation environment requirement, became to solve the light-induction dielectrophoresis technology in micro-nano automated manufacturing field key technologies for application problem.The solution of this problem will reduce the complexity of light-induction dielectrophoresis operation chip greatly, reduce preparation cost, shorten preparation time, and will promote the progress of micro-nano automation mechanized operation and mounting technology widely, promote the light-induction dielectrophoresis technology in micro-nano automated manufacturing field, the popularization in nanometer biotechnology field and application.
The utility model content
For overcome existing with a:Si-H be the photo-conductive film layer material light-induction dielectrophoresis chip preparing process complexity, need special preparation environment and preparation equipment, preparation cost high; and because use danger that toxic and harmful brought or the like deficiency; the purpose of this utility model be to provide a kind of preparation technology is simple, cost is low, adopt a kind of novel light-sensitive material, can realize the light-induction dielectrophoresis chip that micro-nano-scale scale automation is controlled.
It is a kind of micro-fluidic chip based on the light-induction dielectrophoresis technology that chip is controlled in the micro-nano scale automation that the utility model proposes.With existing light-induction dielectrophoresis chip adopt mostly amorphous silicon hydride be photoconductive material different be; the utility model adopts poly-3-hexyl thiophene (P3HT) and C60 derivative PCBM([6; 6]-phenyl-C61-butyric acid methyl ester) mixing photosensitive polymer (P3HT:PCBM) be the photo-conductive film layer material; be mapped to P3HT:PCBM thin layer generation dummy electrodes by being projected illumination; and then between upper and lower base plate, form inhomogeneous field; to micro-nano sample generation dielectrophoretic force wherein, realize scale automation mechanized operation and assembling to sample.
Wherein, core-light-sensitive material of the present utility model has been selected poly-3-hexyl thiophene and C60 derivative mixing photosensitive polymer (P3HT:PCBM) for use, and its mechanism of action and effect are as follows:
Itself has good electrical conductivity C60, can obtain better photoconductive property with other high minute polymer conjugation.The nineties in last century, in the world reported first with conjugated polymer as electron donor material (donor, D), C60 as electron acceptor material (acceptor, A) between the photoinduction charge transfer phenomenon.As everyone knows, p type semi-conducting material P3HT is a kind of good electronic donor material.And PCBM is a kind of electronics acceptor material, is the derivative of C60, compares with C60, and PCBM has better dissolubility, has possessed the advantage of C60 simultaneously, as good electron affinity, transparent good and good electron transmission performance.The P3HT:PCBM blending structure has increased D/A(and has given body/acceptor) interfacial area, each D/A contact position has formed a hetero-junctions, and the hetero-junctions of dispersion has reduced the diffusion length of photoexciton, helps the separation of electric charge.Simultaneously, the D/A network is a bicontinuous structure, and electronics and hole that exciton dissociation becomes are being transferred to electrode in the contiguous network separately, help the conduction and the collection of electric charge.Therefore, in the P3HT:PCBM heterojunction structure, P3HT is after illumination, electronics is subjected to exciting the back that transition takes place, owing to exist around it and be subjected to host molecule PCBM, so P3HT be stimulated the electronics that produces can be with near the PCBM material the very speed of fast (femtosecond) passes to, thereby make this light-sensitive material have very fast opto-electronic conversion speed and very high photoelectric transformation efficiency.
Concrete scheme is as follows:
A kind of based on poly-3-hexyl thiophene (P3HT) and C60 derivative PCBM([6,6]-phenyl-C61-butyric acid methyl ester) photosensitive mixed polymer (P3HT:PCBM) photo-conductive film control chip, it is characterized in that: comprise upper strata substrate, lower floor's substrate, and fluid chamber wall between two layers of substrate and fluid chamber wherein; Described upper strata substrate this as transparent, and the surface that contacts with fluid chamber is provided with the conductive film of layer of transparent, promptly goes up conductive membrane layer; Described lower floor substrate is transparent equally, and the surface that lower floor's substrate contacts with fluid chamber is provided with a photo-conductive film layer based on P3HT:PCBM, and lower floor substrate bottom also is provided with conductive film, promptly descends conductive membrane layer; The described conductive membrane layer of going up all is provided with the lead-in wire that is connected external communication voltage with following conductive membrane layer;
In order to protect the photo-conductive film layer, prevent that it from electrolysis taking place and reduce unstable characteristic that the photo-conductive film layer shows and in order to reduce the contact resistance between the transparent conductive film on photo-conductive film layer and the substrate in liquid environment, improve chip performance and job stability, above the described photo-conductive film layer insulating barrier is set, described photo-conductive film layer is provided with transition zone with following conductive film interlayer;
Described upper and lower conductive membrane layer is made by tin indium oxide (ITO) material; Transition zone adopts 3, and 4-ethene dioxythiophene/polystyrolsulfon acid (PEDOT-PSS) is made; Insulating barrier adopts lithium fluoride (LiF) material to make; The material of fluid chamber wall is the electrically conducting transparent double faced adhesive tape.
It is to realize in the following way the micro-nano-scale material is carried out the operation of scale automation and assembling that chip is controlled in micro-nano scale automation of the present utility model.When on upper strata substrate and lower floor's substrate, applying alternating voltage, because the photo-conductive film that lower floor's substrate is comprised is under the condition of unglazed photograph, has minimum electrical conductivity, on liquid level, there is not pressure drop this moment, neither form inhomogeneous field, therefore, do not produce dielectrophoretic force for the particle in the liquid, particle keeps inactive state.When projected light shines on lower floor's substrate, the photo-conductive film that lower floor's substrate is comprised is having under the condition of illumination, electrical conductivity raises rapidly, be projected lower floor's substrate region that illumination is mapped to and be equivalent to a virtual electrode, and then on liquid level, formed inhomogeneous field, thus, the particle that is arranged in liquid level just has been subjected to dielectrophoretic force.Under the effect of this power, particle or the effect that is subjected to positive dielectrophoretic force is adsorbed on the dummy electrodes zone, or be subjected to negative dielectrophoretic force to be pushed to zone away from dummy electrodes.When projected light was moved on lower floor's substrate by being controlled at of computer, the dummy electrodes that is generated also moved, and then drove particle and move in liquid level, thereby realized the operation to particle.Because this system does not rely on the specific physical structure of chip fully, so long as the zone that projected light can shine on lower floor's substrate can be realized operation in theory, and, the size of projection hot spot is only relevant with selected projector equipment with quantity, therefore, can realize large-scale operation.In addition, the shape of projected light, quantity and motion can directly be controlled by computer, and the particle position in the liquid also can be gathered by visual monitor system, therefore, can realize automation mechanized operation.
The utlity model has following characteristics:
1) this chip adopts photopolymerizable material to make fully.The photo-conductive film layer adopts the P3HT:PCBM material.With respect to existing be the light-induction dielectrophoresis chip of photoconductive material with the amorphous silicon hydride, the preparation technology of this polymer chip is very simple, can carry out at normal temperatures, and the preparation environment is not had specific (special) requirements, therefore, greatly reduce the manufacturing cycle and the cost of chip;
2) owing to utilized the photoconductive property of light-sensitive material, this chip need not to make any physical electrode structure, therefore, greatly reduces the preparation cost of chip;
3) shine by the computer control projected image and generate dummy electrodes on the chip, can realize the operation of fully digitalization.And, by change, can realize the dummy electrodes structure of various difformities, size to the shape of projected image, be a kind of highly flexible, complete reconfigurable system.
Description of drawings
Fig. 1 is the structural representation of the utility model chip;
Fig. 2 is the work system principle schematic of the utility model chip.
The specific embodiment
As shown in Figure 1, the utility model chip is made up of last substrate, transparency liquid chamber wall 8, fluid chamber 9, subtegulum; Last substrate comprises transparent substrates 1 and last conductive membrane layer 2; Subtegulum is by insulating barrier 7, photo-conductive film layer 6, transition zone 5, transparent conductive film layer 3 and substrate 4 down.
In the present embodiment, glass is all adopted in last substrate 1 and following substrate 4.Last conductive membrane layer 2 and following conductive membrane layer 3 all adopt ITO to make.Insulating barrier on the subtegulum adopts LiF to make.Photoconduction conductive film layer adopts P3HT:PCBM to make.Transition zone adopts PEDOT-PSS to make.The material of fluid chamber wall 8 is the electrically conducting transparent double faced adhesive tape.Being operated object is scattered in the liquid medium in the fluid chamber 9.The concrete preparation technology of this chip is as follows:
Step 1: successively soak the glass that has ito thin film, it is cleaned, dry up with nitrogen then with IPA, alcohol and deionized water;
Step 2: the PEDOT:PSS aqueous solution is spin-coated on the following conductive membrane layer of subtegulum dry back film forming;
Step 3: the P3HT and the PCBM of weight such as weigh, add respectively in the chlorobenzene solution, after the concussion dissolving both are mixed, and it is mixed, to obtain the P3HT:PCBM mixed liquor with magnetic stirring apparatus;
Step 4: with the substrate preheating that step 2 obtains, the P3HT:PCBM mixed liquor that step 3 is obtained is spun on it, heat treatment in baking oven then;
Step 5: utilize heat deposition equipment on the film that step 4 obtains, to deposit one deck LiF.
As shown in Figure 2, among the work system theory of constitution figure of the utility model chip, AC signal generator is used for applying ac voltage signal on subtegulum on the chip.Projector 103 by computer 101 controls shines light pattern on the chip by condenser 102.The photoconductive material P3HT:PCBM film of subtegulum is having under the condition of illumination, be conducting state, and then above the projected light pattern, between the upper and lower surface of liquid level, forming inhomogeneous field, the effect that makes the particle that is arranged in liquid level be subjected to dielectrophoretic force produces motion.When by computer 101 control light projection pattern change shape, position, corresponding particle also moves along with moving of projected light.The CCD104 of top is used for the motion state that real time monitoring is followed the tracks of particle.
Claims (2)
1. the photosensitive mixed polymer photo-conductive film based on poly-3-hexyl thiophene (P3HT) and C60 derivative PCBM is controlled chip, it is characterized in that: comprise upper strata substrate, lower floor's substrate, and fluid chamber wall between two layers of substrate and fluid chamber wherein; Described upper strata substrate this as transparent, and the surface that contacts with fluid chamber is provided with the conductive film of layer of transparent, promptly goes up conductive membrane layer; Described lower floor substrate is transparent equally, and the surface that lower floor's substrate contacts with fluid chamber is provided with a photo-conductive film layer based on P3HT:PCBM, and lower floor substrate bottom also is provided with conductive film, promptly descends conductive membrane layer; The described conductive membrane layer of going up all is provided with the lead-in wire that is connected external communication voltage with following conductive membrane layer.
2. the chip of controlling according to claim 1 is characterized in that: above the described photo-conductive film layer insulating barrier is set, described photo-conductive film layer is provided with transition zone with following conductive film interlayer.
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| CN201020629604XU CN201864558U (en) | 2010-11-29 | 2010-11-29 | Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester |
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| CN201020629604XU CN201864558U (en) | 2010-11-29 | 2010-11-29 | Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478581A (en) * | 2010-11-29 | 2012-05-30 | 中国科学院沈阳自动化研究所 | Photosensitive mixed polymer photoconductive film control chip based on poly[3-hexylthiophene] (P3HT) and C60 derivative and preparation method thereof |
| TWI512383B (en) * | 2012-07-04 | 2015-12-11 | Ind Tech Res Inst | Optically-induced dielectrophoresis device |
| CN109821582A (en) * | 2019-03-13 | 2019-05-31 | 京东方科技集团股份有限公司 | A kind of particle-capture structure, particle-capture chip and particle-capture method |
-
2010
- 2010-11-29 CN CN201020629604XU patent/CN201864558U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478581A (en) * | 2010-11-29 | 2012-05-30 | 中国科学院沈阳自动化研究所 | Photosensitive mixed polymer photoconductive film control chip based on poly[3-hexylthiophene] (P3HT) and C60 derivative and preparation method thereof |
| TWI512383B (en) * | 2012-07-04 | 2015-12-11 | Ind Tech Res Inst | Optically-induced dielectrophoresis device |
| CN109821582A (en) * | 2019-03-13 | 2019-05-31 | 京东方科技集团股份有限公司 | A kind of particle-capture structure, particle-capture chip and particle-capture method |
| CN109821582B (en) * | 2019-03-13 | 2021-12-03 | 京东方科技集团股份有限公司 | Particle capture structure, particle capture chip and particle capture method |
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Granted publication date: 20110615 Termination date: 20141129 |
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