CN201841468U - Gas transmission device - Google Patents
Gas transmission device Download PDFInfo
- Publication number
- CN201841468U CN201841468U CN2010205648183U CN201020564818U CN201841468U CN 201841468 U CN201841468 U CN 201841468U CN 2010205648183 U CN2010205648183 U CN 2010205648183U CN 201020564818 U CN201020564818 U CN 201020564818U CN 201841468 U CN201841468 U CN 201841468U
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- Prior art keywords
- inner casing
- packing ring
- ring
- delivery mechanism
- rotating shaft
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Abstract
The utility model provides a gas transmission device comprising a plurality of transmission pipelines and a rotating shaft, wherein the transmission pipelines are superposed in sequence; part of the rotating shaft is arranged in the transmission pipelines; each transmission pipeline comprises a casing and an isolating mechanism arranged in the casing; the isolating mechanism comprises an inner casing, a magnetic fluid, a first retaining gasket, a second retaining gasket, a first snap ring, a second snap ring and at least one seal ring; the outer side wall of the inner casing is connected with the inner side wall of the casing; the first retaining gasket and the first snap ring are arranged at the top end of the inner casing in sequence; the second retaining gasket and the second snap ring are arranged below the bottom end of the inner casing in sequence; the magnetic fluid is positioned between the inner side wall of the inner casing and the outer side wall of the rotating shaft and between the first retaining gasket and the second retaining gasket; and the seal ring is arranged between the outer side wall of the inner casing and the inner side wall of the casing. The gas transmission device provided by the utility model has a good sealing effect and is durable.
Description
Technical field
The utility model relates to the device of transportation of substances, relates in particular to a kind of charge delivery mechanism.
Background technology
Figure 1 shows that the charge delivery mechanism in the chemical-mechanical planarization equipment, this charge delivery mechanism can be used for vacuumizing, make grinding head (head) can tightly hold wafer, this charge delivery mechanism also can be used for transmitting Compressed Gas, makes grinding head wafer can be pressed on the grinding pad.Referring to Fig. 1, this charge delivery mechanism comprises a top cover 110, more piece transmission pipeline 120, a fixed pedestal 130, a rotating shaft 140 and a flange 150; Described more piece transmission pipeline 120 is stacked successively, described top cover 110 is arranged on the top of stacked successively more piece transmission pipeline 120, the bottom of stacked successively more piece transmission pipeline 120 is arranged on the described fixed pedestal 130, the top of described rotating shaft 140 is passed described more piece transmission pipeline 120 successively and is connected with described top cover 110, these rotating shaft 140 bottoms are outside described transmission pipeline 120 is extended in the bottom of stacked successively more piece transmission pipeline 120, and described flange 150 is arranged on the bottom of described rotating shaft 140; The sidewall of the described transmission pipeline 120 of every joint is provided with a passage 121.
Referring to Fig. 2, be provided with many breather pipes 141 in the described rotating shaft 140, one end of described breather pipe 141 communicates with described flange 150, the other end of described breather pipe 141 is provided with opening 142, an opening 142 is corresponding with a passage 121, and described opening 142 passages 121 pairing with it are in same horizontal level;
Described transmission pipeline 120 comprises shell module 122 and inner module 123, described inner module 123 is fixedly installed on the lateral wall of described rotating shaft 140, stacked successively formation one cavity of the shell module 122 of the described transmission pipeline 120 of more piece, described inner module 123 is used for this cavity isolation is become one by one little gas chamber, perfect condition is between each gas chamber good sealing property to be arranged, in order to prevent that gas is by the slot leakage between the lateral wall of described inner module 123 and described rotating shaft 140, be provided with sealing ring (O-ring) 124 between the lateral wall of described inner module 123 and described rotating shaft 140, described sealing ring 124 adopts elastomeric material to make.
The shortcoming of the charge delivery mechanism of prior art is when described rotating shaft 140 is rotated, between described sealing ring 124 and the described rotating shaft 140 frictional force to be arranged, after long-time the use, the sealing ring 124 that elastomeric material is made can damage, thereby destroys the sealing between each gas chamber, produces gas leak phenomenon; And because described sealing ring 124 normally customizes, the time that the sealing ring that more renews not only spends is long, and the cost height.
The utility model content
The purpose of this utility model is to provide a kind of charge delivery mechanism, good sealing effect, and durable.
To achieve the above object, the utility model provides a kind of charge delivery mechanism, being used for carrying out multi-channel gas in rotation carries, comprise that a stacked successively more piece transmission pipeline and a part are arranged on the rotating shaft in the described transmission pipeline, the described transmission pipeline of every joint comprises shell and the interior interrupter of described shell is set that described interrupter comprises that an inner casing, magnetic fluid, first stop that packing ring, second stops packing ring, first snap ring, second snap ring and at least one sealing ring; The lateral wall of described inner casing is connected with the madial wall of described shell; Described first stops that the packing ring and first snap ring are successively set on the top of described inner casing; Described second stops that the packing ring and second snap ring are successively set under the bottom of described inner casing; Described magnetic fluid stops that at the madial wall of described inner casing and the lateral wall and described first of described rotating shaft packing ring and second stops between the packing ring; Described sealing ring is arranged between the madial wall of the lateral wall of described inner casing and described shell.
The above-mentioned gas transmitting device, wherein, described interrupter also comprises elastic washer, described elastic washer is arranged on described first snap ring and described first to be stopped between the packing ring.
The above-mentioned gas transmitting device, wherein, described interrupter also comprises the clutch shaft bearing and second bearing; Described clutch shaft bearing is arranged on described first snap ring and described first to be stopped between the packing ring; Described second bearing is arranged on described second snap ring and second to be stopped between the packing ring.
The above-mentioned gas transmitting device, wherein, described interrupter also comprises the clutch shaft bearing and second bearing; Described clutch shaft bearing is arranged on described elastic washer and described first to be stopped between the packing ring; Described second bearing is arranged on described second snap ring and second to be stopped between the packing ring.
The above-mentioned gas transmitting device, wherein, described inner casing is the magnetic inner casing.
The above-mentioned gas transmitting device, wherein, described first stops that packing ring and second stops that packing ring all adopts plastics to make.
The above-mentioned gas transmitting device wherein, is provided with two sealing rings between the lateral wall of described inner casing and the madial wall of described shell.
Charge delivery mechanism of the present utility model adopts magnetic fluid to make encapsulant, rotating shaft can attract magnetic fluid when rotating, make magnetic fluid tightly be adsorbed in the rotating shaft, good sealing effect, and magnetic fluid can not be worn because of frictional force, and then damages the generation gas leak phenomenon, therefore, adopt magnetic fluid to make encapsulant good sealing effect, long service life;
Charge delivery mechanism of the present utility model is provided with a plurality of bearings, and the resistance that has been subjected to when having reduced the rotating shaft rotation has greatly reduced the loss of rotating shaft, makes the charge delivery mechanism stable and reliable working performance;
Charge delivery mechanism of the present utility model is simple in structure, easy to loading and unloading.
Description of drawings
Charge delivery mechanism of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the charge delivery mechanism of prior art.
Fig. 2 is the cutaway view of a joint transmission pipeline in the prior art.
Fig. 3 is the structural representation of charge delivery mechanism of the present utility model.
Fig. 4 is the cutaway view of charge delivery mechanism of the present utility model.
The specific embodiment
Below with reference to Fig. 3～Fig. 4 charge delivery mechanism of the present utility model is described in further detail.
Charge delivery mechanism of the present utility model is used for carrying out multi-channel gas in rotation and carries, this charge delivery mechanism comprises that a stacked successively more piece transmission pipeline and a part are arranged on the rotating shaft in the described transmission pipeline, and the described transmission pipeline of every joint comprises shell and the interior interrupter of described shell is set;
Described interrupter comprises that an inner casing, magnetic fluid, first stop that packing ring, second stops packing ring, first snap ring, second snap ring and at least one sealing ring;
The lateral wall of described inner casing is connected with the madial wall of described shell;
Described first stops that the packing ring and first snap ring are successively set on the top of described inner casing;
Described second stops that the packing ring and second snap ring are successively set under the bottom of described inner casing;
Described magnetic fluid stops that at the madial wall of described inner casing and the lateral wall and described first of described rotating shaft packing ring and second stops between the packing ring;
Described sealing ring is arranged between the madial wall of the lateral wall of described inner casing and described shell.
Charge delivery mechanism of the present utility model adopts magnetic fluid to make encapsulant, good sealing effect, long service life.
Now describe charge delivery mechanism of the present utility model in detail with a preferred embodiment:
Referring to Fig. 3, the charge delivery mechanism of present embodiment comprises top cover 210, three joint transmission pipelines 220, fixed pedestal 230, rotating shaft 240 and flange 250;
Described three joint transmission pipelines 220 are vertically stacked successively;
Described top cover 210 is arranged on the top of three stacked successively joint transmission pipelines 220;
The bottom of three stacked successively joint transmission pipelines 220 is arranged on the described fixed pedestal 230;
The top of described rotating shaft 240 is passed described three joint transmission pipelines 220 successively and is connected with described top cover 210, and extend outside the described transmission pipeline 220 from the bottom of three stacked successively joint transmission pipelines 220 bottom of described rotating shaft 240;
Described flange 250 is arranged on the bottom of described rotating shaft 240.
Referring to Fig. 4, the shell 222 of the described transmission pipeline 220 of every joint is equipped with housing breather 221 and installing hole 223, by realizing respectively saving being connected between the described transmission pipeline 220 with the screw of described installing hole 223 couplings;
Described top cover 210 is provided with top cover installing hole 211, and described top cover 210 is connected with described transmission pipeline 220 by this top cover installing hole 211;
Described transmission pipeline 220 is fixed on the described fixed pedestal 230 by pedestal fixing hole 224;
Be connected part at described top cover 210 with described transmission pipeline 220 and be provided with sealing ring 212, sealing circle 212 be used to prevent gases in the described transmission pipeline 220 by the slit between described top cover 210 and the described transmission pipeline 220 to this charge delivery mechanism external leakage;
Also be provided with sealing ring 225 in each junction of saving between the described transmission pipeline 220, sealing circle 225 is used to prevent that the gas in the described transmission pipeline 220 from saving slit between the described transmission pipeline 220 to this charge delivery mechanism external leakage by each.
The part of described rotating shaft 240 is positioned at described shell 221, and the top of this rotating shaft 240 is connected with described top cover 210; Be provided with three breather pipes 241 in the described rotating shaft 240, a described breather pipe 241 is corresponding to the described transmission pipeline 220 of a joint, promptly described breather pipe 241 is corresponding with a described housing breather 221, one end of described breather pipe 241 communicates with described flange 250, the other end of described breather pipe 241 is provided with opening 242, and opening 242 and these breather pipe 241 pairing housing breathers 221 of described breather pipe 241 are positioned at same horizontal level.
The stacked successively ring bag of shell 222 of the described transmission pipeline 220 of three joints forms a cavity, in each saves described transmission pipeline 220, interrupter is set, this cavity isolation is become three gas chamber 226 (in the described transmission pipeline 220 of a joint a described gas chamber 226 being arranged), should have good sealing property between each described gas chamber 226, promptly air tight mutually between each described gas chamber 226;
The interrupter of the described transmission pipeline 220 of every joint is arranged on this below of saving housing breather 221 described in the described transmission pipeline 220;
Described interrupter comprise an inner casing 310, magnetic fluid 320, two stop packing ring 330, two bearings 340, two snap rings 350, an elastic washer 360 and two sealing rings 370;
Described inner casing 310 in the form of a ring, the lateral wall of described inner casing 310 is connected with the madial wall of described shell 221;
Described packing ring 330, bearing 340, elastic washer 360 and the snap ring 350 of stopping is successively set on the top of described inner casing 310;
Described packing ring 330, bearing 340 and the snap ring 350 of stopping is successively set under the bottom of described inner casing 310;
Between the lateral wall of the madial wall of described inner casing 310 and described rotating shaft 240 and described two stop and be provided with described magnetic fluid 320 between the packing ring 330;
Described two sealing rings 370 are arranged between the lateral wall of the madial wall of described inner casing 310 and described rotating shaft 240;
Described sealing ring 370 is used to prevent that the slit between the madial wall of the lateral wall of gas by described inner casing and described shell in the adjacent described gas chamber 226 from leaking mutually, and adopting two sealing rings 370 is for further raising sealing property;
Described inner casing 310 preferred magnetic materials are made, described packing ring 330 preferred plastic material that stop are made, described inner casing 310 and two containers that stop packing ring 330 as the described magnetic fluid 320 of splendid attire, the described packing ring 330 that stops is used to prevent that described magnetic fluid 320 from leaking along the lateral wall of described rotating shaft 240;
Described magnetic fluid 320 is as encapsulant, prevents that the gas in the adjacent described gas chamber 226 from leaking mutually along the lateral wall of described rotating shaft 240;
Described bearing 340 is used to reduce the resistance that is subjected to when described rotating shaft 240 is rotated;
Described snap ring 350 is used for fixing the position of described interrupter;
Described elastic washer 360 is used to compress described inner casing 310, stops packing ring 330 and bearing 340.
When charge delivery mechanism of the present utility model is worked, described rotating shaft 240 rotatablely moves, miscellaneous part is transfixion then, described rotating shaft 240 can attract described magnetic fluid 320 when rotating, described magnetic fluid 320 tightly is adsorbed on the lateral wall of described rotating shaft 240, therefore, use magnetic fluid to have excellent sealing performance as encapsulant, in addition, frictional force between described magnetic fluid 320 and the described rotating shaft 240 can not produce abrasive action to described magnetic fluid 320, long-time use can not damage yet and produce gas leak phenomenon, therefore, uses magnetic fluid to make the encapsulant long service life; When described rotating shaft 240 is rotated, describedly stop that frictional force between packing ring 330 and the described rotating shaft 240 can hinder described rotating shaft 240 and rotate, increase the resistance that is subjected to when described bearing 340 can reduce described rotating shaft 240 rotations; Described sealing ring 370 is in actionless state all the time, therefore, does not have frictional force between the madial wall of described sealing ring 370 and described shell, can not damage described sealing ring 370 and the sealing of destruction sealing ring; Described elastic washer 360 makes described inner casing 310, stops that the position is tightr between packing ring 330 and the bearing 340, overcomes the influence that described rotating shaft 240 rotations produce these parts.
Charge delivery mechanism of the present utility model is simple in structure, easy to loading and unloading.
Charge delivery mechanism of the present utility model is specially adapted to vacuumize and transmit Compressed Gas.
In the above-described embodiments, be provided with three breather pipes 241 in the described rotating shaft 240, promptly described charge delivery mechanism is the triple channel charge delivery mechanism, yet will be appreciated that, the quantity of breather pipe of the present invention is not limited to three, and the quantity of described breather pipe 241 can also be one, two or more.
Claims (7)
1. charge delivery mechanism, being used for carrying out multi-channel gas in rotation carries, comprise that a stacked successively more piece transmission pipeline and a part are arranged on the rotating shaft in the described transmission pipeline, the described transmission pipeline of every joint comprises shell and the interior interrupter of described shell is set, it is characterized in that described interrupter comprises that an inner casing, magnetic fluid, first stop that packing ring, second stops packing ring, first snap ring, second snap ring and at least one sealing ring;
The lateral wall of described inner casing is connected with the madial wall of described shell;
Described first stops that the packing ring and first snap ring are successively set on the top of described inner casing;
Described second stops that the packing ring and second snap ring are successively set under the bottom of described inner casing;
Described magnetic fluid stops that at the madial wall of described inner casing and the lateral wall and described first of described rotating shaft packing ring and second stops between the packing ring;
Described sealing ring is arranged between the madial wall of the lateral wall of described inner casing and described shell.
2. charge delivery mechanism as claimed in claim 1 is characterized in that described interrupter also comprises elastic washer, and described elastic washer is arranged on described first snap ring and described first to be stopped between the packing ring.
3. charge delivery mechanism as claimed in claim 1 is characterized in that, described interrupter also comprises the clutch shaft bearing and second bearing; Described clutch shaft bearing is arranged on described first snap ring and described first to be stopped between the packing ring; Described second bearing is arranged on described second snap ring and second to be stopped between the packing ring.
4. charge delivery mechanism as claimed in claim 2 is characterized in that, described interrupter also comprises the clutch shaft bearing and second bearing; Described clutch shaft bearing is arranged on described elastic washer and described first to be stopped between the packing ring; Described second bearing is arranged on described second snap ring and second to be stopped between the packing ring.
5. as the described charge delivery mechanism of arbitrary claim in the claim 1 to 4, it is characterized in that described inner casing is the magnetic inner casing.
6. as the described charge delivery mechanism of arbitrary claim in the claim 1 to 4, it is characterized in that described first stops that packing ring and second stops that packing ring all adopts plastics to make.
7. as the described charge delivery mechanism of arbitrary claim in the claim 1 to 4, it is characterized in that, be provided with two sealing rings between the lateral wall of described inner casing and the madial wall of described shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205648183U CN201841468U (en) | 2010-10-16 | 2010-10-16 | Gas transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205648183U CN201841468U (en) | 2010-10-16 | 2010-10-16 | Gas transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201841468U true CN201841468U (en) | 2011-05-25 |
Family
ID=44036372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205648183U Expired - Fee Related CN201841468U (en) | 2010-10-16 | 2010-10-16 | Gas transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201841468U (en) |
-
2010
- 2010-10-16 CN CN2010205648183U patent/CN201841468U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130325 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130325 Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110525 Termination date: 20181016 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |