CN201840972U - Temperature control dehumidification cabinet - Google Patents
Temperature control dehumidification cabinet Download PDFInfo
- Publication number
- CN201840972U CN201840972U CN2009200591275U CN200920059127U CN201840972U CN 201840972 U CN201840972 U CN 201840972U CN 2009200591275 U CN2009200591275 U CN 2009200591275U CN 200920059127 U CN200920059127 U CN 200920059127U CN 201840972 U CN201840972 U CN 201840972U
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- cabinet
- dehumidification
- temperature control
- control module
- temperature
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- Drying Of Gases (AREA)
Abstract
The utility model relates to a storage and drying treatment cabinet for microelectronics, semiconductor and other precision devices and materials, in particular to a temperature control dehumidification cabinet, which comprises a cabinet body, wherein a temperature control module, a quick dehumidification module and a control module are arranged in the cabinet body, the temperature control module comprises a heat source, and is provided with a convective circulation component and a circulation air duct; the quick dehumidification module comprises a dehumidification device and a dehumidification airflow valve control system; the control module comprises a display and setting part, a control mainboard and a humiture sampled signal input part; and the humiture of the cabinet can be set through the setting part, and other parameters, such as the safe value of humiture, warning, offset corrected value and the like can be set. The temperature control dehumidification cabinet can be applied to frequently taking and placing materials on a production line and opening a cabinet door, and can effectively meet the requirements on the temperature and dryness of the cabinet.
Description
Technical field
The utility model relates to the storage and the drying treatment cabinet of accurate devices such as a kind of microelectronics, semiconductor and material, especially a kind of temperature control type dehumidification cabinet.
Background technology
At present, in the production process of microelectronic product, product develops to the miniature integrated direction of this height, reduce in process of production from dust in the environment and moisture and become the key factor that improves product quality, many electronics dehumidifying cabinets have been produced therefrom, be widely used in and deposit all kinds of humidity sensitive equipment and material, but it is slow that wet speed falls in existing electronics dehumidifying cabinet, inner low humidity stability and uniformity are not good, can not be adapted to using under the frequent situation that picks and places material and frequent unlatching cabinet door on the production line, particularly can not handle wet quick components and parts in wet condition, say under this type of situation and can not finish effectively the safety storing of wet quick components and parts and processing again, and existing dehumidifying cabinet dehumidification mode is single, is short of to some extent on whole effect on moisture extraction.
The function of present electronics dehumidifying cabinet is just stored wet sensitive device, for components and parts in wet condition, electronics dehumidifying cabinet can not play the effect that components and parts are handled again, common way is to use baking oven to carry out high-temperature baking, but material for many components and parts, can not use high-temperature baking, high-temperature baking can make the metal pins oxidation of components and parts simultaneously, reduce the properties for follow of components and parts, only use lower temperature baking,, also do not reach the effect of baking though can not damage components and parts, and only to the temperature controlled while, be that temperature can be regulated according to the baking temperature that components and parts can tolerate, again humidity be reduced to very low level, as 5%RH, just can obtain one is safety, and efficient again baking is processing environment again.
Summary of the invention
One of the purpose of this utility model provides a kind of dehumidifying cabinet of dehumidifying storage fast when being adapted on the production line frequent unlatching the, the temperature control type dehumidification cabinet that carries out temperature control dehumidifying baking after can making moist to all kinds of wet sensitive devices simultaneously.
To achieve these goals, the utility model adopts following technical scheme:
It comprises a cabinet, is provided with temperature control module, quick dehumidification module in cabinet inside, and control module is formed,
Described temperature control module comprises a pyrotoxin, and is provided with convection circulation parts and circulation air path;
Dehumidification module comprises dehydrating unit and dehumidifying air-flow valve control system fast;
Control module connects temperature control module and quick dehumidification module respectively, and control module comprises the control mainboard, and the control mainboard connects demonstration and setting section and temperature and humidity sampling signal input part.
Preferably, described pyrotoxin is bifilar heating cable or ferrochrome heating wire, and described pyrotoxin is layed in the cabinet circulation air path.
Preferably, cabinet is made up of the steel body seal cavity and the magnetic envelope sealed door of antistatic spraying, and whole cabinet sheet resistance is the every square unit of 1Mohm-100Mohm/, resistance to earth＞1Mohm and less than 100Mohm.
Preferably, described control module also comprises a display module.
Temperature control type dehumidification cabinet of the present utility model can be adapted to using under the frequent situation that picks and places material and frequent unlatching cabinet door on the production line, can guarantee the temperature in the cabinet and the requirement of aridity under this type of situation effectively.
Description of drawings
Fig. 1 is that the functional module of the utility model embodiment is formed schematic diagram;
Fig. 2 is the overall structure schematic diagram of the utility model embodiment.
The utility model purpose, function and advantage will be in conjunction with the embodiments, are described further with reference to accompanying drawing.
The specific embodiment
As depicted in figs. 1 and 2, it comprises a cabinet 1 embodiment of the present utility model, is provided with temperature control module 2, quick dehumidification module 3 in cabinet inside, and control module 4 is formed,
Described temperature control module 2 comprises a pyrotoxin 21, and is provided with convection circulation parts 22 and circulation air path 23.
Can set the humiture in the cabinet by setting section 41, and can the safety value of other parameter such as humiture be reported to the police, the value of drift correction etc. is set; Calculate laggard line output control signal driving or stop temperature control module and quick dehumidification module work by control mainboard 42 again; Realize the automatic control of humiture.
Described pyrotoxin 21 is bifilar heating cable or ferrochrome heating wire, and described pyrotoxin 11 is layed in the cabinet circulation air path.
Described quick dehumidification module 3 comprises dehydrating unit 31 and air-flow valve control system 32; Charge in the cabinet and after the dehydrating unit depth-type filtration dehumidifies the compressed air degree of depth and displace cabinet, realize dehumidification function humid air in the cabinet; The air-flow valve control system in order to whether dried compressed air is charged into cabinet is controlled, and after humidity arrived and sets humidity in cabinet, the air-flow valve control system stopped to charge into dried compressed air, otherwise then charges into.
The described sensing element of temperature control modules is accepted the in-cabinet temperature situation and sends to comparing unit to compare with setting value, and according to comparative result adjustment control output, and export control instruction to heating unit, carry out or stop heating, to realize that temperature controlling and regulon are comprised temperature and humidity sensing parts, parameter setting and comparing unit, have the control output function concurrently.
Dry gas stream after described process dehumidifies is fast driven by the convection circulation parts, and the circulation air path of flowing through carries out Temperature Treatment, thus the final gas that obtains through low humidity and temperature modulation; And air-flow is circulated to keep the uniformity of humidity by the wind speed of setting by the convection circulation parts.Sensing element is accepted cabinet humiture situation and sends to comparing unit to compare with setting value, and adjusts humiture module condition of work and precision and the minimum fluctuation degree of convection circulation to guarantee Temperature and Humidity Control according to comparative result.
Cabinet is made up of the steel body seal cavity and the magnetic envelope sealed door of antistatic spraying, and whole cabinet sheet resistance can satisfy the every square unit of 1Mohm-100Mohm/.Resistance to earth can satisfy again＞1Mohm and meet the requirement of antistatic standard less than this sheet resistance of 100Mohm. and resistance to earth, guaranteed can make electrostatic dissipation than faster behind the static protection components and parts; Unload simultaneously when destaticing, can be too not little because of resistance, the excessive electronic devices and components that cause of earial drainage electric current are damaged;
Described control mainboard 42 also comprises a display module 44, can realize the functions such as setting, running status and alarm indication of humiture.
Cabinet 1 is made up of the steel body seal cavity and the magnetic envelope sealed door of antistatic spraying, about whole cabinet resistance to earth 1Mohm.
Wherein, after common compressed air is handled through quick dehumidification module 3, become the compressed air of depth drying, be injected into that cabinet is built-in changes original humid air in the cabinet, thereby reduce humidity fast.
1. the air in the cabinet is inhaled into circulation air path through the effect of convection circulation parts 12, and through behind the heating source, air themperature is heated, and is recycled blower fan and blows again and get back in the cabinet, realizes temperature controlled function.
2. Fig. 2 is the automatic Temperature and Humidity Control principle module map of the utility model embodiment, and all above-mentioned Temperature and Humidity Control all have this Temperature and Humidity Control unit controls.
Its operation principle is:
By the humiture in the Temperature Humidity Sensor inspection cabinet, and feed back to the control mainboard, through with setting value relatively after, the executive component of temperature control, dehumidification function is issued in the instruction of Temperature and Humidity Control, carry out or stop heating or dehumidifying action, the control of realization humiture.
3. characteristics such as the utility model is then because dehumidification function is uninterrupted, and low humidity control is stable and solved this problem.
4. the utility model provides a cost low, and the method that operating cost is cheap (only needing a spot of compressed air) realizes dehumidification function.
5. the utility model more provides a function of toasting under low wet condition, and this function has been expanded the scope that can toast humidity-sensitive material greatly, simultaneously than traditional high-temperature baking, has also improved the efficient of baking greatly.
6. comprehensive, the utility model provides a multi-functional temperature control type dehumidification method:
-promptly can be used for the quick dehumidifying storage of wet sensitive device
-can be used for low temperature+dehumidifying baking again, as 40 ℃+5%RH, 60 ℃+5%RH
-can also be used for simple high-temperature baking, as 125 ℃, 150 ℃
Characteristics of the present utility model are that also temperature control, dehumanization method that it provides are simple, inexpensive, operating cost is low, effect on moisture extraction good.
[0044] the above only is a preferred embodiment of the present utility model; be not so limit claim of the present utility model; every equivalent structure or equivalent flow process conversion that utilizes the utility model specification and accompanying drawing content to be done; or directly or indirectly be used in other relevant technical fields, all in like manner be included in the scope of patent protection of the present utility model.
Claims (4)
1. temperature control type dehumidification cabinet, it is characterized in that: it comprises a cabinet, is provided with temperature control module, dehumidification module fast in cabinet inside, control module is formed,
Described temperature control module comprises a pyrotoxin, and is provided with convection circulation parts and circulation air path;
Dehumidification module comprises dehydrating unit and dehumidifying air-flow valve control system fast;
Control module connects temperature control module and quick dehumidification module respectively, and control module comprises the control mainboard,
The control mainboard connects demonstration and setting section and temperature and humidity sampling signal input part.
2. temperature control type dehumidification cabinet as claimed in claim 1 is characterized in that: described pyrotoxin is bifilar heating cable or ferrochrome heating wire, and described pyrotoxin is layed in the cabinet circulation air path.
3. temperature control type dehumidification cabinet as claimed in claim 2 is characterized in that: cabinet is made up of the steel body seal cavity and the magnetic envelope sealed door of antistatic spraying.
4. temperature control type dehumidification cabinet as claimed in claim 3 is characterized in that: described control module also comprises a display module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200591275U CN201840972U (en) | 2009-06-24 | 2009-06-24 | Temperature control dehumidification cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200591275U CN201840972U (en) | 2009-06-24 | 2009-06-24 | Temperature control dehumidification cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201840972U true CN201840972U (en) | 2011-05-25 |
Family
ID=44035877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200591275U Expired - Lifetime CN201840972U (en) | 2009-06-24 | 2009-06-24 | Temperature control dehumidification cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201840972U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411387A (en) * | 2011-07-11 | 2012-04-11 | 江苏金风风电设备制造有限公司 | Closed cabinet body control system and wind turbine generator system (WTGS) |
| CN107883516A (en) * | 2017-12-11 | 2018-04-06 | 佛山市淇特科技有限公司 | A kind of air freshening system |
| CN109781596A (en) * | 2019-02-19 | 2019-05-21 | 南京银纳新材料科技有限公司 | A kind of automatic heating and dehumidification inserted sheet preparation method of miniature controllable temperature |
-
2009
- 2009-06-24 CN CN2009200591275U patent/CN201840972U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102411387A (en) * | 2011-07-11 | 2012-04-11 | 江苏金风风电设备制造有限公司 | Closed cabinet body control system and wind turbine generator system (WTGS) |
| CN107883516A (en) * | 2017-12-11 | 2018-04-06 | 佛山市淇特科技有限公司 | A kind of air freshening system |
| CN109781596A (en) * | 2019-02-19 | 2019-05-21 | 南京银纳新材料科技有限公司 | A kind of automatic heating and dehumidification inserted sheet preparation method of miniature controllable temperature |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110525 |