CN201815042U - Automatic fire extinguishing system - Google Patents
Automatic fire extinguishing system Download PDFInfo
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- CN201815042U CN201815042U CN2010205796575U CN201020579657U CN201815042U CN 201815042 U CN201815042 U CN 201815042U CN 2010205796575 U CN2010205796575 U CN 2010205796575U CN 201020579657 U CN201020579657 U CN 201020579657U CN 201815042 U CN201815042 U CN 201815042U
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- fire
- protection system
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- suppressant gas
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Abstract
The utility model discloses an automatic fire extinguishing system for fire extinguishing in case of a fire in the processing cavity of a semi-conductor or a display. The automatic fire extinguishing system comprises a detecting unit arranged near the processing cavity and used for detecting the combustion condition of the processing cavity and providing detection signals for a control unit; and the control unit is used for judging whether the detection signals are characteristic values or not after receiving the detection signals, if yes, deterrent signals are sent to a deterrent unit near the processing cavity for warning and fire extinguishing signals are sent to a fire extinguishing unit near the processing cavity for fire extinguishing.
Description
Technical field
The utility model relates to a kind of automatic fire protection system, particularly relevant for a kind of automatic fire protection system that is applicable to the manufacture process cavity of making semiconductor or display.
Background technology
At present, because the market and the demand of semiconductor subassembly and flat-panel screens are more and more big, make IC factory and panel factory also more and more many.Concerning eight cun wafer factories, the total capital volume of founding the factory surpasses about U.S. dollar about 1,000,000,000 usually, and wherein 70 percent is that flower is on the semi-conductor processing equipment instrument of costliness.In general IC factory and panel factory, the purchase of dust free room (clean room) and to keep required cost be extra high is so the layout designs of equipment accurately has a decisive influence.
In the processing procedure of semiconductor and flat-panel screens; Shi Changhui applies to many different types of organic solutions and carries out processing procedure; for example at the employed photoresistance liquid of micro-photographing process, and the blocking solution etc. of delustering used of etch process, all be to use the organic solution fabrication schedule of being correlated with.Yet because organic solution has volatile characteristic, and its burning-point is relatively low, under the situation that high temperature process is extremely general now, just causes fire quite easily, and is difficult for putting out.And for the environment of dust free room, in case fire is arranged, be the dustless condition of catastrophic destruction, so an automatic fire protection system of being located at around the manufacture process cavity is provided, what just show is very urgent.
The utility model content
Because above-mentioned prior art problems, the purpose of this utility model is providing a kind of automatic fire protection system with exactlying, in semiconductor and flat-panel screens processing procedure, is difficult for putting out the problem of the fire that organic solution causes with solution.
According to the purpose of this utility model, a kind of automatic fire protection system is proposed, system is used for the manufacture process cavity fire extinguishing, it comprises at least one detecting unit of being located at around the manufacture process cavity, be located at least one fire extinguishing unit around the manufacture process cavity, be located at least one the caution unit and the control module at the contiguous place of manufacture process cavity, and control module connects detecting unit, fire extinguishing unit and caution unit respectively.Wherein, detecting unit is in order to the burning condition of inspection process cavity, and provides detection signal to control module.The fire extinguishing unit then comprises is located at manufacture process cavity at least one nozzle, at least one fire-suppressant gas supply system and at least one pressure switch on every side, and nozzle connects the fire-suppressant gas supply system; And after after control module is receiving detection signal, judging that detection signal is characteristic value, promptly being judged as fire takes place, and send the fire extinguishing signal to the fire extinguishing unit, and make the fire-suppressant gas supply system discharge fire-suppressant gas to nozzle by pressure switch, according to nozzle towards burning condition place ejecting extinguishing gas to put out a fire; Simultaneously, control module also sends alarm signal to warn to the caution unit.
Wherein, this automatic fire protection system also comprises surveillance, is the situation that monitors and write down at least one detecting unit, thus the position of learning this burning condition.
In sum, according to automatic fire protection system of the present utility model, it can have one or more following advantages:
(1) this automatic fire protection system has the function of automatic detection, self-extinguishing, can promptly put out a fire and warns the related personnel in the very first time that fire takes place, and reaches and reduces the purpose that manpower expends.
(2) mode of this automatic fire protection system using gases fire extinguishing can effectively be safeguarded the dustless condition of dust free room.
(3) surveillance that possesses of this automatic fire protection system can be notified the position that related personnel's fire alarm takes place rapidly, saves expending of manpower.
Description of drawings
Fig. 1 is the calcspar of automatic fire protection system of the present utility model; And
Fig. 2 is the schematic diagram of the embodiment of automatic fire protection system of the present utility model.
Main symbol description: 1 is automatic fire protection system; 10 is detecting unit; 100 is detection signal; 101 is flame detector; 102 is smoke-detectors; 103 is Temperature Detector; 11 are the fire extinguishing unit; 110 is the fire-suppressant gas supply system; 1100 is fire-suppressant gas; 1101 is the fire-suppressant gas storage device; 1102 is pressure switch; 1103 is pipeline; 111 are the apolipsis valve; 112 is nozzle; 12 are the caution unit; 120 is warning lamp; 121 is buzzer; 13 is control module; 130 is alarm signal; 131 are the fire extinguishing signal; 132 is automatic control module; 133 is manual control module; 134 is storage device; 14 is surveillance; 140 is mixed-media network modules mixed-media; 141 is monitor; 142 is servocomputer; 2 is burning condition; And 3 be manufacture process cavity.
The specific embodiment
Hereinafter with reference to correlative type, the embodiment according to automatic fire protection system of the present utility model is described, for ease of understanding, the same components among the following embodiment illustrates with identical symbology.
See also Fig. 1, it is the calcspar of automatic fire protection system of the present utility model.
As shown in the figure, automatic fire protection system 1 of the present utility model is used for manufacture process cavity fire extinguishing, and it comprises at least one detecting unit 10, at least one fire extinguishing unit 11, at least one warns unit 12, control module 13 and surveillance 14.Wherein, detecting unit 10 has comprised the combination of flame detector 101, smoke-detectors 102, Temperature Detector 103 or these detectors; Fire extinguishing unit 11 has comprised at least one fire-suppressant gas supply system 110, and fire-suppressant gas supply system 110 comprises at least one fire-suppressant gas storage device 1101, at least one pressure switch 1102; In addition, fire extinguishing unit 11 also can comprise at least one apolipsis valve 111 and at least one nozzle 112; Caution unit 12 has comprised at least one warning lamp 120 and at least one buzzer 121; Control module 13 has comprised automatic control module 132, manual control module 133 and storage device 134; Surveillance has then comprised network system 140 and at least one monitor 141.In addition, control module 13 connects caution unit 12, detecting unit 10 and fire extinguishing unit 11, and 10 of detecting units connect surveillance 14 again.
Wherein, detecting unit 10 be located at manufacture process cavity around, to detect burning condition 2, and give control module 13 and surveillance 14 respectively with detection signal 100, control module 13 judges whether detection signal 100 is characteristic value after receiving detection signal 100, if, then send alarm signal 130 to the caution unit 12 on every side of being located at manufacture process cavity, make warning lamp 120 light and make buzzer 121 to sound and think caution, and to the fire extinguishing unit 11 send the fire extinguishing signal 131, and make fire-suppressant gas supply system 110 by pressure switch 1102, pipeline 1103 (stainless steel) and apolipsis valve 111, and discharge fire-suppressant gas 1100 (carbon dioxide or nitrogen), and burning condition 2 ejecting extinguishing gases 1100 are put out a fire to nozzle 112.Wherein, when detecting burning conditions 2 with flame detector 101, its characteristic value be judged to be the infrared spectrum that obtains burning condition 2, if when judging that this spectrum is flame sample attitude, be and confirm that fire takes place; When detecting burning condition 2 with smoke-detectors 102, the quantity that is judged to be the fine particle of measuring the manufacture process cavity vicinity of its characteristic value if surpass the upper limit that the toilet kept, is and confirms that fire takes place; And if when detecting burning conditions 2 with Temperature Detector 103, the judgement of its characteristic value surpasses the upper limit that the toilet kept then for measuring the contiguous temperature of manufacture process cavity, is to confirm that fire takes place.And after fire confirm to take place, storage device 134 promptly write down the operating state of the unit 11 of respectively putting out a fire, and surveillance 14 promptly is shown in detection signal 100 on the monitor 141 by network system 140, to inform related personnel's fire scene.
See also Fig. 2, it is the schematic diagram of the embodiment of automatic fire protection system of the present utility model.In the present embodiment, the upper left side of manufacture process cavity 3 openings is located in caution unit 12, and detecting unit 10 and nozzle 112 are located at the top of manufacture process cavity 3 openings, and nozzle 112 is connected with fire-suppressant gas storage device 1101 by pipeline 1103, apolipsis valve 111 and pressure switch 1102.Wherein, apolipsis valve 111 is a selected components, promptly selects for use apolipsis valve 111 to do explanation in the present embodiment.In addition, the general pattern of control module 13 is operation automatically, but also can use manual operation, and in the present embodiment, the switching device shifter of manual control module 133 promptly is located at the below of caution unit.
Because fire-suppressant gas storage device 1101 volumes are excessive, thus be located at different floors with manufacture process cavity 3, to save the space.In addition, correctly discharge in order to ensure fire-suppressant gas 1100 when fire takes place, so on pipeline 1103 between fire-suppressant gas storage device 1101 and the nozzle 112, be provided with pressure switch 1102, this pressure switch 1102 is only opened there being gas to flow through Shi Caihui, so can monitor the discharging of fire-suppressant gas 1100; And when maintenance this automatic fire protection system 1, for the sake of security, on the pipeline 1103 between pressure switch 1102 and the nozzle 112, be provided with apolipsis valve 111, in order to apolipsis fire-suppressant gas supply system 1101 discharging fire-suppressant gas 1100, can maintain safely thus.
The above only is an illustrative, rather than restrictive.Anyly do not break away from spirit of the present utility model and category, and, all should be contained within the claim scope its equivalent modifications of carrying out or change.
Claims (10)
1. an automatic fire protection system is to be used for the manufacture process cavity fire extinguishing, it is characterized in that comprising:
At least one detecting unit, be located at described manufacture process cavity around, in order to detecting burning condition, and provide detection signal;
At least one unit of putting out a fire, reception fire extinguishing signal is also put out a fire, and comprises:
At least one fire-suppressant gas supply system possesses at least one pressure switch, and described at least one pressure switch monitors the discharging of fire-suppressant gas;
At least one nozzle, be located at described manufacture process cavity around, and connect described fire-suppressant gas supply system and spray described fire-suppressant gas to described burning condition;
At least one warns the unit, is located at the contiguous place of described manufacture process cavity, provides alarm signal behind the reception alarm signal; And
Control module, connect described at least one caution unit, described at least one detecting unit and described at least one fire extinguishing unit, and after receiving described detection signal, judge whether described detection signal is characteristic value, when meeting described characteristic value, then send described alarm signal to described at least one caution unit, and send described fire extinguishing signal to described at least one fire extinguishing unit, and make described at least one fire-suppressant gas supply system discharge this fire-suppressant gas to described at least one nozzle
Surveillance is in order to monitor and to write down the detection signal of described at least one detecting unit and the position of learning described burning condition.
2. automatic fire protection system as claimed in claim 1 is characterized in that described surveillance comprises network system and at least one monitor.
3. automatic fire protection system as claimed in claim 1 is characterized in that described at least one detecting unit comprises the combination of flame detector, smoke-detectors, Temperature Detector or above-mentioned detector.
4. automatic fire protection system as claimed in claim 1 is characterized in that described caution unit comprises at least one warning lamp and at least one buzzer.
5. automatic fire protection system as claimed in claim 1 is characterized in that described control module comprises automatic control module and manual control module.
6. automatic fire protection system as claimed in claim 5 is characterized in that described control module also comprises the operating state of the described automatic fire protection system of memory means record.
7. automatic fire protection system as claimed in claim 1, it is characterized in that described at least one fire-suppressant gas supply system comprises at least one fire-suppressant gas storage device and at least one pipeline, described at least one pipeline is located between described at least one fire-suppressant gas storage device and described at least one nozzle.
8. automatic fire protection system as claimed in claim 7, the material that it is characterized in that described at least one pipeline is a stainless steel.
9. automatic fire protection system as claimed in claim 7 is characterized in that described fire extinguishing unit also comprises at least one apolipsis valve, in order to when maintaining described automatic fire protection system, and described at least one the fire-suppressant gas supply system of apolipsis.
10. automatic fire protection system as claimed in claim 8 is characterized in that described fire-suppressant gas is carbon dioxide or nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205796575U CN201815042U (en) | 2010-10-26 | 2010-10-26 | Automatic fire extinguishing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205796575U CN201815042U (en) | 2010-10-26 | 2010-10-26 | Automatic fire extinguishing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201815042U true CN201815042U (en) | 2011-05-04 |
Family
ID=43913015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205796575U Expired - Lifetime CN201815042U (en) | 2010-10-26 | 2010-10-26 | Automatic fire extinguishing system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201815042U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020054658A (en) * | 2018-10-02 | 2020-04-09 | 株式会社コーアツ | Gas-based fire extinguishing equipment |
-
2010
- 2010-10-26 CN CN2010205796575U patent/CN201815042U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020054658A (en) * | 2018-10-02 | 2020-04-09 | 株式会社コーアツ | Gas-based fire extinguishing equipment |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110504 |
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| CX01 | Expiry of patent term |