CN201788952U - Wafer chamfering supporting device - Google Patents
Wafer chamfering supporting device Download PDFInfo
- Publication number
- CN201788952U CN201788952U CN2010205863226U CN201020586322U CN201788952U CN 201788952 U CN201788952 U CN 201788952U CN 2010205863226 U CN2010205863226 U CN 2010205863226U CN 201020586322 U CN201020586322 U CN 201020586322U CN 201788952 U CN201788952 U CN 201788952U
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- CN
- China
- Prior art keywords
- silicon chip
- bogey
- brilliant boat
- chamfering
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a wafer chamfering supporting device, comprising a boat and a positioning device, wherein the positioning device is arranged on the boat, the positioning device comprises a stopper and two baffles, the boat comprises two supporting plates, the included angle between the planes where the two supporting plates are arranged is 90 DEG, the two supporting plates are provided with a clearance therebetween, a connection plate is arranged between the sides for the two supporting plates which are provided with an included angle of 90 DEG therebetween, the connection plate is arranged on one ends of the two supporting plates, a boat fixing plate is arranged between the sides for the two supporting plates which are provided with an included angle of 90 DEG therebetween, the boat fixing plate is arranged on the other ends of the two supporting plates, a positioning plate is arranged between the boat fixing plate and the connection plate, the point of the connection plate which is close to the clearance is provided with a circular arc-shaped opening, the amount of the positioning plate is four and the positioning plates are triangular in shape.
Description
Technical field
The utility model relates to the device in a kind of solar silicon wafers chamfer process, relates in particular to a kind of silicon chip chamfering bogey.
Background technology
In the solar silicon wafers production process; the edge regular meeting of the silicon chip after the warp cutting burr occurs, collapses the limit; even little crack or other defective arranged; if the problems referred to above appear in the corner of silicon chip, can make silicon chip produce certain internal stress, if the internal stress of silicon chip can't obtain discharging; silicon chip just is very easy to cracked or distortion; make product rejection, cause bigger loss, improved production cost.
In order to increase the mechanical strength of silicon chip edge, reduce residual stress, simultaneously for fear of in operations such as following process, transportation, check, producing problems such as collapsing the limit with reducing, just need carry out chamfered to the corner of silicon chip, silicon chip after the chamfering is owing to there has been a relatively slick and sly more smooth edge, just be difficult for producing again and collapse the angle, the qualification rate of back working procedure processing is significantly improved.
The utility model content
The technical problems to be solved in the utility model is at above deficiency, provides a kind of simple in structure, easy to use, is used for silicon chip is carried out the silicon chip chamfering bogey of chamfering.
In order to solve above technical problem, the technical solution adopted in the utility model is as follows: a kind of silicon chip chamfering bogey, comprise brilliant boat, and it is characterized in that: described silicon chip chamfering bogey comprises positioner, and positioner is arranged on the brilliant boat.
As further improvement in the technical proposal:
Described positioner comprises block and two baffle plates.
Described brilliant boat comprises two supporting brackets, and plane included angle, two supporting bracket places is 90 °.
Be provided with the gap between described two supporting brackets.
It is to be provided with brace between 90 ° the side that described two supporting brackets form angle, and brace is arranged on an end of two supporting brackets.
It is to be provided with brilliant boat stator between 90 ° the side that described two supporting brackets form angle, and brilliant boat stator is arranged on the other end of two supporting brackets.
Be provided with spacer between described brilliant boat stator and the brace.
Described brace is provided with the circular arc opening near gap location.
The quantity of described spacer is 4.
Described spacer be shaped as triangle.
The utility model is taked above technical scheme; have the following advantages: silicon chip chamfering bogey comprises brilliant boat and positioner; positioner comprises block and two baffle plates; brilliant boat is placed on the brilliant boat carrier of edging machine; in the time of fixedly; the circular arc opening that shifting axle on the edging machine is passed on the brace of brilliant boat is fixedlyed connected with brilliant boat; block is placed on the brilliant boat; two spacers of one side contacts of block on same straight line are fixed; the opposite side of block is provided with two baffle plates; place silicon chip between two baffle plates, block play fixed supporting role, and can be the polycrystal silicon ingot of chamfering length greater than specification chamfering length; also can be for having the cuboid of larger volume; two baffle plates play protection and compress silicon chip, make silicon chip be unlikely to be damaged in the chamfering operating process, and are simple in structure; easy to use.
The utility model is described in further detail below in conjunction with drawings and Examples.
Description of drawings
Accompanying drawing 1 is the structural representation of brilliant boat among the utility model embodiment;
Accompanying drawing 2 is left views of accompanying drawing 1;
Accompanying drawing 3 is right views of accompanying drawing 1;
Accompanying drawing 4 be in the accompanying drawing 1 A to structural representation;
Accompanying drawing 5 is user mode figure of silicon chip chamfering bogey among the utility model embodiment.
Among the figure,
1,2-supporting bracket, the brilliant boat stator of 3-, the 4-brace, the 5-spacer, 6, the 11-gap, the 7-opening, the brilliant boat carrier of 8-, the 9-shifting axle, 10-moves axle bed, 12-block, 13, the 15-baffle plate, 14-silicon chip.
Embodiment
Embodiment, as Fig. 1, Fig. 2, Fig. 3 and shown in Figure 5, a kind of silicon chip chamfering bogey comprises brilliant boat and positioner, positioner is arranged in the brilliant boat.
Brilliant boat comprises supporting bracket 1 and supporting bracket 2, supporting bracket 1 and plane included angle, supporting bracket 2 place are 90 °, be provided with gap 6 between supporting bracket 1 and the supporting bracket 2, one side of the supporting bracket 1 in formation gap 6 is parallel with one side of supporting bracket 2, supporting bracket 1 and supporting bracket 2 are respectively rectangle, supporting bracket 1 and supporting bracket 2 forms between the side that angles are 90 ° side of supporting bracket 1 and supporting bracket 2 and is respectively equipped with brilliant boat stator 3, brace 4 and 4 spacers 5, brace 4 is arranged on an end of supporting bracket 1 and supporting bracket 2, brilliant boat stator 3 is arranged on another end of supporting bracket 1 and supporting bracket 2,4 spacers 5 are separately positioned between brilliant boat stator 3 and the brace 4, brace 4 is provided with circular arc opening 7 near 6 places, gap, as shown in Figure 4, spacer 5 be shaped as triangle, wherein two spacers 5 are arranged on the supporting bracket 1, two other spacer 5 is arranged on the supporting bracket 2, be arranged on the supporting bracket 1 one of them spacer 5 be arranged on one of them spacer 5 on the supporting bracket 2 on same straight line, be arranged on the supporting bracket 1 another spacer 5 be arranged on another spacer 5 on the supporting bracket 2 on same straight line, brace 4 and and his two spacers 5 closing between be provided with gap 11, gap 11 is greater than the width in gap 6.
Positioner comprises block 12, baffle plate 13 and baffle plate 15.
During use; as shown in Figure 5; brilliant boat is placed on the brilliant boat carrier 8 of edging machine; in the time of fixedly; the circular arc opening 7 that edging machine moves on the brace 4 that shifting axle 9 on the axle bed 10 passes brilliant boat is fixedlyed connected with brilliant boat; block 12 is placed on the brilliant boat; two spacers 5 of one side contacts of block 12 on same straight line are fixing; the opposite side of block 12 is provided with baffle plate 13 and baffle plate 15; be provided with silicon chip 14 between baffle plate 13 and the baffle plate 15; block 12 play fixed supporting role; can be for chamfering length require the polycrystal silicon ingot of chamfering length greater than silicon chip 14, also can require the cuboid with larger volume of chamfering length, baffle plate 13 and baffle plate 15 to play a part to protect greater than silicon chip 14 and compress silicon chip 14 for chamfering length; make silicon chip 14 in the chamfering operating process, be unlikely to be damaged, simple in structure; easy to use.
Claims (10)
1. a silicon chip chamfering bogey comprises brilliant boat, it is characterized in that: described silicon chip chamfering bogey comprises positioner, and positioner is arranged on the brilliant boat.
2. a kind of silicon chip chamfering bogey as claimed in claim 1 is characterized in that: described positioner comprises block (12) and two baffle plates (13,15).
3. a kind of silicon chip chamfering bogey as claimed in claim 2 is characterized in that: described brilliant boat comprises two supporting brackets (1,2), and two supporting brackets (1,2) plane included angle, place is 90 °.
4. a kind of silicon chip chamfering bogey as claimed in claim 3 is characterized in that: be provided with gap (6) between described two supporting brackets (1,2).
5. as claim 3 or 4 described a kind of silicon chip chamfering bogeys, it is characterized in that: it is to be provided with brace (4) between 90 ° the side that described two supporting brackets (1,2) form angle, and brace (4) is arranged on an end of two supporting brackets (1,2).
6. a kind of silicon chip chamfering bogey as claimed in claim 5, it is characterized in that: it is to be provided with brilliant boat stator (3) between 90 ° the side that described two supporting brackets (1,2) form angle, and brilliant boat stator (3) is arranged on the other end of two supporting brackets (1,2).
7. a kind of silicon chip chamfering bogey as claimed in claim 6 is characterized in that: be provided with spacer (5) between described brilliant boat stator (3) and the brace (4).
8. a kind of silicon chip chamfering bogey as claimed in claim 5, it is characterized in that: described brace (4) locates to be provided with circular arc opening (7) near gap (6).
9. as claim 7 or 8 described a kind of silicon chip chamfering bogeys, it is characterized in that: the quantity of described spacer (5) is 4.
10. a kind of silicon chip chamfering bogey as claimed in claim 9 is characterized in that: described spacer (5) be shaped as triangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205863226U CN201788952U (en) | 2010-11-02 | 2010-11-02 | Wafer chamfering supporting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205863226U CN201788952U (en) | 2010-11-02 | 2010-11-02 | Wafer chamfering supporting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201788952U true CN201788952U (en) | 2011-04-06 |
Family
ID=43820908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205863226U Expired - Fee Related CN201788952U (en) | 2010-11-02 | 2010-11-02 | Wafer chamfering supporting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201788952U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102962743A (en) * | 2012-11-28 | 2013-03-13 | 天津市环欧半导体材料技术有限公司 | Chamfering machine capable of processing non-standard silicon wafer |
-
2010
- 2010-11-02 CN CN2010205863226U patent/CN201788952U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102962743A (en) * | 2012-11-28 | 2013-03-13 | 天津市环欧半导体材料技术有限公司 | Chamfering machine capable of processing non-standard silicon wafer |
| CN102962743B (en) * | 2012-11-28 | 2015-06-24 | 天津市环欧半导体材料技术有限公司 | Chamfering machine capable of processing non-standard silicon wafer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110406 Termination date: 20151102 |
|
| EXPY | Termination of patent right or utility model |