CN201772119U - Automatic adjusting valve - Google Patents
Automatic adjusting valve Download PDFInfo
- Publication number
- CN201772119U CN201772119U CN2010205063057U CN201020506305U CN201772119U CN 201772119 U CN201772119 U CN 201772119U CN 2010205063057 U CN2010205063057 U CN 2010205063057U CN 201020506305 U CN201020506305 U CN 201020506305U CN 201772119 U CN201772119 U CN 201772119U
- Authority
- CN
- China
- Prior art keywords
- valve
- pipeline
- operated valve
- links
- plectane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
The utility model discloses an automatic adjusting valve, which comprises a hand-operated valve, and an automatic flow-adjusting device and a detecting device which are connected with the hand-operated valve respectively. The automatic flow-adjusting device comprises a flow adjusting device, a motor, an encoder, a flow-meter and an isometric differential integral module. The flow-adjusting device comprises a circular plate and a knob connected with the circular plate; the circular plate is positioned in a pipeline of the hand-operated valve and the diameter of the circular plate is equal to the interior diameter of the pipeline; the knob is connected with the motor; and the isometric differential integral module and the encoder control the rotating direction and angle of the motor according to the current flow speed of the flow-meter and a determined flow speed. The knob is driven to rotate by the rotation of the motor, so that the flow speed is adjusted automatically. The detecting device comprises an optical sensor and an identification device. The identification device displays different identification status according to statuses of the optical sensor and the hand-operated valve, so that the working status of the hand-operated valve can be detected.
Description
Technical field
The utility model relates to ultra-pure water supply equipment in the semiconductor production, relates in particular to a kind of automatic regulating valve.
Background technique
In the manufacturing process of semiconductor integrated circuit, the operation more than 80% all needs water is cleaned, and in cleaning process, wafer and workpiece directly contact with water.And need make in the operation that water cleans at these, nearly operation over half wafer with and then just enter pyroprocess after water contact, will enter silicon chip and cause IC-components decreased performance, yield rate reduction if contain impurity in the water at this moment.The cost problem that provides the water of stablizing high-quality to will be referred to enterprise to production line definite a bit is provided.
In order to solve the pollution problem that causes because of cleaning, the way that adopts is that common water is carried out purifying at present, is prepared into ultra-pure water.So-called ultra-pure water is meant almost all to be removed the conducting medium in the water, again colloidal substance, gas and the organic substance that does not dissociate in the water all is removed to the very water of low degree.In the time of 25 ℃, ultrapure resistivity of water is greater than 18M Ω .cm, or near the limiting value of 18.3M Ω .cm.
As a rule, ultra-pure water is engaged in preparing by factory, is delivered to each manufacturing mechanism by the ultra-pure water delivery line again, for use; And the delivery line that is transported to each manufacturing mechanism place is respectively by a valve control.
Existing valve is generally manually operated valve, please refer to Fig. 1 to Fig. 2, wherein, Fig. 1 is in the structural representation of closed condition for existing manually operated valve, Fig. 2 is the structural representation that existing manually operated valve is in opening state, and to shown in Figure 2, existing manually operated valve 100 comprises as Fig. 1:
Spool 130, described spool 130 inserts in the described pipeline 120 by described second through hole, controls the break-make of described pipeline 102; And
The valve control piece, described valve control piece is positioned at described valve casing 110, and described valve control piece comprises piston cavity 140, is positioned at the piston 143 of described piston cavity 140, spring 141 and head rod 144; Described spring 141 connects the top and the described piston 143 of described piston cavity 140, sealing between described piston 143 and the described piston cavity 140; Described head rod 144 is fixed on the described piston 143, and an end of described head rod 144 is connected with described spool 130, the top of the described piston cavity 140 of the other end break-through, and the top by the described valve casing 110 of the described first through hole break-through; Described piston cavity 140 is provided with vent 142, and described vent 142 is positioned at the below of described piston 143, described vent 142 external sources of the gas.
The working principle of existing manually operated valve 100 is:
When need use ultra-pure water, control described source of the gas and in described piston cavity 140, feed gas by described vent, under the pressure of gas, described piston 143 moves upward, compress described spring 141, and drive described head rod 144 and move upward, further driving described spool 130 moves upward, make it shift out described pipeline 120 by described second through hole, thereby make manually operated valve 100 be in opening state, ultra-pure water flow in the described pipeline 120 from described water intake joint 121, and flows out by described water outlet joint 122, for use;
When ultra-pure water is finished using, close source of the gas, under the elastic force effect of described spring 141, described piston 143 moves downward, and drive described head rod 144 and move downward, further drive described spool 130 and move downward, make it pass through described second through hole and insert in the described pipeline 120, thereby make manually operated valve 100 be in closed condition.
Yet there are the following problems for existing manually operated valve 100:
(1) after spool 130 shifts out described pipeline 120, described manually operated valve 100 is in opening state, after spool 130 inserts described pipeline 120, described manually operated valve 100 is in closed condition, be described manually operated valve 100 or be in the complete opening state, be in fully and close, thereby can not regulate the flow velocity of ultra-pure water;
(2) along with the growth of service time, there is loss in described valve control piece, the elasticity variation of spring 141 for example, and the sealing between piston 143 and the piston cavity 140 reduces, thereby manually operated valve 100 may be in abnormal working position, but but do not have detection device that it is detected.
And in the manufacturing process of semiconductor integrated circuit, the manufacture of semiconductor that has requires the flow velocity of ultra-pure water constantly to change, thereby reach better effect, for example after wafer moves to dry slot from the acid treatment groove, need a large amount of ultra-pure waters to wash earlier, and it is big that the flow velocity of ultra-pure water is wanted, and washes with a spot of ultra-pure water more subsequently.And the processing procedure that has needs the flow velocity of ultra-pure water to change many times at short notice, thereby existing manually operated valve 100 can not meet the demands.
Therefore, be necessary existing manually operated valve is improved.
The model utility content
The purpose of this utility model is to provide a kind of automatic regulating valve, do not regulate flow meter automatically to solve manually operated valve of the prior art, can not satisfy some manufacture of semiconductor needs constantly to change the requirement of the flow velocity of ultra-pure water, and do not have detection device, can not detect the problem of manually operated valve working state.
For addressing the above problem, the utility model proposes a kind of automatic regulating valve, this automatic regulating valve comprises manually operated valve and the automatic adjusting flow meter and the detection device that link to each other with described manually operated valve respectively.
Optionally, described manually operated valve comprises:
Valve casing, the top of described valve casing is provided with first through hole, is provided with pipeline in the described valve casing, and described pipeline is provided with second through hole, a termination water intake joint of described pipeline, the other end picks out water outlet connector;
Spool, described spool inserts in the described pipeline by described second through hole, controls the break-make of described pipeline; And
The valve control piece, described valve control piece is positioned at described valve casing, and described valve control piece comprises piston cavity, is positioned at piston, spring and the head rod of described piston cavity; Described spring connects the top and the described piston of described piston cavity, seals between described piston and the described piston cavity; Described head rod is fixed on the described piston, and an end of described head rod is connected with described spool, the top of the described piston cavity of the other end break-through, and the top by the described valve casing of the described first through hole break-through; Described piston cavity is provided with vent, and described vent is positioned at the below of described piston, the external source of the gas of described vent.
Optionally, described automatic adjusting flow meter comprises:
Flow regulator, described flow regulator comprises plectane, second connecting rod and knob, and described plectane is positioned at described pipeline, and the diameter of described plectane equates with the internal diameter of described pipeline; Described knob is positioned at the top of described valve casing, and described knob is provided with first gear; One end of described second connecting rod links to each other with described plectane, links to each other with described knob behind the described valve casing of the other end break-through;
Motor, described motor is provided with second gear, described first gear and described second gear engagement;
Encoder, described encoder links to each other with described motor;
Flowmeter, described flowmeter links to each other with described water outlet joint; And
Equal proportion differential integration module, described equal proportion differential integration module links to each other with described flowmeter, motor and encoder respectively.
Optionally, described detection device comprises photoreceptor and identity device, and described photoreceptor is fixed on the top of described valve casing, and described identity device links to each other with described photoreceptor; Described photoreceptor comprises light transmitting terminal and optical receiving end, is provided with a space between described smooth transmitting terminal and the described optical receiving end, and described space is positioned at the top of described first through hole.
Optionally, described identity device comprises first bulb and second bulb, and described first bulb links to each other with described smooth transmitting terminal, and described second bulb links to each other with described optical receiving end.
The utility model makes it compared with prior art owing to adopt above technological scheme, has following advantage and good effect:
(1) automatic regulating valve that provides of the utility model comprises flow regulator, described flow regulator comprises plectane, second connecting rod and knob, described second connecting rod connects described knob and described plectane, described plectane is positioned at described pipeline, by rotating described knob, driving described second connecting rod rotates, and further drive described plectane and rotate, regulate the flow velocity of described ultra-pure water by the angle of controlling described plectane and described pipeline, when described plectane was parallel with described pipeline, the flow velocity maximum of described ultra-pure water was when described plectane is vertical with described pipeline, the flow velocity minimum of described ultra-pure water, thus realized the adjusting of flow velocity;
(2) automatic regulating valve that provides of the utility model comprises automatic adjusting flow meter, described automatic adjusting flow meter can be according to the current flow velocity and the setting flow velocity of described flowmeter, automatically described flow regulator is adjusted, thereby regulated the flow velocity of ultra-pure water automatically;
(3) automatic regulating valve that provides of the utility model comprises detection device, when described spool is positioned at described pipeline, when described manually operated valve is in closed condition, the light of the light transmitting terminal emission of described photoreceptor can be sent to described optical receiving end by described space, after described optical receiving end received light, described second bulb was bright; When described spool shifts out described pipeline, when described manually operated valve was in opening state, described head rod inserted in the described space, stopped the light of described smooth transmitting terminal emission, made it can not be sent to described optical receiving end, and described second bulb goes out; Thereby can judge whether described manually operated valve is in correct state by described detection device.
Description of drawings
Fig. 1 is in the structural representation of closed condition for existing manually operated valve;
Fig. 2 is in the structural representation of opening state for existing manually operated valve;
The automatic regulating valve that Fig. 3 provides for the utility model embodiment is in the structural representation of closed condition;
The automatic regulating valve that Fig. 4 provides for the utility model embodiment is in the structural representation of opening state.
Embodiment
Below in conjunction with the drawings and specific embodiments the automatic regulating valve that the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only be used for conveniently, aid illustration the utility model embodiment's purpose lucidly.
Core concept of the present utility model is, a kind of automatic regulating valve is provided, this automatic regulating valve comprises manually operated valve and the automatic adjusting flow meter and the detection device that link to each other with described manually operated valve respectively, described automatic adjusting flow meter automatically adjusts to the flow velocity of the ultra-pure water in the described manually operated valve, described detection device detects the on off state of described manually operated valve, thereby overcome the shortcoming that existing manually operated valve can not be regulated flow velocity automatically, and can judge in time by described detection device whether described manually operated valve is normal.
Please refer to Fig. 3 to Fig. 4, wherein the automatic regulating valve that provides for the utility model embodiment of Fig. 3 is in the structural representation of closed condition, the automatic regulating valve that Fig. 4 provides for the utility model embodiment is in the structural representation of opening state, to shown in Figure 4, the automatic regulating valve 200 that the utility model provides comprises manually operated valve and the automatic adjusting flow meter and the detection device that link to each other respectively with described manually operated valve as Fig. 3.
Further, described manually operated valve comprises:
Spool 230, described spool 230 inserts in the described pipeline 220 by described second through hole, controls the break-make of described pipeline 220; And
The valve control piece, described valve control piece is positioned at described valve casing 210, and described valve control piece comprises piston cavity 240, is positioned at the piston 243 of described piston cavity 240, spring 241 and head rod 244; Described spring 241 connects the top and the described piston 243 of described piston cavity 240, sealing between described piston 243 and the described piston cavity 240; Described head rod 244 is fixed on the described piston 243, and an end of described head rod 244 is connected with described spool 230, the top of the described piston cavity 240 of the other end break-through, and the top by the described valve casing 210 of the described first through hole break-through; Described piston cavity 240 is provided with vent 242, and described vent 242 is positioned at the below of described piston 243, described vent 242 external sources of the gas.
Further, described automatic adjusting flow meter comprises:
Flow regulator, described flow regulator comprise plectane 250, second connecting rod 251 and knob 252, and described plectane 250 is positioned at described pipeline 220, and the diameter of described plectane 250 equates with the internal diameter of described pipeline 220; Described knob 252 is positioned at the top of described valve casing 210, and described knob is provided with first gear; One end of described second connecting rod 251 links to each other with described plectane 250, and the described valve casing of the other end break-through 210 backs link to each other with described knob 252; By rotating described knob 252, driving described second connecting rod 251 rotates, and further drive described plectane 250 and rotate, regulate the flow velocity of described ultra-pure water by the angle of controlling described plectane 250 and described pipeline 220, when described plectane 250 and described pipeline 220 are parallel, the flow velocity maximum of described ultra-pure water, when described plectane 250 and described pipeline 220 are vertical, the flow velocity minimum of described ultra-pure water;
Equal proportion differential integration module 280, described equal proportion differential integration module 280 links to each other with described flowmeter 270, motor 290 and encoder 291 respectively; Described equal proportion differential integration module 280 reads the current flow velocity of described flowmeter 270 and sets flow velocity, calculates the direction and the angle of described plectane 250 need rotations according to the difference of described setting flow velocity and described current flow velocity; And need the direction of rotation to send to described motor 290 the described plectane 250, need the angle of rotation to send to described encoder 291 described plectane 250; Described encoder 291 needs the goniometer of rotation to calculate described motor 290 according to described plectane 250 and needs the angle of rotation, and sends to described motor 290.
Further, described detection device comprises photoreceptor 260 and identity device, and described photoreceptor 260 is fixed on the top of described valve casing 210, and described identity device links to each other with described photoreceptor 260; Described photoreceptor 260 comprises light transmitting terminal 261 and optical receiving end 262, is provided with a space 263 between described smooth transmitting terminal 261 and the described optical receiving end 262, and described space 263 is positioned at the top of described first through hole.
Further, described identity device comprises first bulb 264 and second bulb 265, and described first bulb 264 links to each other with described smooth transmitting terminal 261, and described second bulb 265 links to each other with described optical receiving end 262; When described spool 230 is positioned at described pipeline 220, when described manually operated valve is in closed condition, the light of light transmitting terminal 261 emissions of described photoreceptor 260 can be sent to described optical receiving end 262 by described space 263, after described optical receiving end 262 received light, described second bulb 265 was bright; When described spool 230 shifts out described pipeline 220, when described manually operated valve was in opening state, described head rod 244 inserted in the described space 263, stops the light of described smooth transmitting terminal 261 emissions, make it can not be sent to described optical receiving end 262, described second bulb 265 goes out; And when described smooth transmitting terminal 261 was launched light, described first bulb 264 was bright; Thereby can judge with the state of described second bulb 265 whether described manually operated valve is in correct state by described first bulb 264.
The using method of the manual modulation valve 200 that the utility model embodiment provides is:
When need use ultra-pure water, set the flow velocity of described flowmeter 270, described equal proportion differential integration module 280 reads the current flow velocity of described flowmeter 270 and sets flow velocity, wherein current flow velocity is 0, calculates the direction and the angle of described plectane 250 need rotations according to the difference of described setting flow velocity and described current flow velocity; And need the direction of rotation to send to described motor 290 the described plectane 250, need the angle of rotation to send to described encoder 291 described plectane 250; Described encoder 291 needs the goniometer of rotation to calculate described motor 290 according to described plectane 250 and needs the angle of rotation, and sends to described motor 290; Described motor 290 is rotated according to the direction of described equal proportion differential integration module 280 transmissions and the angle of described encoder 291 transmissions, and drives described knob 252 rotations, makes the described plectane 250 and the angle of described pipeline 220 reach desirable value;
Control described source of the gas and in described piston cavity 240, feed gas by described vent, under the pressure of gas, described piston 243 moves upward, compress described spring 241, and drive described head rod 244 and move upward, further driving described spool 230 moves upward, make it shift out described pipeline 220 by described second through hole, thereby make manually operated valve 200 be in opening state, ultra-pure water flow in the described pipeline 220 from described water intake joint 221, and by described water outlet joint 222 outflows, for use;
When need change the flow velocity of ultra-pure water, set the flow velocity of described flowmeter 270, described equal proportion differential integration module 280 reads the current flow velocity of described flowmeter 270 and sets flow velocity, calculates the direction and the angle of described plectane 250 need rotations according to the difference of described setting flow velocity and described current flow velocity; And need the direction of rotation to send to described motor 290 the described plectane 250, need the angle of rotation to send to described encoder 291 described plectane 250; Described encoder 291 needs the goniometer of rotation to calculate described motor 290 according to described plectane 250 and needs the angle of rotation, and sends to described motor 290; Described motor 290 is rotated according to the direction of described equal proportion differential integration module 280 transmissions and the angle of described encoder 291 transmissions, and drives described knob 252 rotations, makes the described plectane 250 and the angle of described pipeline 220 reach desirable value;
When ultra-pure water is finished using, rotate described knob 252, make described plectane 250 vertical with described pipeline 220; And close source of the gas, under the elastic force effect of described spring 241, described piston 243 moves downward, and drive described head rod 244 and move downward, further driving described spool 230 moves downward, make it pass through described second through hole and insert in the described pipeline 220, thereby make manually operated valve 200 be in closed condition.
The condition detection method of the manual modulation valve 200 that the utility model embodiment provides is:
Open the light transmitting terminal 261 of described photoreceptor 260, make its emission light, this moment, first bulb 264 was bright;
If described second bulb 265 is bright, then described manually operated valve is in closed condition, if described second bulb 265 goes out, then described manually operated valve is in opening state;
The manually operated valve on off state of described second bulb 265 expressions is compared with actual manually operated valve on off state, judge whether described manually operated valve is normal.
In a specific embodiment of the present utility model, described identity device is first bulb 264 and second bulb 265, yet should be realized that, according to actual conditions, described identity device can also can identify the parts of different conditions, for example first buzzer and second buzzer etc. for other.
In sum, the utility model provides a kind of automatic regulating valve, this automatic regulating valve comprises manually operated valve and the automatic adjusting flow meter and the detection device that link to each other with described manually operated valve respectively, and described automatic adjusting flow meter comprises flow regulator, motor, encoder, flowmeter and equal proportion differential integration module; Described flow regulator comprises plectane and the knob that links to each other with described plectane, and described plectane is positioned at the pipeline of described manually operated valve, and the diameter of described plectane equates with the internal diameter of described pipeline; Described knob links to each other with described motor; Described equal proportion differential integration module and described encoder according to the current flow velocity of flowmeter with set direction and the angle that the described motor of flow speed control need rotate, described motor rotation drives described knob rotation, thereby realizes regulating automatically flow velocity.Described detection device comprises photoreceptor and identity device, and described photoreceptor comprises light transmitting terminal and optical receiving end, and described identity device shows different identification-states according to the state of described photoreceptor and the state of described manually operated valve.Thereby can regulate the flow velocity of described manually operated valve and detect the working state of described manually operated valve.
Obviously, those skilled in the art can carry out various changes and modification to model utility and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.
Claims (5)
1. an automatic regulating valve is characterized in that, comprises manually operated valve, and the automatic adjusting flow meter and the detection device that link to each other with described manually operated valve respectively.
2. automatic regulating valve as claimed in claim 1 is characterized in that, described manually operated valve comprises:
Valve casing, the top of described valve casing is provided with first through hole, is provided with pipeline in the described valve casing, and described pipeline is provided with second through hole, a termination water intake joint of described pipeline, the other end picks out water outlet connector;
Spool, described spool inserts in the described pipeline by described second through hole, controls the break-make of described pipeline; And
The valve control piece, described valve control piece is positioned at described valve casing, and described valve control piece comprises piston cavity, is positioned at piston, spring and the head rod of described piston cavity; Described spring connects the top and the described piston of described piston cavity, seals between described piston and the described piston cavity; Described head rod is fixed on the described piston, and an end of described head rod is connected with described spool, the top of the described piston cavity of the other end break-through, and the top by the described valve casing of the described first through hole break-through; Described piston cavity is provided with vent, and described vent is positioned at the below of described piston, the external source of the gas of described vent.
3. automatic regulating valve as claimed in claim 2 is characterized in that, described automatic adjusting flow meter comprises:
Flow regulator, described flow regulator comprises plectane, second connecting rod and knob, and described plectane is positioned at described pipeline, and the diameter of described plectane equates with the internal diameter of described pipeline; Described knob is positioned at the top of described valve casing, and described knob is provided with first gear; One end of described second connecting rod links to each other with described plectane, links to each other with described knob behind the described valve casing of the other end break-through;
Motor, described motor is provided with second gear, described first gear and described second gear engagement;
Encoder, described encoder links to each other with described motor;
Flowmeter, described flowmeter links to each other with described water outlet joint; And
Equal proportion differential integration module, described equal proportion differential integration module links to each other with described flowmeter, motor and encoder respectively.
4. automatic regulating valve as claimed in claim 2 is characterized in that described detection device comprises photoreceptor and identity device, and described photoreceptor is fixed on the top of described valve casing, and described identity device links to each other with described photoreceptor; Described photoreceptor comprises light transmitting terminal and optical receiving end, is provided with a space between described smooth transmitting terminal and the described optical receiving end, and described space is positioned at the top of described first through hole.
5. automatic regulating valve as claimed in claim 4 is characterized in that, described identity device comprises first bulb and second bulb, and described first bulb links to each other with described smooth transmitting terminal, and described second bulb links to each other with described optical receiving end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205063057U CN201772119U (en) | 2010-08-26 | 2010-08-26 | Automatic adjusting valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205063057U CN201772119U (en) | 2010-08-26 | 2010-08-26 | Automatic adjusting valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201772119U true CN201772119U (en) | 2011-03-23 |
Family
ID=43751961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205063057U Expired - Fee Related CN201772119U (en) | 2010-08-26 | 2010-08-26 | Automatic adjusting valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201772119U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103307335A (en) * | 2013-06-09 | 2013-09-18 | 无锡市华牧机械有限公司 | Direction control valve braking method |
| CN112180990A (en) * | 2019-07-01 | 2021-01-05 | 河南翔宇医疗设备股份有限公司 | Adjusting method and adjusting system of electric control knob |
-
2010
- 2010-08-26 CN CN2010205063057U patent/CN201772119U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103307335A (en) * | 2013-06-09 | 2013-09-18 | 无锡市华牧机械有限公司 | Direction control valve braking method |
| CN112180990A (en) * | 2019-07-01 | 2021-01-05 | 河南翔宇医疗设备股份有限公司 | Adjusting method and adjusting system of electric control knob |
| CN112180990B (en) * | 2019-07-01 | 2024-02-06 | 河南翔宇医疗设备股份有限公司 | Adjusting method and adjusting system of electric control knob |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201610970U (en) | GPRS intelligent electric valve actuating mechanism | |
| CN201772119U (en) | Automatic adjusting valve | |
| CN102966143A (en) | Automatic water supplement system and method of water tank | |
| US20220205346A1 (en) | Downhole throttling device based on wireless control | |
| CN201844051U (en) | Manual adjustment valve | |
| CN205592117U (en) | Water pump intelligent control valve | |
| CN104903657A (en) | Fast attachment open end direct mount damper and valve actuator | |
| CN110715100A (en) | Valve with remote control function | |
| CN203770796U (en) | Electronically controlled flow valve | |
| CN203737185U (en) | Automatic alkali mixing device | |
| CN104565414A (en) | Poking rod control type valve core | |
| CN212203211U (en) | Energy-saving control valve based on Internet of things protocol | |
| CN203799274U (en) | Air flow regulating device based on PM10 online monitoring | |
| CN204544658U (en) | A kind of two component feeding system | |
| CN203926834U (en) | Throttling arrangement | |
| CN112728196B (en) | Pipeline wireless digital quantity intelligent regulating valve and control method thereof | |
| CN211467426U (en) | Automatic water temperature adjusting device of vacuum box | |
| CN209321812U (en) | The intelligent tight catenary system of Digital motor | |
| CN204420154U (en) | A kind of shift rod control type spool | |
| CN208912454U (en) | A kind of coating of lithium-ion battery feeding system | |
| CN208663864U (en) | Mechanical arm | |
| CN208460780U (en) | Source liquid air inlet constant-voltage equipment | |
| CN211026214U (en) | Lime milk adding device | |
| CN205101097U (en) | Novel coolant liquid is added device | |
| CN219642127U (en) | Automatic control system for liquid level of industrial water supply and drainage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110323 Termination date: 20160826 |