Background technology
Along with the sustained, stable growth of Chinese national economy and the development of constantly bringing forth new ideas of production technology, the front and back multiple working procedure during extensive and super large-scale integration (IC) is produced is had higher requirement to production environment.Simultaneously, along with integrated level and the complexity of IC are more and more higher, pollution control technology is just restricting the development of microelectric technique more.
In semiconductor fabrication process, not only to keep certain temperature/humidity and control static, also need to keep higher cleanliness factor.At present, in the extensive IC production process, especially the IC encapsulated phase requires the grit of control 0.1 μ m to reach 1 grade even tighter.
If dust, dirt are brought into the workshop of semiconductor devices, be adsorbed on the chip, will influence product quality, worsen properties of product, reduce the IC yield rate greatly, even cause product rejection.For example, when the radius of dust adsorbed particle during greater than the about 100 μ m of 100 μ m, line thickness, film thickness is at 50 μ m following times, the easiest product rejection that makes.
In semiconductor fabrication process, need usually to adopt electric drill on elements such as circuit board, to punch, punch out step can produce more fines, dust etc., and production environment is had bigger pollution.Because electric drill continues to produce dust in the process of motion, the dust catcher that uses can only sop up the dust granule less than 1/3 usually at present, can't really play the effect of dedusting, and some employing is built the mode of clean canopy so that solution to be provided, though kept cleanliness factor, also brought the cost of great number.
The specific embodiment
A lot of details have been set forth in the following description so that fully understand the utility model.But the utility model can be implemented much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of the utility model intension, so the utility model is not subjected to the restriction of following public concrete enforcement.
Secondly, the utility model utilizes schematic diagram to be described in detail, when the utility model embodiment is described in detail in detail; for ease of explanation; the profile of expression device architecture can be disobeyed general ratio and be done local the amplification, and described schematic diagram is example, and it should not limit the scope of the utility model protection at this.The three dimensions size that in actual fabrication, should comprise in addition, length, width and the degree of depth.
Below in conjunction with the drawings and specific embodiments, the utility model embodiment is described in further details.
With reference to figure 1, the utility model provides a kind of electric drill dust guard 100, comprises at least: fixed cell 110 is suitable for electric drill dust guard 100 is fixed on the electric drill; Dust suction unit 120 is a hollow chamber, covers in around the drill bit, receives the dust that produces in the electric drill motion process; Regulon 130 is suitable for being connected and fixed unit 110 and dust suction unit 120, and the length of regulating electric drill dust guard 100 along with the motion of electric drill, keeps dust suction unit 120 to depend on the object surface of electric drill construction.
With reference to figure 2, in a kind of embodiment of electric drill dust guard 100, fixed cell 110 can comprise at least: electric drill connecting portion 201 is suitable for connecting electric drill; And be connected and fixed portion 202, be suitable for connecting electric drill connecting portion 201 and regulon 130.
Wherein, in a kind of specific embodiment, electric drill connecting portion 201 is two structures that separate with being connected and fixed portion 202, and an end that is connected and fixed portion 202 adopts modes such as welding, fixing riveted joint, close joint riveted joint to be connected with electric drill connecting portion 201, the other end that is connected and fixed portion 202 adopts modes such as welding, fixing riveted joint, close joint riveted joint to be connected with regulon 130, to guarantee electric drill in the course of the work, by being connected of electric drill and fixed cell 110, can driving regulon 130 and produce corresponding motion thereupon.
Particularly, electric drill connecting portion 201 can be the tubular body of hollow, and the pipe diameter and the electric drill of electric drill connecting portion 201 are complementary, and for example can be complementary with the electric drill stator.Be connected and fixed portion 202 and can adopt one of existing multiple attaching parts commonly used or its combination, to realize being connected and fixing of electric drill connecting portion 201 and regulon 130, wherein, be connected and fixed the hollow structure that portion 202 has perforation, the cross sectional shape and the size of described hollow structure are matched with drill bit, are suitable for the electric drill head is connected insertion.In a kind of specific embodiment, be connected and fixed portion 202 and can be blocks with holes or plates with certain shape of cross section, for example its shape of cross section can be circle, square, rhombus etc., and concrete shape does not impact itself and being connected of electric drill connecting portion 201.
In other specific embodiment, electric drill connecting portion 201 be connected and fixed that portion 202 also can be formed as one.For example, with reference to figure 3, electric drill connecting portion 201 be connected and fixed portion 202 and specifically can be a tubular body 211 with pedestal 212; Wherein, this pedestal 212 can be blocks or the plates that cross section has definite shape, for example its cross section can be circle, square, rhombus etc., the area of pedestal 212 is not less than the area of section of tubular body 211, have the hole 213 of perforation in the described pedestal, the area of section in hole 213 is less than the area of section of tubular body 211.
In addition, fixed cell 110 also can comprise: connect sticking department, be suitable for electric drill connecting portion 201 and being connected of electric drill are locked.With reference to figure 4, in the specific embodiment, electric drill connecting portion 201 is a tubular body, and described connection sticking department can comprise: snap close 301 and holding screw 302; Wherein, snap close 301 can be annular, be enclosed in the outer surface of electric drill connecting portion 201, and has the projection that is provided with in opposite directions in described annular indentation, there, described projection is suitable for being complementary with holding screw 302, makes that by fastening snap close 301 also tightens up thereupon when passing the holding screw 302 of described projection, and then tighten up by 301 of snap closes around electric drill connecting portion 201, thereby guarantee that electric drill is connected with the tight of electric drill connecting portion 201.
In a kind of embodiment of the utility model electric drill dust guard 100, with reference to figure 5, dust suction unit 120 is for being cylindrical hollow chamber, one side bottom surface of described chamber is connected with regulon 130, on this bottom surface chamber wall is set, the chamber wall of this bottom surface is provided with drill bit bore 401, is suitable for drill bit and penetrates.A side bottom surface relative with this bottom surface fits in the surface of electric drill construction object, and this bottom surface is opened wide chamber wall is not set, and makes the dust suction unit 120 and the surface of described electric drill construction object fit tightly.Side in dust suction unit 120 is provided with chamber wall, is convenient to assemble the dust that produces in the drill bit work progress; And, being provided with dust discharge pipeline 402 on this side, leak from drill bit bore 401 to prevent dust greater than the aperture of drill bit bore 401 in the aperture of dust discharge pipeline 402.Dust discharge pipeline 402 is suitable for being connected with external dust collection equipment, by opening external dust collection equipment, makes dust suction unit 120 be in low-pressure state, and the dust of being convenient to drill bit is produced is discharged from dust discharge pipeline 402.
In other embodiments, dust suction unit 120 can have other form, for example square, cuboid etc., specifically, a face is set to drill bit and penetrates face in the dust suction unit 120, and wherein said drill bit penetrates face and is provided with chamber wall, and in chamber wall drill bit bore is set; Penetrate another relative face of face with described drill bit and be set to the face that fits with drill bit construction object surface, this face is not provided with chamber wall.In the four sides chamber wall is being set all in addition, and in the one side dust discharge pipeline is being set arbitrarily therein.The concrete form of dust suction unit 120 is not influential to its enforcement.
In specific implementation, regulon 130 can comprise extensible member, for example spring; The one end is connected with fixed cell 110, for example, can be connected in the portion that is connected and fixed of fixed cell 110; Its other end is connected in dust suction unit 120.When electric drill was in running order, fixed cell 110 was elastic with the motion of electric drill, drove regulon 130 and moved thereupon.Because regulon 130 has scalability, make electric drill in motion process, electric drill motion is brought influences major part and is conditioned unit 130 and offsets, and dust suction unit 130 does not produce displacement with the electric drill motion, thereby can guarantee that the construct surface of object of dust suction unit 130 and drill bit fits.In other embodiments, described extensible member also can be other material with retractility.
With reference to figure 6, in practice of construction is used, electric drill connecting portion 501 by the utility model electric drill dust guard be connected and fixed portion 502, electric drill is connected with described electric drill dust guard, use snap close 503 and holding screw 504 that the electric drill stator closely is fixed in the fixed cell 510, and make drill bit pass electric drill connecting portion 501, be connected and fixed the drill bit bore 506 of portion 502 and dust suction unit 520.In the one side relative chamber wall is not set in the dust suction unit 520, is close to the construction surface of electric drill, for example ground with drill bit bore 506.In the work progress of electric drill, along with the continuous propelling of electric drill, the spring 505 that is connected and fixed unit 510 and dust suction unit 520 moves thereupon, thereby makes dust suction unit 520 and ground combine closely.In addition, dust suction unit 520 is provided with dust discharge pipeline 507.
When electric drill is in the construction state, dust discharge pipeline 507 is connected with equipment such as external dust catchers, and starts external equipment such as dust catcher.At this moment, external dust collection equipment is opened, and by dust discharge pipeline 507, is in low-pressure state in the dust suction unit 520.Under action of pressure, the air that the dust that produces in the drill bit work progress can be accompanyed or follow drill bit bore 506 inspirations is discharged from through dust discharge pipeline 507.Since dust suction unit 520 close proximity to grounds, and around it cavity wall is set all, stop the diffusion of dust effectively, and can absorb the most dusts that produce by the drill bit construction.
Compared to prior art, the utility model the respective embodiments described above, by being close to the dust suction unit of drill bit construction object surface, stop the diffusion of the most dusts that produce in the drill bit work progress effectively, and by the dust discharge pipeline that can connect external dust collection equipment is set in the dust suction unit, absorb in time,, solved the contamination by dust problem effectively for the electric drill construction provides efficiently, dedusting easily.
In addition, when electric drill is not in the construction state, can untie snap close and holding screw, the utility model electric drill dust guard is shirked from electric drill, thereby can adopt an electric drill dust guard and a plurality of electric drill to be used, save construction cost.
Though the utility model by the preferred embodiment explanation as above, these preferred embodiments are not in order to limit the utility model.Those skilled in the art in not breaking away from spirit and scope of the present utility model, should have the ability various corrections and additional are made in this preferred embodiment, and therefore, protection domain of the present utility model is as the criterion with the scope of claims.