CN201728698U - Electric drill dustproof device - Google Patents

Electric drill dustproof device Download PDF

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Publication number
CN201728698U
CN201728698U CN2010202465231U CN201020246523U CN201728698U CN 201728698 U CN201728698 U CN 201728698U CN 2010202465231 U CN2010202465231 U CN 2010202465231U CN 201020246523 U CN201020246523 U CN 201020246523U CN 201728698 U CN201728698 U CN 201728698U
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CN
China
Prior art keywords
electric drill
dust
drill
dust guard
drill bit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2010202465231U
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Chinese (zh)
Inventor
刘铁柱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Beijing Corp
Original Assignee
Semiconductor Manufacturing International Shanghai Corp
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Filing date
Publication date
Application filed by Semiconductor Manufacturing International Shanghai Corp filed Critical Semiconductor Manufacturing International Shanghai Corp
Priority to CN2010202465231U priority Critical patent/CN201728698U/en
Application granted granted Critical
Publication of CN201728698U publication Critical patent/CN201728698U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

An electric drill dustproof device comprises a fixing unit, a dust catching unit and an adjusting unit. The fixing unit is suitable for fixing the electric drill dustproof device onto an electric drill, the dust catching unit covering on the periphery of an electric drill bit absorbs dust generated during movement of the electric drill, and the adjusting unit applicable to connection of the fixing unit and the dust catching unit adjusts the length of the electric drill dustproof device along with movement of the electric drill to maintain the dust catching unit being attached to the surface of an implemented object of the electric drill. The electric drill dustproof device provides high-efficiency and convenient dust removal for electric drill implementation by forming the low-pressure dust catching unit on the periphery of the drill bit.

Description

The electric drill dust guard
Technical field
The utility model relates to the pollution control technology in the semiconductor fabrication process, particularly the electric drill dust guard.
Background technology
Along with the sustained, stable growth of Chinese national economy and the development of constantly bringing forth new ideas of production technology, the front and back multiple working procedure during extensive and super large-scale integration (IC) is produced is had higher requirement to production environment.Simultaneously, along with integrated level and the complexity of IC are more and more higher, pollution control technology is just restricting the development of microelectric technique more.
In semiconductor fabrication process, not only to keep certain temperature/humidity and control static, also need to keep higher cleanliness factor.At present, in the extensive IC production process, especially the IC encapsulated phase requires the grit of control 0.1 μ m to reach 1 grade even tighter.
If dust, dirt are brought into the workshop of semiconductor devices, be adsorbed on the chip, will influence product quality, worsen properties of product, reduce the IC yield rate greatly, even cause product rejection.For example, when the radius of dust adsorbed particle during greater than the about 100 μ m of 100 μ m, line thickness, film thickness is at 50 μ m following times, the easiest product rejection that makes.
In semiconductor fabrication process, need usually to adopt electric drill on elements such as circuit board, to punch, punch out step can produce more fines, dust etc., and production environment is had bigger pollution.Because electric drill continues to produce dust in the process of motion, the dust catcher that uses can only sop up the dust granule less than 1/3 usually at present, can't really play the effect of dedusting, and some employing is built the mode of clean canopy so that solution to be provided, though kept cleanliness factor, also brought the cost of great number.
The utility model content
The purpose of this utility model is to provide a kind of electric drill dust guard, for the electric drill construction provides efficiently, dedusting easily.
For achieving the above object, the utility model provides a kind of electric drill dust guard, comprising: fixed cell is suitable for described electric drill dust guard is fixed on the electric drill; The dust suction unit covers in around the drill bit, receives the dust that produces in the electric drill motion process; Regulon is suitable for connecting described fixed cell and described dust suction unit, and the length of regulating described electric drill dust guard along with the motion of electric drill, keeps described dust suction unit to depend on the surface of electric drill construction object.
Compared to prior art, the utlity model has following beneficial effect: by around drill bit, forming the dust suction unit of low pressure, stop the diffusion of the most dusts that produce in the drill bit work progress effectively, and in time dust is discharged, for the electric drill construction provides efficiently, dedusting easily, solved the contamination by dust problem effectively.
Description of drawings
Fig. 1 is the structural representation of a kind of embodiment of the utility model electric drill dust guard;
Fig. 2 is the structural representation of fixed cell in a kind of embodiment of the utility model electric drill dust guard;
Fig. 3 is the structural representation that the electric drill connecting portion fish portion of being connected and fixed of fixed cell in a kind of specific embodiment of the utility model electric drill dust guard is formed as one;
Fig. 4 is the structural representation of the connection sticking department of fixed cell in a kind of specific embodiment of the utility model electric drill dust guard;
Fig. 5 is the structural representation of dust suction unit in a kind of embodiment of the utility model electric drill dust guard;
Fig. 6 is the structural representation of a kind of specific embodiment of the utility model electric drill dust guard.
The specific embodiment
A lot of details have been set forth in the following description so that fully understand the utility model.But the utility model can be implemented much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of the utility model intension, so the utility model is not subjected to the restriction of following public concrete enforcement.
Secondly, the utility model utilizes schematic diagram to be described in detail, when the utility model embodiment is described in detail in detail; for ease of explanation; the profile of expression device architecture can be disobeyed general ratio and be done local the amplification, and described schematic diagram is example, and it should not limit the scope of the utility model protection at this.The three dimensions size that in actual fabrication, should comprise in addition, length, width and the degree of depth.
Below in conjunction with the drawings and specific embodiments, the utility model embodiment is described in further details.
With reference to figure 1, the utility model provides a kind of electric drill dust guard 100, comprises at least: fixed cell 110 is suitable for electric drill dust guard 100 is fixed on the electric drill; Dust suction unit 120 is a hollow chamber, covers in around the drill bit, receives the dust that produces in the electric drill motion process; Regulon 130 is suitable for being connected and fixed unit 110 and dust suction unit 120, and the length of regulating electric drill dust guard 100 along with the motion of electric drill, keeps dust suction unit 120 to depend on the object surface of electric drill construction.
With reference to figure 2, in a kind of embodiment of electric drill dust guard 100, fixed cell 110 can comprise at least: electric drill connecting portion 201 is suitable for connecting electric drill; And be connected and fixed portion 202, be suitable for connecting electric drill connecting portion 201 and regulon 130.
Wherein, in a kind of specific embodiment, electric drill connecting portion 201 is two structures that separate with being connected and fixed portion 202, and an end that is connected and fixed portion 202 adopts modes such as welding, fixing riveted joint, close joint riveted joint to be connected with electric drill connecting portion 201, the other end that is connected and fixed portion 202 adopts modes such as welding, fixing riveted joint, close joint riveted joint to be connected with regulon 130, to guarantee electric drill in the course of the work, by being connected of electric drill and fixed cell 110, can driving regulon 130 and produce corresponding motion thereupon.
Particularly, electric drill connecting portion 201 can be the tubular body of hollow, and the pipe diameter and the electric drill of electric drill connecting portion 201 are complementary, and for example can be complementary with the electric drill stator.Be connected and fixed portion 202 and can adopt one of existing multiple attaching parts commonly used or its combination, to realize being connected and fixing of electric drill connecting portion 201 and regulon 130, wherein, be connected and fixed the hollow structure that portion 202 has perforation, the cross sectional shape and the size of described hollow structure are matched with drill bit, are suitable for the electric drill head is connected insertion.In a kind of specific embodiment, be connected and fixed portion 202 and can be blocks with holes or plates with certain shape of cross section, for example its shape of cross section can be circle, square, rhombus etc., and concrete shape does not impact itself and being connected of electric drill connecting portion 201.
In other specific embodiment, electric drill connecting portion 201 be connected and fixed that portion 202 also can be formed as one.For example, with reference to figure 3, electric drill connecting portion 201 be connected and fixed portion 202 and specifically can be a tubular body 211 with pedestal 212; Wherein, this pedestal 212 can be blocks or the plates that cross section has definite shape, for example its cross section can be circle, square, rhombus etc., the area of pedestal 212 is not less than the area of section of tubular body 211, have the hole 213 of perforation in the described pedestal, the area of section in hole 213 is less than the area of section of tubular body 211.
In addition, fixed cell 110 also can comprise: connect sticking department, be suitable for electric drill connecting portion 201 and being connected of electric drill are locked.With reference to figure 4, in the specific embodiment, electric drill connecting portion 201 is a tubular body, and described connection sticking department can comprise: snap close 301 and holding screw 302; Wherein, snap close 301 can be annular, be enclosed in the outer surface of electric drill connecting portion 201, and has the projection that is provided with in opposite directions in described annular indentation, there, described projection is suitable for being complementary with holding screw 302, makes that by fastening snap close 301 also tightens up thereupon when passing the holding screw 302 of described projection, and then tighten up by 301 of snap closes around electric drill connecting portion 201, thereby guarantee that electric drill is connected with the tight of electric drill connecting portion 201.
In a kind of embodiment of the utility model electric drill dust guard 100, with reference to figure 5, dust suction unit 120 is for being cylindrical hollow chamber, one side bottom surface of described chamber is connected with regulon 130, on this bottom surface chamber wall is set, the chamber wall of this bottom surface is provided with drill bit bore 401, is suitable for drill bit and penetrates.A side bottom surface relative with this bottom surface fits in the surface of electric drill construction object, and this bottom surface is opened wide chamber wall is not set, and makes the dust suction unit 120 and the surface of described electric drill construction object fit tightly.Side in dust suction unit 120 is provided with chamber wall, is convenient to assemble the dust that produces in the drill bit work progress; And, being provided with dust discharge pipeline 402 on this side, leak from drill bit bore 401 to prevent dust greater than the aperture of drill bit bore 401 in the aperture of dust discharge pipeline 402.Dust discharge pipeline 402 is suitable for being connected with external dust collection equipment, by opening external dust collection equipment, makes dust suction unit 120 be in low-pressure state, and the dust of being convenient to drill bit is produced is discharged from dust discharge pipeline 402.
In other embodiments, dust suction unit 120 can have other form, for example square, cuboid etc., specifically, a face is set to drill bit and penetrates face in the dust suction unit 120, and wherein said drill bit penetrates face and is provided with chamber wall, and in chamber wall drill bit bore is set; Penetrate another relative face of face with described drill bit and be set to the face that fits with drill bit construction object surface, this face is not provided with chamber wall.In the four sides chamber wall is being set all in addition, and in the one side dust discharge pipeline is being set arbitrarily therein.The concrete form of dust suction unit 120 is not influential to its enforcement.
In specific implementation, regulon 130 can comprise extensible member, for example spring; The one end is connected with fixed cell 110, for example, can be connected in the portion that is connected and fixed of fixed cell 110; Its other end is connected in dust suction unit 120.When electric drill was in running order, fixed cell 110 was elastic with the motion of electric drill, drove regulon 130 and moved thereupon.Because regulon 130 has scalability, make electric drill in motion process, electric drill motion is brought influences major part and is conditioned unit 130 and offsets, and dust suction unit 130 does not produce displacement with the electric drill motion, thereby can guarantee that the construct surface of object of dust suction unit 130 and drill bit fits.In other embodiments, described extensible member also can be other material with retractility.
With reference to figure 6, in practice of construction is used, electric drill connecting portion 501 by the utility model electric drill dust guard be connected and fixed portion 502, electric drill is connected with described electric drill dust guard, use snap close 503 and holding screw 504 that the electric drill stator closely is fixed in the fixed cell 510, and make drill bit pass electric drill connecting portion 501, be connected and fixed the drill bit bore 506 of portion 502 and dust suction unit 520.In the one side relative chamber wall is not set in the dust suction unit 520, is close to the construction surface of electric drill, for example ground with drill bit bore 506.In the work progress of electric drill, along with the continuous propelling of electric drill, the spring 505 that is connected and fixed unit 510 and dust suction unit 520 moves thereupon, thereby makes dust suction unit 520 and ground combine closely.In addition, dust suction unit 520 is provided with dust discharge pipeline 507.
When electric drill is in the construction state, dust discharge pipeline 507 is connected with equipment such as external dust catchers, and starts external equipment such as dust catcher.At this moment, external dust collection equipment is opened, and by dust discharge pipeline 507, is in low-pressure state in the dust suction unit 520.Under action of pressure, the air that the dust that produces in the drill bit work progress can be accompanyed or follow drill bit bore 506 inspirations is discharged from through dust discharge pipeline 507.Since dust suction unit 520 close proximity to grounds, and around it cavity wall is set all, stop the diffusion of dust effectively, and can absorb the most dusts that produce by the drill bit construction.
Compared to prior art, the utility model the respective embodiments described above, by being close to the dust suction unit of drill bit construction object surface, stop the diffusion of the most dusts that produce in the drill bit work progress effectively, and by the dust discharge pipeline that can connect external dust collection equipment is set in the dust suction unit, absorb in time,, solved the contamination by dust problem effectively for the electric drill construction provides efficiently, dedusting easily.
In addition, when electric drill is not in the construction state, can untie snap close and holding screw, the utility model electric drill dust guard is shirked from electric drill, thereby can adopt an electric drill dust guard and a plurality of electric drill to be used, save construction cost.
Though the utility model by the preferred embodiment explanation as above, these preferred embodiments are not in order to limit the utility model.Those skilled in the art in not breaking away from spirit and scope of the present utility model, should have the ability various corrections and additional are made in this preferred embodiment, and therefore, protection domain of the present utility model is as the criterion with the scope of claims.

Claims (10)

1. an electric drill dust guard is characterized in that, comprising:
Fixed cell is suitable for described electric drill dust guard is fixed on the electric drill;
The dust suction unit covers in around the drill bit, receives the dust that produces in the electric drill motion process;
Regulon is suitable for connecting described fixed cell and described dust suction unit, and the length of regulating described electric drill dust guard along with the motion of electric drill, keeps described dust suction unit to depend on the surface of electric drill construction object.
2. electric drill dust guard as claimed in claim 1 is characterized in that, described fixed cell comprises at least: the electric drill connecting portion is suitable for connecting electric drill; And be connected and fixed portion, be suitable for connecting described electric drill connecting portion and regulon; Described electric drill connecting portion and the described portion of being connected and fixed are isolating construction or integrally formed.
3. electric drill dust guard as claimed in claim 2 is characterized in that, described electric drill connecting portion is the tubular body of hollow, and the diameter of described tubular body and electric drill stator are complementary.
4. electric drill dust guard as claimed in claim 2 is characterized in that the described portion of being connected and fixed has the hollow structure of perforation, and the cross sectional shape and the size of described hollow structure are matched with drill bit, is suitable for the electric drill head is connected insertion.
5. electric drill dust guard as claimed in claim 2 is characterized in that, described fixed cell also comprises: connect sticking department, be suitable for described electric drill connecting portion and being connected of electric drill are locked.
6. electric drill dust guard as claimed in claim 5 is characterized in that, described connection sticking department comprises: snap close and holding screw; Wherein, described snap close is an annular, is enclosed in the outer surface of described electric drill connecting portion, and has the projection that is provided with in opposite directions in described annular indentation, there, and described projection is suitable for being complementary with described holding screw.
7. electric drill dust guard as claimed in claim 1, it is characterized in that, in the described dust suction unit except that a surface is opened wide, other surface all is provided with cavity wall, the described unlimited surface and the surface of drill bit construction object fit, and be provided with drill bit bore with a described unlimited surperficial relative surface, described drill bit bore is suitable for drill bit and penetrates.
8. electric drill dust guard as claimed in claim 7, it is characterized in that, described dust suction unit has the dust discharge pipeline, described dust discharge pipeline be arranged at except that the surface that described drill bit bore is set and with its facing surfaces arbitrary face on, and the diameter of described dust discharge pipeline is greater than the aperture of described drill bit bore.
9. electric drill dust guard as claimed in claim 8 is characterized in that, described dust suction unit is cylinder, and an one bottom surface is provided with drill bit bore, and the surface of another bottom surface and drill bit construction object fits.
10. electric drill dust guard as claimed in claim 1 is characterized in that, described regulon is a spring.
CN2010202465231U 2010-06-30 2010-06-30 Electric drill dustproof device Expired - Fee Related CN201728698U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010202465231U CN201728698U (en) 2010-06-30 2010-06-30 Electric drill dustproof device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010202465231U CN201728698U (en) 2010-06-30 2010-06-30 Electric drill dustproof device

Publications (1)

Publication Number Publication Date
CN201728698U true CN201728698U (en) 2011-02-02

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010202465231U Expired - Fee Related CN201728698U (en) 2010-06-30 2010-06-30 Electric drill dustproof device

Country Status (1)

Country Link
CN (1) CN201728698U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103272816A (en) * 2013-05-29 2013-09-04 成都飞机工业(集团)有限责任公司 Composite material drilling dust collecting device
CN110449630A (en) * 2019-09-04 2019-11-15 孟庆美 A kind of electric drill with dust reduction capability

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103272816A (en) * 2013-05-29 2013-09-04 成都飞机工业(集团)有限责任公司 Composite material drilling dust collecting device
CN110449630A (en) * 2019-09-04 2019-11-15 孟庆美 A kind of electric drill with dust reduction capability

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130115

C41 Transfer of patent application or patent right or utility model
COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TR01 Transfer of patent right

Effective date of registration: 20130115

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20110202

Termination date: 20180630

CF01 Termination of patent right due to non-payment of annual fee