CN201694951U - Clamp for manufacturing flat plate display - Google Patents
Clamp for manufacturing flat plate display Download PDFInfo
- Publication number
- CN201694951U CN201694951U CN2010201971325U CN201020197132U CN201694951U CN 201694951 U CN201694951 U CN 201694951U CN 2010201971325 U CN2010201971325 U CN 2010201971325U CN 201020197132 U CN201020197132 U CN 201020197132U CN 201694951 U CN201694951 U CN 201694951U
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- CN
- China
- Prior art keywords
- chuck
- anchor clamps
- clamps according
- clip tongue
- lateral margin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a clamp for manufacturing a flat plate display, in particular to a clamp for a film coating machine platform. The clamp comprises a clamping head, a fixed base and a clamping neck; a clamping tongue is further arranged below the clamping head; and a tilted part is arranged above the front end of the clamping head. By the technical scheme, the contact extrusion of film coating deposition tumors to a glass base plate is reduced, and the risks of the unfilled corner and the breakage of the glass base plate are avoided.
Description
Technical field
The utility model relates to a kind of anchor clamps that are used to make flat-panel monitor, the anchor clamps that particularly a kind of film coating equipment is used.
Background technology
In recent years, because in light weight, advantage such as volume is little, flat-panel monitor especially liquid-crystal display (LCD) and organic light emitting display (OLED) is widely used in display terminals such as cell phone, digital camera, notebook computer and flat panel TV.Owing to have brightness, viewing angle properties, response speed and the display effect that is better than LCD, the advantage that OLED is acknowledged as flat-panel monitor of future generation, particularly active matrix/organic light emitting display (AMOLED) is more outstanding.AMOLED realizes luminous Presentation Function by form the OLED device on thin film transistor (TFT) substrate.The manufacturing of TFT substrate will be made thin film transistor (TFT) array on glass substrate, its arts demand forms multilayered structure through multiple tracks mask processing procedure and finally constitutes tft array on glass substrate.
Fig. 1 a and Fig. 1 b make the anchor clamps synoptic diagram of tft array with film coating equipment in the prior art.As shown in the figure, anchor clamps 1 comprise chuck 1-1, whizzer 1-2 and permanent seat 1-3, form clip slot 1-4 between chuck 1-1 and equipment base plate carrying platform with clamping one gripping object, as glass substrate.Two chuck lateral margin 1-5 are parallel to each other and the chuck end face is a rectangle.Fig. 2 is existing anchor clamps work synoptic diagram, as shown in the figure, in the film coating equipment working process during as sputter material can be at the chuck edge chuck front end formation of deposits deposition knurl 2-1 especially, when long-time use deposition knurl 2-1 volume is excessive, can cause extrusion and collision to glass substrate at deposition knurl place during anchor clamps clamping glass substrate 2-2, unbalance stress will cause glass substrate unfilled corner even fragmentation, as shown in the figure the 2-3 of fragmentation place.
Summary of the invention
Based on the problems referred to above, the purpose of this utility model provides the anchor clamps that a kind of film coating equipment is used, to solve the problem of glass substrate unfilled corner and fragmentation.
The purpose of this utility model is achieved by following technical solution:
The anchor clamps that the utility model provides a kind of film coating equipment to use comprise chuck, permanent seat and whizzer, and whizzer is used to connect chuck and permanent seat, and form clip slot between chuck and equipment base plate carrying platform.Above-mentioned chuck below also has a clip tongue, and this clip tongue and chuck form the lamination step structure, and the chuck front end protrudes in the clip tongue front end.The top of chuck front end has a warping part.The lateral margin of chuck is a camber line shape, and two chuck lateral margins are contraction-like by chuck front end to the direction of chuck rear end.The chuck lateral margin can be concordant with the clip tongue lateral margin, also can protrude in adjacent clip tongue lateral margin.Chuck front end lower edge, clip tongue front end lower edge and chuck front end corner all can be fillet.
The utility model increases the warping part at the chuck front end, deposit towards the direction that deviates from glass substrate with the guiding Coating Materials, set up clip tongue simultaneously, make and form a space between glass substrate and chuck front end, to hold to the sedimentary deposition knurl of glass substrate direction, reduced of the contact extruding of deposition knurl by above technical scheme, avoided the risk of glass substrate unfilled corner and fragmentation glass substrate.
Description of drawings
Fig. 1 a prior art is used for the side-view of the anchor clamps of film coating equipment;
Fig. 1 b prior art is used for the vertical view of the anchor clamps of film coating equipment;
Fig. 2 causes the synoptic diagram of fragmentation when having anchor clamps clamping glass substrate now;
Fig. 3 a the utility model embodiment 1 is used for the side-view of the anchor clamps of film coating equipment;
Fig. 3 b the utility model embodiment 1 is used for the vertical view of the anchor clamps of film coating equipment;
The work effect synoptic diagram of Fig. 4 the utility model embodiment 1;
Fig. 5 a the utility model embodiment 2 is used for the side-view of the anchor clamps of film coating equipment;
Fig. 5 b the utility model embodiment 2 is used for the vertical view of the anchor clamps of film coating equipment;
Description of reference numerals is as follows:
Whizzer 1-2 3-2 5-2 permanent seat 1-3 3-3 5-3
Clip slot 1-4 chuck front end 3-5 5-5
Chuck lateral margin 1-5 3-12 5-12 chuck rear end 3-11 5-11
Chuck front end corner 3-13 5-13 chuck front end lower edge 3-6 5-6
Warping part 3-7 5-7 clip tongue 3-8 5-8
Clip tongue front end 3-9 5-9 clip tongue front end lower edge 3-10 5-10
Clip tongue lateral margin 5-14 space 4-3
Deposition knurl 2-1 4-1 glass substrate 2-2 4-2
The 2-3 of fragmentation place
Embodiment
For allowing foregoing of the present utility model become apparent, preferred embodiment cited below particularly, and be described in detail below in conjunction with the accompanying drawings.
Fig. 3 a and Fig. 3 b are respectively the side-view and the vertical views of the utility model embodiment 1 anchor clamps of being used for film coating equipment.Fig. 4 is the work effect synoptic diagram of the utility model embodiment 1.As shown in the figure, anchor clamps 10 described in the utility model are used for a film coating equipment, and this board can be the metal coating board, includes but not limited to this, and those of ordinary skill in the art also can adjust applied board according to the actual requirements.Anchor clamps 10 are used for clamping and are sent to the gripping object of film coating equipment, and for example glass substrate includes but not limited to this, and those of ordinary skill in the art is the classification of conversion gripping object according to demand also.Described anchor clamps 10 comprise chuck 3-1, clip tongue 3-8, whizzer 3-2 and permanent seat 3-3, permanent seat 3-3 can be fixed in anchor clamps 10 on the film coating equipment, whizzer 3-2 is used to be connected and fixed pedestal 3-3 and chuck 3-1, form clip slot between chuck 3-1 and equipment base plate carrying platform, clip slot have be slightly larger than thickness of glass substrate height with clamping glass substrate 4-2.Chuck front end 3-5 top has a warping part 3-7, this warping part 3-7 one sticks up point, but be not limited to this, utilize warping part 3-7 can guide Coating Materials, to alleviate or to avoid depositing knurl 4-1 contact and push glass substrate towards the direction deposition that deviates from glass substrate.Clip tongue 3-8 is positioned at chuck 3-1 below, chuck front end 3-5 protrudes in clip tongue front end 3-9, the two forms the lamination step structure, because the existence of clip tongue 3-8 makes and forms a space 4-3 between glass substrate and chuck front end, to hold, avoid it to contact with glass substrate 4-2 to the sedimentary deposition knurl of glass substrate direction 4-1.Chuck lateral margin 3-12 is a camber line shape, and two chuck lateral margin 3-12 are contraction-like by chuck front end 3-5 to the direction of chuck rear end 3-11, and concordant with the clip tongue lateral margin.Fillet can reduce the deposition of Coating Materials, and chuck front end lower edge 3-6, clip tongue front end lower edge 3-10 and chuck front end corner 5-13 are a fillet, but are not limited thereto, and also can adjust its design according to the actual requirements.
In preferred embodiment, the height h essence of warping part 3-7 is not less than 0.5mm, and chuck 3-1 thickness H1 essence is not less than 1mm, and clip tongue 3-8 thickness H2 essence is not less than 1mm, chuck length L 1 essence is not less than 3mm, and length L 2 essence that chuck front end 3-5 protrudes in clip tongue front end 3-9 are not less than 1mm.For example, the about 0.5mm of height h of warping part 3-7 in the utility model, the about 1mm of chuck 3-1 thickness H1, the about 1mm of clip tongue 3-8 thickness H2, chuck 3-1 length L 1 about 4mm, chuck front end 3-5 protrudes in length L 2 about 1mm of clip tongue front end 3-9, however the utility model with above-mentioned be described as the limit, those of ordinary skill in the art can adjust its size according to the actual requirements.
The utility model is at the defective of prior art, increase warping part 3-7 at chuck front end 3-5, deposit towards the direction that deviates from glass substrate with the guiding Coating Materials, set up clip tongue 3-8 simultaneously, make and form a space 4-3 between glass substrate and chuck front end, to hold to the sedimentary deposition knurl of glass substrate direction 4-1, reduced of the contact extruding of deposition knurl by above technical scheme to glass substrate, avoided the risk of glass substrate unfilled corner and fragmentation.
Embodiment 2
Fig. 5 a and Fig. 5 b are respectively the side-view and the vertical views of the utility model embodiment 2 anchor clamps of being used for film coating equipment.Compare with embodiment 1, chuck lateral margin 5-12 protrudes in adjacent clip tongue lateral margin 5-14 in the present embodiment, and the two spacing W essence is not less than 1mm, and the coated film deposition to the anchor clamps side has also formed favorable protection like this.Other are all with embodiment 1.
Though the utility model is to disclose as above than preferable embodiment; yet it is not in order to limit the utility model; anyly be familiar with this technology personage; in not breaking away from spirit and scope of the present utility model; when being used for a variety of modifications and variations; therefore, protection domain of the present utility model is as the criterion when the claim with application defines.
Claims (14)
1. the anchor clamps that film coating equipment is used comprise chuck, permanent seat and whizzer, and whizzer is used to connect chuck and permanent seat, and form clip slot between chuck and equipment base plate carrying platform, it is characterized in that, described chuck below also has a clip tongue.
2. anchor clamps according to claim 1 is characterized in that, described clip tongue and chuck form the lamination step structure, and the chuck front end protrudes in the clip tongue front end.
3. anchor clamps according to claim 2 is characterized in that, the length essence that described chuck front end protrudes in the clip tongue front end is not less than 1mm.
4. anchor clamps according to claim 1 is characterized in that, the thickness essence of described clip tongue is not less than 1mm.
5. anchor clamps according to claim 2 is characterized in that the top of described chuck front end has a warping part.
6. anchor clamps according to claim 5 is characterized in that, the height essence of described warping part is not less than 0.5mm.
7. anchor clamps according to claim 6 is characterized in that, described warping part is one to stick up point.
8. anchor clamps according to claim 1 is characterized in that, the lateral margin of described chuck is a camber line shape.
9. anchor clamps according to claim 8 is characterized in that, the both side edges of described chuck is contraction-like by chuck front end to the direction of chuck rear end.
10. anchor clamps according to claim 9 is characterized in that, described chuck lateral margin protrudes in adjacent clip tongue lateral margin.
11. anchor clamps according to claim 10 is characterized in that, the spacing essence of described chuck lateral margin and adjacent clip tongue lateral margin is not less than 1mm.
12. anchor clamps according to claim 1 is characterized in that, the front end lower edge of described chuck is a fillet.
13. anchor clamps according to claim 1 is characterized in that, the front end lower edge of described clip tongue is a fillet.
14. anchor clamps according to claim 1 is characterized in that, the front end corner of described chuck is a fillet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201971325U CN201694951U (en) | 2010-05-20 | 2010-05-20 | Clamp for manufacturing flat plate display |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201971325U CN201694951U (en) | 2010-05-20 | 2010-05-20 | Clamp for manufacturing flat plate display |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201694951U true CN201694951U (en) | 2011-01-05 |
Family
ID=43396192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201971325U Expired - Lifetime CN201694951U (en) | 2010-05-20 | 2010-05-20 | Clamp for manufacturing flat plate display |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201694951U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101921064A (en) * | 2010-05-20 | 2010-12-22 | 昆山工研院新型平板显示技术中心有限公司 | Clamp for manufacturing panel displays |
| CN104820301A (en) * | 2015-04-27 | 2015-08-05 | 武汉华星光电技术有限公司 | Sputtering clamp and sputtering operating platform |
-
2010
- 2010-05-20 CN CN2010201971325U patent/CN201694951U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101921064A (en) * | 2010-05-20 | 2010-12-22 | 昆山工研院新型平板显示技术中心有限公司 | Clamp for manufacturing panel displays |
| CN101921064B (en) * | 2010-05-20 | 2013-04-03 | 昆山工研院新型平板显示技术中心有限公司 | Clamp for manufacturing panel displays |
| CN104820301A (en) * | 2015-04-27 | 2015-08-05 | 武汉华星光电技术有限公司 | Sputtering clamp and sputtering operating platform |
| CN104820301B (en) * | 2015-04-27 | 2018-06-22 | 武汉华星光电技术有限公司 | A kind of sputtering fixture and sputtering operation platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110105 Effective date of abandoning: 20130403 |
|
| RGAV | Abandon patent right to avoid regrant |