CN201692889U - Improved nozzle structure - Google Patents

Abstract

The utility model provides an improved nozzle structure, comprising a nozzle body; the nozzle body comprises an upper part, a neck part and a through hole, wherein, the upper part is funneled and gradually contracted downwards and inwards, the neck part is connected to the upper part and extended downwards from the upper part, the upper part and the neck part are communicated by the through hole; in addition, the upper part also comprises a top surface, a plurality of flanges is projected from the top surface towards the through hole, every two adjacent flanges are partitioned to form a flow passage, and the passages are communicated with the through hole. Thereby, the purpose of greatly reducing accumulated particles is realized by the design of the funneled structure of the nozzle body and the purpose of separating air flows is realized by the design of the flanges and the partitioned flow passages of the nozzle body.

Description

Improved nozzle arrangements

Technical field

The utility model relates to a kind of improved nozzle arrangements, relates in particular to a kind of improved nozzle arrangements that can significantly reduce the particulate accumulation and disperse air-flow.

Background technology

In manufacture of semiconductor, because of processing procedure needs and wafer can be contained in the wafer cassette, utilize gas that spray nozzle device fills nitrogen for example afterwards to wafer cassette, with avoid in the wafer cassette ccontaining wafer be subjected to oxidation and particulate (particle) pollutes.For example, under 45 nanometer processing procedures, crystal grain (die) is littler with the interval of intergranule, so to significantly reducing the also more and more strictness of requirement that the particulate accumulation is polluted.

Please refer to Fig. 1, it is the stereogram of the nozzle body of known nozzle structure, shows the nozzle body 9 of known nozzle structure in graphic, and its section is to be taper, and has provided pore 91.

Please refer to Fig. 2, it is the profile of the spray nozzle device of assembling nozzle body shown in Figure 1.In graphic, show and be used for the spray nozzle device 8 of nozzle body 9 of assembly drawing 1, and this spray nozzle device 8 as blanketing gas (for example nitrogen) to the interior usefulness of wafer cassette (figure does not show), gas flow is shown in arrow.

As shown in Figure 2, so the nozzle body 9 of known nozzle structure is because of being taper in angle zone 92 easy accumulated particles, in other words, the nozzle body 9 of known nozzle structure can be difficult for getting rid of the particulate of inner product because of structural restriction, so when utilizing spray nozzle device 8 blanketing gas to wafer cassette, the promptly easy and then air-flow of the aforementioned particulate of piling up enters in the wafer cassette and causes wafer to be polluted, and is real non-very good.

Therefore, how creating a kind of improved nozzle arrangements, can significantly reduce the purpose that particulate is piled up and disperseed air-flow to reach, will be that the utility model is desired actively openly part.

In the invention

Because the shortcoming of above-mentioned known nozzle structure, it does not reach perfection utility model people's thoughts, then exhausting the concentrated research of its intelligence overcomes, be engaged in this industry accumulating experience for many years with it, and then develop a kind of improved nozzle arrangements, can significantly reduce the purpose that particulate is piled up and disperseed air-flow in the hope of reaching.

A purpose of the present utility model is to provide a kind of improved nozzle arrangements, it can have funnelform structural design by nozzle body and reaches and significantly reduce the purpose that particulate is piled up, and can reach the purpose of disperseing air-flow by the structural design that nozzle body has a flange and a runner that is separated out thereof in addition.

For reaching above-mentioned purpose or other purpose, the improved nozzle structure-improved of the utility model comprises nozzle body, this nozzle body comprises top, neck and perforation, wherein, top is funnel-form and contracts in gradually inwardly downwards, neck continues and extends downwards on top and by top, and perforation runs through top and neck.In addition, top also comprises end face, and this end face has protruded out a plurality of flanges towards perforation, also is separated out a runner to each other between each flange, and these runners are communicated in perforation.

Therefore, can have funnelform structural design by nozzle body and reach and significantly reduce the purpose that particulate is piled up, can reach the purpose of disperseing air-flow by the structural design that nozzle body has a flange and a runner that is separated out thereof in addition.

The quantity of above-mentioned a plurality of flanges can be eight and also is separated out eight runners to each other, and perhaps the quantity of a plurality of flanges can be three and also is separated out three runners to each other.Certainly, the quantity of a flange and a runner that is separated out thereof is not exceeded with aforementioned, can be other quantity yet, for example four, five etc.

Description of drawings

Fig. 1 is the stereogram of the nozzle body of known nozzle structure.

Fig. 2 is the profile of the spray nozzle device of assembling nozzle body shown in Figure 1.

Fig. 3 is the stereogram of the utility model first preferred embodiment.

Fig. 4 is the side view of the utility model first preferred embodiment.

Fig. 5 is the top view of the utility model first preferred embodiment.

Fig. 6 be among Fig. 5 along the profile of AA ' line segment.

Fig. 7 is one of assembling schematic diagram of the utility model first preferred embodiment.

Fig. 8 is two of the assembling schematic diagram of the utility model first preferred embodiment.

Fig. 9 is three of the assembling schematic diagram of the utility model first preferred embodiment.

Figure 10 is the top view for the utility model second preferred embodiment.

[primary clustering symbol description]

1 nozzle body

11 tops

111 end faces

112 flanges

113 runners

114 front ends

115 flanges

116 runners

12 necks

121 ring grooves

13 perforations

2 spray nozzle devices

3 gas filling devices

31 loading plates

32 alignment pins

4 wafer cassette

8 spray nozzle devices

9 nozzle bodies

91 pores

92 angle zones

The D diameter

T at interval

The W transverse width

AA ' hatching

The specific embodiment

For fully understanding the purpose of this utility model, feature and effect, existing by following specific embodiment, and cooperate appended graphicly, the utility model is described in detail, illustrate as after:

Please refer to Fig. 3, it is the stereogram of the utility model first preferred embodiment.Show that in graphic the improved nozzle arrangements of the utility model comprises nozzle body 1, and this nozzle body 1 adopts antistatic silica gel nozzle body in preferred implementation.

Please be simultaneously with reference to Fig. 3 to Fig. 6, wherein Fig. 4 is the side view of the utility model first preferred embodiment, and Fig. 5 is the top view of the utility model first preferred embodiment, and Fig. 6 is along the cross section view of AA ' line segment among Fig. 5.

Show that in graphic nozzle body 1 comprises top 11, neck 12 and perforation 13, wherein, top 11 is funnel-form and contracts in gradually inwardly downwards, and neck 12 continues on top 11 and is extended by top 11 downwards, and perforation 13 runs through top 11 and neck 12.

In the present embodiment, neck 12 can be arranged with ring groove 121, so that be assembled in spray nozzle device 2 usefulness of (as shown in Figure 7).13 of perforations of the present utility model can have the diameter D that is about 10mm.

In addition, the top 11 of graphic middle demonstration nozzle body 1 also comprises end face 111, and this end face 111 has protruded out a plurality of flanges 112 towards perforation 13, also is separated out the runner 113 of connection at perforation 13 between each flange 112 to each other.

In the present embodiment, a plurality of flanges 112 can adopt equal angles to arrange around the mode that protrudes out towards perforation 13, and show eight flanges 112 in graphic, and eight flanges of relative this 112 also are separated out eight runners 113 to each other.

In addition, each flange 112 comprises a transverse width W respectively, and this transverse width W is about 2mm.In addition, each flange 112 comprises a front end 114 respectively, and the front end 114 of two adjacent flanges 112 is at a distance of an interval T, this at interval T be about 1mm (also can be other size certainly).

Please refer to Fig. 7, it is one of assembling schematic diagram of the utility model first preferred embodiment, and shows the spray nozzle device 2 that is assembled with said nozzle body 1 in graphic.

Please refer to Fig. 8, its be the utility model first preferred embodiment the assembling schematic diagram two, and in graphic, show a gas filling device 3, this gas filling device 3 comprises a loading plate 31, and is assembled with four spray nozzle device 2 and three alignment pins 32 as shown in Figure 7 on loading plate 31.Wherein, the quantity of spray nozzle device 2 and alignment pin 32 can be provided with according to actual needs.

Please be simultaneously with reference to Fig. 8 and Fig. 9, wherein Fig. 9 be the utility model first preferred embodiment the assembling schematic diagram three, and in graphic, show wafer cassette 4, this wafer cassette 4 is placed on the loading plate 31 and utilizes alignment pin 32 to position, and four spray nozzle devices 2 as shown in Figure 7 get final product corresponding inflation inlet at wafer cassette 4 base plates (figure does not show), so can utilize 2 pairs of wafer cassette of spray nozzle device 4 to carry out for example inflation operation of nitrogen.

Referring again to Fig. 3 to Fig. 6, when blanketing gas, the gas flow shown in Fig. 4 and Fig. 6 arrow because of nozzle body 1 has funnelform structural design, significantly reduces the purpose that particulate is piled up so can reach by this.

Moreover nozzle body 1 is because of having the structural design of a flange 112 and a runner that is separated out 113 thereof, so can reach the purpose of disperseing air-flow by this.In other words, under the constant situation of the total flow of blanketing gas, can reduce gas by an above-mentioned flange 112 and a runner that is separated out 113 thereof and pour into wafer cassette 4 flow velocity of (as shown in Figure 9), so can avoid the particulate that deposits (if having) in the wafer cassette 4 originally being kicked up because of flow velocity is too fast.

Please refer to Figure 10, it is the top view of the utility model second preferred embodiment, and in the present embodiment, its primary structure is all specifically executed routine identical with the above-mentioned first preferable reality, unique difference is that the quantity of a plurality of flanges 115 is three and is separated out three runners 116 to each other, and so structural design can be reached the described various effects of above-mentioned first preferred embodiment equally.

In sum, these runners 113,116 of 114 formation of front end of the funnel-shaped structure on the utility model top 11 and these flanges 112,115 can significantly reduce in particulate is piled up in.More can give different designs, various enforcement aspects for example described in the utility model by the arrangement mode of these flanges 112,115, the arrangement and the runner control at interval of quantity again according to actual demand.

The utility model is open with preferred embodiment hereinbefore, so knows this operator and it should be understood that this embodiment only is used in and describe the utility model, and should not be read as restriction scope of the present utility model.It should be noted that the variation and the displacement of all and this embodiment equivalence all should be made as and be encompassed in the category of the present utility model.Therefore, protection domain of the present utility model when with hereinafter claim the person of being defined be as the criterion.

Claims (10)

1. improved nozzle arrangements, it is characterized in that, comprise nozzle body, this nozzle body comprises top, neck and perforation, and this top is funnel-form and contracts in gradually inwardly downwards, this neck is connected in this top and is extended downwards by this top, this perforation runs through this top and this neck, and this top also comprises end face, and this end face has protruded out a plurality of flanges towards this perforation, also be separated out first-class road to each other between each flange, these runners are communicated in this perforation.

2. improved nozzle arrangements as claimed in claim 1 is characterized in that, these a plurality of flanges with equal angles around protruding out towards this perforation.

3. improved nozzle arrangements as claimed in claim 2 is characterized in that, the quantity of these a plurality of flanges is eight and is separated out eight runners to each other.

4. improved nozzle arrangements as claimed in claim 3 is characterized in that, the transverse width of each of these a plurality of flanges is 2mm.

5. improved nozzle arrangements as claimed in claim 2 is characterized in that, the quantity of these a plurality of flanges is three and is separated out three runners to each other.

6. improved nozzle arrangements as claimed in claim 5 is characterized in that, the transverse width of each of these a plurality of flanges is to be 2mm.

7. as each described improved nozzle arrangements of claim 1 to 6, it is characterized in that each of these a plurality of flanges comprises front end respectively, and the front end of two adjacent flanges apart be spaced apart 1mm.

8. improved nozzle arrangements as claimed in claim 7 is characterized in that, this nozzle body is antistatic silica gel nozzle body.

9. improved nozzle arrangements as claimed in claim 8 is characterized in that, this neck also is concaved with ring groove.

10. improved nozzle arrangements as claimed in claim 7 is characterized in that, the diameter of this perforation is 10mm.

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