CN201674719U - Plasma processing equipment - Google Patents
Plasma processing equipment Download PDFInfo
- Publication number
- CN201674719U CN201674719U CN2010201747372U CN201020174737U CN201674719U CN 201674719 U CN201674719 U CN 201674719U CN 2010201747372 U CN2010201747372 U CN 2010201747372U CN 201020174737 U CN201020174737 U CN 201020174737U CN 201674719 U CN201674719 U CN 201674719U
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- China
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- temperature control
- plasma processing
- control pipeline
- temperature
- battery lead
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Abstract
The utility model provides plasma processing equipment comprising a shell with a cavity, an electrode plate inside the cavity and a temperature control system in which heat-conducting fluid can flow circularly. The temperature control system comprises a temperature control pipeline fixed on the electrode plate, a fluid pump that leads the heat-conducting fluid to flow circularly in the temperature control pipeline and a fluid thermoregulator that leads the heat-conducting fluid to remain at preset temperature. Compared with the prior art, through arranging the temperature control pipeline on the bottom surface of the electrode plate, the plasma processing equipment leads the temperature of the electrode plate inside the cavity to remain in a basically constant state, thus improving the processing uniformity and processing effect.
Description
Technical field
The utility model relates to a kind of plasma processing, especially relates to the temperature control system in the plasma processing.
Background technology
Plasma processing is widely used in plasma cleaning, etching, plasma plating, plasma coated, plasma ashing and occasions such as surface active, modification.Handle by it, can improve the wettability of material, make operations such as multiple material can apply, plating, strengthen bonding force, bonding force, remove organic pollution, greasy dirt or grease simultaneously.In the middle of existing plasma processing, the battery lead plate temperature of its inside cavity changes easily, causes process uniformity poor, and treatment effect is undesirable.
The utility model content
The purpose of this utility model is the defective at prior art, provides a kind of process uniformity good plasma processing.
For solving the problems of the technologies described above, the utility model has adopted following technical scheme: design a kind of plasma processing, comprise the housing with cavity, the battery lead plate that is positioned at this inside cavity and the temperature control system that can circulate for heat-conducting fluid within it, this temperature control system comprised the temperature control pipeline that is fixed in described battery lead plate, make the fluid pump that described heat-conducting fluid circulates in described temperature control pipeline and make described heat-conducting fluid remain on the fluid temperature regulation device of preset temperature.
Compared with prior art, the utility model makes the temperature of battery lead plate remain on substantially invariable state by the temperature control pipeline that is fixed in battery lead plate, thereby has improved the process uniformity of plasma processing, has improved treatment effect.
Preferably, described temperature control pipeline is close to the bottom surface of being fixed in described battery lead plate, and heat conductivility is better.
Preferably, described temperature control pipeline is fixed in the bottom surface of described battery lead plate by securing member, can prevent that the temperature control pipeline from coming off.Described securing member can be connected in screw or the pin that is formed on the connecting hole on the described battery lead plate for base with described base., preferably, described heat-conducting fluid can be conduction oil or heat-conductive water.
Preferably, described temperature control pipeline adopts aluminum alloy material, not only has good heat-conducting, and have very strong tensile strength (〉=205Mpa), and have very strong corrosion resistance.
Preferably, described battery lead plate has comprised polylith positive plate and the polylith negative plate that is parallel to each other, and wherein said positive plate and negative plate distribute alternately.
Preferably, described temperature control pipeline is snakelike distribution.
Description of drawings
Fig. 1 is the stereogram of the embodiment one of the utility model plasma processing.
Fig. 2 is the front view of plasma processing shown in Figure 1.
Fig. 3 is the battery lead plate of plasma processing shown in Figure 1 and the stereogram of temperature control system part thereof.
Fig. 4 is the front view of battery lead plate shown in Figure 3 and temperature control system part thereof.
Fig. 5 is battery lead plate and the temperature control system stereogram partly thereof of the embodiment two of the utility model plasma processing.
Fig. 6 is the A partial enlarged drawing of Fig. 5.
Fig. 7 is the front view of battery lead plate shown in Figure 5 and temperature control system part thereof.
Fig. 8 is the right view of battery lead plate shown in Figure 5 and temperature control system part thereof.
Fig. 9 is the left view of battery lead plate shown in Figure 5 and temperature control system part thereof.
Embodiment
Embodiment one as shown in Figures 1 to 4, plasma processing 10 of the present utility model comprises the housing 11 with cavity 12, the polylith battery lead plate 8 that is parallel to each other that is positioned at these cavity 12 inside and the temperature control system that can supply heat-conducting fluid to circulate within it, and described battery lead plate 8 has comprised positive plate 5 and the negative plate 6 that distributes alternately.
Described temperature control system has comprised oil pump 1, fluid temperature regulation device 18, oil inlet pipe 3, temperature control pipeline 7, flowline 4 and oil return pipe 9, and temperature control pipeline 7 is close to the bottom surface that is fixed on every positive plate 5 and negative plate 6 by bonding agent, and heat conductivility is better like this.Every temperature control pipeline 7 all is snakelike distribution, and it adopts aluminum alloy material, not only has good heat-conducting, and have very strong tensile strength (〉=205Mpa), and have very strong corrosion resistance.Wherein, oil pump 1, fluid temperature regulation device 18, oil inlet pipe 3, temperature control pipeline 7 and flowline 4 head and the tail successively are connected, the inlet of temperature control pipeline 7 is connected to oil inlet pipe 3, the outlet of temperature control pipeline 7 is connected to flowline 4, flowline 4 is connected in oil pump 1 by oil return pipe 9, thereby the formation circulatory system circulates within it for conduction oil.Oil return pipe 9 places are provided with temperature sensor, with the temperature of the conduction oil in the real-time sensing circulatory system.
Embodiment two is referring to Fig. 5 to Fig. 9, temperature control system in the middle of the present embodiment has oil pump 1, oil inlet pipe 3, temperature control pipeline 7, flowline 4, oil return pipe 9 equally, comprise heater 2, fuel tank 13 in addition and be connected in the cooler 14 of this fuel tank 13, when the conduction oil in the circulatory system is lossy, can carry out automatic supply by fuel tank 13.Described oil return pipe 9 is provided with temperature sensor 17, and its effect is the temperature of sensing oil return, if surpass preset temperature value, with its cooling, and then is heated to preset temperature value by heater 2 by cooler 14.The inlet of temperature control pipeline 7 is connected to oil inlet pipe 3, and the outlet of temperature control pipeline 7 is connected to flowline 4, and the outlet of flowline 4 is connected in the inlet of fuel tank 13, oil pump 1, heater 2 and oil inlet pipe 3 successively by oil return pipe 9.Described temperature control pipeline 7 is by base 15 and base 15 can be connected in the screw of battery lead plate 8 connecting holes or the bottom surface that pin 16 is fixed in battery lead plate 8, comes off to prevent temperature control tube road 7.Above-mentioned temperature control system can be controlled by control units such as single-chip microcomputer or PLC controllers: when the actual temperature of conduction oil surpasses design temperature, temperature sensor 17 can be passed to control unit with signal, control unit can command heater 2 stop heating, and order cooler 14 is implemented cooling.When actual temperature was lower than design temperature, temperature sensor 17 can be passed to control unit with signal, and control unit can command heater 2 continue heating, until reaching design temperature.
Need to prove, more than only be preferred implementation of the present utility model, can not be interpreted as restriction to the utility model protection range.Should be noted that, for the person of ordinary skill of the art, under the prerequisite that does not break away from the present utility model design, can also make some distortion and improvement, for example: above-mentioned conduction oil can be realized with heat-conductive water or other heat-conducting fluid, described temperature control pipeline also is not limited to aluminum alloy material, and its distribution shape also is not limited to snakelike.More than these distortion and improving all within protection range of the present utility model.
Claims (10)
1. plasma processing, comprise housing with cavity and the battery lead plate that is positioned at this inside cavity, it is characterized in that: this equipment has also comprised the temperature control system that can circulate for heat-conducting fluid within it, and this temperature control system comprised the temperature control pipeline that is fixed in described battery lead plate, make the fluid pump that described heat-conducting fluid circulates in described temperature control pipeline and make the described heat-conducting fluid remain on the fluid temperature regulation device of preset temperature.
2. plasma processing according to claim 1 is characterized in that: described temperature control pipeline is close to the bottom surface of being fixed in described battery lead plate.
3. plasma processing according to claim 2 is characterized in that: described temperature control pipeline is fixed in the bottom surface of described battery lead plate by securing member.
4. plasma processing according to claim 3 is characterized in that: described securing member is base and described base is connected in screw or the pin that is formed on the connecting hole on the described battery lead plate.
5. plasma processing according to claim 1 is characterized in that: described heat-conducting fluid is conduction oil or heat-conductive water.
6. plasma processing according to claim 1 is characterized in that: described temperature control pipeline is an aluminium alloy pipeline.
7. plasma processing according to claim 1 is characterized in that: described temperature control pipeline is snakelike distribution.
8. plasma processing according to claim 1 is characterized in that: described battery lead plate has comprised polylith positive plate and the polylith negative plate that is parallel to each other, and wherein said positive plate and negative plate distribute alternately.
9. according to each described plasma processing of claim 1 to 8, it is characterized in that: described temperature control system has also comprised oil inlet pipe, flowline and oil return pipe, and described oil return pipe is provided with temperature sensor; The inlet of described temperature control pipeline is connected to described oil inlet pipe, the outlet of described temperature control pipeline is connected to described flowline, and the outlet of described flowline is connected in the inlet of described oil pump, fluid temperature regulation device and described oil inlet pipe successively by described oil return pipe.
10. according to each described plasma processing of claim 1 to 8, it is characterized in that: described temperature control system has also comprised oil inlet pipe, flowline, oil return pipe and fuel tank, described oil return pipe is provided with temperature sensor, described fluid temperature regulation device has comprised heater and cooler, and this cooler is connected in described fuel tank; The inlet of described temperature control pipeline is connected to described oil inlet pipe, the outlet of described temperature control pipeline is connected to described flowline, and the outlet of described flowline is connected in the inlet of described fuel tank, oil pump, heater and described oil inlet pipe successively by described oil return pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201747372U CN201674719U (en) | 2010-04-29 | 2010-04-29 | Plasma processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201747372U CN201674719U (en) | 2010-04-29 | 2010-04-29 | Plasma processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201674719U true CN201674719U (en) | 2010-12-15 |
Family
ID=43332125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201747372U Expired - Lifetime CN201674719U (en) | 2010-04-29 | 2010-04-29 | Plasma processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201674719U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103934238A (en) * | 2013-01-23 | 2014-07-23 | 深南电路有限公司 | Plate electrode for plasma cleaning, electrode assembly and device |
| CN111446844A (en) * | 2020-05-06 | 2020-07-24 | 黄笃莲 | Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply |
-
2010
- 2010-04-29 CN CN2010201747372U patent/CN201674719U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103934238A (en) * | 2013-01-23 | 2014-07-23 | 深南电路有限公司 | Plate electrode for plasma cleaning, electrode assembly and device |
| CN111446844A (en) * | 2020-05-06 | 2020-07-24 | 黄笃莲 | Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply |
| CN111446844B (en) * | 2020-05-06 | 2021-06-22 | 深圳市美泽电源技术有限公司 | Alternating-current high-power MW-level constant-temperature voltage-regulating automatic control plasma power supply |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: ZHUHAI BOFFOTTO ELECTRONIC TECHNOLOGY CO., LTD. Free format text: FORMER NAME: SHENZHEN PETER'S PLASMA TECHNOLOGY CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 519060 China Guangdong city of Zhuhai province Xiangzhou District Nanping Technology Industrial Park West Road No. 5, a seven screen building 1-1A, 1-1B Patentee after: Zhuhai Boffotto Electronic Technology Co., Ltd. Address before: 519060 Guangdong Province, Zhuhai city Xiangzhou District Nanping Technology Industrial Park West Road No. 5, a seven screen plant floor 1-1A Patentee before: Zhuhai Peters Plasma Science and Technology Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20101215 |