CN201664869U - Double-ended chamfering equipment for optical quartz wafer - Google Patents

Double-ended chamfering equipment for optical quartz wafer Download PDF

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Publication number
CN201664869U
CN201664869U CN2009201537526U CN200920153752U CN201664869U CN 201664869 U CN201664869 U CN 201664869U CN 2009201537526 U CN2009201537526 U CN 2009201537526U CN 200920153752 U CN200920153752 U CN 200920153752U CN 201664869 U CN201664869 U CN 201664869U
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CN
China
Prior art keywords
frame
quartz wafer
optical quartz
chamfering equipment
double end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009201537526U
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Chinese (zh)
Inventor
李广辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Crystal Optoelectronic Science & Technology Inc
Original Assignee
Beijing Crystal Optoelectronic Science & Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN2009201537526U priority Critical patent/CN201664869U/en
Application granted granted Critical
Publication of CN201664869U publication Critical patent/CN201664869U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model provides double-ended chamfering equipment for an optical quartz wafer, comprising a frame, a precision grinder arranged above the frame, precision displacement frame bodies and a cooling system, wherein two precision displacement frame bodies (2) are respectively and symmetrically arranged at the central position above the frame (1); the precision grinder is a precision double-ended grinder which is provided with a double-grinding head output structure and consists of a grinding wheel cover body (3) and a grinder motor body (4); and the precision grinder is arranged at the central position above the frame (1). The utility model has simple structure, scientific design, reliable mechanical performance and strong practicability; in addition, the two persons can operate one machine at the same time, the production efficiency can be doubled, the equipment investment is one twentieth of the professional chamfering equipment, the investment is small, and the quality and efficiency remain at the same level.

Description

Optical quartz wafer double end chamfering equipment
Technical field
The utility model relates to a kind of plant equipment, specifically, has related to a kind of to carrying out the accurate beveler of accurate chamfering before the quartz crystal polished silicon wafer polishing of using in the imaging optical system.
Background technology
Arrival along with the optical information epoch, digital product, as: digital camera, digital camera, the high-definition digital video camera products arises like rain the back spring bamboo, and move towards common people masses fast, core component CCD (sensor devices) size of digital imaging apparatus constantly increases, to produce higher image resolution ratio, special digital camera CCD uses 2/3 inch CCD to obtain bigger resolution ratio usually at present, in order to obtain the better image that gets, OLPF (low pass filter) is installed in the capital in CCD photosensitive-member front, its material is the high-quality synthetic quartzcrystal, through cutting, grind, chamfering, polishing, plated films etc. are finished at last, and this equipment is used for just to carrying out the special equipment of chamfering before this wafer polishing.
And existing chamfering equipment price costliness, maintenance cost height, production cost are big; And the expensive especially production cost that has greatly improved crystal of import chamfering equipment price.Be badly in need of a large amount of wafer chamfering equipment and put into operation along with rolling up of order, be badly in need of a kind of special equipment of design and avoid purchasing expensive import chamfering equipment and reduce cost, and then improve product competitiveness.
The utility model content
The purpose of this utility model is at existing chamfering equipment price costliness, maintenance cost height, problem that production cost is big, thereby the special equipment that a kind of structural design is ingenious, simple to operate, efficient is high, fault rate is low, operating cost is low is provided.
To achieve these goals, the utility model provides a kind of new optical quartz wafer double end chamfering equipment, and this equipment comprises frame, is arranged on accurate abrasive machine, accurate displacement support body and the cooling system of frame top, wherein:
Described accurate displacement support body is provided with 2, and symmetry is installed in frame top center position respectively; Constitute by 45 ° of reference blocks, baffle plate, length travel piece, lateral displacement piece, length travel vernier knob and jackscrew seat.Described accurate abrasive machine is accurate double-end grinder, is provided with two bistrique export structures, is made of emery wheel cover body, abrasive machine motor body, is installed on frame top center position.
Described frame is the mechanism of a welding, screwing, and sealing around the upper stages face only keeps two coolings filling pipe end and following water refluxing opening, and mouthful top of confluxing is used to mill and is arranged with the outflow that compiles that meter is convenient to water.
Be provided with yielding rubber between described accurate abrasive machine and the described frame.
Described accurate abrasive machine is provided with two bistrique export structures, and the transverse and longitudinal displacement tunable arrangement that a precision has been installed respectively before two bistriques is used for the control of wafer chamfer dimesion and adjusts.
Be provided with water circulation mechanism in the cooling system of described optical quartz wafer double end chamfering equipment.
Described optical quartz wafer double end chamfering equipment is provided with motor revolution variable frequency adjustment mechanism.
The beneficial effects of the utility model are:
1. the main panel of the utility model optical quartz wafer double end chamfering equipment is provided with the cooler bin water in-out port, improves cooling effect.
2. the custom-designed accurate portraitlandscape displacement-adjustable frame of this equipment can guarantee the dimension precision requirement of 45 ° of chamferings of wafer.
3. the utility model optical quartz wafer double end chamfering equipment has designed a kind of accurate displacement support body especially, and rigidity is strong, reliability and durability, prolongs service life of equipment.
4. the relative prior art of the utility model has substantive distinguishing features and progressive, and this machine is simple in structure, and is reasonable in design, and reliable in mechanical performance is practical, can make equipment investment reduce 10 times, cuts down production cost greatly.
Description of drawings
Fig. 1 is the structural representation of optical quartz wafer double end chamfering equipment;
Fig. 2 the utility model is the structural representation of the accurate displacement support body of optical quartz wafer double end chamfering equipment;
Wherein
1. frame 7. baffle plate
2. accurate displacement support body 8. length travel piece
3. emery wheel cover body 9. lateral displacement piece
4. abrasive machine motor body 10. length travel vernier knob
5. cooling system 11. jackscrew seat
6.45 ° reference block 12. treat the chamfering wafer
The specific embodiment
Below in conjunction with accompanying drawing,, be described further the utility model optical quartz wafer double end chamfering equipment:
Fig. 1 is the structural representation of optical quartz wafer double end chamfering equipment, as shown in Figure 1: accurate displacement support body 2 and cooling system 5 that the utility model optical quartz wafer double end chamfering equipment comprises frame 1, is arranged on the accurate abrasive machine of frame 1 top, 2 symmetries are installed in frame 1 top center position.
Frame 1 is a welding body, and sealing around the upper stages face only keeps two coolings filling pipe end and following water refluxing opening, and mouthful top of confluxing is used to mill and is arranged with the outflow that compiles that meter is convenient to water; Accurate abrasive machine is two bistrique export structures, is made of emery wheel cover body 3 and abrasive machine motor 4 bodies, and is provided with yielding rubber between the frame 1.
The transverse and longitudinal displacement tunable arrangement of a precision has been installed respectively before two bistriques of described accurate abrasive machine, has been used for control of wafer chamfer dimesion and adjustment.
Fig. 2 the utility model is the structural representation of the accurate displacement support body of optical quartz wafer double end chamfering equipment; As shown in Figure 2: the accurate displacement support body of the utility model optical quartz wafer double end chamfering equipment is made of 45 ° of reference blocks 6, baffle plate 7, length travel piece 8, lateral displacement piece 9, length travel vernier knob 10 and jackscrew seat 11.
Start accurate abrasive machine, regulate grinding wheel drive mitor body 4 to predetermined rotating speed by the frequency converter that numeral shows, ensure the quality of products and the prerequisite of efficient under should select lower rotating speed, to prolong the service life of bearing arrangement, according to the size for the treatment of chamfering wafer 12 needs bevellings, regulate lateral displacement piece 9 to its behind emery wheel, locking lateral displacement piece 9, regulate the length travel vernier knob 10 of accurate displacement support body 2 tops, after extremely chamfering wafer 12 size conforms technological requirements are treated in detection, after lock-screw on the length travel piece 8 slowly locked, can begin normal bevelling operation.To treat that 12 of chamfering wafers contact closely in 45 ° of reference blocks 6, make simultaneously treat that chamfering wafer 12 1 sides contact well with baffle plate 7 upper plane after, move left and right treats that chamfering wafer 12 promptly finishes the bevelling work on a stupefied limit, finishes the chamfering of wafer then successively to remaining 3 limits of length direction (or width).
Should be noted that at last: above embodiment only is not intended to limit in order to the explanation the technical solution of the utility model; Although with reference to preferred embodiment the utility model is had been described in detail, those of ordinary skill in the field are to be understood that: still can make amendment or the part technical characterictic is equal to replacement the specific embodiment of the present utility model; And not breaking away from the spirit of technical solutions of the utility model, it all should be encompassed in the middle of the technical scheme scope that the utility model asks for protection.

Claims (6)

1. optical quartz wafer double end chamfering equipment, this equipment comprise frame (1), are arranged on accurate abrasive machine, accurate displacement support body (2) and the cooling system (5) of frame top, it is characterized in that:
Described accurate displacement support body (2) is provided with 2, and symmetry is installed in frame (1) top center position respectively;
Described accurate abrasive machine is accurate double-end grinder, is provided with two bistrique export structures, is made of emery wheel cover body (3), abrasive machine motor body (4), is installed on frame (1) top center position.
2. optical quartz wafer double end chamfering equipment according to claim 1, it is characterized in that: described frame (1) is the mechanism of a welding, screwing, sealing around the upper stages face, only keep two coolings filling pipe end and following water refluxing opening, mouthful top of confluxing is used to mill and is arranged with the outflow that compiles that meter is convenient to water.
3. optical quartz wafer double end chamfering equipment according to claim 1 is characterized in that: be provided with yielding rubber between described accurate abrasive machine and the described frame (1).
4. optical quartz wafer double end chamfering equipment according to claim 1, it is characterized in that: described cooling system is provided with water circulation mechanism in (5).
5. optical quartz wafer double end chamfering equipment according to claim 1 is characterized in that: described optical quartz wafer double end chamfering equipment is provided with motor revolution variable frequency adjustment mechanism.
6. optical quartz wafer double end chamfering equipment according to claim 1 is characterized in that: the transverse and longitudinal displacement tunable arrangement that a precision has been installed respectively before two bistriques of described accurate abrasive machine is used for control of wafer chamfer dimesion and adjustment.
CN2009201537526U 2009-05-11 2009-05-11 Double-ended chamfering equipment for optical quartz wafer Expired - Fee Related CN201664869U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009201537526U CN201664869U (en) 2009-05-11 2009-05-11 Double-ended chamfering equipment for optical quartz wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009201537526U CN201664869U (en) 2009-05-11 2009-05-11 Double-ended chamfering equipment for optical quartz wafer

Publications (1)

Publication Number Publication Date
CN201664869U true CN201664869U (en) 2010-12-08

Family

ID=43265823

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009201537526U Expired - Fee Related CN201664869U (en) 2009-05-11 2009-05-11 Double-ended chamfering equipment for optical quartz wafer

Country Status (1)

Country Link
CN (1) CN201664869U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102319927A (en) * 2011-05-24 2012-01-18 严金南 Double-knife cutting machine
CN103978425A (en) * 2014-05-22 2014-08-13 苏州天脉导热科技有限公司 Symmetrical grinding equipment
CN109590877A (en) * 2018-11-30 2019-04-09 嘉兴百盛光电有限公司 A kind of new structure polishing machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102319927A (en) * 2011-05-24 2012-01-18 严金南 Double-knife cutting machine
CN103978425A (en) * 2014-05-22 2014-08-13 苏州天脉导热科技有限公司 Symmetrical grinding equipment
CN109590877A (en) * 2018-11-30 2019-04-09 嘉兴百盛光电有限公司 A kind of new structure polishing machine

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101208

Termination date: 20150511

EXPY Termination of patent right or utility model