CN201634054U - Multilayer sealing device - Google Patents

Multilayer sealing device Download PDF

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Publication number
CN201634054U
CN201634054U CN2010201406378U CN201020140637U CN201634054U CN 201634054 U CN201634054 U CN 201634054U CN 2010201406378 U CN2010201406378 U CN 2010201406378U CN 201020140637 U CN201020140637 U CN 201020140637U CN 201634054 U CN201634054 U CN 201634054U
Authority
CN
China
Prior art keywords
cavity
storage tank
vacuum cavity
cooling bath
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010201406378U
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Chinese (zh)
Inventor
杨明生
王银果
刘惠森
范继良
王曼媛
王勇
张华�
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan Anwell Digital Machinery Co Ltd
Original Assignee
Dongguan Anwell Digital Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan Anwell Digital Machinery Co Ltd filed Critical Dongguan Anwell Digital Machinery Co Ltd
Priority to CN2010201406378U priority Critical patent/CN201634054U/en
Application granted granted Critical
Publication of CN201634054U publication Critical patent/CN201634054U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses a multilayer sealing device, which is adaptable to sealing connection between a cavity opening of a vacuum cavity and a cavity cover. The multilayer sealing device comprises a plurality of rubber sealing rings, holding grooves surrounding the cavity opening are arranged on the vacuum cavity facing the cavity cover, the rubber sealing rings are contained in the holding grooves in one-to-one correspondence and project out of the holding grooves, a cooling groove facing the cavity cover is arranged between adjacent holding grooves, cooling tubes with hollow structures are contained in the cooling grooves in one-to-one correspondence, an air extraction passage is arranged on the side wall of the vacuum cavity, one end of the air extraction passage is communicated with an external evacuating device, and the other end of the air extraction passage is respectively communicated with the cooling grooves. The multilayer sealing device has the advantages of simple and compact structure, fine leakage prevention performance, long service life and multilayered sealing effect.

Description

Multi-layer sealed device
Technical field
The utility model relates to a kind of multi-layer sealed device, relates in particular to a kind of vacuum chamber body cavity lid leak free device that is used for.
Background technology
For a long time, the face seal of cavity adopts the sealing of mono-rubber strip mostly, or " O " type of employing coil structures form, and the serviceability temperature of adhesive tape is-40 ℃~60 ℃, and to leakproofing material and leak free requirement be: 1. material compactness is good, is difficult for leaking medium; 2. suitable mechanical strength and hardness are arranged; 3. compressibi1ity and rebound resilience are good, and permanent deformation is little; 4. do not soften under the high temperature, do not decompose non-sclerous, not embrittlement under the low temperature; 5. has the flexibility that engages with sealing surface; 6. resistance to ag(e)ing is good, and is durable in use; 7. convenient processing and manufacture, low price is drawn materials easily etc.The mono-rubber strip can't satisfy above-mentioned conditional request simultaneously aspect selection.Existing technology adopts " O " type coil structures form, need process a sealed groove at case oral thermometer face, in rubber ring is placed in; More or less there is unsatisfactory place in existing technology, because any solid material can both dissolve, adsorb some gases under air environment.When material places vacuum, will be molten, desorb gives vent to anger because of separating.Concerning general vacuum apparatus, giving vent to anger of material is topmost source of the gas in the vacuum system.Can cause drawbacks such as vacuum cavity pollution.
At above-mentioned technical matters, the utility model provides the multi-layer sealed device with multi-layer sealed effect of a kind of simple and compact for structure, better anti-leakage property and long service life.
The utility model content
The purpose of this utility model is to provide the multi-layer sealed device with multi-layer sealed effect of a kind of simple and compact for structure, better anti-leakage property and long service life.
To achieve these goals, the technical solution of the utility model is: a kind of multi-layer sealed device is provided, be applicable to that the cavity mouth to vacuum cavity sealed with being connected of chamber lid, described multi-layer sealed device comprises the plurality of rubber seal ring, the vacuum cavity place of covering over against described chamber offers the storage tank around described cavity mouth, described rubber seal is contained in the described storage tank one to one and protrudes described storage tank, offer between the adjacent described storage tank over against the cooling bath of described chamber lid, accommodate the cooling pipe that is hollow structure in the described cooling bath one to one, also offer bleed-off passage on the sidewall of described vacuum cavity, one end of described bleed-off passage is communicated with outside vaccum-pumping equipment, and the other end of described bleed-off passage is communicated with described cooling pipe respectively.
Preferably, the cross-sectional plane of described cooling bath and described cooling pipe is all rectangular.
Compared with prior art, because the vacuum cavity place of the multi-layer sealed device of the utility model offers a plurality of storage tanks around the cavity mouth, be mounted with the rubber seal of protruding storage tank in the described storage tank; Multilayer rubber sealing ring the air-tightness that has guaranteed vacuum cavity is set, prevent seepage.Also offer between adjacent storage tank over against the cooling bath of chamber lid, described bleed-off passage one end is communicated with cooling bath, and the described bleed-off passage other end is communicated with outside vaccum-pumping equipment; Outside vaccum-pumping equipment vacuumizes cooling bath, simultaneously cooling bath is cooled off, and with the gas efficiency of rubber seal around reducing, the deformation quantity of rubber seal also is under control simultaneously, and also prolonged service life.Because the multi-layer sealed apparatus structure of the utility model is simply compact, therefore better anti-leakage property and long service life relatively are applicable to the sealing to vacuum chamber body cavity lid in addition.
Description of drawings
Fig. 1 is the rubber seal of the multi-layer sealed device of the utility model local sectional structure chart when not compressing.
Fig. 2 is the scheme drawing that the rubber seal of the multi-layer sealed device of the utility model is compressive state.
The specific embodiment
As shown in Figures 1 and 2, the multi-layer sealed device of the utility model, be applicable to that the cavity mouth 11 to vacuum cavity 10 sealed with being connected of chamber lid 12, described multi-layer sealed device comprises plurality of rubber seal ring 20, offer storage tank 13 around described cavity mouth 11 over against vacuum cavity 10 places of described chamber lid 12, described rubber seal 20 is contained in the described storage tank 13 one to one and protrudes described storage tank 13, offer between the adjacent described storage tank 13 over against the cooling bath 14 of described chamber lid 12, accommodate the cooling pipe 15 that is hollow structure in the described cooling bath 14 one to one, also offer bleed-off passage 16 on the sidewall of described vacuum cavity 10, one end of described bleed-off passage 16 is communicated with outside vaccum-pumping equipment, and the other end of described bleed-off passage 16 is communicated with described cooling pipe 15 respectively.
The better one, described cooling bath 14 is all rectangular with the cross-sectional plane of described cooling pipe 15.
In conjunction with Fig. 1 and Fig. 2 the principle of work of the multi-layer sealed device 1 of the utility model is done a detailed explanation:
During work, lid 12 extruding rubber seal 20 in the chamber of vacuum cavity 10 start outside vaccum-pumping equipment, and outside vaccum-pumping equipment vacuumizes by 16 pairs of cooling baths 14 of bleed-off passage, to avoid gaseous contamination vacuum cavity 10 in the cooling bath 14; Subsequently, outside vaccum-pumping equipment cools off by 16 pairs of cooling baths 14 of bleed-off passage, with the gas efficiency of rubber seal 20 around reducing, reduces the pollution of the seepage of rubber seal 20 to vacuum cavity 10.Finish the seal process of whole multi-layer sealed device thus.
Vacuum cavity 10 places of the multi-layer sealed device of the utility model offer a plurality of storage tanks 13 around cavity mouth 11, are mounted with the rubber seal 20 of protruding storage tank 13 in the described storage tank 13; Multilayer rubber sealing ring 20 the air-tightness that has guaranteed vacuum cavity 10 is set, prevent seepage.13 of adjacent storage tanks also offer over against the cooling bath 14 of chamber lid 12, and described bleed-off passage 16 1 ends are communicated with cooling bath 14, and described bleed-off passage 16 other ends are communicated with outside vaccum-pumping equipment; Outside vaccum-pumping equipment vacuumizes cooling bath 14, simultaneously cooling bath 14 is cooled off, and with the gas efficiency of rubber seal 20 around reducing, the deformation quantity of rubber seal 20 also is under control simultaneously, and also prolonged service life.Because the multi-layer sealed apparatus structure of the utility model is simply compact, therefore better anti-leakage property and long service life relatively are applicable to the sealing to vacuum chamber body cavity lid in addition.
The rubber seal 20 that the multi-layer sealed device of the utility model is related and the concrete structure of vacuum extractor and principle of work are well known to those of ordinary skill in the art, no longer are described in detail at this.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.

Claims (2)

1. multi-layer sealed device, be applicable to that the cavity mouth to vacuum cavity sealed with being connected of chamber lid, it is characterized in that: described multi-layer sealed device comprises the plurality of rubber seal ring, the vacuum cavity place of covering over against described chamber offers the storage tank around described cavity mouth, described rubber seal is contained in the described storage tank one to one and protrudes described storage tank, offer between the adjacent described storage tank over against the cooling bath of described chamber lid, accommodate the cooling pipe that is hollow structure in the described cooling bath one to one, also offer bleed-off passage on the sidewall of described vacuum cavity, one end of described bleed-off passage is communicated with outside vaccum-pumping equipment, and the other end of described bleed-off passage is communicated with described cooling bath respectively.
2. multi-layer sealed device as claimed in claim 1 is characterized in that: the cross-sectional plane of described cooling bath and described cooling pipe is all rectangular.
CN2010201406378U 2010-03-23 2010-03-23 Multilayer sealing device Expired - Lifetime CN201634054U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010201406378U CN201634054U (en) 2010-03-23 2010-03-23 Multilayer sealing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010201406378U CN201634054U (en) 2010-03-23 2010-03-23 Multilayer sealing device

Publications (1)

Publication Number Publication Date
CN201634054U true CN201634054U (en) 2010-11-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010201406378U Expired - Lifetime CN201634054U (en) 2010-03-23 2010-03-23 Multilayer sealing device

Country Status (1)

Country Link
CN (1) CN201634054U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101881335A (en) * 2010-03-23 2010-11-10 东莞宏威数码机械有限公司 Multilayer rubber sealing ring sealing device
CN110375072A (en) * 2019-07-31 2019-10-25 徐春霞 A kind of general-purpose sealing rubber strip
CN112060742A (en) * 2020-09-18 2020-12-11 深圳市铭达技术有限公司 Vacuum press-fit device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101881335A (en) * 2010-03-23 2010-11-10 东莞宏威数码机械有限公司 Multilayer rubber sealing ring sealing device
CN101881335B (en) * 2010-03-23 2012-02-01 东莞宏威数码机械有限公司 Multilayer rubber sealing ring sealing device
CN110375072A (en) * 2019-07-31 2019-10-25 徐春霞 A kind of general-purpose sealing rubber strip
CN110375072B (en) * 2019-07-31 2021-04-06 扬州华通橡塑有限公司 Universal sealing rubber strip
CN112060742A (en) * 2020-09-18 2020-12-11 深圳市铭达技术有限公司 Vacuum press-fit device

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20101117

Effective date of abandoning: 20120201