CN201628730U - Long-service-life plug-in type probe head - Google Patents
Long-service-life plug-in type probe head Download PDFInfo
- Publication number
- CN201628730U CN201628730U CN2010201314573U CN201020131457U CN201628730U CN 201628730 U CN201628730 U CN 201628730U CN 2010201314573 U CN2010201314573 U CN 2010201314573U CN 201020131457 U CN201020131457 U CN 201020131457U CN 201628730 U CN201628730 U CN 201628730U
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- China
- Prior art keywords
- probe
- pressure spring
- pin
- grip box
- long
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- Expired - Lifetime
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Abstract
The utility model discloses a long-service-life plug-in type probe head which comprises a cylinder body, a pressure adjusting nut, a screw-type pressure spring, a lead wire protecting cover, a needle clip box cover, a needle clip box, a conical seat, a probe bearing bush guide sheet, a screw-type mini-sized pressure spring, a needle clip and an alloy probe, wherein the pressure adjusting nut is arranged in the cylinder body; the pressure adjusting nut presses the screw-type pressure spring; the lead wire protecting cover is inserted in the screw-type pressure spring; the lead wire protecting cover and the needle clip box cover are fixed on the upper surface of the needle clip box; the screw-type pressure spring presses the lead wire protecting cover and the needle clip box cover; the needle clip box is arranged on the upper surface of the conical seat; the probe bearing bush guide sheet is fixed in the groove on the head part of the conical seat; the conical seat is fixed on the front end of the cylinder body; the screw-type mini-sized pressure spring is fixedly connected with the needle clip box cover; the screw-type mini-sized pressure spring is fixedly connected with the needle clip that is arranged in the guide slot inside the needle clip box; and the alloy probe passes through the probe bearing bush guide sheet and the conical seat and is inserted in the needle clip. The long-service-life plug-in type probe head has advantages of high measurement precision, long service life and low manufacturing cost.
Description
Technical field
The utility model relates to the sniffer of accurate measurement silicon, germanium single crystal resistivity and various conductive film square resistance (claiming surface resistivity again), is specifically related to a kind of long-life plug formula probe.
Background technology
Resistivity is one of main mass parameter of semiconductor material, and many at present employing probes are measured.People's Republic of China's national metrological verification regulations " four point probe resistivity tester " (JJG508-87) is clearly stipulated: the probe spacing of Four probing pin probe is not more than 2% partially, and the probe rate of vacillating is not more than 3%.Existing probe all is that the pressing spring three big important documents by the guiding part of probe, probe vertical movement, probe constitute with accurate geometry location, the employed pressing spring of existing probe all is a plane spring, the advantage of plane spring is to make simply, good springiness, but shortcoming is that the life-span is short, has therefore influenced the life cycle of probe.
The utility model content
The utility model provides the long-life plug formula probe of a kind of measuring accuracy height, long service life, low cost of manufacture in order to overcome the deficiency that above prior art exists.
The purpose of this utility model realizes by following technical scheme: this long-life plug formula probe, it is characterized in that: comprise cylindrical shell, the pressure setting nut, spiral pressure spring, the lead-in wire guard shield, pin grip box lid, the pin grip box, the awl seat, probe axle sleeve fairlead, spiral micro pressure spring, pin folder and alloy probe, the pressure setting nut is positioned at cylindrical shell, the pressure setting nut is pushed down spiral pressure spring, the lead-in wire guard shield inserts spiral pressure spring, lead-in wire guard shield and pin grip box lid are fixed on above the pin grip box, spiral pressure spring is pushed down lead-in wire guard shield and pin grip box lid, the pin grip box is placed on above the awl seat, probe axle sleeve fairlead is fixed in the awl seat head recess, and the awl seat is fixed on barrel front end; Spiral micro pressure spring is fixedlyed connected with pin grip box lid, spiral micro pressure spring is connected surely with the pin clamping, pin folder is placed in the guide channel of pin grip box inside, and pin is clipped in the guide channel in the pin grip box and moves up and down, and alloy probe passes probe axle sleeve fairlead and the awl seat inserts in the pin folder.
As a kind of preferred structure, described cylindrical shell tail end has been screwed the socket securing member, the socket securing member is provided with the aviation socket, and the stitch of aviation socket connects by internal lead on the spring spool of spiral micro pressure spring afterbody, and internal lead passes pressure setting nut and lead-in wire guard shield.
As a kind of preferred structure, described socket securing member and aviation socket adopt and are threaded, adopts between pressure setting nut and the cylindrical shell and be threaded, and adopt between awl and the cylindrical shell to be threaded.
As a kind of preferred structure, described lead-in wire guard shield and pin grip box lid one are reinstated 3 screw retention on the pin grip box, and spiral pressure spring is pressed on the plane of lead-in wire guard shield root.
As a kind of preferred structure, be provided with in the described cylindrical shell and be used to limit the limited step that moves distance on the pin grip box.
Described pin grip box is positioned on two guide posts of awl seat, and two guide posts are used for the guide needle grip box and move up and down, and do not produce rotation.
Described spiral micro pressure spring, pin folder and alloy probe are 4, and the diameter of alloy probe is 0.5mm, and alloy probe is selected the whole hard alloy probe of external diameter less than ruby sleeve diameter 1～2 μ m (1 grade) or 3～5 μ m (2 grades).Be provided with 4 tubaeform probe guide holes by the direct injection mo(u)lding of mould in the awl seat, tubaeform probe guide hole is convenient to the plug of alloy probe, and 4 tubaeform probe guide holes on 4 guide channels of pin grip box and the awl seat are on same axis.
As a kind of preferred structure, the spring spool of described spiral micro pressure spring afterbody passes guide hole that the pin grip box covers and covers with the pin grip box with high strength quick drying glue and bonds together, and the flexible end of spiral micro pressure spring head and pin press from both sides and weld together.
As a kind of preferred structure, described pin grip box be built-in be used to limit the pin folder on move two plastics banking stops of distance.
Described probe axle sleeve fairlead is the sheet metal that is inlaid with four ruby axle sleeves, the spacing of four ruby axle sleeves is 1.00mm, alloy probe passes the ruby axle sleeve of probe axle sleeve fairlead, the monolateral gap of ruby axle sleeve and alloy probe is 3 μ m, thereby has guaranteed the ionization rate of probe needle point.
The utility model has following advantage with respect to prior art:
One, this long-life plug formula probe, spiral micro pressure spring makes the position of four probes needle point peak in measuring process remain unanimity, improved the precision of measuring, significantly improve the serviceable life of probe, and form with lower cost manufacturing, help solving in semiconductor, liquid crystal industry and the new material scientific research will more accurate measured resistivity needs.
Two, spiral micro pressure spring adopts qin steel wire material and spiral moulding thereof, in the compression process, the actual deformation quantity of every circle elater is very little, the plane spring that uses on the existing relatively probe, serviceable life can be much longer, life-span is generally more than 5 times of other form spring, and installs and fixes conveniently, and wiring is simple.
Three, the position of adjusting pressure setting nut can change the decrement of spiral pressure spring, thereby changes the down force pressure of alloy probe, and range of adjustment can be from 400g to 800g.
Four, the monolateral gap of ruby axle sleeve and alloy probe is 3 μ m, can obtain the best probe rate of vacillating.
Five, the internal lead of probe inside is less, has only four, keeps in repair very convenient.
Description of drawings
Fig. 1 is the front section view of long-life plug formula probe of the present utility model.
Fig. 2 is the side sectional view of long-life plug formula probe of the present utility model.
Fig. 3 is the stereographic map of long-life plug formula probe of the present utility model.(saving cylindrical shell)
Fig. 4 is another stereographic map of long-life plug formula probe of the present utility model.(saving cylindrical shell)
Fig. 5 is the planimetric map of pin folder of the present utility model.
Fig. 6 is the planimetric map of probe axle sleeve fairlead of the present utility model.
Fig. 7 is the vertical view of pin grip box guide channel of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with drawings and Examples.
As Fig. 1～long-life plug formula probe shown in Figure 4, comprise cylindrical shell 3, pressure setting nut 6, spiral pressure spring 5, lead-in wire guard shield 14, pin grip box lid 4, pin grip box 11, awl seat 2, probe axle sleeve fairlead 9, spiral micro pressure spring 12, pin folder 10 and alloy probe 1, the pressure setting nut is positioned at cylindrical shell, the pressure setting nut is pushed down spiral pressure spring, the lead-in wire guard shield inserts spiral pressure spring, lead-in wire guard shield and pin grip box lid are fixed on above the pin grip box, spiral pressure spring is pushed down lead-in wire guard shield and pin grip box lid, the pin grip box is placed on above the awl seat, probe axle sleeve fairlead is fixed in the awl seat head recess, and the awl seat is fixed on barrel front end; Spiral micro pressure spring is fixedlyed connected with pin grip box lid, spiral micro pressure spring is connected surely with the pin clamping, the pin folder is placed in the guide channel 18 of pin grip box inside, pin is clipped in the guide channel in the pin grip box and moves up and down, and alloy probe passes probe axle sleeve fairlead and the awl seat inserts in the pin folder.
The cylindrical shell tail end has been screwed socket securing member 7, and the socket securing member is provided with aviation socket 8, and the stitch 19 of aviation socket connects on the spring spool 20 of spiral micro pressure spring afterbody by internal lead 13, and internal lead passes pressure setting nut and lead-in wire guard shield.
Socket securing member and aviation socket adopt and are threaded, adopts between pressure setting nut and the cylindrical shell and be threaded, and adopt between awl and the cylindrical shell to be threaded.
Lead-in wire guard shield and pin grip box lid one are reinstated 3 screw retention on the pin grip box, and spiral pressure spring is pressed on the plane of lead-in wire guard shield root.
Be provided with in the cylindrical shell and be used to limit the limited step 15 that moves distance on the pin grip box.
The pin grip box is positioned on two guide posts 16 of awl seat, and two guide posts are used for the guide needle grip box and move up and down, and do not produce rotation.
Spiral micro pressure spring, pin folder and alloy probe are 4, and the diameter of alloy probe is 0.5mm, and alloy probe is selected the whole hard alloy probe of external diameter less than ruby sleeve diameter 1～2 μ m (1 grade) or 3～5 μ m (2 grades).Be provided with 4 tubaeform probe guide holes by the direct injection mo(u)lding of mould in the awl seat, tubaeform probe guide hole is convenient to the plug of alloy probe, and 4 tubaeform probe guide holes on 4 guide channels of pin grip box and the awl seat are on same axis.4 guide channels as shown in Figure 7.
The spring spool of spiral micro pressure spring afterbody passes guide hole that the pin grip box covers and bonds together with high strength quick drying glue and pin grip box lid, and the flexible end 21 of spiral micro pressure spring head and pin press from both sides and weld together, as shown in Figure 5.
The pin grip box be built-in be used to limit the pin folder on move two plastics banking stops 17 of distance.
As shown in Figure 6, described probe axle sleeve fairlead is the sheet metal that is inlaid with four ruby axle sleeves 22, the spacing of four ruby axle sleeves is 1.00mm, alloy probe passes the ruby axle sleeve of probe axle sleeve fairlead, the monolateral gap of ruby axle sleeve and alloy probe is 3 μ m, thereby has guaranteed the ionization rate of probe needle point.
Above-mentioned embodiment is a preferred embodiment of the present utility model; can not limit the utility model; other any change that does not deviate from the technical solution of the utility model and made or other equivalent substitute mode are included within the protection domain of the present utility model.
Claims (10)
1. long-life plug formula probe, it is characterized in that: comprise cylindrical shell, the pressure setting nut, spiral pressure spring, the lead-in wire guard shield, pin grip box lid, the pin grip box, the awl seat, probe axle sleeve fairlead, spiral micro pressure spring, pin folder and alloy probe, the pressure setting nut is positioned at cylindrical shell, the pressure setting nut is pushed down spiral pressure spring, the lead-in wire guard shield inserts spiral pressure spring, lead-in wire guard shield and pin grip box lid are fixed on above the pin grip box, spiral pressure spring is pushed down lead-in wire guard shield and pin grip box lid, the pin grip box is placed on above the awl seat, probe axle sleeve fairlead is fixed in the awl seat head recess, and the awl seat is fixed on barrel front end; Spiral micro pressure spring is fixedlyed connected with pin grip box lid, and spiral micro pressure spring is connected surely with the pin clamping, and the pin folder is placed in the guide channel of pin grip box inside, and alloy probe passes probe axle sleeve fairlead and the awl seat inserts in the pin folder.
2. long-life plug formula probe according to claim 1, it is characterized in that: described cylindrical shell tail end has been screwed the socket securing member, the socket securing member is provided with the aviation socket, the stitch of aviation socket connects the spring spool of spiral micro pressure spring afterbody by internal lead, and internal lead passes pressure setting nut and lead-in wire guard shield.
3. long-life plug formula probe according to claim 2 is characterized in that: described socket securing member and aviation socket adopt and are threaded, adopts between pressure setting nut and the cylindrical shell and be threaded, and adopt between awl and the cylindrical shell to be threaded.
4. long-life plug formula probe according to claim 1 is characterized in that: described lead-in wire guard shield and pin grip box lid one are reinstated 3 screw retention on the pin grip box, and spiral pressure spring is pressed on the plane of lead-in wire guard shield root.
5. long-life plug formula probe according to claim 1 is characterized in that: be provided with in the described cylindrical shell and be used to limit the limited step that moves distance on the pin grip box.
6. long-life plug formula probe according to claim 1 is characterized in that: described pin grip box is positioned on two guide posts of awl seat.
7. according to each described long-life plug formula probe of claim 1～6, it is characterized in that: described spiral micro pressure spring, pin folder and alloy probe are 4, the diameter of alloy probe is 0.5mm, be provided with 4 tubaeform probe guide holes by the direct injection mo(u)lding of mould in the awl seat, 4 tubaeform probe guide holes on 4 guide channels of pin grip box and the awl seat are on same axis.
8. according to each described long-life plug formula probe of claim 1～6, it is characterized in that: the spring spool of described spiral micro pressure spring afterbody passes guide hole that the pin grip box covers and covers with the pin grip box with high strength quick drying glue and bonds together, and the flexible end of spiral micro pressure spring head and pin press from both sides and weld together.
9. according to each described long-life plug formula probe of claim 1～6, it is characterized in that: described pin grip box be built-in be used to limit the pin folder on move two plastics banking stops of distance.
10. according to each described long-life plug formula probe of claim 1～6, it is characterized in that: described probe axle sleeve fairlead is the sheet metal that is inlaid with four ruby axle sleeves, the spacing of four ruby axle sleeves is 1.00mm, alloy probe passes the ruby axle sleeve of probe axle sleeve fairlead, and the monolateral gap of ruby axle sleeve and alloy probe is 3 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201314573U CN201628730U (en) | 2010-03-11 | 2010-03-11 | Long-service-life plug-in type probe head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201314573U CN201628730U (en) | 2010-03-11 | 2010-03-11 | Long-service-life plug-in type probe head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201628730U true CN201628730U (en) | 2010-11-10 |
Family
ID=43060128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201314573U Expired - Lifetime CN201628730U (en) | 2010-03-11 | 2010-03-11 | Long-service-life plug-in type probe head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201628730U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221635A (en) * | 2011-03-30 | 2011-10-19 | 浙江省电力公司 | Contact pin applied to full-automatic electric energy meter detection pipeline |
| CN113466032A (en) * | 2021-05-27 | 2021-10-01 | 昆明理工大学 | Soft rock strength test needle penetration device and use method thereof |
-
2010
- 2010-03-11 CN CN2010201314573U patent/CN201628730U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102221635A (en) * | 2011-03-30 | 2011-10-19 | 浙江省电力公司 | Contact pin applied to full-automatic electric energy meter detection pipeline |
| CN102221635B (en) * | 2011-03-30 | 2013-07-03 | 浙江省电力公司 | Contact pin applied to full-automatic electric energy meter detection pipeline |
| CN113466032A (en) * | 2021-05-27 | 2021-10-01 | 昆明理工大学 | Soft rock strength test needle penetration device and use method thereof |
| CN113466032B (en) * | 2021-05-27 | 2022-09-20 | 昆明理工大学 | Soft rock strength test needle penetration device and use method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20101110 |
|
| CX01 | Expiry of patent term |