CN201615070U - Integral rotor of composite molecular pump - Google Patents
Integral rotor of composite molecular pump Download PDFInfo
- Publication number
- CN201615070U CN201615070U CN2010200327468U CN201020032746U CN201615070U CN 201615070 U CN201615070 U CN 201615070U CN 2010200327468 U CN2010200327468 U CN 2010200327468U CN 201020032746 U CN201020032746 U CN 201020032746U CN 201615070 U CN201615070 U CN 201615070U
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- Prior art keywords
- turbine blade
- level
- rotor
- molecular pump
- composite molecular
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- Expired - Fee Related
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- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The utility model discloses an integral rotor of a composite molecular pump. The integral rotor comprises a turbine blade stage and a groove dragging stage which adopt an integrated structure. The integral rotor has the advantages that the turbine blade stage and the groove dragging stage are integrated, the thickness of a turbine blade decreases gradually from the root part to the edge, the depth of an pumping groove decreases gradually from top to bottom, the natural frequency of the rotor is much higher than the work frequency, and the rotor is made of high-strength aluminum alloy.
Description
Technical field
The utility model relates to a kind of integral rotor of composite molecular pump.
Background technique
Molecular pump generally has molecular drag pump, turbomolecular pump and composite molecular pump etc.Molecular drag pump carries gas molecule by the rigid body surface of high-speed motion and realizes bleeding, turbomolecular pump is to cooperatively interact with the moving vane of high speed rotating and static fixed blade to realize bleeding, composite molecular pump is made up of turbine stage and draft stage, has the advantage of preceding two kinds of pumps concurrently.The core of molecular pump is a rotor, and different pumps is equipped with multi-form rotor.All there are much relations in the pumping performance of turbomolecular pump and working life with rotor.When the frequency of okperation of rotor need be crossed its natural frequency, violent moving plate resonance will take place, very easily damage equipment.When pumping hole pressure raises (pouring as atmosphere) suddenly, if the blade of rotor is very thin very long, under the atmospheric pressure effect, moving plate is contacted with stator, make rotor blade be beaten scattered here and therely, well damage.Though the combined blade easy processing, the error of bringing in the assembling process has reduced gyration precision, has increased the difficulty of balance correction, and then influences the overall performance of pump.In view of the foregoing, integral rotor described in the utility model has solved the problems referred to above targetedly.
Summary of the invention
Technical problem to be solved in the utility model is, at the running problem of unstable of the rotor of existing composite molecular pump, provides a kind of integral rotor of composite molecular pump, and its pumping speed is big, compression ratio height, rotating accuracy height, blade strength height.
The utility model solves the problems of the technologies described above by following technical proposal:
A kind of integral rotor of composite molecular pump comprises that turbine blade level and groove drag level, and it is an overall structure that described turbine blade level and groove drag level.
Described turbine blade level and groove drag level and adopt aluminum alloy material.
The vane thickness of described turbine blade level outwards reduces gradually from root.
The blade tilt of described turbine blade level is spent between 12 degree 40, and is the relation that gradually changes.
The utility model has the advantages that, the integral rotor of composite molecular pump uses a whole block material to process, it is an integral material that turbine blade level and groove drag level, turbine blade thickness reduces to edge thickness gradually from root, the top-down degree of depth of the groove of bleeding reduces gradually, rotor intrinsic frequency uses high tensile aluminium alloy far above frequency of okperation.
Description of drawings
Fig. 1 is an overall structure schematic representation of the present utility model.
Description of symbols among the figure
Groove drags level to 1---turbine blade level 2---
Embodiment
Shown in Figure 1, a kind of integral rotor of composite molecular pump comprises that turbine blade level 1 and groove drag level 2, and it is an overall structure that described turbine blade level 1 and groove drag level 2.
Described turbine blade level 1 and groove drag level 2 and adopt aluminum alloy material.
The vane thickness of described turbine blade level 1 outwards reduces gradually from root.
To between 12 degree, is made up of 8 grade blades, and is the relation that gradually changes by the turbine blade level 1 of bleeding at 40 degree for the blade tilt of described turbine blade level 1, preceding what have big pumping speed, afterwards what has big compression ratio.Groove drags level 2 and is made up of six gradually shallow spiral grooves of the degree of depth.Blade and groove are processed by the interlocked numerical controlled milling machine of high speed four-shaft.
Claims (4)
1. the integral rotor of a composite molecular pump comprises that turbine blade level and groove drag level, is characterized in that: it is an overall structure that described turbine blade level and groove drag level.
2. the integral rotor of a kind of composite molecular pump according to claim 1 is characterized in that: described turbine blade level and groove drag level and adopt an aluminum alloy material.
3. the integral rotor of a kind of composite molecular pump according to claim 1, it is characterized in that: the vane thickness of described turbine blade level outwards reduces gradually from root.
4. the integral rotor of a kind of composite molecular pump according to claim 1 is characterized in that: the blade tilt of described turbine blade level between 12 degree, and is the relation that gradually changes at 40 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010200327468U CN201615070U (en) | 2010-01-05 | 2010-01-05 | Integral rotor of composite molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010200327468U CN201615070U (en) | 2010-01-05 | 2010-01-05 | Integral rotor of composite molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201615070U true CN201615070U (en) | 2010-10-27 |
Family
ID=43001439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010200327468U Expired - Fee Related CN201615070U (en) | 2010-01-05 | 2010-01-05 | Integral rotor of composite molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201615070U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN104929978A (en) * | 2015-06-17 | 2015-09-23 | 川北真空科技(北京)有限公司 | Novel impact-resistant molecular pump rotor |
| CN110863997A (en) * | 2019-11-19 | 2020-03-06 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump with internal heating device |
-
2010
- 2010-01-05 CN CN2010200327468U patent/CN201615070U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102536853A (en) * | 2012-03-06 | 2012-07-04 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN102536853B (en) * | 2012-03-06 | 2014-07-09 | 北京北仪创新真空技术有限责任公司 | High-performance compound molecular pump |
| CN104929978A (en) * | 2015-06-17 | 2015-09-23 | 川北真空科技(北京)有限公司 | Novel impact-resistant molecular pump rotor |
| CN104929978B (en) * | 2015-06-17 | 2018-01-05 | 川北真空科技(北京)有限公司 | A kind of novel shock-resistant molecular pump rotor |
| CN110863997A (en) * | 2019-11-19 | 2020-03-06 | 北京中科科仪股份有限公司 | Magnetic suspension molecular pump with internal heating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101027 Termination date: 20150105 |
|
| EXPY | Termination of patent right or utility model |