CN201613065U

CN201613065U - Self-cleaning filter device

Info

Publication number: CN201613065U
Application number: CN2010201302504U
Authority: CN
Inventors: 赵晶
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2010-03-12
Filing date: 2010-03-12
Publication date: 2010-10-27
Anticipated expiration: 2020-03-12

Abstract

The utility model discloses a self-cleaning filter device, which comprises two filtering passages. Each filtering passage comprises a first valve, a filter, a buffer tank and a second valve which are connected sequentially, the first valve in each filtering passage is connected with a first three-way pipeline, the second valve in each filtering passage is connected to a second three-way passage which is further connected with a main valve, the two filtering passages are connected via a connecting passage, two ends of the connecting passage are respectively disposed between the first valve and the filter in the first passage and between the first valve and the filter in the second passage, and the connecting passage comprises a third valve, a three-way pipeline and a fourth valve which are connected sequentially. In the filter device, the buffer tanks and the valves additionally arranged at the rears of the filters have buffering functions, and water can be filtered by the filters while water intake flow can be adjusted, thereby avoiding influence of pressure and air bubbles. Simultaneously, the two filters are connected in parallel and can be cleaned automatically by aid of adjustment of the valves.

Description

But the filter of self-cleaning

Technical field

The utility model relates to the test and analysis technology field, but relates in particular to a kind of filter that is used for the self-cleaning of Water Test Kits.

Background technology

At present, the development level of microelectronics industry has become the scientific and technological level of a country of measurement and the important symbol of economic development strength, becomes the technical foundation of the most critical of realizing IT application in the national economy and the mainstay of national economic development.Its development level embodies the scientific and technological level and the economic strength of a country.And the develop rapidly of microelectronics industry also can drive and influence the high-tech industries such as development, particularly computer, Aero-Space, war industry and information industry of all trades and professions.

In the manufacture process of integrated circuit, from raw material to the product, need carry out hundreds of road manufacturing procedure, and along with the increase of integrated circuit integrated level, product processing number of times is added constantly also.Will be caused scrapping in a large number of product if pollute during this, make decrease in yield.Mainly containing following pollution sources in product processing influences the quality of product, as dust and bacterium, electromagnetic interference, noise and the little vibration on the impurity in airborne dirt particle, the industrial gas, impurity in the water and microorganism, the person.Therefore, improve ic manufacturing technology, except solving material, processing equipment and graphic designs technology, also should carry out pollution control processing environment.

Pure water is as a part of production environment, and its quality quality will directly play great influence to product quality.This mainly is to be used for cleaning products because of ultra-pure water in integrated circuit production, and almost the per pass operation all will be used pure water, and product directly contacts with water like this, makes the trace that produces in the product processing stain and is cleaned.Trace impurity may make product be polluted once more again in the water in this process, makes decrease in yield, so high-quality pure water just seems particularly important to the production of integrated circuit.

Water Test Kits is exactly whether a kind of every index that is used for detecting pure water meets the analytical instrument that integrated circuit is made water supply standard.As a rule, be provided with filter on the inlet pipeline of Water Test Kits, yet employed filter is a conventional filter on the present Water Test Kits inlet pipeline, there is following shortcoming in this conventional filter:

(1) probe tube directly is connected with supply channel, is subject to the pipeline water quality impact;

(2) use the instrument of this kind filter, often, cause the measured value fluctuation, severe patient even can not recover normal detection because intake pressure fluctuation or pipeline enter problems such as bubble, excessive or fluctuate when excessive when Water Test Kits sample point place piping flow, especially obvious;

(3) this kind filter because a large amount of particles that dam need filter core is taken out cleaning, impacts to operate as normal after using after a while.

Therefore, provide a kind of influence that is not subjected to sampling pressure fluctuation and bubble etc., the filter that possesses the self-cleaning function again becomes the problem that industry is needed solution badly.

The utility model content

But the utility model provides a kind of filter of self-cleaning, is subject to sampling pressure fluctuation and influence of air bubbles with the filter that solves present Water Test Kits, causes the measured value fluctuation, and needs filter core is taken out when cleaning, and influence the problem of operate as normal.

For addressing the above problem, but the utility model proposes a kind of filter of self-cleaning, but the filter of described self-cleaning comprises that two groups are filtered path, every group is filtered path and comprises first valve that links to each other successively, filter, the surge tank and second valve, described every group of first valve that filters path connects first three-way pipeline, second valve connects second three-way pipeline, described second three-way pipeline also connects total valve, be provided with connecting path between described two groups of filtration paths, the two ends of described connecting path are separately positioned between first valve and filter of described every group of filtration path, and described connecting path comprises the 3rd valve that links to each other in turn, three-way pipeline and the 4th valve.

Optionally, filter water inlet and filter delivery port that described filter comprises casing and is arranged on described tank ends are provided with filter core in the described casing.

Optionally, the described surge tank surge tank water inlet and the surge tank delivery port that comprise tank body and be arranged on described tank body two ends.

The utility model makes it compared with prior art owing to adopted above-mentioned technical scheme, has following advantage and good effect:

1, behind filter, increases small-sized water tank and valve, play cushioning effect, water can be filtered through filter, can regulate flow of inlet water again, avoid pressure and aeration;

2,,, realize the self-cleaning function of filter by the adjustment of valve with two set filter parallel connections.

Description of drawings

But the structural representation of the filter of the self-cleaning that Fig. 1 provides for the utility model embodiment;

The structure of filter schematic diagram that Fig. 2 provides for the utility model embodiment;

The structural representation of the surge tank that Fig. 3 provides for the utility model embodiment;

But the parallel filtering state of the filter of the self-cleaning that Fig. 4 provides for the utility model embodiment;

But the single-filtering state of the filter of the self-cleaning that Fig. 5 provides for the utility model embodiment;

But the self-cleaning state of the filter of the self-cleaning that Fig. 6 provides for the utility model embodiment.

The specific embodiment

But be described in further detail below in conjunction with the filter of the drawings and specific embodiments to the self-cleaning that the utility model proposes.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.

Core concept of the present utility model is, but a kind of filter of self-cleaning is provided, so that the measurement of Water Test Kits is not subjected to sampling pressure fluctuation and influence of air bubbles, and this filter has the self-cleaning function, do not need filter core taken out to clean.

Please refer to Fig. 1, but the structural representation of the filter of the self-cleaning that Fig. 1 provides for the utility model embodiment, as shown in Figure 1, but the filter that is somebody's turn to do self-cleaning comprises that two groups are filtered paths, every group is filtered path and comprises first valve 10 that links to each other successively, filter 20, the surge tank 30 and second valve 11, described every group of first valve 10 that filters path connects first three-way pipeline 41, second valve 11 connects second three-way pipeline 42, described second three-way pipeline 42 also connects total valve 17, be provided with connecting path between described two groups of filtration paths, the two ends of described connecting path are separately positioned between first valve 10 and filter 20 of described every group of filtration path, and described connecting path comprises the 3rd valve 13 that links to each other in turn, three-way pipeline 40 and the 4th valve 14.

Please continue with reference to figure 2, the structure of filter schematic diagram that Fig. 2 provides for the utility model embodiment, as shown in Figure 2, filter water inlet 202 and filter delivery port 203 that described filter 20 comprises casing 201 and is arranged on described casing 201 two ends are provided with filter core in the described casing 201.

Please continue with reference to figure 3, the structural representation of the surge tank that Fig. 3 provides for the utility model embodiment, as shown in Figure 3, surge tank water inlet 302 and surge tank delivery port 303 that described surge tank 30 comprises tank body 301 and is arranged on described tank body 301 two ends.

But below will describe the duty of the filter of the self-cleaning that the utility model embodiment provides in detail, for convenience, the filtration path of two groups of parallel connections be distinguished with A and B respectively.But the duty of the filter of the self-cleaning that the utility model embodiment provides is as follows:

(1) closes when valve 13 and valve 14, during other valve opening, this filter is in the parallel filtering state, promptly two groups of filtration paths filter simultaneously, at this moment, the equivalent working state figure of this filter please refer to Fig. 4, but the parallel filtering state of the filter of the self-cleaning that Fig. 4 provides for the utility model embodiment;

(2) close when valve 13 and valve 14, while one group of valve closing that filters path, other valve opening, close as valve 13 and valve 14, when valve 10A and valve 11A closed, this filter was in single channel and filters state, promptly have only one group of filtration path to filter, at this moment, the equivalent working state figure of this filter please refer to Fig. 5, but the single-filtering state of the filter of the self-cleaning that Fig. 5 provides for the utility model embodiment;

(3) close when total valve 17, one group of first valve closing that filters path, simultaneously on the connecting path away from the valve closing of described filtration path, other valve opening, close as total valve 17, valve 10A closes, when valve 14 is closed, this filter is in the self-cleaning state, be after water passes through the filtration of second group of filtration path, first group of filter 20A that filters path to be cleaned, at this moment, the equivalent working state figure of this filter please refer to Fig. 6, but the self-cleaning state of the filter of the self-cleaning that Fig. 6 provides for the utility model embodiment.Certainly, close when total valve 17, valve 10B closes, and when valve 13 was closed, water cleaned second group of filter 20B that filters path after filtering the path filtration by first group.

In above-mentioned specific embodiment, but the filter of described self-cleaning is to be described as to be used on the inlet pipeline of Water Test Kits water sample being filtered, yet should be realized that, but the filter of described self-cleaning can also be used for the analytical instrument that other need filter sampling.

In sum, but the utility model provides a kind of filter of self-cleaning, and this filter increases surge tank and valve behind filter, play cushioning effect, and water can be filtered through filter, can regulate flow of inlet water again, avoids pressure and aeration; Simultaneously, with two set filter parallel connections,, realize the self-cleaning function of filter by the adjustment of valve.

Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims

1. but the filter of a self-cleaning, it is characterized in that, comprise that two groups are filtered path, every group is filtered path and comprises first valve that links to each other successively, filter, the surge tank and second valve, described every group of first valve that filters path connects first three-way pipeline, second valve connects second three-way pipeline, described second three-way pipeline also connects total valve, be provided with connecting path between described two groups of filtration paths, the two ends of described connecting path are separately positioned between first valve and filter of described every group of filtration path, and described connecting path comprises the 3rd valve that links to each other in turn, three-way pipeline and the 4th valve.

2. but the filter of self-cleaning as claimed in claim 1 is characterized in that, filter water inlet and filter delivery port that described filter comprises casing and is arranged on described tank ends are provided with filter core in the described casing.

3. but the filter of self-cleaning as claimed in claim 1 is characterized in that, surge tank water inlet and surge tank delivery port that described surge tank comprises tank body and is arranged on described tank body two ends.