CN201561879U

CN201561879U - Sampling device

Info

Publication number: CN201561879U
Application number: CN2009202132828U
Authority: CN
Inventors: 朱建红; 张跃; 王晶
Original assignee: Semiconductor Manufacturing International Shanghai Corp
Current assignee: Semiconductor Manufacturing International Beijing Corp
Priority date: 2009-12-17
Filing date: 2009-12-17
Publication date: 2010-08-25
Anticipated expiration: 2019-12-17

Abstract

The utility model discloses a sampling device which comprises a pipette, a liquid discharge pipe, a liquid suction ball and a valve, wherein the liquid suction ball is respectively connected with the pipette and the liquid discharge pipe; and the valve is arranged on the liquid discharge pipe. The sampling device can ensure the personnel safety of an operator and ensure the cleanliness of chemical reagents.

Description

Sampler

Technical field

The utility model relates to integrated circuit and makes the field, particularly relates to a kind of sampler that is used to draw chemical reagent.

Background technology

Make the field at integrated circuit, behind some processing step, can stay pollutant at crystal column surface usually, described pollutant includes organic compounds, metallic impurity or particle etc., and these pollutants are very big for the influence of product subsequent technique.For example, adhering to of particle can influence the authenticity of photoetching process design transfer, even can cause the short circuit of circuit structure.Therefore, in fabrication of semiconductor device, except will getting rid of the external pollution source, also need the frequent wafer cleaning of carrying out, described wafer cleaning is under the prerequisite of not destroying crystal column surface characteristic and electrical characteristics, use chemical solution or gas clean-up to remain in pollutant on the wafer effectively, avoid the carrying out of these pollutant effect successive process, and prevent that cleaning machine and other wafer are subjected to the pollution of these pollutants.

In the wafer cleaning process, mainly be to utilize chemical reagent that wafer is soaked and clean.For example, the cleaning equipment that adopts U.S. SCP company to produce, utilize sulfuric acid, hydrofluorite, hydrochloric acid, nitric acid, ammoniacal liquor, hydrogen peroxide with and mixed solution etc. have the chemical reagent of severe corrosive, come wafer is cleaned.In the process of utilizing the cleaning equipment cleaning wafer, need regularly the chemical reagent in the cleaning equipment to be carried out sample analysis, whether meet the requirements with the parameters such as metal ion content, concentration and pH value of judging this chemical reagent, this just needs operating personnel often to utilize sampler to take out chemical reagent in cleaning equipment.

Specifically please refer to Fig. 1, it is the synoptic diagram of existing sampler, as shown in Figure 1, described sampler 100 comprises suction pipe 110, compression bottle 120 and the bottle cap 130 that mates with compression bottle 120, please continue with reference to figure 2, it is the use synoptic diagram of existing sampler, as shown in Figure 2, when needs are taken a sample, at first open the protective door of cleaning equipment 10, and bottle cap 130 is screwed on the compression bottle 120, suction pipe 110 is inserted in the cleaning equipment 10; Then, push described compression bottle 120 repeatedly, chemical reagent is drawn in the compression bottle 120 with hand; And suction pipe 110 and bottle cap 130 taken off from compression bottle 120, and there is not the lid in hole to be tightened on the compression bottle 120 another, rock compression bottle 120 so that it is carried out rinse, afterwards chemical reagent discarded in the compression bottle 120 is discharged in the deionization tank, the rinse compression bottle is repeatedly guaranteed the cleanliness factor of compression bottle 120 so repeatedly; At last, utilizing compression bottle 120 and suction pipe 110 to draw chemical reagent, and chemical reagent is poured in the sampling jar analyzing.

Yet, in actual production, find, existing sampler has following several shortcoming: at first, near the extruding compression bottle 120 that operating personnel need not stop cleaning equipment 10, this is very dangerous, various liquid with severe corrosive very likely are splashed on one's body the operating personnel in the cleaning equipment 10, threaten operating personnel's personal safety; And near operating personnel's operation cleaning equipment 10 also might be brought into the metallic ion on its health in the cleaning equipment 10, makes that cleaning equipment 10 is contaminated; In addition, the discarded chemical reagent that rinse compression bottle 120 backs produce need be discharged in the deionization tank, also can pollute the deionization tank.

Therefore, provide a kind of sampler, the minimizing operating personnel contact with cleaning equipment, guarantee operating personnel's the personal safety and the cleanliness factor of equipment, are very necessary.

The utility model content

The utility model provides a kind of sampler, needs operating personnel closely to contact cleaning equipment to solve existing sampler, threatens operating personnel's personal safety, can't guarantee the problem of the cleanliness factor of equipment.

For solving the problems of the technologies described above, the utility model provides a kind of sampler, comprising: pipette, discharging tube, Liquid absorption ball and valve, described Liquid absorption ball are connected with described discharging tube with described pipette respectively, and described valve is arranged on the described discharging tube.

Optionally, the material of described pipette is the soluble poly tetrafluoroethene.

Optionally, the material of described discharging tube is the soluble poly tetrafluoroethene.

Optionally, the material of described Liquid absorption ball is the soluble poly tetrafluoroethene.

Optionally, the length of described pipette is 30～100cm.

Optionally, the volume of described Liquid absorption ball is greater than the volume of described pipette.

Compared with prior art, sampler provided by the utility model comprises pipette, Liquid absorption ball and valve, when taking a sample work, elder generation's valve-off pushes Liquid absorption ball again, because the pressure in the Liquid absorption ball is less than ambient pressure, chemical reagent is inhaled into Liquid absorption ball, open valve afterwards again, according to law of connected vessels, can make chemical reagent in discharging tube flow into sampling jar, sampler provided by the utility model need not operating personnel and carries out sampling work near cleaning equipment, chemical reagent is flow in the sampling jar automatically, guarantee operating personnel's the personal safety and the cleanliness factor of equipment, simultaneously, also need not rinse work, can not produce discarded chemical reagent.

Description of drawings

Fig. 1 is the synoptic diagram of existing sampler;

Fig. 2 is the use synoptic diagram of existing sampler;

The synoptic diagram of the sampler that Fig. 3 provides for the utility model embodiment;

The use synoptic diagram of the sampler that Fig. 4 provides for the utility model embodiment.

Embodiment

Below in conjunction with synoptic diagram the utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.

For clear, whole features of practical embodiments are not described.In the following description, be not described in detail known function and structure, because they can make the utility model because unnecessary details and confusion.Will be understood that in the exploitation of any practical embodiments, must make a large amount of implementation details, for example, change into another embodiment by an embodiment according to relevant system or relevant commercial restriction to realize developer's specific objective.In addition, will be understood that this development may be complicated and time-consuming, but only be routine work to those skilled in the art.

In the following passage, with way of example the utility model is described more specifically with reference to accompanying drawing.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the purpose of aid illustration the utility model embodiment lucidly.

Core concept of the present utility model is, a kind of sampler is provided, described sampler comprises pipette, Liquid absorption ball and valve, when taking a sample, elder generation's valve-off pushes Liquid absorption ball again, because the Liquid absorption ball internal pressure is less than ambient pressure, sample is inhaled into Liquid absorption ball, open valve afterwards again, utilize the principle of linker, can make chemical reagent in discharging tube flow into sampling jar, operating personnel need not to carry out sampling work near cleaning equipment, can make chemical reagent flow in the sampling jar automatically, guarantee operating personnel's the personal safety and the cleanliness factor of equipment, and described sampler need not rinse work, can not produce discarded chemical reagent.

Specifically please refer to Fig. 3, the synoptic diagram of the sampler that it provides for the utility model embodiment, as shown in Figure 3, sampler 200 comprises: pipette 210, discharging tube 220, Liquid absorption ball 230 and valve 240, described Liquid absorption ball 230 is connected with discharging tube 220 with pipette 210 respectively, and described valve 240 is arranged on the discharging tube 220.

In a specific embodiment of the present utility model, the material of pipette 210 is soluble poly tetrafluoroethene (PFA), and the wall thickness of pipette 210 is 0.5mm to 1.5mm, to guarantee its corrosion resistance.

In a specific embodiment of the present utility model, the material of discharging tube 220 is soluble poly tetrafluoroethene, and the wall thickness of discharging tube 220 is 0.5mm to 1.5mm.

Described pipette 210 and discharging tube 220 can high temperature resistant, acid and alkali-resistances, avoid being subjected to the corrosion of chemical reagent, and can not produce dust or particle and influence the cleanliness factor of chemical reagent.Certainly, in other embodiment of the utility model, pipette 210 and discharging tube 220 also can be that the material of and acid-alkali-corrosive-resisting high temperature resistant by other is made, for example high density polyethylene (HDPE).

In a specific embodiment of the present utility model, the material of Liquid absorption ball 230 is can corrosion resistant soluble poly tetrafluoroethene.In other embodiment of the utility model, Liquid absorption ball 230 also can be that the material corrosion-resistant, high temperature resistant and soft by other made.

In other specific embodiment of the present utility model, can be provided with scale on the sampling jar 250, so that judge the quantity of the chemical reagent that takes out, the volume of described sampling jar 250 can be 50～200mL.

In a specific embodiment of the present utility model, the length of pipette 210 should be complementary with the height of cleaning equipment, and for example it can be 30～100cm, guarantees in sampling process, guarantees that the height of Liquid absorption ball 230 is lower than the height of liquid level in the cleaning equipment.

In a specific embodiment of the present utility model, the volume of Liquid absorption ball 230 is greater than the volume of pipette 210, so that chemical reagent flow in the sampling jar automatically, guarantee operating personnel's the personal safety and the cleanliness factor of equipment, and described sampler need not rinse work, can not produce discarded chemical reagent.

Please continue with reference to figure 4, the use synoptic diagram of the sampler that it provides for the utility model embodiment, as shown in Figure 4, in the time of need carrying out sampling operation, at first open the protective door of cleaning equipment, and pipette 210 is inserted in the chemical reagent of cleaning equipment 20, guarantee that simultaneously the height of Liquid absorption ball 230 is lower than the height of liquid level in the cleaning equipment; Then, valve-off 240, and extruding Liquid absorption ball 230 make in the Liquid absorption ball 230 to be negative pressure state, and then rely on the negative pressure in the Liquid absorption ball 230 that chemical reagent is drawn in the pipette 210; Open valve 240 again, can utilize the principle of linker, chemical reagent is flow in the sampling jar 250 automatically.

Sampler 200 provided by the utility model need not operating personnel to be continued to carry out sampling work near cleaning equipment 20, can utilize the principle of linker, chemical reagent is flow in the sampling jar 250 automatically, guarantee operating personnel's personal safety, can guarantee the cleanliness factor of cleaning equipment 20 simultaneously.In addition, described sampler 200 also need not rinse work, can not produce discarded chemical reagent, guarantees can not pollute the deionization tank.

Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from spirit and scope of the present utility model.Like this, if of the present utility model these are revised and modification belongs within the scope of the utility model claim and equivalent technologies thereof, then the utility model also is intended to comprise these changes and modification interior.

Claims

1. a sampler is characterized in that, comprising: pipette, discharging tube, Liquid absorption ball and valve, described Liquid absorption ball are connected with described discharging tube with described pipette respectively, and described valve is arranged on the described discharging tube.

2. sampler as claimed in claim 1 is characterized in that, the material of described pipette is the soluble poly tetrafluoroethene.

3. sampler as claimed in claim 2 is characterized in that, the material of described discharging tube is the soluble poly tetrafluoroethene.

4. sampler as claimed in claim 3 is characterized in that, the material of described Liquid absorption ball is the soluble poly tetrafluoroethene.

5. as claim 1 or 4 described samplers, it is characterized in that the length of described pipette is 30～100cm.

6. sampler as claimed in claim 5 is characterized in that the volume of described Liquid absorption ball is greater than the volume of described pipette.