CN201528432U - Electrode radiation structure of a vacuum furnace - Google Patents

Electrode radiation structure of a vacuum furnace Download PDF

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Publication number
CN201528432U
CN201528432U CN2009202525687U CN200920252568U CN201528432U CN 201528432 U CN201528432 U CN 201528432U CN 2009202525687 U CN2009202525687 U CN 2009202525687U CN 200920252568 U CN200920252568 U CN 200920252568U CN 201528432 U CN201528432 U CN 201528432U
Authority
CN
China
Prior art keywords
electrode
blind hole
vacuum furnace
radiation structure
outlet pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009202525687U
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Chinese (zh)
Inventor
马玉水
张立基
赵仕庆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd
Original Assignee
Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd filed Critical Shandong Gaotang Jiesheng Semiconductor Technology Co Ltd
Priority to CN2009202525687U priority Critical patent/CN201528432U/en
Application granted granted Critical
Publication of CN201528432U publication Critical patent/CN201528432U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model provides an electrode radiation structure of a vacuum furnace. A blind hole deep to the bottom is drilled on an electrode of the vacuum furnace and an end plug is connected with the opening of the blind hole and a water inlet pipe and a water outlet pipe communicated with the blind hole are arranged on the end plug. Cold water is pump into the blind hole and discharged by the water outlet pipe after direct heat exchange with the electrode. A radiation structure is directly produced on the electrode to leave out a helical cooling pipe outside the electrode, simplify the structure, reduce the cost and increase the heat radiation efficiency after direct contact heat exchange between the cold water and the electrode.

Description

Vacuum furnace electrode radiator structure
Technical field
The utility model relates to a kind of electrode radiator structure of vacuum furnace, belongs to the vacuum furnace technical field.
Background technology
Vacuum furnace is a kind of equipment that heats in vacuum environment, and its vacuum chamber is evacuated by vacuum pump.The general structure of vacuum furnace as shown in Figure 1, vacuum chamber 1 usefulness pipeline connects with vacuum pump system, the inferior utmost point of transformer 4 (output voltage after transformer 4 transformations is 5V) two ends are connected with two electrodes 2 by connecting plate 5 respectively, two electrodes 2 are connected with graphite heating bed in the vacuum chamber 1, and workpiece is placed on the graphite heating bed and heats.Because the temperature of electrode 2 reaches 100--200 ℃ in the heating process, produce a large amount of heat, make copper electrode 2 be subjected to thermal stretching, because connecting plate 5 is rigidity, copper electrode 2 can only upwards extend, cause the electrode 2 and the sealing device 6 of vacuum chamber 1 junction to damage easily, cause the vacuum degree in the vacuum chamber 1 to descend, vacuum furnace loses due performance thereupon.Therefore, vacuum furnace all is provided with the device into electrode 2 heat radiations.At present, the heat abstractor of vacuum furnace top electrode 2 is that the outer felt at electrode 2 is wound with helical form cooling water pipe 3, and cold water is entered by an end of cooling water pipe 3, is flowed out by the other end, by the indirect thermal conduction heat that electrode 2 produces is taken away by cold water, reached the purpose of electrode 2 heat radiations.But this mode, owing to be indirect heat loss through conduction, radiating effect is poor, speed is slow, and complex structure, the cost height.
Summary of the invention
The utility model is at the deficiency that existing vacuum furnace electrode heat dissipation technology exists, and a kind of vacuum furnace electrode radiator structure of simple in structure, good heat dissipation effect is provided.
Vacuum furnace electrode radiator structure of the present utility model adopts following technical proposals:
This vacuum furnace electrode radiator structure is that the electrode with vacuum furnace is drilled with a blind hole, is connected with plug at the opening part of this blind hole, and plug is provided with water inlet pipe and the outlet pipe that is communicated with blind hole.
Feed cold water by water inlet pipe in blind hole, cold water and electrode direct heat exchange back are discharged by outlet pipe.
The utility model is directly made radiator structure on electrode, saved the helical form cooling water pipe in the electrode outside, simplifies the structure, and has reduced cost, and cold water and electrode direct contact heat exchange has simultaneously improved radiating efficiency.
Description of drawings
Fig. 1 is the structural representation of existing vacuum furnace.
Fig. 2 is the schematic diagram of the utility model vacuum furnace electrode radiator structure.
Among the figure: 1, vacuum chamber, 2, electrode, 3, cooling water pipe, 4, transformer, 5, connecting plate, 6, sealing device, 7, plug, 8, water inlet pipe, 9, outlet pipe, 10, blind hole.
Embodiment
As shown in Figure 2, vacuum furnace electrode radiator structure of the present utility model is that the electrode 2 of vacuum furnace is bored a blind hole 10 that is deep to the bottom along axis, at the opening part of this blind hole 10 by the plug 7 that has been threaded, plug 7 is provided with water inlet pipe 8 and the outlet pipe 9 that is communicated with blind hole 10, outlet pipe 9 grows to the bottom of blind hole 10, and water inlet pipe 8 is shorter.
Feed cold water by water inlet pipe 8 in blind hole 10, cold water and electrode 2 direct heat exchange back are discharged by outlet pipe 9.Because cold water directly contacts with electrode 2, has improved radiating efficiency.Because the voltage of electrode 2 is 5V low pressure, so can not bring potential safety hazard after feeding water in the electrode 2.

Claims (1)

1. vacuum furnace electrode radiator structure, it is characterized in that: the electrode of vacuum furnace is drilled with a blind hole, is connected with plug at the opening part of this blind hole, and plug is provided with water inlet pipe and the outlet pipe that is communicated with blind hole.
CN2009202525687U 2009-11-12 2009-11-12 Electrode radiation structure of a vacuum furnace Expired - Fee Related CN201528432U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009202525687U CN201528432U (en) 2009-11-12 2009-11-12 Electrode radiation structure of a vacuum furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009202525687U CN201528432U (en) 2009-11-12 2009-11-12 Electrode radiation structure of a vacuum furnace

Publications (1)

Publication Number Publication Date
CN201528432U true CN201528432U (en) 2010-07-14

Family

ID=42519713

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009202525687U Expired - Fee Related CN201528432U (en) 2009-11-12 2009-11-12 Electrode radiation structure of a vacuum furnace

Country Status (1)

Country Link
CN (1) CN201528432U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108541096A (en) * 2018-05-25 2018-09-14 山西丹源碳素股份有限公司 A kind of monoblock type internal thermal tandem graphitization furnace tip electrode and preparation method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108541096A (en) * 2018-05-25 2018-09-14 山西丹源碳素股份有限公司 A kind of monoblock type internal thermal tandem graphitization furnace tip electrode and preparation method thereof

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100714

Termination date: 20141112

EXPY Termination of patent right or utility model