CN201524532U - Stirring mechanism - Google Patents

Stirring mechanism Download PDF

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Publication number
CN201524532U
CN201524532U CN200920104556XU CN200920104556U CN201524532U CN 201524532 U CN201524532 U CN 201524532U CN 200920104556X U CN200920104556X U CN 200920104556XU CN 200920104556 U CN200920104556 U CN 200920104556U CN 201524532 U CN201524532 U CN 201524532U
Authority
CN
China
Prior art keywords
blades
stirring
blade
seal head
hollow spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200920104556XU
Other languages
Chinese (zh)
Inventor
赵雷
靳永吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Semiconductor Equipment Institute
Original Assignee
Beijing Semiconductor Equipment Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Semiconductor Equipment Institute filed Critical Beijing Semiconductor Equipment Institute
Priority to CN200920104556XU priority Critical patent/CN201524532U/en
Application granted granted Critical
Publication of CN201524532U publication Critical patent/CN201524532U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mixers Of The Rotary Stirring Type (AREA)
  • Crushing And Grinding (AREA)

Abstract

The utility model relates to a stirring mechanism, which comprises a stirring shaft and blades. The lower end of the stirring shaft is fixed with a center portion of a hollow spherical-crown shaped seal head, a spherical surface of the hollow spherical-crown shaped seal head faces downwards, the blades include toothed blades and rib-plate shaped blades, more than two toothed blades are uniformly circumferentially distributed on the hollow spherical-crown shaped seal head, more than two rib-plate shaped blades are uniformly radially distributed on the upper surface of the hollow spherical-crown shaped seal head, the blades are used for driving liquid to move, stirring solid materials to enable solid material particles to be dispersed in the liquid uniformly, and keeping solid material particles of a mixture in a suspension state for a long time. The stirring mechanism is simple in structure, easy to be manufactured, high in stirring efficiency and reliable in operation, and can eliminate swirling effectively and meet requirements to process different specifications of chips.

Description

Rabbling mechanism
Technical field
The utility model relates to a kind of rabbling mechanism, particularly a kind of agitator arm.
Background technology
At semiconductor equipment manufacturing, solar facilities manufacturing, food machinery industry, all exist two kinds of immiscible materials evenly mixed, make one be scattered in mutually another mutually in.In the wafer process process, the stirring technique flow process is followed whole grinding cutting process, in order to prevent that the solid abrasive particle is in suspended state all the time under cutting process and non-cutting process, be unlikely to rapid sedimentation and form bulk and cause job failure, the abrasive material of different size granularity mixes to stir and can use with a kind of rabbling mechanism.Mixed process is generally carried out in stirred vessel, different production processes to the peeling strength that mixes with separate yardstick different requirements arranged.At semicon industry and solar energy industry the requirement that mixes is designed suitable stirring system by analyzing specific embodiment.A complete stirring system comprises tank diameter, mechanical agitator, shaft, temperature measuring equipment, sampler.Mechanical agitator is that agitator arm is a core component, the effect of agitator arm is to drive liquid to move, wherein axial and radial velocity plays a major role to mixing, axial velocity makes liquid form circulation up and down, tangential velocity makes liquid make circumference around axle and rotates, the liquid layer that formation speed is different, under centrifugal action, produce the recessed vortex in surface, the liquid level phenomenon of can serious recessed formation turning round and round when speed is higher, thus the effective volume of container reduced, produce foam, this is totally unfavorable to mixing stirring, and make shurry pump output flow instability, cause the shurry pump fallback, the long-time hole of the pump housing is moved and is damaged.So should manage to eliminate, should design a kind of simple in structure, stirring efficiency is high, the rabbling mechanism of reliable operation.
Summary of the invention
Technical problem to be solved in the utility model provide a kind of simple in structure, be easy to manufacture, the rabbling mechanism of stirring efficiency height, reliable operation.
The utility model adopts following technical scheme:
The utility model comprises shaft and blade, the centre of shaft lower end and the crown end socket of a hollow ball is fixed, and the sphere of the crown end socket of hollow ball down, said blade is made of profile of tooth blade and two kinds of blades of gusset shape blade, wherein, profile of tooth blade more than two is along the circumference uniform distribution of the crown end socket of hollow ball, and the gusset shape blade more than two is distributed on the upper surface of the crown end socket of hollow ball radially.
Said profile of tooth blade of the utility model and gusset shape blade are alternate being arranged on the crown end socket of hollow ball.
The centre of the crown end socket of the said hollow ball of the utility model is provided with the adapter sleeve that links to each other with shaft.
The beneficial effects of the utility model: rabbling mechanism provided by the utility model designs at the mixing plant in the semiconductor manufacturing equipment.Driving liquid with it moves, and stir solids material, solid material particle is dispersed in the liquid, and make the solid material particle of mixture be in suspended state often, this rabbling mechanism is simple in structure, be easy to manufacture, stirring efficiency height, reliable operation, the phenomenon of turning round and round can be effectively eliminated, and the wafer of processing different size can be satisfied.
Description of drawings
Accompanying drawing is that the axle of a kind of embodiment of the utility model is surveyed schematic diagram.
In the accompanying drawings: 1 shaft, the crown end socket of 2 hollow balls, 3 gusset shape blades, 4 profile of tooth blades, 5 adapter sleeves.
The specific embodiment
The utility model is described in further detail below in conjunction with the embodiment accompanying drawing:
Referring to accompanying drawing, comprise shaft and blade in the formation of this rabbling mechanism, blade is made of profile of tooth blade 4 and 3 two kinds of blades of gusset shape blade; The set adapter sleeve 5 in the crown end socket of shaft 1 lower end and a hollow ball 2 centres is connected and fixed, and constitutes umbrella.In the present embodiment, adopt six profile of tooth blades 4 to be distributed on the circumference of end socket 2, adopt on the alternate upper surface that is distributed on end socket 2 radially of six gusset shape blades 3 and profile of tooth blade 4.
The utility model is in conjunction with the advantage of blade impeller and turbine type impeller, be designed to the version of two-layer blade, realized the combination of fluid axial flow type and radial flow, gusset shape blade has effectively been eliminated the phenomenon of turning round and round simultaneously, and ability low to processing, the high viscosity material obviously improves.

Claims (3)

1. rabbling mechanism, it comprises shaft and blade, the centre that it is characterized in that said shaft (1) lower end and the crown end socket of a hollow ball (2) is fixed, and the sphere of the crown end socket of hollow ball (2) down, said blade is made of profile of tooth blade (4) and (3) two kinds of blades of gusset shape blade, wherein, profile of tooth blade (4) more than two is along the circumference uniform distribution of the crown end socket of hollow ball (2), and the gusset shape blade (3) more than two is distributed on the upper surface of the crown end socket of hollow ball (2) radially.
2. rabbling mechanism according to claim 1 is characterized in that said profile of tooth blade (4) and gusset shape blade (3) are alternate being arranged on the crown end socket of hollow ball (2).
3. rabbling mechanism according to claim 1 and 2 is characterized in that the centre of the crown end socket of said hollow ball (2) is provided with the adapter sleeve (5) that links to each other with shaft (1).
CN200920104556XU 2009-09-18 2009-09-18 Stirring mechanism Expired - Fee Related CN201524532U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200920104556XU CN201524532U (en) 2009-09-18 2009-09-18 Stirring mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200920104556XU CN201524532U (en) 2009-09-18 2009-09-18 Stirring mechanism

Publications (1)

Publication Number Publication Date
CN201524532U true CN201524532U (en) 2010-07-14

Family

ID=42515832

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200920104556XU Expired - Fee Related CN201524532U (en) 2009-09-18 2009-09-18 Stirring mechanism

Country Status (1)

Country Link
CN (1) CN201524532U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109999708A (en) * 2019-03-29 2019-07-12 济南大学 Stirring rod external member and its application method based on virtual reality fusion experiment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109999708A (en) * 2019-03-29 2019-07-12 济南大学 Stirring rod external member and its application method based on virtual reality fusion experiment

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100714

Termination date: 20140918

EXPY Termination of patent right or utility model