CN201487540U - Anti-explosion source bottle used for diffusion furnace - Google Patents
Anti-explosion source bottle used for diffusion furnace Download PDFInfo
- Publication number
- CN201487540U CN201487540U CN2009202041617U CN200920204161U CN201487540U CN 201487540 U CN201487540 U CN 201487540U CN 2009202041617 U CN2009202041617 U CN 2009202041617U CN 200920204161 U CN200920204161 U CN 200920204161U CN 201487540 U CN201487540 U CN 201487540U
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- bottle
- explosion
- source bottle
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- ptfe
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Abstract
The utility model discloses an anti-explosion source bottle used for a diffusion furnace, and the technology and the device are mainly applied in the diffusion furnace. The anti-explosion source bottle comprises a bottle body and a tube arranged on the bottle body, wherein the bottle body is made of a PTFE or a PFA material and is provided with outward raised reinforced ribs. The material of the source bottle is changed, namely, the flexible PTFE or the PFA material are substituted for brittle quartz material, therefore, the source bottle resists corrosion, high (or low) temperature and ageing, has certain mechanical strength, and does not cause stress or hidden crack, and can bear collision after being made into a sealed bottle; and simultaneously, the reinforced ribs used for increasing the strength is arranged on the bottle body, therefore, the source bottle can eliminate hidden danger of fracture to a great extent, and greatly reduces the risk of explosion when in loading and use of the source bottle.
Description
Technical field
The utility model relates to a provenance bottle, relates in particular to a kind of explosion-proof source bottle that is used for diffusion furnaces.
Background technique
Diffusion furnaces is a kind of semiconductor manufacturing equipment, is mainly used in doping process, and in crystal silicon solar energy battery was produced, diffusion furnaces was unique implantation equipment, is in the manufacturing process generation of PN junction, the raising of conversion efficiency to be played conclusive key equipment especially.
Present diffusion furnaces is done the phosphorus diffusion mostly, is the POCl of the bottled liquid storage attitude in source of quartzy bottle
3, N
2Be passed in the bottle of quartzy source, bubbling carries POCl
3Enter in the process duct, condition of high temperature fission produces phosphorus.In order to control N well
2Carry POCl
3Amount, usually quartzy source bottle is seated in the thermostatic water bath.This method exists serious potential safety hazard.Because quartz member is a kind of brittle material, in manufacture process, easily produce stress and concentrate, in handling process, easily produce latent splitting as if collision is arranged, collide with etc.In use, the gas of band pressure feeds in the bottle, the outer temperature great change of bottle, and these stress are concentrated and latent splitting very easily caused quartzy bottle breakage.If behind the bottle breakage of quartzy source, liquid POCl
3Will flow in the water, violent chemical reaction: POCl take place with water
3+ 3H
2O → H
3PO
4+ 3HCl.This reaction product is with vaporific eruption, and around spreading in rapidly, danger is bigger.The vaporific phosphoric acid and the hydrochloric acid that generate are poisonous substances, and respiratory tract is had stimulation, and the eye contact meeting causes burns, and causes permanent lesion, and the skin contact can cause third-degree burn.And phosphoric acid, hydrochloric acid are a kind of corrosive materials, and is harmful equally to human body, and equipment, instrument, factory building facility are produced corrosion.
Summary of the invention
The utility model easily breaks and causes the defective of potential safety hazard in order to solve existing quartzy source bottle, and a kind of explosion-proof source bottle that is used for diffusion furnaces is provided, and it effectively improves the reliability of source bottle by with the Manufacturing material of flexible macromolecular material as the source bottle.
For solving the problems of the technologies described above, the utility model adopts following technological scheme: be used for the explosion-proof source bottle of diffusion furnaces, comprise bottle and be arranged on body on the bottle; Described bottle is polytetrafluoroethylene (PTFE) or Meltability polytetrafluorethyletubular (PFA) material, is provided with the stiffening rib to outer lug on bottle.
Described stiffening rib comprises horizontal rib and the lengthways of rod around bottle.
Described stiffening rib is PTFE or PFA material.
Described body is PTFE or PFA material.
Described bottle is the cylinder of sealing, and body is engaged in the cylinder end face, and stiffening rib is arranged on the external cylindrical surface of cylinder.
The utility model is by the material of change source bottle, changes the quartz material of fragility into flexible PTFE or PFA material, and corrosion-resistant, anti-height (low) temperature, ageing-resistant has certain mechanical strength, make seal bottle after, unstressed, do not have a latent collision of splitting, be not afraid of; The stiffening rib of gaining in strength body being provided with just can be eliminated the hidden danger of breaking to a great extent simultaneously, significantly reduces the danger of bottle explosion when loading, use source bottle.
Description of drawings
Below in conjunction with drawings and Examples the utility model is described further:
Fig. 1 is the utility model sectional structure schematic representation.
Embodiment
A kind of as shown in Figure 1 explosion-proof source bottle that is used for diffusion furnaces comprises the hollow cylinder bottle 1 of sealing and is arranged on body 3 on the bottle.Be provided with the stiffening rib 2 to outer lug on the external cylindrical surface of cylindrical bottle 1, stiffening rib 2 comprises horizontal rib and lengthways of rod, and laterally rib is around bottle 1.Described bottle 1, stiffening rib 2 and body 3 are PTFE or PFA material.Described body 3 penetrates and is fixed in the end face of cylindrical bottle 1.
Aforementioned only is preferred embodiment of the present utility model, and described bottle 1 also can be made other suitable shape; Stiffening rib 2 also can be arranged on bottle 1 inside or adopt other structure, layout; Body 3 can adopt other material (with reference to Fig. 1) separately.
Described PTFE (teflon is commonly called as the plastics king) is the widest kind of purposes in the fluoro-containing plastic, has the excellent comprehensive performance: corrosion-resistant, anti-height (low) is warm, ageing-resistant, high insulation, highly lubricate, do not adhere to, nonhazardous.Be widely used in industries such as aviation, chemical industry, electronics, bridge, weaving, machinery, papermaking, pottery.As electrical insulation, liner, antiseized, selflubricating part etc., be commonly used for delivery pipe, the container of corrosive liquids and gas especially.PFA (tetrafluoroethylene and perfluoroalkyl vinyl ether copolymer are commonly called as Meltability polytetrafluorethyletubular) has kept the chemical stability of the excellence of PTFE, high-and low-temperature resistance performance, fire retardant.Self lubricity, resistance to bond, incombustibility and ageing-resistant performance.Its outstanding characteristics are foldings, resistance to cracking can be good, and the mechanical strength during high temperature is more than 1.6 times of PTFE.Be usually used in various anticorrosion, sealings, anti-attrition, insulating part etc., be commonly used for delivery pipe, the container of corrosive liquids and gas especially.
Use the diffusion furnaces of this provenance bottle, when loading, use source bottle, will significantly reduce the danger of bottle explosion.The source bottle that PTFE or PFA material are done, owing to be flexible material, and can corrosion-resistant, anti-height (low) temperature, ageing-resistant, have certain mechanical strength, after making seal bottle, unstressed, there be not latent splitting, be not afraid of collision, and have stiffening rib to gain in strength, just can eliminate harm hidden danger to a great extent.
Claims (5)
1. explosion-proof source bottle that is used for diffusion furnaces comprises bottle (1) and is arranged on body (3) on the bottle that it is characterized in that: described bottle (1) is PTFE or PFA material, is provided with the stiffening rib (2) to outer lug on bottle (1).
2. the explosion-proof source bottle that is used for diffusion furnaces according to claim 1, it is characterized in that: described stiffening rib (2) comprises horizontal rib and the lengthways of rod around bottle (1).
3. the explosion-proof source bottle that is used for diffusion furnaces according to claim 2 is characterized in that: described stiffening rib (2) is PTFE or PFA material.
4. the explosion-proof source bottle that is used for diffusion furnaces according to claim 3 is characterized in that: described body (3) is PTFE or PFA material.
5. according to each described explosion-proof source bottle that is used for diffusion furnaces of claim 1 to 4, it is characterized in that: described bottle (1) is the cylinder of sealing, and body (3) is engaged in the cylinder end face, and stiffening rib (2) is arranged on the external cylindrical surface of cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202041617U CN201487540U (en) | 2009-08-28 | 2009-08-28 | Anti-explosion source bottle used for diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202041617U CN201487540U (en) | 2009-08-28 | 2009-08-28 | Anti-explosion source bottle used for diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201487540U true CN201487540U (en) | 2010-05-26 |
Family
ID=42426419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202041617U Expired - Fee Related CN201487540U (en) | 2009-08-28 | 2009-08-28 | Anti-explosion source bottle used for diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201487540U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102851742A (en) * | 2012-09-26 | 2013-01-02 | 浙江鸿禧光伏科技股份有限公司 | Explosion-proof source bottle for diffusion technology |
| CN102954214A (en) * | 2011-08-24 | 2013-03-06 | 株式会社神户制钢所 | Pressure vessel |
| CN106594512A (en) * | 2016-12-12 | 2017-04-26 | 四川煜天石油机械设备有限公司 | Safe explosive-handling natural gas storage tank |
| CN114046438A (en) * | 2021-11-18 | 2022-02-15 | 安徽威尔低碳科技股份有限公司 | High-strength air cylinder |
| CN115210493A (en) * | 2020-03-11 | 2022-10-18 | 罗伯特·博世有限公司 | Tank container for storing gas and method for manufacturing the tank container |
-
2009
- 2009-08-28 CN CN2009202041617U patent/CN201487540U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102954214A (en) * | 2011-08-24 | 2013-03-06 | 株式会社神户制钢所 | Pressure vessel |
| CN102954214B (en) * | 2011-08-24 | 2015-02-11 | 株式会社神户制钢所 | Pressure vessel |
| CN102851742A (en) * | 2012-09-26 | 2013-01-02 | 浙江鸿禧光伏科技股份有限公司 | Explosion-proof source bottle for diffusion technology |
| CN106594512A (en) * | 2016-12-12 | 2017-04-26 | 四川煜天石油机械设备有限公司 | Safe explosive-handling natural gas storage tank |
| CN106594512B (en) * | 2016-12-12 | 2019-01-22 | 咸阳华立物流有限公司 | A kind of explosive natural gas air accumulator of safety |
| CN115210493A (en) * | 2020-03-11 | 2022-10-18 | 罗伯特·博世有限公司 | Tank container for storing gas and method for manufacturing the tank container |
| CN114046438A (en) * | 2021-11-18 | 2022-02-15 | 安徽威尔低碳科技股份有限公司 | High-strength air cylinder |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHENZHEN S.C NEW ENERGY TECHNOLOGY CORPORATION Free format text: FORMER NAME: SHENZHEN JIEJIA WEICHUANG MICROELECTRONICS EQUIPMENT CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 518000, Guangdong, Shenzhen province Baoan District manhole Street oyster four Lin slope pit Industrial Zone A4 and No. A6 workshop Patentee after: Shenzhen S. C New Energy Equipment Co., Ltd. Address before: 518103 A4 building, oyster four woods slope pit Industrial Zone, Baoan District, Guangdong, Shenzhen Patentee before: Shenzhen Jiejiachuang Microelectronic Equipment Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20140828 |
|
| EXPY | Termination of patent right or utility model |