CN201487243U - Vacuum valve - Google Patents
Vacuum valve Download PDFInfo
- Publication number
- CN201487243U CN201487243U CN2009200616696U CN200920061669U CN201487243U CN 201487243 U CN201487243 U CN 201487243U CN 2009200616696 U CN2009200616696 U CN 2009200616696U CN 200920061669 U CN200920061669 U CN 200920061669U CN 201487243 U CN201487243 U CN 201487243U
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- China
- Prior art keywords
- pivoted arm
- plate
- driven
- vacuum chamber
- turning door
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- Expired - Fee Related
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Abstract
A vacuum valve is mounted on a vacuum chamber (1) and adopts the structure that a cylinder (2) drives a rack (3) and is linked with a gear (4) meshed with the rack (4), so as to drive a rotating shaft (41) mounted in the center of the gear (4) to rotate, a pair of driving rotating arms are mounted on the rotating shaft (41); or two cylinders are linked with a main shaft (41) through the rack and the gear, four driving rotating arms are connected on the main shaft, the driving rotating arms are linked with respective driven rotating arms through the transmission of the respective connecting rods; an upper board turning door (5) is mounted below each driven rotating arm and used for sealing the workpiece inlet (14) of the vacuum chamber; the board turning doors can be turned up or turned down through the transmission of the rotating shaft so as to open or close the inlet. The vacuum valve has the advantages of stable transmission and good sealing performance, and is particularly suitable for sealing a longer strip-shaped workpiece inlet on a vacuum chamber.
Description
Technical field
The utility model relates to a kind of vacuum equipment, particularly a kind of vacuum valve that is used on the plated film vacuum chamber.
Technical background
The valve that uses on vacuum system is not only wanted good seal performance, and closely, " interior leakage " is also not easy to use, and conversion is flexible, because valve must bear inside and outside air pressure pressure difference in the course of the work, the total pressure that is stood is sizable.At present, the valve that is mostly cylinder one valve gap formula or title baffle-type of use, promptly the piston by cylinder drives valve gap, covers or opens valve port, is venting channels.For example, the disclosed valve of patent No. ZL200620062404.4 " bilateral high vacuum valve door device " (notification number CN200940713Y), form by working room, valve body, cylinder, the valve gap that is equipped with on valve body in cylinder, the valve body passes through pole, and the piston of connection upper cylinder drives valve gap by piston and moves.Thereby contact and seal with valve body, form a sealed environment.For the plated film vacuum chamber, because workpiece glass is bigger, enter the inlet of vacuum chamber institute warp, its size also must be bigger.Now adopt a kind of Flap valve to control this inlet of sealing usually.Existing Flap valve directly drives long rotating shaft by cylinder, directly rotates the plate-turning door of a block length bar shaped, is entirely covered the gateway of the glass plate of vacuum chamber by plate-turning door.This not enough or sealed at both ends unbalanced problem of sealing dynamics just might occur, thereby influences its sealability.
Summary of the invention
The purpose of this utility model is to avoid above-mentioned the deficiencies in the prior art part, and provides a kind of transmission stable, and sealing is close to, and is easy to use, the vacuum turning plate valve that uses on the plated film vacuum chamber.
The purpose of this utility model can reach by following measure:
A kind of vacuum valve, be mounted in the turning plate valve on the vacuum chamber, include interconnective cylinder, rotating shaft, connecting rod and plate-turning door, the workpiece that covers and seal up on the vacuum chamber by plate-turning door enters the mouth, it is characterized in that, described cylinder is a cylinder that is placed in the vacuum chamber outside, and the piston rod of this cylinder is connected with a toothed rack, this tooth bar and a gear engagement; Be fixedly connected with an above-mentioned gear at one above the rotating shaft, at two of this root rotating shaft, also linking respectively has each one initiatively pivoted arm, above-mentioned two pivoted arms initiatively, and the binding of the connecting rod by separately, and be attached to above separately the driven pivoted arm; These two driven pivoted arms are connected on the back side of plate-turning door of a rectangle respectively, and the bottom surface of plate-turning door is that the outer wall with vacuum chamber coincide, and cover the workpiece inlet on it; On the sealing surface between plate-turning door and the outer wall, be provided with a seal ring.
On the basis of such scheme, described cylinder is two cylinders that are placed in vacuum chamber outside, and the piston rod of these two cylinders is connected with a toothed rack separately, this two toothed rack separately with a gear engagement; At two of a rotating shaft, be fixedly connected with above-mentioned each gear respectively, at this above root rotating shaft, also link respectively 4 equally distributed active pivoted arms are arranged, above-mentioned 4 pivoted arms initiatively, the binding of a connecting rod by separately, and be attached to above separately the driven pivoted arm; These 4 driven pivoted arms are connected on the back side of plate-turning door of a rectangle respectively.
Above-mentioned gear is fixedlyed connected with rotating shaft, is by the center transmission shaft of one or two gear, is supported in the bearing support, and is connected to one or two Hooks coupling universal coupling, is connected in the described rotating shaft.
Between the connection part of above-mentioned two or 4 driven pivoted arms and plate-turning door, be equipped with one separately and adjust stick.
Each above-mentioned root is pivoted arm and driven pivoted arm initiatively, all is installed in above the fixed base that is fixed on the vacuum chamber with an end.
The above-mentioned connecting rod that passes through links initiatively pivoted arm and driven pivoted arm, be by the pin that passes two or 4 active pivoted arms, links with the pin that passes two or 4 driven pivoted arms; And the other end of the driven pivoted arm of each root then is attached at pin on the fixed base.
Vacuum valve of the present utility model has following advantage:
1. transmission is stable, good seal performance.The transmission shaft of cylinder, through a series of power transmission, particularly by driving and driven pivoted arm effectively and also the rubber-like transmission, make the torque force of shutting plate-turning door, fall two of plate-turning door evenly, add the every setting of adjusting stick, make that plate-turning door is not only stable but also cover the workpiece inlet of long strip exactly; The pressurized of sealing surface in order, sealability is superior, the sealing that further assurance valve is set of seal ring.
2. be applicable to on the vacuum chamber than the sealing of the import and export of long strip.The utility model vacuum valve uses the plate-turning door than the rectangle of long strip, just is being fit to structural glass is imported and exported the needs of sealing.Under vacuum chamber enters the mouth broad especially situation, adopt rotating shaft of the common drive of each cylinder of both sides, be provided with 4 in the rotating shaft and overlap driving and driven pivoted arm structure, make transmission more strong and more steady, stable.
The utility model is done the narration of further indefiniteness below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is the main TV structure schematic representation of the utility model vacuum valve;
Fig. 2 is side-looking (part) structural representation of the utility model vacuum valve;
Fig. 3 is cross-sectional side (part) structural representation of the utility model vacuum valve;
Fig. 4 is the main TV structure schematic representation of the pivoted arm drive part of this vacuum valve;
Fig. 5 is the plan structure schematic representation of the pivoted arm drive part of this vacuum valve;
Fig. 6 is another embodiment's of the utility model vacuum valve a structural representation;
Fig. 7 is that a kind of front vertical profile of vacuum turning plate valve of elementary skill is looked reference drawing;
Fig. 8 is a kind of cross-sectional side reference drawing of vacuum turning plate valve of elementary skill;
Among each figure, 1 represents vacuum chamber, and the 11st, vacuum chamber outer wall, the 12nd, fixed base, the 13rd, vacuum chamber head cover plate, the 14th, workpiece inlet, 2,2 ' is cylinder, and 3,3 ' is tooth bar, and 4,4 ' is gear, the 41st, rotating shaft, 42,42 ' is bearing support, 43,43 ' is Hooks coupling universal coupling, 44,44 ', 44 ", 44 ' " be the active pivoted arm, 441,441 ', 441 ", 441 ' " be pin, 45,45 ', 45 "; 45 ' " be connecting rod, 451,451 ', 451 ", 451 ' "; Be pin, 46,46 ', 46 ", 46 ' " and be driven pivoted arm, 461,461 ', 461 ", 461 ' " and be pin, the 5th, plate-turning door, 51,51 ', 51 ", 51 ' " and be to adjust stick, the 52nd, seal ring.
Embodiment
Embodiment 1: as shown in drawings, on the outer wall 11 of vacuum chamber 1, install fixed base 12, another side at vacuum chamber 1, install bearing support 42,, load onto a rotating shaft 41 42 li of this bearing supports, one end of this root rotating shaft 41, by a Hooks coupling universal coupling 43, be connected to a gear 4 in be fixed together the other end that rotating shaft 41 is long in the heart and with this gear, load onto initiatively pivoted arm 44 and 44 ' respectively.Above-mentioned gear 4 and a toothed rack 3 engagements, tooth bar 3 is driven by the piston rod of a cylinder 2, the piston rod of cylinder moves, drive tooth bar 3, through the transmission of tooth bar/gear mesh, change direction and be transferred to rotating shaft 41, the slow rotation of rotating shaft 41, two initiatively pivoted arm 44,44 ' rotations that drive is mounted thereon.These two pivoted arms are by the binding of pin 441,441 ', and connecting rod 45 in the binding, 45 ', connecting rod 45,45 ' the other end, also by pin 451,451 ' binding, driven pivoted arm 46,46 ' in the connection, two driven pivoted arms 46,46 ' the other end, then with pin 461,461 ' is attached on the fixed base 12.Like this, driven pivoted arm 46,46 ' promptly can 461,461 ' is fulcrum, under the drive of active pivoted arm 44,44 ', digs or turns over; And be installed together, thereby drive this plate-turning door 5, dig or turn over the workpiece inlet 14 that falls to covering on the vacuum chamber outer wall (1) with the back side of the plate-turning door 5 of a screw and a block length bar shaped; In the bottom surface of plate-turning door 5, be equipped with a circle seal ring 52, when the assembling plate-turning door, between the back of driven pivoted arm 46,46 ' and plate-turning door 5, can also place one and adjust stick 51,51 ', so that adjust the accurate position of the driven pivoted arm in both sides, the pressure on the balance compression face.The transmission of the utility model vacuum valve is stable; Good seal performance.Be particularly suitable for the sealing imported and exported than the long strip vacuum on the vacuum chamber.
Embodiment 2: with embodiment 1, just,, fixedly connected with two sleeve gear driving mechanisms respectively on the both sides of rotating shaft 41, i.e. the two ends of rotating shaft 41, respectively by coupling 43,43 ', and with gear 4,4 ' connects, they are bearing in bearing support 42 respectively, 42 ' the inside; This gear 4,4 ', respectively with tooth bar 3,3 ' engagement, tooth bar 3,3 ' is connected with the piston rod of a cylinder 2 or 2 ' again separately.On above-mentioned rotating shaft 41, be fixed with 4 initiatively pivoted arms 44,44 ' evenly distributedly, 44 ", 44 ' ", they pass through connecting rod 45 separately, 45 ', 45 ", 45 ' ", be attached to 4 driven pivoted arms 46,46 ', 46 "; 46 ' " on, the bottom surface of 4 driven pivoted arms all is connected with the above plate-turning door 5 of embodiment 1, thereby more sane and exactly plate-turning door is close to above-mentioned inlet than long strip.
Claims (10)
1. vacuum valve, be mounted in the turning plate valve on the vacuum chamber (1), include interconnective cylinder, rotating shaft, connecting rod and plate-turning door cover and seal up workpiece inlet (14) on the vacuum chamber (1) by plate-turning door, it is characterized in that, described cylinder is a cylinder (2) that is placed in vacuum chamber (1) outside, and the piston rod of this cylinder (2) is connected with a toothed rack (3), this tooth bar (3) and a gear (4) engagement; On a rotating shaft (41), be fixedly connected with an above-mentioned gear (4), on the both sides of this root rotating shaft (41), also linking respectively has each one initiatively pivoted arm (44,44 '), these two active pivoted arms (44,44 '), the binding of the connecting rod (45,45 ') by separately, and be attached to above separately the driven pivoted arm (46,46 '); These two driven pivoted arms (46,46 ') are connected on the back side of plate-turning door (5) of a rectangle respectively, and the bottom surface of plate-turning door (5) is that the outer wall (11) with vacuum chamber (1) coincide, and cover the workpiece inlet (14) on it; On the sealing surface between plate-turning door (5) and the outer wall (11), be provided with a seal ring (52).
2. vacuum valve, be mounted in the turning plate valve on the vacuum chamber (1), include interconnective cylinder, rotating shaft, connecting rod and plate-turning door cover and seal up workpiece inlet (14) on the vacuum chamber (1) by plate-turning door, it is characterized in that, described cylinder is two cylinders (2.2 ') that are placed in vacuum chamber (1) outside, and the piston rod of these two cylinders (2.2 ') is connected with a toothed rack (3.3 ') separately, and this two toothed rack (3.3 ') meshes with a gear (4.4 ') separately; Both sides in a rotating shaft (41), be fixedly connected with each above-mentioned gear (4.4 '), at this above root rotating shaft (41), also link respectively 4 equally distributed active pivoted arms are arranged (44,44 ' .44 " .44 " '), 4 above-mentioned active pivoted arms (44,44 ' .44 " .44 " '), the binding of a connecting rod by separately (45,45 ' .45 " .45 " '), and be attached to above separately the driven pivoted arm (46,46 ' .46 " .46 " '); These 4 driven pivoted arms (46,46 ' .46 " .46 " ') are connected on the back side of plate-turning door (5) of a rectangle respectively, and the bottom surface of plate-turning door (5) is that the outer wall (11) with vacuum chamber (1) coincide, and cover the workpiece inlet (14) on it; On the sealing surface between plate-turning door (5) and the outer wall (11), be provided with a seal ring (52).
3. a kind of vacuum valve according to claim 1 and 2, it is characterized in that, described gear (4.4 ') is fixedlyed connected with rotating shaft (41), be by the transmission shaft that is fixed on gear (4.4 ') center, be supported in bearing support (42) or be bearing in separately bearing support (42.42 ') lining, and be connected to Hooks coupling universal coupling (43) or Hooks coupling universal coupling (43.43 ') separately, be connected in the described rotating shaft (41).
4. a kind of vacuum valve according to claim 1 and 2, it is characterized in that, at described 2 driven pivoted arms (46,46 ') or 4 driven pivoted arms (46,46 ' .46 " .46 " ') and the connection part of plate-turning door (5) between, be equipped with one separately and adjust stick (51,51 ' .51 " .51 " ').
5. a kind of vacuum valve according to claim 3, it is characterized in that, at described 2 driven pivoted arms (46,46 ') or 4 driven pivoted arms (46,46 ' .46 " .46 " ') and the connection part of plate-turning door (5) between, be equipped with one separately and adjust stick (51,51 ' .51 " .51 " ').
6. a kind of vacuum valve according to claim 1 and 2; It is characterized in that described active pivoted arm (44,44 ' .44 " .44 " ') and driven pivoted arm (46,46 ' .46 " .46 " ') all are mounted and fixed on above the fixed base (12) on the vacuum chamber (1) with an end.
7. a kind of vacuum valve according to claim 3; It is characterized in that described active pivoted arm (44,44 ' .44 " .44 " ') and driven pivoted arm (46,46 ' .46 " .46 " ') all are mounted and fixed on above the fixed base (12) on the vacuum chamber (1) with an end.
8. a kind of vacuum valve according to claim 1 and 2, it is characterized in that, describedly link initiatively pivoted arm (44 by connecting rod (45,45 ' .45 " .45 " '), 44 ' .44 " .4 " ') and driven pivoted arm (46,46 ' .4 " .4 " '), be by the pin (441 that passes pivoted arm initiatively (44,44 ' .44 " .44 " '), 441 ' .441 " .441 " '), link with the pin that passes driven pivoted arm (46,46 ' 46 " .46 " ') (451,451 ' .451 " .451 " '); And the other end of driven pivoted arm (46,46 ' .46 " .46 " ') then is attached on the fixed base (12) with pin (461,461 ' .461 " .461 " ').
9. a kind of vacuum valve according to claim 3, it is characterized in that, describedly link initiatively pivoted arm (44 by connecting rod (45,45 ' .45 " .45 " '), 44 ' .44 " .44 " ') and driven pivoted arm (46,46 ' .46 " .46 " '), be by the pin (441 that passes pivoted arm initiatively (44,44 ' .44 " .44 " '), 441 ' .441 " .441 " '), link with the pin that passes driven pivoted arm (46,46 ' 46 " .46 " ') (451,451 ' .451 " .451 " '); And the other end of driven pivoted arm (46,46 ' .46 " .46 " ') then is attached on the fixed base (12) with pin (461,461 ' .461 " .461 " ').
10. a kind of vacuum valve according to claim 6, it is characterized in that, describedly link initiatively pivoted arm (44 by connecting rod (45,45 ' .45 " .45 " '), 44 ' .44 " .44 " ') and driven pivoted arm (46,46 ' .46 " .46 " '), be by the pin (441 that passes pivoted arm initiatively (44,44 ' .44 " .44 " '), 441 ' .441 " .441 " '), link with the pin that passes driven pivoted arm (46,46 ' .46 " .46 " ') (451,451 ' .451 " .451 " '); And the other end of driven pivoted arm (46,46 ' .46 " .46 " ') then is attached on the fixed base (12) with pin (461,461 ' .461 " .461 " ').
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200616696U CN201487243U (en) | 2009-08-03 | 2009-08-03 | Vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200616696U CN201487243U (en) | 2009-08-03 | 2009-08-03 | Vacuum valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201487243U true CN201487243U (en) | 2010-05-26 |
Family
ID=42426122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200616696U Expired - Fee Related CN201487243U (en) | 2009-08-03 | 2009-08-03 | Vacuum valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201487243U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014657A (en) * | 2011-09-22 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | PECVD vacuum chamber built-in sealing device |
| CN103470789A (en) * | 2013-08-09 | 2013-12-25 | 中建材光电装备（太仓）有限公司 | Vacuum chamber flap valve of continuous type vacuum film plating line |
| CN107159724A (en) * | 2017-07-20 | 2017-09-15 | 河北工业大学 | A kind of sealing device of composite plate assembly process |
| CN109357073A (en) * | 2018-12-16 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber turning plate valve device |
| WO2019205337A1 (en) * | 2018-04-24 | 2019-10-31 | 君泰创新（北京）科技有限公司 | Isolation device of precipitation chamber |
-
2009
- 2009-08-03 CN CN2009200616696U patent/CN201487243U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103014657A (en) * | 2011-09-22 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | PECVD vacuum chamber built-in sealing device |
| CN103470789A (en) * | 2013-08-09 | 2013-12-25 | 中建材光电装备（太仓）有限公司 | Vacuum chamber flap valve of continuous type vacuum film plating line |
| CN103470789B (en) * | 2013-08-09 | 2015-11-11 | 中建材光电装备（太仓）有限公司 | A kind of vacuum chamber Flap valve of continuous vacuum coating line |
| CN107159724A (en) * | 2017-07-20 | 2017-09-15 | 河北工业大学 | A kind of sealing device of composite plate assembly process |
| WO2019205337A1 (en) * | 2018-04-24 | 2019-10-31 | 君泰创新（北京）科技有限公司 | Isolation device of precipitation chamber |
| CN109357073A (en) * | 2018-12-16 | 2019-02-19 | 湖南玉丰真空科学技术有限公司 | A kind of vacuum chamber turning plate valve device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20160803 |