CN201483657U - Wire wheel mechanism - Google Patents
Wire wheel mechanism Download PDFInfo
- Publication number
- CN201483657U CN201483657U CN2009201046350U CN200920104635U CN201483657U CN 201483657 U CN201483657 U CN 201483657U CN 2009201046350 U CN2009201046350 U CN 2009201046350U CN 200920104635 U CN200920104635 U CN 200920104635U CN 201483657 U CN201483657 U CN 201483657U
- Authority
- CN
- China
- Prior art keywords
- rotating shaft
- bearings
- left end
- line
- wheel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a wire wheel mechanism. The left end of a wire storage wheel is fixed to the right end of a rotating shaft, two bearings are arranged between the rotating shaft and a bearing sleeve, an inner insulating ring and an outer insulating ring are arranged between the two bearings, a bearing press cover for pressing the outer ring of the bearings is fixed to the left end of the bearing sleeve, the bearing sleeve and a driving motor are respectively fixed on both ends of a base, a shaft coupling is arranged between the left end of the rotating shaft and a motor shaft of the driving motor for connection, and a baffle nut for pressing the inner ring of the bearings is connected with the rotating shaft through screw threads. The wire wheel mechanism provided by the utility model belongs to a special mechanism matched with semiconductor special equipment, which has the advantages of simple structure, convenient use and high positioning precision. The right end of the wire storage wheel is sealed by a wire wheel end cover, the left end is made to a labyrinth type sealing structure, dust, water and other impurities can be prevented from entering into the bearings, and the service life of the bearings can be prolonged. The whole device is driven by a high-precision servomotor, the rotating speed and the rotating direction of the wire wheel can be conveniently controlled, simultaneously, the structure is simple and compact, the size is small, and the reliability and the stability of the whole device are improved.
Description
Technical field
The utility model relates to a kind of line wheel mechanism, particularly a kind of line wheel mechanism that is used for the semiconductor patent equipment.
Background technology
Semiconductor manufacturing equipment owing to will guarantee the retractable cable wheel speed and turn to consistently, makes the rotation of line wheel controlled to seem extremely important in the process with Buddha's warrior attendant line cutting crystal bar.Common Winder directly drives line storage wheel rotation by motor, has some problems like this, as poor sealing, poor stability, running accuracy is lower, the life-span is short etc.
Summary of the invention
Technical problem to be solved in the utility model provides the line wheel mechanism of a kind of easy to use, good airproof performance, positioning accuracy height, long service life.
The utility model adopts following technical scheme:
The right-hand member of a said line storage wheel left end of the utility model and a rotating shaft is fixed, be provided with two bearings between a rotating shaft and a bearing holder (housing, cover), be provided with inside and outside spacer ring between two bearings, the bearing gland of last item bearing outer-ring and bearing holder (housing, cover) left end are fixed, bearing holder (housing, cover) and drive motors are separately fixed at the two ends of base, establish shaft coupling between the left end of rotating shaft and the motor shaft of drive motors and be connected, last item holds that the retaining of inner ring is female to be threaded with rotating shaft.
The said line storage wheel right-hand member of the utility model flange is provided with the line wheel end cap for sealing.
The utility model said bearing holder (housing, cover) right side and its be concavo-convex ring-type labyrinth seal structure between the shaft shoulder side of right rotating shaft.
The said line storage wheel right-hand member of the utility model flange is provided with the elliptical hole that passes for the end of a thread.
The said bearing of the utility model is an angular contact ball bearing.
The beneficial effects of the utility model: line wheel mechanism provided by the utility model is a kind of simple in structure, easy to use and positioning accuracy is high and the matching used special mechanism of semiconductor manufacturing equipment, its line storage wheel right-hand member is taken turns end cap seal by line, left end is made labyrinth sealing, can prevent that dust, moisture and other impurity from entering bearing, improve the life-span of bearing.Two wing nuts that link to each other with standing screw have been installed on the right-hand member flange of line storage wheel, simultaneously two elliptical apertures have been processed in its vertical direction, when initial coiling, the end of a thread passed the elliptical aperture on the flange, after unclamping wing nut, be drawn to below the wing nut, the fixing the end of a thread of fastening nut so just can wind the line easily then.Bearing holder (housing, cover) and motor are installed on the same cast iron base, can be thereon processing mounting holes simultaneously, improve the axiality of device.Whole device is by the high-precision servo motor-driven, the rotating speed of control line wheel and turning to easily, and simultaneously simple and compact for structure, volume is little, has improved the reliability and stability of whole device.
Description of drawings
Accompanying drawing 1 is looked the sectional structure schematic diagram for the master of a kind of embodiment of the utility model;
In the accompanying drawings: 1 line wheel end cap, 2 wing nuts, 3 line storage wheels, 4 bearing holder (housing, cover)s, 5 bearings, 6 bearing glands, 7 retaining mothers, 8 rotating shafts, 9 shaft couplings, 10 bases, 11 drive motors, 12 elliptical holes.
The specific embodiment
Referring to Fig. 1, shown in 2, comprise line storage wheel 3 and drive motors 11 in the formation of this line wheel mechanism, line wheel end cap 1 is fixed in the circular groove of line storage wheel 3 right-hand member flanges by wing nut 2, on the line storage wheel 3 right side inner faces six screw-threaded counterbore are arranged, passing screw is connected with rotating shaft 8, rotating shaft 8 is a multidiameter, two angular contact ball bearings 5 by left end are installed in the bearing holder (housing, cover) 4, bearing gland 6 is fixedlyed connected on bearing outer ring and with bearing holder (housing, cover) 4 by screw in compression, retaining female 7 compresses bearing inner race by the screw thread in the rotating shaft 8, the left axle head of rotating shaft 8 connects with the motor shaft of drive motors 11 by shaft coupling 9, and the housing of drive motors 11 and bearing holder (housing, cover) 4 are installed in the two ends, the left and right sides of base 10 respectively by screw.
Above-mentioned line storage wheel 3 all uses screw and flat key with shaft coupling 9, drive motors 11 simultaneously with the connection of shaft coupling 9.
There is the radial labyrinth sealing in the shaft shoulder left side of rotating shaft 8 with the right-hand member of bearing holder (housing, cover) 4, and line storage wheel 3 right side flanges are provided with the elliptical hole 12 that passes for the end of a thread.
In the present embodiment, drive motors 11 adopts high-precision servomotor, and it connects by shaft coupling 9 and rotating shaft 8, and rotating shaft 8 connects by screw and line storage wheel 3, and servomotor just can drive line storage wheel 3 rotation at a high speed like this.In the present embodiment, drive motors 11 and bearing holder (housing, cover) 4 are installed in the shoulder hole of the left and right sides of base 10.Being provided with of labyrinth seal structure in line wheel end cap 10 and line storage wheel 3 left sides can prevent entering of dust.Elliptical hole 12 by line storage wheel 3 right side flanges and wing nut 2 can be easily fixing the end of a thread.
Claims (5)
1. line wheel mechanism, it comprises drive motors and line storage wheel, the right-hand member that it is characterized in that said line storage wheel (a 3) left end and a rotating shaft (8) is fixed, be provided with two bearings (5) between a rotating shaft (8) and a bearing holder (housing, cover) (4), in being provided with between two bearings (5), outer spacer ring, last item holds the bearing gland (6) of (5) outer ring and fixes with bearing holder (housing, cover) (4) left end, bearing holder (housing, cover) (4) and drive motors (11) are separately fixed at the two ends of base (10), establish shaft coupling (9) between the left end of rotating shaft (8) and the motor shaft of drive motors (11) and be connected, the retaining mother (7) that last item holds (5) inner ring is threaded with rotating shaft (8).
2. a kind of line wheel mechanism according to claim 1 is characterized in that said line storage wheel (3) right-hand member flange is provided with the line wheel end cap (1) for sealing.
3. a kind of line wheel mechanism according to claim 1, it is characterized in that said bearing holder (housing, cover) (4) right side and its be concavo-convex ring-type labyrinth seal structure between the shaft shoulder side of right rotating shaft (8).
4. a kind of line wheel mechanism according to claim 1 and 2 is characterized in that said line storage wheel (3) right-hand member flange is provided with the elliptical hole (12) that passes for the end of a thread.
5. a kind of line wheel mechanism according to claim 1 is characterized in that said bearing (5) is an angular contact ball bearing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009201046350U CN201483657U (en) | 2009-09-11 | 2009-09-11 | Wire wheel mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009201046350U CN201483657U (en) | 2009-09-11 | 2009-09-11 | Wire wheel mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201483657U true CN201483657U (en) | 2010-05-26 |
Family
ID=42422553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009201046350U Expired - Fee Related CN201483657U (en) | 2009-09-11 | 2009-09-11 | Wire wheel mechanism |
Country Status (1)
Country | Link |
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CN (1) | CN201483657U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102528958A (en) * | 2011-03-15 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Positioning device for cutting jewels |
CN102873773A (en) * | 2012-10-12 | 2013-01-16 | 湖南宇晶机器股份有限公司 | Installation device for transition roller wheel of multi-wire cutting machine |
-
2009
- 2009-09-11 CN CN2009201046350U patent/CN201483657U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102528958A (en) * | 2011-03-15 | 2012-07-04 | 北京国科世纪激光技术有限公司 | Positioning device for cutting jewels |
CN102873773A (en) * | 2012-10-12 | 2013-01-16 | 湖南宇晶机器股份有限公司 | Installation device for transition roller wheel of multi-wire cutting machine |
CN102873773B (en) * | 2012-10-12 | 2014-08-27 | 湖南宇晶机器股份有限公司 | Installation device for transition roller wheel of multi-wire cutting machine |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100526 Termination date: 20130911 |