CN201473590U - Open door type etching tank - Google Patents

Open door type etching tank Download PDF

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Publication number
CN201473590U
CN201473590U CN2009201859820U CN200920185982U CN201473590U CN 201473590 U CN201473590 U CN 201473590U CN 2009201859820 U CN2009201859820 U CN 2009201859820U CN 200920185982 U CN200920185982 U CN 200920185982U CN 201473590 U CN201473590 U CN 201473590U
Authority
CN
China
Prior art keywords
outer side
side wall
wall
adjacent
etching tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009201859820U
Other languages
Chinese (zh)
Inventor
郑德良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WUJIANG FEILETIANHE ELECTRONIC MATERIAL CO Ltd
Original Assignee
WUJIANG FEILETIANHE ELECTRONIC MATERIAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WUJIANG FEILETIANHE ELECTRONIC MATERIAL CO Ltd filed Critical WUJIANG FEILETIANHE ELECTRONIC MATERIAL CO Ltd
Priority to CN2009201859820U priority Critical patent/CN201473590U/en
Application granted granted Critical
Publication of CN201473590U publication Critical patent/CN201473590U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses an etching tank, and the outer wall of the tank comprises four outer side walls surrounding the inner wall of the tank and an outer bottom wall, wherein every two adjacent outer side walls are fixedly connected, each outer side wall is fixedly connected with the outer bottom wall, at least one outer side wall is rotatable, the fixed connections of the rotatable outer side wall, the adjacent outer side walls and the outer bottom wall are detachable, and a hinge part is arranged on the connection portion of the rotatable outer side wall and one adjacent outer side wall. The etching tank of the utility model adopts open door type structure, thus the operation is more convenient.

Description

The opening door etching tank
Technical field
The utility model relates to a kind of etching tank.
Background technology
At chemical field, need use etching tank when particularly silicon oxy-nitride material is carried out corrosion reaction to material.The corrosive fluid of etching tank institute splendid attire has stronger corrodibility, toxicity usually, so etching tank generally is made as open-topped groove, it has an acid proof groove inwall and fixedly covers groove outer wall outside the groove inwall.For preventing that corrosive fluid from leaking, the groove outer wall comprises outer side wall (generally comparatively firm) and exterior bottom wall of four circumferential groove inwalls, and is fixedly connected between every two adjacent outer side walls, is fixedly connected between each outer side wall and the exterior bottom wall.And be placed with some relative unit, parts, material etc. in the etching tank in addition, need often to change, and operate pretty troublesome from the open top taking-up.
Summary of the invention
For solving above-mentioned technical problem, the utility model provides a kind of etching tank of being more convenient for operating, its groove outer wall comprises outer side wall and exterior bottom wall of four circumferential groove inwalls, be fixedly connected between every two adjacent outer side walls, be fixedly connected between each outer side wall and the exterior bottom wall, wherein has a rotating outer side wall at least, the fixedly connected of the outer side wall that described rotating outer side wall is adjacent, described exterior bottom wall is demountable, and the junction of the rotating outer side wall outer side wall adjacent with one of them also is provided with a hinge portion
Adopt the etching tank of technique scheme, at least be provided with a rotating outer side wall, this outer side wall and adjacent outer side wall, fixing can the dismounting between the exterior bottom wall, and be provided with one can so that this outer side wall relative to hinge portion that one of them outer side wall that is adjacent rotates, etching tank of the present utility model adopts side opening door structure, more convenient operation.
Be folded with gasket seal between two outer side walls that described rotating outer side wall is adjacent.
Described hinge portion is a spring hinge portion.
Describedly be fixedly connected as bolted mode.Also can adopt other fixedly connected modes known in the art.
Description of drawings
Accompanying drawing 1 is the schematic top plan view of the utility model etching tank;
11,12,13,14, outer side wall; 31,32, mounting block; 4, hinge portion; 5, gasket seal.
Embodiment
Below in conjunction with drawings and Examples the utility model etching tank is specifically described.
Embodiment 1
Accompanying drawing 1 is the structure iron of the utility model etching tank.Referring to Fig. 1, a kind of etching tank, its groove outer wall comprises 11,12,13,14 and exterior bottom wall of outer side wall of four circumferential groove inwalls, be fixedly connected between every adjacent two outer side walls 11,12,13,14, be fixedly connected between each outer side wall 11,12,13,14 and the exterior bottom wall, as shown in Figure 1, mounting block 31,32 adopts bolt connecting mode.
A rotating outer side wall 11 is wherein arranged, the fixedly connected of outer side wall 11,12 that described rotating outer side wall 11 is adjacent and exterior bottom wall is demountable (being that mounting block 31 is demountable), and the junction of rotating outer side wall 11 outer side wall 12 adjacent with one of them also is provided with a hinge portion 4.
As shown in Figure 1, be folded with gasket seal 5 between two outer side walls that rotating outer side wall is adjacent.
As shown in Figure 1, hinge portion 5 is a spring hinge portion.
Etching tank of the present utility model is not limited to the above embodiments, and all equivalences of doing according to spirit of the present utility model change or modify, and all should be encompassed in the protection domain of the present utility model.

Claims (4)

1. etching tank, its groove outer wall comprises outer side wall and exterior bottom wall of four circumferential groove inwalls, be fixedly connected between every two adjacent outer side walls, be fixedly connected between each outer side wall and the exterior bottom wall, it is characterized in that: wherein have a rotating outer side wall at least, the fixedly connected of the outer side wall that described rotating outer side wall is adjacent, described exterior bottom wall is demountable, and the junction of the rotating outer side wall outer side wall adjacent with one of them also is provided with a hinge portion.
2. etching tank according to claim 1 is characterized in that: be folded with gasket seal between two outer side walls that described rotating outer side wall is adjacent.
3. according to claim 1,2 described etching tanks, it is characterized in that: described hinge portion is a spring hinge portion.
4. according to claim 1,2 described etching tanks, it is characterized in that: describedly be fixedly connected as bolted mode.
CN2009201859820U 2009-07-24 2009-07-24 Open door type etching tank Expired - Fee Related CN201473590U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009201859820U CN201473590U (en) 2009-07-24 2009-07-24 Open door type etching tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009201859820U CN201473590U (en) 2009-07-24 2009-07-24 Open door type etching tank

Publications (1)

Publication Number Publication Date
CN201473590U true CN201473590U (en) 2010-05-19

Family

ID=42409834

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009201859820U Expired - Fee Related CN201473590U (en) 2009-07-24 2009-07-24 Open door type etching tank

Country Status (1)

Country Link
CN (1) CN201473590U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107523831A (en) * 2017-09-30 2017-12-29 江阴康强电子有限公司 It is roughened immersion plating pilot trench

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107523831A (en) * 2017-09-30 2017-12-29 江阴康强电子有限公司 It is roughened immersion plating pilot trench

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Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100519

Termination date: 20130724