CN201473327U - Novel equipment flange for poly-silicon hydrogenation furnace - Google Patents
Novel equipment flange for poly-silicon hydrogenation furnace Download PDFInfo
- Publication number
- CN201473327U CN201473327U CN2009202084805U CN200920208480U CN201473327U CN 201473327 U CN201473327 U CN 201473327U CN 2009202084805 U CN2009202084805 U CN 2009202084805U CN 200920208480 U CN200920208480 U CN 200920208480U CN 201473327 U CN201473327 U CN 201473327U
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- flange
- hydrogenation furnace
- annular groove
- thickness
- ring flange
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Abstract
The utility model provides a novel equipment flange for a poly-silicon hydrogenation furnace, which is composed of a flange. Stainless steel materials are welded on the inner surface of the flange, a liner ring is arranged on the lower surface of the flange, an annular groove is arranged at the upper end face of the flange along the circumferential direction, and the height of the upper end face of the flange at the inner side of the annular groove is larger than that of the upper end face of the flange at the outer side of the annular groove. A poly-silicon hydrogenation furnace inner cylinder is welded on the upper end face of the flange at the inner side of the annular groove, and a poly-silicon hydrogenation furnace clamping sleeve is welded on the upper end face of the flange at the outer side of the annular groove. The bottom part of the section of the annular groove is curved. Force-bearing points of the equipment flange are on the inner cylinder, the clamping sleeve, a bolt, a washer and a gasket; and the bending moment of the equipment flange is obviously smaller than that of the equipment flange without the clamping sleeve. On the basis of the above structure, the calculating method of the entire flange thickness can be adopted; therefore, the thickness of a cylinder body is equal to the superposed value of the thickness of the inner cylinder and the clamping sleeve, so that the calculating thickness of the equipment flange can be reduced, thereby saving materials and reducing the specifications as well as numbers of the bolt, nuts and the washer.
Description
Technical field:
The utility model relates to the polysilicon manufacturing technology, particularly polysilicon hydrogenation furnace, and concrete is a kind of polysilicon hydrogenation furnace novel appts flange.
Background technology:
Polysilicon is the important foundation starting material of semi-conductor, large-scale integrated circuit and solar energy industry.Extensively adopt SiHCl in the prior art
3Reduction method prepares polysilicon.Generate SiHCl
3Process in polysilicon hydrogenation furnace, carry out, principal reaction is
Above-mentioned reaction requires temperature to be controlled at about 1250 ℃.Polysilicon hydrogenation furnace working conditions harshness, the vessel flange on the polysilicon hydrogenation furnace not only will be connected to inner barrel, but also will be connected on the chuck, structure and stressed complexity.On the vessel flange.Vessel flange in the prior art on the polysilicon hydrogenation furnace is stressed unreasonable, and suffered axial stress is excessive, and radial stress and hoop stress are very little, causes required bolt area to increase, and worsens design conditions, waste material.
Summary of the invention:
The purpose of this utility model is to provide a kind of polysilicon hydrogenation furnace novel appts flange, and described this polysilicon hydrogenation furnace will solve excessive and the technical problem that radial stress and hoop stress are very little of the suffered axial stress of the vessel flange of polysilicon hydrogenation furnace in the prior art with the novel appts flange.
This polysilicon hydrogenation furnace of the present utility model is made of ring flange with the novel appts flange, wherein, described ring flange internal surface built-up welding stainless material, lower surface is provided with a grommet, along the circumferential direction be provided with an endless groove in the upper surface of ring flange, the height of the ring flange upper surface of described endless groove inboard is greater than the height of the ring flange upper surface in the endless groove outside.
Further, be welded with the polysilicon hydrogenation furnace inner core on the ring flange upper surface of endless groove inboard, be welded with the polysilicon hydrogenation furnace chuck on the ring flange upper surface in the endless groove outside.
Further, bottom, the cross section of described endless groove is curved.
Concrete, ring flange adopts carbon steel material manufacturing, internal surface built-up welding stainless material.Grommet is welded in the ring flange lower surface, uses stainless material.
Principle of work of the present utility model is: the vessel flange stress point is on inner core, chuck, bolt, packing ring and pad, suffered moment of flexure is little when obviously more strap clamp does not overlap, on the basis of this structure, can adopt integral type flange THICKNESS CALCULATION method, consider that big end of neck and neck small end thickness are the stack thickness at inner core place and chuck place, cylindrical shell thickness is the superposition value of inner core and jacket thickness, can reduce the calculated thickness of vessel flange, and then reduce the specification and the quantity of bolt, nut, packing ring, economical with materials.
The utility model and prior art are compared, and its effect is actively with tangible.The utility model along the circumferential direction is provided with endless groove in the upper surface of ring flange, the height of the ring flange upper surface of described endless groove inboard is greater than the height of the ring flange upper surface in the endless groove outside, be welded with the polysilicon hydrogenation furnace inner core on the ring flange upper surface of endless groove inboard, be welded with the polysilicon hydrogenation furnace chuck on the ring flange upper surface in the endless groove outside, stress point is at inner core, chuck, bolt, on packing ring and the pad, suffered moment of flexure is little when obviously more strap clamp does not overlap, on the basis of this structure, can adopt integral type flange THICKNESS CALCULATION method, consider that big end of neck and neck small end thickness are the stack thickness at inner core place and chuck place, cylindrical shell thickness is the superposition value of inner core and jacket thickness, can reduce the calculated thickness of vessel flange, and then reduce bolt, nut, the specification of packing ring and quantity, economical with materials.
Description of drawings:
Fig. 1 is the cross-sectional view of polysilicon hydrogenation furnace of the present utility model with the novel appts flange.
Fig. 2 is the local structure synoptic diagram of polysilicon hydrogenation furnace of the present utility model with the novel appts flange.
Embodiment:
Embodiment 1:
As depicted in figs. 1 and 2, polysilicon hydrogenation furnace of the present utility model novel appts flange, constitute by ring flange 2, wherein, be provided with a grommet 1 in the described ring flange 2, described grommet 1 is arranged on ring flange 2 inwalls, and extend to turnover of the lower surface of ring flange 2 and expansion the lower end of grommet 1, along the circumferential direction be provided with an endless groove in the upper surface of ring flange 2, the height of ring flange 2 upper surfaces of described endless groove inboard is greater than the height of ring flange 2 upper surfaces in the endless groove outside.
Further, be welded with polysilicon hydrogenation furnace inner core 4 on ring flange 2 upper surfaces of endless groove inboard, be welded with polysilicon hydrogenation furnace chuck 3 on ring flange 2 upper surfaces in the endless groove outside.
Further, bottom, the cross section of described endless groove is curved.
Concrete, ring flange 2 adopts carbon steel material manufacturing, internal surface built-up welding stainless material.Grommet 1 weldering ring flange 2 lower surfaces use stainless material.
The principle of work of present embodiment is: ring flange 2 adopts band neck form with inner core 4 connection portions, and plant tray 2 also adopts band neck form with chuck 3 connection portions, and in neck root processing zone of transition, has improved the vessel flange force-bearing situation.The vessel flange stress point is on inner core 4, chuck 3, bolt, packing ring and pad, suffered moment of flexure obviously more not strap clamp overlap 3 o'clock little, on the basis of this structure, can adopt integral type flange THICKNESS CALCULATION method, consider that big end of neck and neck small end thickness are the stack thickness at inner core 4 places and chuck 3 places, cylindrical shell thickness is the superposition value of inner core 4 and chuck 3 thickness, the calculated thickness of vessel flange be can reduce, and then the specification and the quantity of bolt, nut, packing ring, economical with materials reduced.
Claims (3)
1. polysilicon hydrogenation furnace novel appts flange, constitute by ring flange, it is characterized in that: internal surface built-up welding stainless material in the described ring flange, lower surface is provided with a grommet, along the circumferential direction be provided with an endless groove in the upper surface of ring flange, the height of the ring flange upper surface of described endless groove inboard is greater than the height of the ring flange upper surface in the endless groove outside.
2. polysilicon hydrogenation furnace novel appts flange as claimed in claim 1 is characterized in that: be welded with the polysilicon hydrogenation furnace inner core on the ring flange upper surface of endless groove inboard, be welded with the polysilicon hydrogenation furnace chuck on the ring flange upper surface in the endless groove outside.
3. polysilicon hydrogenation furnace novel appts flange as claimed in claim 1 is characterized in that: the bottom, cross section of described endless groove is curved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202084805U CN201473327U (en) | 2009-08-26 | 2009-08-26 | Novel equipment flange for poly-silicon hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202084805U CN201473327U (en) | 2009-08-26 | 2009-08-26 | Novel equipment flange for poly-silicon hydrogenation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201473327U true CN201473327U (en) | 2010-05-19 |
Family
ID=42409572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202084805U Expired - Fee Related CN201473327U (en) | 2009-08-26 | 2009-08-26 | Novel equipment flange for poly-silicon hydrogenation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201473327U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241961A (en) * | 2013-06-09 | 2014-12-24 | 上海翔洲电气科技有限公司 | Explosive-proof cable connector |
-
2009
- 2009-08-26 CN CN2009202084805U patent/CN201473327U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104241961A (en) * | 2013-06-09 | 2014-12-24 | 上海翔洲电气科技有限公司 | Explosive-proof cable connector |
| CN104241961B (en) * | 2013-06-09 | 2018-08-21 | 上海翔洲电气科技有限公司 | Bolted flame-proof cable coupling device for mine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHANGHAI SENHE ENGINEERING INVESTMENT CO., LTD. Free format text: FORMER NAME: SHANGHAI SENHE INVESTMENT CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 201323 Shanghai city Pudong New Area Zhuqiao gold smell Road No. 29 Patentee after: Shanghai Senhe Engineering Investment Co., Ltd. Address before: 200240 Shanghai city Minhang District Jianchuan Road No. 951 Building 5 room 619 Patentee before: Shanghai Senhe Investment Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI MORIMATSU CHEMICAL EQUIPMENT CO., LTD. Free format text: FORMER OWNER: SHANGHAI SENHE ENGINEERING INVESTMENT CO., LTD. Effective date: 20140319 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140319 Address after: 201323 Shanghai city Pudong New Area Zhuqiao Airport Industrial Zone No. 29 gold smell Road Building 3 Patentee after: Shanghai Morimatsu Chemical Equipment Co., Ltd. Address before: 201323 Shanghai city Pudong New Area Zhuqiao gold smell Road No. 29 Patentee before: Shanghai Senhe Engineering Investment Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100519 Termination date: 20150826 |
|
| EXPY | Termination of patent right or utility model |