CN201470300U - Filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment - Google Patents
Filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment Download PDFInfo
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- CN201470300U CN201470300U CN2009201490568U CN200920149056U CN201470300U CN 201470300 U CN201470300 U CN 201470300U CN 2009201490568 U CN2009201490568 U CN 2009201490568U CN 200920149056 U CN200920149056 U CN 200920149056U CN 201470300 U CN201470300 U CN 201470300U
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- filtration system
- flooded suction
- reaction
- product
- atmospheric pressure
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Abstract
The utility model discloses a filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment. The filter system can be integrated on a plasma head with a nozzle in an atmospheric pressure plastic system. The filter system comprises a suction head, an air pumping unit, and a filter unit, wherein the suction head is arranged on the plasma head and used for collecting and guiding gas containing the byproducts; the air pumping unit is connected with the suction head through a ventilation member and used for discharging the gas containing the byproducts from the suction head through the ventilation member; and the filter unit is connected with the suction head and the air pumping unit and used for filtering the gas containing the byproducts.
Description
[technical field]
The utility model relates to a kind of filtration system, relates in particular to the filtration system that is used to collect and filter the side reaction thing in a kind of atmospheric plasma treatment.
[background technology]
In many industries, atmospheric plasma treatment is a kind of main trend that part substitutes wet-treating.Because most materials or material have to carry out drying after wet-treating, so wet-treating need consume big energy.And in many countries, wet-treating also needs sewage disposal system to reach environmental index.With respect to atmospheric plasma treatment, these sewerages of wet-treating consume more multipotency, and area occupied is big, and need expert and operator to operate.
Atmospheric plasma treatment produces the dissimilar reaction by-products with strong peculiar smell.
In atmospheric plasma treatment, the target material through regular meeting by nameless contaminants.These pollutants can form dissimilar reaction by-products in plasma treatment or after handling, for example, and nitrogen group, oxygen group, hydrogen group, carbon group or the like.
Yet these reaction by-products are to environment, and manufacturing process manufactures a product, pollute once more and consequence that importances such as health of human body cause rarely known by the people.Wherein some reaction by-product also can cause physiological hazard to human body, and some then can cause environmental pollution.Therefore, the processing to these reaction by-products is absolutely necessary.
Existing atmospheric plasma treatment device only is furnished with common degassing function, but this degassing function lacked before reaction by-product is discharged from its function of handling, therefore, make ambient air have to absorb these reaction by-products, and our working environment has been caused harm.Therefore, hindered the development in industry of atmospheric plasma treatment technology.
In atmospheric plasma treatment, as cleaning, etching is cut, and surface reparation etc. are gone back the neither one filtration system and can be handled these reaction by-products.
So far, the insider will not be expressly understood that the urgency of the demand yet, not recognize the benefit of this filtration system yet, as help to expand the window of production technology, improve health standards, the flexibility that increase is produced and functional.
[utility model content]
Main purpose of the present utility model is to provide the filtration system that is used to collect and filter the side reaction thing in a kind of atmospheric plasma treatment, wherein this filtration system can be handled reaction by-product before the gas that contains reaction by-product is discharged from, thereby avoided air pollution.
Another purpose of the present utility model is to provide a kind of filtration system, because the flooded suction of this filtration system and the plasma head of atmospheric pressure plasma system mutually combine, so this filtration system removes these reaction by-products by way of parenthesis, avoided polluting once more.
Another purpose of the present utility model is to provide a kind of filtration system, and with respect to the sewage treatment in the wet treatment method, this filtration system has lower cost of investment.
Correspondingly, in order to finish above-mentioned purpose, the utility model provides the filtration system that is used to collect and filter the side reaction thing in a kind of atmospheric plasma treatment, wherein, this filtration system can be integrated on the plasma head that has shower nozzle in the atmospheric pressure plasma system, and this filtration system comprises:
Flooded suction is arranged on the plasma head in the atmospheric pressure plasma system, is used to collect and guide the gas that contains reaction by-product;
The unit of bleeding is connected to flooded suction by ventilation component, is used for the gas that contains reaction by-product from flooded suction is discharged by ventilation components; With
Filter element is connected to flooded suction respectively and the unit of bleeding by ventilation component, is used to filter the gas that contains reaction by-product.
Preferably, flooded suction further comprises fixed part and extends collection unit from fixed part, and wherein fixed part is attached on the plasma head of plasma and collection unit is arranged on the periphery of shower nozzle, contains the gas of reaction by-product with collection.Flooded suction further comprises the connecting portion of extension from collection unit, is used to be communicated with flooded suction and ventilation components.Flooded suction is removably mounted on the shower nozzle of atmospheric pressure plasma.Flooded suction is integrated on the shower nozzle of atmospheric pressure plasma.
Preferably, filtration system further comprises the outlet of bleeding that is arranged on the ventilation component, is used to discharge be filtered product after the processing of filtering the unit.
Preferably, ventilation component is specially a plurality of pipelines, is respectively applied for to connect flooded suction hermetically bleed unit and filter element.
Preferably, filter element comprise at least one can with at least one group of filtration members of reacting in the reaction by-product that is included in the gas.
The utility model discloses the filtration system that is used to collect and filter the side reaction thing in a kind of atmospheric plasma treatment.This filtration system comprises the flooded suction that is used to collect and guide the gas that contains reaction by-product, be used for the filter element that bag filter is contained in the reaction by-product of gas, and be used to discharge the unit of bleeding that contains the gas of product after the processing of satisfying environmental standard from the gas that contains reaction by-product of flooded suction to filter element and final discharging.
Filtration system described in the utility model is one does not have harm and compact system to environment, and this system takies a spot of working space.Atmospheric plasma treatment with this filtration system can be integrated in the existing production line easily, and does not need to carry out existing production line is reequiped.Therefore, with respect to wet treatment method, filtration system only needs lower cost of investment.Secondly, the maintenance cost of atmospheric plasma treatment system with this filtration system is cheaper, does not severally even need the staff to operate as only needing, and running cost is lower.In addition, because the flooded suction of filtration system and the plasma head of atmospheric plasma treatment system mutually combine, it has eliminated these reaction by-products by way of parenthesis, has therefore avoided polluting once more.
Filtration system described in the utility model is given the integrated circuit packing device, semiconductor, and LCD display, industrial circles such as hard disk drive (HDD) and pharmaceuticals industry have brought impact.And this filtration system partly is better than wet-treating more.
More purpose and advantage will at length be set forth in following description and accompanying drawing.
For above-mentioned and other purpose of the present utility model, feature and advantage can be become apparent more, the utility model is described in further detail below in conjunction with the drawings and specific embodiments.
[description of drawings]
Fig. 1 is a kind of overall schematic of the filtration system described in the utility model embodiment;
Fig. 2 is a kind of structural representation of filter element in the filtration system described in the utility model embodiment;
Fig. 3 is the another kind of structural representation of filter element in the filtration system described in the utility model embodiment.
More than the graphic signal that is simplification graphic, and basic conception of the present invention only is described in a schematic way, so only show the assembly relevant in graphic but not component count, shape and size drafting when implementing according to reality with the present invention, kenel, quantity and the ratio of each assembly can be done random change during its actual enforcement, and its assembly layout kenel may be more complicated.
[specific embodiment]
As shown in Figure 1, a kind of filtration system shown in the utility model embodiment, wherein, this filtration system can be integrated on the plasma head 2 that has shower nozzle 3 in the atmospheric pressure plasma system 1, and is used for collecting and the filtering reaction byproduct in atmospheric plasma treatment.
In atmos plasma system 1, plasma head 2 is connected on the control module (not shown).This control module is used to plasma head 2 that required material of atmospheric plasma treatment and power supply are provided, and comprises refrigerating gas, handles gas and power supply etc.Wherein, different atmospheric plasma treatment adopt the processing gas of respective type, as carry out atmospheric plasma treatment employing compression dry gas (compressed dried air) the conduct processing gas of surface clean.Refrigerating gas is used for plasma head 2 is remained on low-temperature condition.The processing gas that enters plasma head 2 is converted to plasma gas.And the shower nozzle 3 of these gas flow of ions on this plasma head 2 flow to the surface of target material, to carry out atmospheric plasma treatment.
Filtration system of the present utility model mainly comprises flooded suction 10, bleed unit 30 and filter element 20.Flooded suction 10 is installed on the plasma head 2 of atmospheric pressure plasma system 1 and is used to collect the gas that contains reaction by-product 7.The unit 30 of bleeding is connected on the flooded suction 10 by ventilation component 40 and the gas that is used for will containing by this ventilation component 40 reaction by-product 7 emits from flooded suction 10.Filter element 20 is positioned in flooded suction 10 and bleeds and is connected with the unit 30 of bleeding with flooded suction 10 between the unit 30 and by ventilation component 40.Filter element 20 is used for the reaction by-product 7 that bag filter is contained in gas.
According to embodiment of the present utility model, flooded suction 10 comprises fixed part 11 and collection unit 12.The fixed part 11 of flooded suction 10 is removably mounted on the plasma head 2 of atmospheric pressure plasma system 1, and collection unit 12 extend from this fixed part 11 and be arranged on this plasma head 2 around.Especially, in the present embodiment, flooded suction 10 has flared structure, and the collection unit 12 of flooded suction 10 is specially loudspeaker itself, is used for the shower nozzle 3 of cover cap in atmospheric pressure plasma system 1.Therefore, when the beam-plasma 4 that is ejected by plasma 2 when target material 6 was handled, the gas that contains reaction by-product 7 produced and is collected in the collection unit 12 of flooded suction 10.Wherein, the size and dimension of flooded suction 10 can design according to different demands.
Because the flooded suction 10 of filtration system is installed on the plasma head 2 of atmospheric pressure plasma system 1, and collection unit 12 cover caps of flooded suction 10 are on the shower nozzle 2 of atmospheric pressure plasma system 1, therefore, this filtration system is along having eliminated these reaction by-products with being with and therefore having avoided polluting once more.
Flooded suction 10 also comprises the connecting portion 13 of extension from collection unit 12, is used for being communicated with flooded suction 10 by ventilation component 40.More specifically, ventilation component 40 is specially channelled pipeline, and this passage is used to contain the gas communication of reaction by-product 7.In embodiment of the present utility model, ventilation component 40 essence are that a plurality of being respectively applied for connects flooded suction 10, the pipeline of bleed unit 30 and filter element 20.
Filtered by this active carbon filtration layer from the gas that contains reaction by-product 7 of flooded suction 10, and the carbon group in the reaction by-product reacts with activated carbon on the active carbon filtration layer, thereby generate product 8 after the processing that does not have the carbon group, meet environmental requirement.Again for example; can also comprise a high efficiency particle gaseous mixture filter course (high efficiency particle airfilter) in the filter element 20; be used for filtering the non-organic particulate that produces on atmospheric plasma treatment target material 6 surfaces, avoid it to enter the ambient atmosphere environment.
Replacedly, have other filtration members of differential responses thing, as have the ozone layer destroying layer of ozone layer destroying agent, can place in the shell of filter element 20 alone or in combination, with in the reaction by-product correspondingly group react, correspondingly handle back product 8 thereby generate.That is to say that in atmospheric plasma treatment, as cleaning, etching is cut, surface reparation etc., because the reaction by-product that produces may comprise dissimilar reaction by-products, as, nitrogen group, oxygen group, hydrogen group, carbon group or the like.The dissimilar filtration members that contains the differential responses thing can be increased in the filter element 20 with cohort correspondingly reacts respectively.Therefore, because type according to atmospheric plasma treatment, the additional filtering part can be added in the filter element 20, gas after being filtered filtration members in the unit 20 and filtering contain trace or can cause the reaction by-product 7 of environmental pollution on a small quantity and Geng Duo does not have harm to environment processing after product 8, thereby the content of reaction by-product is minimized, to reach the level of environment not being had harm.
What deserves to be mentioned is that according to the respective type of the reaction by-product that contains in the gas, filter element 20 can adopt alone or in combination.Wherein, filter element 20 can adopt the design of modular type, can be according to different processing requirements, and for example heat treatment process or deionising process increase corresponding filtering module.Wherein, filter element 20 can adopt the design of modular type, can be according to different processing requirements, and for example heat treatment process or deionising process increase corresponding filtering module.Shown in Fig. 2 and 3, the structure that in different atmospheric plasma processes, adopts of filter element 20 respectively, wherein, in Fig. 2, a plurality of filtration members 21 are arranged in the housing, form an independent filter element 20; In Fig. 3, adopted knockdown filter element 20, promptly filter element comprises a plurality of filtering modules, and filtration members 21 places each independently filtering module respectively, and each module is communicated with by ventilation component 40 simultaneously.
Because the structure of filtration members 21 and filtering module and application have been the common technologies of industry, therefore, the utility model does not disclose in detail to this.
The unit 30 of bleeding is used for gas is disposed to exhaust outlet 5 from the passage of flooded suction 10 by ventilation component 40.Especially, the gas that the unit 30 of bleeding will contain reaction by-product 7 is disposed to filter element 20 from flooded suction 10, and next, unit 30 discharging of bleeding is filtered that unit 20 filters, and has the gas of handling back product 8 and is disposed to this exhaust outlet 5.That is to say that the unit 30 of bleeding of the present utility model is as a power source, guiding gas is by ventilation component 40 and filter element 20.
Particularly, the unit 30 of bleeding comprises an exhausting part, and this exhausting part makes and produces air-flows in the ventilation component 40.
In the utility model, this exhausting part can be extraction fan or the aspiration pump that air-flow is circulated in ventilation component 40 and filter element.According to embodiment of the present utility model, this exhausting part of this unit 30 of bleeding is specially extraction fan.
According to above-mentioned exposure, filtration system of the present utility model is one does not have the system of the compactness of harm to environment, and this system only need take a small amount of running space.And this filtration system can be integrated on the plasma head 3 of atmospheric pressure plasma system 1 simply.Correspondingly, in the atmospheric pressure plasma system or afterwards the reaction by-product that produces can be inhaled into 10 and collects, and is directed in the filter element 20 that has at least one filtration members, such as, this at least one filtration members is the active carbon filtration layer.Then, reaction by-product 7 by with filtration members on reactant react, in filter element 20, partly filtered, producing does not have product 8 after the processing of harm to environment.Therefore, the reaction by-product that this filtration system will be disposed in the ambient air reduces to minimum, reduces environmental pollution and the mother's who protects working environment thereby reach.
Be compared to the traditional aerating system that is used for atmospheric plasma treatment, this filtration system not only can be used as an air-breather and carries out work, but also can handle undischarged reaction by-product still, thereby, avoided reaction by-product to be absorbed, thereby working environment has been worked the mischief by ambient air.
Filtration system of the present utility model is given the integrated circuit packing device, semiconductor, and LCD display, industrial circles such as hard disk drive (HDD) and pharmaceuticals industry have brought impact.And this filtration system partly is better than wet-treating more.The filtration system that the utility model provides can be applicable to various easy generations and has in the mechanical system and automated system of reaction by-product of harmfulness.In addition, the filtration system that the utility model provides also can be used as an independently filtration system, is applied in the particular environment, and the artificially is assembled on the plasma head in the atmospheric pressure plasma system.
The explanation that above-mentioned embodiment of the present utility model is only exemplary principle of the present utility model and effect thereof, but not be used to limit the utility model, know and it will be understood by those skilled in the art that, under the situation that does not depart from spirit and scope of the present utility model, any changes and improvements that the utility model is done are all in scope of the present utility model.Rights protection scope of the present utility model, should as the application claim defined is as the criterion.
Claims (10)
1. the filtration system that is used to collect and filter the side reaction thing in the atmospheric plasma treatment, wherein, this filtration system can be integrated on the plasma head that has shower nozzle in the atmospheric pressure plasma system, it is characterized in that, and this filtration system comprises:
Flooded suction is arranged on the described plasma head in the described atmospheric pressure plasma system, is used to collect and guide the gas that contains reaction by-product;
The unit of bleeding is connected to described flooded suction by ventilation component, is used for the described gas that contains described reaction by-product from described flooded suction is discharged by described ventilation components; With
Filter element is connected to described flooded suction and the described unit of bleeding respectively by described ventilation component, is used to filter the described gas that contains described reaction by-product.
2. filtration system as claimed in claim 1, wherein, described flooded suction further comprises fixed part and the collection unit of extending from described fixed part, wherein said fixed part is attached on the described plasma head of described plasma, be arranged on the periphery of described shower nozzle with described collection unit, contain the described gas of described reaction by-product with collection.
3. filtration system as claimed in claim 2, wherein, described flooded suction further comprises the connecting portion of extension from described collection unit, is used to be communicated with described flooded suction and described ventilation components.
4. filtration system as claimed in claim 1, wherein, described flooded suction is removably mounted on the described shower nozzle of described atmospheric pressure plasma.
5. filtration system as claimed in claim 3, wherein, described flooded suction is removably mounted on the described shower nozzle of described atmospheric pressure plasma.
6. filtration system as claimed in claim 1, wherein, described flooded suction is integrated on the described shower nozzle of described atmospheric pressure plasma.
7. filtration system as claimed in claim 3, wherein, described flooded suction is integrated on the described shower nozzle of described atmospheric pressure plasma.
8. filtration system as claimed in claim 1, wherein, described filtration system further comprises the outlet of bleeding that is arranged on the described ventilation component, is used to discharge product after the processing of being filtered by described filter element.
9. filtration system as claimed in claim 1, wherein, described ventilation component is specially a plurality of pipelines, is respectively applied for to connect described flooded suction hermetically, described unit and the described filter element of bleeding.
10. filtration system as claimed in claim 1, wherein, described filter element comprise at least one can with at least one group of filtration members of reacting in the described reaction by-product that is included in the described gas.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201490568U CN201470300U (en) | 2009-04-14 | 2009-04-14 | Filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment |
| HK09106967A HK1129998A2 (en) | 2009-04-14 | 2009-07-29 | Filtration system for collecting and filtering reacted by-products during atmospheric plasma treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201490568U CN201470300U (en) | 2009-04-14 | 2009-04-14 | Filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201470300U true CN201470300U (en) | 2010-05-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201490568U Expired - Fee Related CN201470300U (en) | 2009-04-14 | 2009-04-14 | Filter system for collecting and filtering byproducts in atmospheric pressure plasma treatment |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN201470300U (en) |
| HK (1) | HK1129998A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI737503B (en) * | 2020-09-28 | 2021-08-21 | 棨揚企業有限公司 | Water-soluble waste gas purification equipment |
-
2009
- 2009-04-14 CN CN2009201490568U patent/CN201470300U/en not_active Expired - Fee Related
- 2009-07-29 HK HK09106967A patent/HK1129998A2/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI737503B (en) * | 2020-09-28 | 2021-08-21 | 棨揚企業有限公司 | Water-soluble waste gas purification equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| HK1129998A2 (en) | 2009-12-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100519 Termination date: 20110414 |