CN201446534U - Transmission equipment - Google Patents
Transmission equipment Download PDFInfo
- Publication number
- CN201446534U CN201446534U CN2009200592507U CN200920059250U CN201446534U CN 201446534 U CN201446534 U CN 201446534U CN 2009200592507 U CN2009200592507 U CN 2009200592507U CN 200920059250 U CN200920059250 U CN 200920059250U CN 201446534 U CN201446534 U CN 201446534U
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- cavity
- transmission equipment
- manipulator
- top cover
- flange
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 135
- 230000007246 mechanism Effects 0.000 claims abstract description 42
- 238000007789 sealing Methods 0.000 claims description 16
- 230000002787 reinforcement Effects 0.000 claims description 8
- 240000007320 Pinus strobus Species 0.000 abstract 5
- 239000000047 product Substances 0.000 description 38
- 238000004519 manufacturing process Methods 0.000 description 20
- 239000000758 substrate Substances 0.000 description 17
- 239000006059 cover glass Substances 0.000 description 15
- 238000003825 pressing Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000003848 UV Light-Curing Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000001723 curing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000004083 survival effect Effects 0.000 description 1
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Abstract
The utility model provides transmission equipment, which comprises a base, a cavity, a mechanical hand, a mechanical hand driving mechanism, a control system, a driving shaft, a plurality of lateral flanges, and sensors, strobes and strobe driving mechanisms which correspond to the lateral flanges mutually, wherein the cavity adopts a hollow structure which forms a mechanical hand movable cavity; one end of the driving shaft hermetically passes through the bottom of the cavity, extends the mechanical hand movable cavity and is connected with the mechanical hand; the other end of the driving shaft is connected with the mechanical hand driving mechanism; the mechanical hand driving mechanism is electrically connected with the control system; the lateral flanges are provided with transmission passages and arranged on the side walls of the cavity; the transmission passages are connected with the mechanical hand movable cavity; strobes are mounted in the transmission passages of the lateral flanges and connected with the strobe driving mechanisms; the strobe driving mechanisms are mounted on the cavity and electrically connected with the sensors; and the sensors are electrically connected with the control system. The utility model can make the best use of the interior space of the cavity, has compact structure and high compatibility, and facilitates the product transmission in the cavity.
Description
Technical field
The utility model relates to a kind of transmission equipment that is used to provide transmission space, relates in particular to a kind of transmission equipment that is used to the activity that works the manipulator that transmits product or half product between the production equipment that the sealing transmission space is provided.
Background technology
Along with constant development of economy, the continuous progress of science and technology and the minimizing day by day of available land resource, people more and more pay attention to resources conservation and utilization ratio thereof, destroy with the environmental protection that reduces human survival, make the development of the mankind and natural harmony to satisfy the novel industrialization road requirement of China.
Wherein, in the processing cluster equipment of semicon industry, electron trade and mechanical industry etc., the transmission between finished product and the semi-finished product also is a very important part.Because it is related to one of key factor of the quality, efficient and the qualification rate that improve product, also be to reduce one of enterprise's production cost key factor.Therefore, in today that the cost of enterprise's land used increases day by day, enterprise more and more payes attention to the space utilization efficient of transmission equipment, reduce enterprise to the use amount in soil reducing the cost that enterprise produces product, thereby improve enterprise's competitiveness in market.But, the shortcoming that the transmission equipment ubiquity on the market is following:
At present, in transmission system, transmission equipment generally all is single to single right mode of operation, promptly is product but needs to go to carry out with a transmission equipment product when some operations transformation task.But, in the production process of product production line, in order to satisfy the streamline production requirement of product, especially satisfy the production requirement of the miscellaneous semiconductor product of production process, but need many transmission equipments to go to be responsible for the product transmission of each inter process to realize streamline production operation purpose.Make semiconductor product a large amount of transmission equipment of demand in the pipelining production process remove to carry out the transformation task of semiconductor product on the one hand, increased the cost of making and use transmission equipment; Make transmission equipment take a large amount of land resource on the other hand, increased the use cost in soil, thereby increased the production cost of enterprise product and reduced enterprise's competitiveness on market.Simultaneously, owing to transmission equipment is that pipelining at a certain semiconductor product requires to manufacture and design, after this semiconductor product updates, the most of transmission equipments that are applied on this semiconductor product all can not be suitable for the transmission requirement of new semiconductor product, thereby make the poor compatibility of transmission equipment.
Therefore, be badly in need of to want a kind of compact conformation, compatible good and can effectively dwindle the transmission equipment that being used to of floor space work the manipulator that transmits product or half product between the production equipment activity provides the sealing transmission space.
The utility model content
The purpose of this utility model is to provide a kind of compact conformation, compatible good and can effectively dwindle the transmission equipment that being used to of floor space work the manipulator that transmits product or half product between the production equipment activity provides the sealing transmission space.
For achieving the above object, the technical solution of the utility model is: a kind of transmission equipment is provided, wherein, described transmission equipment comprises base, cavity, manipulator, mechanical arm drive mechanism, control system, driving shaft, a plurality of side flange reach and the mutual corresponding sensor of described side flange, gate and gate driving mechanism, described cavity is hollow structure, described hollow structure forms the movable chamber of manipulator, described cavity is arranged on the described base, the bottom of the described cavity of one end hermetically passing of described driving shaft and extending in the movable chamber of described manipulator and with described manipulator is connected, the other end of described driving shaft is connected with described mechanical arm drive mechanism, described mechanical arm drive mechanism is electrically connected with described control system, described side flange has transmission channel, described side flange is arranged on the sidewall of described cavity and described transmission channel is communicated with the movable chamber of described manipulator, described gate is installed in the transmission channel of described side flange and with described gate driving mechanism and is connected, described gate driving mechanism is installed on the described cavity and with described sensor electrical and is connected, described sensor is electrically connected with described control system, and described sensor is controlled described gate driving mechanism described gate is opened or closed.
Preferably, described transmission equipment also comprises cavity top cover and top cover actuating device, the top of described cavity offers cavity hatch, described cavity top cover is articulated on the described cavity and with described top cover actuating device and is connected, described top cover actuating device is installed on the described cavity, and described top cover actuating device is controlled described cavity top cover and described cavity hatch is carried out hermetically closing or opened.By described cavity hatch, be convenient to the mounting or dismounting of inside cavity part and be convenient to the maintenance of cavity; By cavity top cover and top cover actuating device, make the cavity top cover open or close very easily and the sealing property excellence to cavity hatch.Particularly, described transmission equipment also comprises seal member, the described seal member of going up comprises upper cover and upper flange, one end of described upper cover is connected in the opening part of the cavity hatch of described cavity, the other end is connected with described upper flange, described upper flange is evenly distributed with the hole that is tightly connected, and described cavity top cover has the sealing pin corresponding with the described hole that is tightly connected.By the last seal member of forming by upper cover and upper flange, make the environment that the is in vacuum work down of the interior product that transmits of transmission equipment to prevent that polluter from polluting the transmission product in the transmission equipment, the crudy of raising product; By the sealing pin of cavity top cover and the hole that is tightly connected of upper flange, make that the sealing of cavity top cover and upper flange is more reliable, fixing more convenient.Particularly, described cavity top cover offers the observation window that is transparence.By the observation window of described transparence, the handled easily personnel are to transmission equipment monitoring in real time and maintenance.
Preferably, described transmission equipment also comprises the window flange, the end face of described window flange is transparence, described sensor is installed on the end face of the window flange that is transparence, and described window flange is arranged at transmission channel terminal of described side flange accordingly and lays respectively at the top and the bottom of described cavity; By described window flange and the setting sensor thereon that is transparence, the manipulator that makes sensor can detect transmission equipment accurately moves on the one hand, thereby open or close gate accurately, make that the product in the transmission equipment transmits more coordination, more consistent; Being convenient to operating personnel on the other hand monitors in real time to inside cavity.
Preferably, described transmission equipment also comprises vavuum pump, and described vavuum pump handstand is installed on the bottom of described cavity and is communicated with the movable chamber of described manipulator.By described vavuum pump, make transmission equipment inside have high vacuum; Handstand by described vavuum pump is installed, and can prevent that wisps such as dust, greasy dirt from having damaged vavuum pump, prolongs the service life of vavuum pump.
Preferably, described transmission equipment also comprises mobile supporting component, and described mobile supporting component comprises movable pulley and back-up block, and described movable pulley and described base articulate, and described back-up block is connected with described base is telescopic.By described movable pulley, be convenient to transmission equipment location and use; By described back-up block, more stable, more reliable when making transmission equipment work.
Preferably, described transmission equipment also comprises support ring, described support ring is installed on the bottom of described cavity, the described support ring of described driving shaft hermetically passing and extending in the movable chamber of described manipulator, be provided with interior reinforcement between the inwall of described support ring and described cavity, be provided with outer reinforcement between the outer wall of described cavity and the described side flange.By described support ring, it is more convenient, reliable to make driving shaft install; By described inside and outside reinforcement, increase the integral rigidity of transmission equipment, prevent the transmission equipment distortion, the assurance transmission equipment is worked more reliably.Particularly, described side flange is tabular, by flat side flange, makes transmission equipment be connected simply with various dissimilar production equipments, seal reliably, thereby makes transmission equipment have excellent compatibility.
Preferably, described cavity is cylinder or polygon cylinder.By being the cavity of cylinder or polygon cylinder, make that the more compact structure of cavity and utilization rate are higher.
Compared with prior art, because cavity of the present utility model, manipulator, mechanical arm drive mechanism, control system and driving shaft, and cavity forms the movable chamber of manipulator, make transmission equipment of the present utility model can make full use of the space of inside cavity, improve the inside cavity utilization of space, make the more compact structure of transmission equipment to reduce the occupancy of transmission equipment to the land resource of preciousness, thereby reduce the production cost of enterprise product. simultaneously, because the side flange with transmission channel of the present utility model makes that on the one hand the product transmission in the cavity that is connected with transmission channel is easier; Make transmission equipment to be connected with various dissimilar production equipments simultaneously on the other hand, and connection is simple, sealing is reliable, thereby makes transmission equipment have excellent compatible performance.
Description of drawings
Fig. 1 is the structural representation of the utility model transmission equipment.
Fig. 2 is another structural representation of the utility model transmission equipment.
State diagram when Fig. 3 is the utility model transmission equipment clamping substrate.
Fig. 4 is the structural representation behind the utility model transmission equipment dismounting cavity top cover, top cover actuating device and the base.
Fig. 5 is another structural representation behind the utility model transmission equipment dismounting cavity top cover, top cover actuating device and the base.
State diagram when Fig. 6 is the manipulator clamping substrate of the utility model transmission equipment.
Fig. 7 is the flow chart of the manipulator of the utility model transmission equipment.
The specific embodiment
Technology contents, structural feature in order to describe the utility model transmission equipment in detail are described further below in conjunction with embodiment and conjunction with figs..
As shown in Figure 1 to Figure 3, the utility model transmission equipment 100 comprises base 1, cavity 2, manipulator 3, the mechanical arm drive mechanism (not shown), control system, driving shaft 7, a plurality of side flange 5 reach and described side flange 5 mutual corresponding sensor 4, gate (not shown) and gate driving mechanism 6, described cavity 2 is hollow structure, described hollow structure forms the movable chamber 20 of manipulator, described cavity 2 is fixed in the top of described base 1 by support 15, the bottom of the described cavity 2 of upper end hermetically passing of described driving shaft 7 and extending in the movable chamber 20 of described manipulator and with described manipulator 3 is connected, wherein, as shown in Figure 6, described manipulator 3 comprises fixed arm 31, intermediate arm 32 and transfer arm 33, one end of described fixed arm 31 is fixed on the driving shaft 7, one end of the other end of described fixed arm 31 and intermediate arm 32 flexibly connects, the other end of described intermediate arm 32 and described transfer arm 33 flexibly connect, by by fixed arm 31, the manipulator 3 that intermediate arm 32 and transfer arm 33 are formed, make that manipulator 3 can be free movable in the space of 360 degree, the lower end of described driving shaft 7 is connected with described mechanical arm drive mechanism, described mechanical arm drive mechanism is electrically connected with described control system, described side flange 5 offers transmission channel 50, described side flange 5 is arranged on the sidewall of described cavity 2 and described transmission channel 50 is communicated with the movable chamber 20 of described manipulator, described gate (not shown) is installed in the transmission channel 50 of described side flange 5 and with described gate driving mechanism 6 and is connected, described gate driving mechanism 6 is installed on the bottom of described cavity 2 and with described sensor 4 and is electrically connected, described sensor 4 is electrically connected with described control system, and 6 pairs of described gates of the described sensor 4 described gate driving mechanisms of control are opened or closed.Particularly, described side flange 5 is tabular, by described flat side flange 5, make between transmission equipment 100 and the various dissimilar production equipments be connected simple, sealing is reliable, thereby make transmission equipment 100 have excellent compatibility.In conjunction with Fig. 4 to Fig. 5, more specifically, as follows:
Than the superior, described transmission equipment 100 also comprises cavity top cover 81a and top cover actuating device 82a, the top of described cavity 2 offers cavity hatch 29, described cavity top cover 81a is articulated on the described cavity 2 and with described top cover actuating device 82a and is connected, described top cover actuating device 82a is installed on the top of described cavity 2, described top cover actuating device 82a controls described cavity top cover 81a and described cavity hatch 29 is carried out hermetically closing or opens. and by described cavity hatch 29, be convenient to the mounting or dismounting of cavity 2 inner parts and be convenient to the maintenance of cavity 2; By cavity top cover 81a and top cover actuating device 82a, make cavity top cover 81a open or close very easily and the sealing property excellence to cavity hatch 29. particularly, described transmission equipment 100 also comprises seal member, the described seal member of going up comprises upper cover 83a and upper flange 84a, the cavity hatch 29 of the outside of described upper cover 83a and described cavity 2 is welded to connect, the interior of described upper cover 83a then is welded to connect with described upper flange 84a, described upper flange 84a is evenly distributed with several hole 840a that is tightly connected, described cavity top cover 81a has the last seal member of the sealing pin 811a. corresponding with the described hole 840a that is tightly connected by being made up of upper cover 83a and upper flange 84a, make the environment that is in vacuum of the transmission equipment 100 interior products that transmit work down, prevent that polluter from polluting the transmission product in the transmission equipment 100, improves the crudy of product; By the sealing pin 811a of cavity top cover 81a and the hole 840a that is tightly connected of upper flange 84a, make that cavity top cover 81a and upper flange 84a sealing is more reliable, fixing more convenient. more specifically, described transmission equipment 100 also comprises low head 81b and lower flange 82b, described driving shaft 7 passes the bottom of described lower flange 82b, and described lower flange 82b seals described driving shaft 7, described lower flange 82b is connected with the end of described low head 81b, and the described low head 81b other end is connected with the bottom of described cavity 2; By low head 81b and lower flange 82b, the parts that make transmission equipment 100 have in excellent sealing property and the cavity 2 are installed and removed very easily. and particularly, described cavity top cover 81a offers the observation window 810a that is transparence; More specifically, described observation window 810a is to being arranged at the observation window 810a of cavity top cover 81a. by described transparence, and the handled easily personnel are to transmission equipment 100 monitoring in real time and maintenance.
Than the superior, described transmission equipment 100 also comprises window flange 9, the end face of described window flange 9 is transparence, described sensor 4 is installed on the end face of the window flange 9 that is transparence, and described window flange 9 is arranged at transmission channel 50 terminal of described side flange 5 accordingly and lays respectively at the top and the bottom of described cavity 2; By described window flange 9 and the setting sensor 4 thereon that is transparence, the manipulator 3 that makes sensor 4 can detect transmission equipment 100 accurately moves on the one hand, thereby open or close gate accurately, make that the product in the transmission equipment 100 transmits more coordination, more consistent; Being convenient to operating personnel on the other hand monitors in real time to cavity 2 inside.
Than the superior, described transmission equipment 100 also comprises vavuum pump 200, and described vavuum pump 200 handstand are installed on the bottom of described cavity 2 and are communicated with the movable chamber 20 of described manipulator.By described vavuum pump 200, make transmission equipment 100 inside have high vacuum; Handstand by described vavuum pump 200 is installed, and can prevent that wisps such as dust, greasy dirt from having damaged vavuum pump 200, prolongs the service life of vavuum pump 200.
Than the superior, described transmission equipment 100 also comprises mobile supporting component, described mobile supporting component comprises movable pulley 11 and back-up block 12, described movable pulley 11 is fixed in slip wheel carrier (not annotating among the figure) on the described base 1 by screw 110, and slip wheel carrier and movable pulley 11 articulate, and described back-up block 12 is connected with described base 1 by height-adjustable double-screw bolt, the nut 120 that cooperatively interacts can move back-up block 12 along the central axial direction of double-screw bolt 120.By described movable pulley 11, be convenient to transmission equipment 100 location and use; By described back-up block 12, make that transmission equipment 100 can be according to the work requirements of reality and flexible modulation back-up block 12 and ground contact reliability, thus more stable, more reliable when making transmission equipment 100 work.
Than the superior, described transmission equipment 100 also comprises support ring 24, and described support ring 24 is installed on the bottom of described cavity 2; Particularly, described support ring 24 is welded in the bottom of cavity 2 so that support ring 24 is fixing reliable. the described support ring 24 of described driving shaft 7 hermetically passings and extending in the movable chamber 20 of described manipulator, reinforcement 22 in being welded with between the inwall of described support ring 24 and described cavity 2, be welded with outer reinforcement 23. between the outer wall of described cavity 2 and the described side flange 5 by described support ring 24, it is more convenient, reliable to make driving shaft 7 install; By described inside and outside reinforcement 22,23, increase the integral rigidity of transmission equipment 100, prevent transmission equipment 100 distortion, assurance transmission equipment 100 is worked more reliably. particularly, described side flange 5 is tabular, by flat side flange 5, make transmission equipment 100 be connected simply with various dissimilar production equipments, seal reliably, thereby make transmission equipment 100 have excellent compatibility.
Than the superior, described cavity 2 is cylinder or polygon cylinder, and wherein, the polygon cylinder can be hexagon cylinder, octagonal cylinder, decagon cylinder or the like, so its non-limiting person.By being the cavity 2 of cylinder or polygon cylinder, make that the more compact structure of cavity 2 and utilization rate are higher.
In conjunction with the accompanying drawings, the operation principle to the utility model transmission equipment 100 is explained in detail: when the intact substrate 600 of plated film all was in the cavity 2 of importing transmission equipment 100 with the back cover glass, the substrate 600 of this moment was transported among the substrate buffer cell S10.Then, the control system of transmission equipment 100 is toward substrate control signal of mechanical arm drive mechanism output, and mechanical arm drive mechanism is ordered about manipulator 3 and moved along transmission channel 50 directions of side flange 5 under the control of control system; Simultaneously, control system also makes sensor 4 work toward the substrate detection signal of sensor 4 outputs that is arranged on the window flange 9 that is transparence; When sensor 4 detects manipulator 3, give control system, remove to order about gate by control system toward a substrate driving of gate driving mechanism 6 outputs signal again and open (annotating among the figure) substrate testing result signal feedback; Then, the transfer arm 33 of manipulator 3 orders about clamping substrate 600 down in mechanical arm drive mechanism, and as Fig. 3 and shown in Figure 6, and the transfer arm 33 of manipulator 3 transfers to substrate 600 among the UV curing pressing first module S20; When sensor 4 detects manipulator 3 not in sensor 4 detection ranges, just testing result is fed back to control system, remove closed shutter by control system regulating gate driving mechanism 6 again.Then, control system is exported a driving shaft control signal toward the drive shaft device (annotating among the figure) of driving shaft 7 again, make drive shaft device order about driving shaft 7 and rotate, thereby it is corresponding with the side flange 5 that is used to import back cover glass that the manipulator 3 that is fixed on the driving shaft 7 can be rotated to around driving shaft 7; The cover glass control signal moved in bake out cell S 30 to order about manipulator 3 after the control system of this moment was exported one toward mechanical arm drive mechanism; Simultaneously, control system also after one of sensor 4 output that is arranged on the window flange 9 the cover glass detection signal make sensor 4 work; When sensor 4 detects manipulator 3, give control system, drive the gate that signal goes to order about side flange 5 by control system cover glass after one of gate driving mechanism 6 output again and open (among the figure notes) back cover glass testing result signal feedback; Then, the transfer arm 33 of manipulator 3 a cover glass and back cover glass is transferred to UV solidify among the pressing first module S20 after mechanical arm drive mechanism is ordered about down clamping; When detecting manipulator 3 not in sensor 4 detection ranges, sensor 4 just testing result is fed back to control system, remove closed shutter by control system regulating gate driving mechanism 6 again, so finish substrate 600, back cover glass simultaneously and solidify among the pressing first module S20 at UV and transmit.Wherein, substrate 600 is the same with substrate 600 with back cover glass transmission course in UV curing pressing first module S20 with back cover glass transmission course in UV curing pressing second cell S 40, and is no longer burdensome at this.
When substrate 600 all is immobilized pressing with the back cover glass in UV curing pressing first module S20, under the control system effect, UV is solidified pressing first module S20 curing pressing meron 600 with mechanical arm drive mechanism control manipulator 3 and the back cover glass is exported S50 by first output unit; Equally, the substrate 600 and the back cover glass that solidify the pressing that is cured in pressing second cell S 40 at UV also order about mechanical arm drive mechanism under the control system effect, make manipulator 3 that UV is solidified substrate 600 and the back cover glass that pressing second cell S 40 solidifies after the pressings and exported by the second output unit S60.So just finished the product transmission course of the inside of transmission equipment 100.Wherein, contaminated to reduce the product precision for the product that prevents to import in the transmission equipment 100, under mechanical arm drive mechanism, manipulator 3 temporarily is stored in the product in the transmission equipment 100 among the temporary storage location S70.
It is known according to actual needs that the drive principle of mechanical arm drive mechanism, control system and gate drive system that the utility model transmission equipment 100 is related is those of ordinary skills, no longer is described in detail at this.
Above disclosed only is preferred embodiments of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (10)
1. transmission equipment, it is characterized in that: comprise base, cavity, manipulator, mechanical arm drive mechanism, control system, driving shaft, a plurality of side flange reach and the mutual corresponding sensor of described side flange, gate and gate driving mechanism, described cavity is hollow structure, described hollow structure forms the movable chamber of manipulator, described cavity is arranged on the described base, the bottom of the described cavity of one end hermetically passing of described driving shaft and extending in the movable chamber of described manipulator and with described manipulator is connected, the other end of described driving shaft is connected with described mechanical arm drive mechanism, described mechanical arm drive mechanism is electrically connected with described control system, described side flange has transmission channel, described side flange is arranged on the sidewall of described cavity and described transmission channel is communicated with the movable chamber of described manipulator, described gate is installed in the transmission channel of described side flange and with described gate driving mechanism and is connected, described gate driving mechanism is installed on the described cavity and with described sensor electrical and is connected, described sensor is electrically connected with described control system, and described sensor is controlled described gate driving mechanism described gate is opened or closed.
2. transmission equipment as claimed in claim 1, it is characterized in that: also comprise cavity top cover and top cover actuating device, the top of described cavity offers cavity hatch, described cavity top cover is articulated on the described cavity and with described top cover actuating device and is connected, described top cover actuating device is installed on the described cavity, and described top cover actuating device is controlled described cavity top cover and described cavity hatch is carried out hermetically closing or opened.
3. transmission equipment as claimed in claim 2, it is characterized in that: also comprise seal member, the described seal member of going up comprises upper cover and upper flange, one end of described upper cover is connected in the opening part of the cavity hatch of described cavity, the other end is connected with described upper flange, described upper flange is evenly distributed with the hole that is tightly connected, and described cavity top cover has the sealing pin corresponding with the described hole that is tightly connected.
4. transmission equipment as claimed in claim 2 is characterized in that: described cavity top cover offers the observation window that is transparence.
5. transmission equipment as claimed in claim 1, it is characterized in that: also comprise the window flange, the end face of described window flange is transparence, described sensor is installed on the end face of the window flange that is transparence, and described window flange is arranged at transmission channel terminal of described side flange accordingly and lays respectively at the top and the bottom of described cavity.
6. transmission equipment as claimed in claim 1 is characterized in that: also comprise vavuum pump, described vavuum pump handstand is installed on the bottom of described cavity and is communicated with the movable chamber of described manipulator.
7. transmission equipment as claimed in claim 1 is characterized in that: also comprise mobile supporting component, described mobile supporting component comprises movable pulley and back-up block, and described movable pulley and described base articulate, and described back-up block is connected with described base is telescopic.
8. transmission equipment as claimed in claim 1, it is characterized in that: also comprise support ring, described support ring is installed on the bottom of described cavity, the described support ring of described driving shaft hermetically passing and extending in the movable chamber of described manipulator, be provided with interior reinforcement between the inwall of described support ring and described cavity, be provided with outer reinforcement between the outer wall of described cavity and the described side flange.
9. transmission equipment as claimed in claim 1 is characterized in that: described side flange is tabular.
10. transmission equipment as claimed in claim 1 is characterized in that: described cavity is cylinder or polygon cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200592507U CN201446534U (en) | 2009-06-26 | 2009-06-26 | Transmission equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200592507U CN201446534U (en) | 2009-06-26 | 2009-06-26 | Transmission equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201446534U true CN201446534U (en) | 2010-05-05 |
Family
ID=42551246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200592507U Expired - Fee Related CN201446534U (en) | 2009-06-26 | 2009-06-26 | Transmission equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201446534U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114800578A (en) * | 2022-06-28 | 2022-07-29 | 江苏邑文微电子科技有限公司 | Wafer transmission equipment and control method thereof |
-
2009
- 2009-06-26 CN CN2009200592507U patent/CN201446534U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114800578A (en) * | 2022-06-28 | 2022-07-29 | 江苏邑文微电子科技有限公司 | Wafer transmission equipment and control method thereof |
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