CN201444162U - Capacitance accelerometer middle movable electrode - Google Patents
Capacitance accelerometer middle movable electrode Download PDFInfo
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- CN201444162U CN201444162U CN2009200291228U CN200920029122U CN201444162U CN 201444162 U CN201444162 U CN 201444162U CN 2009200291228 U CN2009200291228 U CN 2009200291228U CN 200920029122 U CN200920029122 U CN 200920029122U CN 201444162 U CN201444162 U CN 201444162U
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- mass
- brace summer
- frame
- movable electrode
- acceleration detector
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Abstract
The utility model relates to a capacitance accelerometer middle movable electrode, in particular to a capacitance accelerometer, which is provided with a quality block, wherein, support beams are uniformly distributed on the quality block, the support beam are connected with the inner side of a frame, a metal polar plate is arranged on the quality block, and the support beams are straight form support beams. The accelerometer has simple manufacturing technique and low cost, the stress concentration is not easily formed during the manufacture process, the deformation and fracture are not easily created, the consistency of electric capacity is good, the noise is small, the property is stable, the wave form distortion is small. The utility model suits capacitance accelerometer.
Description
Technical field
The present invention relates to capacitive acceleration detector, is a kind of capacitive acceleration detector intermediate movable electrode specifically.
Background technology
We know, existing capacitive acceleration detector intermediate movable electrode, the patent No. as United States Patent Office (USPO) announcement on July 29th, 1997 is 5652384, name is called the sensor of L shaped support beam structure, intermediate movable electrode is provided with mass, four sides of mass correspondence up and down are provided with L shaped brace summer, and two-layer up and down eight L shaped brace summers connect the frame middle inside, and mass is provided with metal polar plate.This capacitive acceleration detector intermediate movable electrode, because correspondence is provided with L shaped brace summer about four sides of mass, L shaped brace summer has 90 ° of turnings, the manufacturing process complexity, the cost height forms stress easily and concentrates in the manufacturing process, influence the intensity of brace summer, cause the distortion fracture easily, make the electric capacity consistance poor, noise is big, unstable properties, waveform distortion is big, even damages wave detector.
Summary of the invention
The technical matters that the present invention solves is, solve L shaped brace summer manufacturing process complexity, the cost height forms stress easily and concentrates in the manufacturing process, influence the intensity of brace summer, cause the distortion fracture easily, make the electric capacity consistance poor, noise is big, unstable properties, waveform distortion is big, even the problem of damaging wave detector, provide a kind of manufacturing process simple, cost is low, being not easy to form stress in the manufacturing process concentrates, be not easy to cause the distortion fracture, the electric capacity high conformity, noise is little, stable performance, the capacitive acceleration detector intermediate movable electrode that waveform distortion is little.
Technical scheme of the present invention is, is provided with mass, uniform brace summer on the mass, and brace summer connects scuncheon, and mass is provided with metal polar plate, and the primary structure characteristics are that brace summer is straight shape brace summer.
Brace summer of the present invention is positioned at the mass corner, perpendicular to mass and frame.
Brace summer of the present invention is positioned in the middle of the mass side, perpendicular to mass and frame.
Brace summer of the present invention is positioned on mass wedge angle and the frame interior angle.
Brace summer of the present invention is positioned at the mass corner, is parallel to mass side and frame.
Brace summer of the present invention is the mono-layer propping beam.
The present invention and frame, mass, corresponding parallel lower frame, following mass, the lower support beam of being provided with of brace summer, frame fits integral body with lower frame, is whole frame, and mass is fitted whole with following mass, be the total quality piece, brace summer and lower support beam form the double layer support beam.
Brace summer of the present invention and lower support beam and column alignment.
Brace summer of the present invention and lower support beam are interspersed.
The invention has the beneficial effects as follows that because brace summer is straight shape brace summer, manufacturing process is simple, cost is low, is not easy to form stress in the manufacturing process and concentrates, and is not easy to cause the distortion fracture, the electric capacity high conformity, and noise is little, stable performance, waveform distortion is little.The present invention is applicable to capacitive acceleration detector.
Description of drawings
Fig. 1, Fig. 2 are a kind of structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Fig. 1 is a front view, and Fig. 2 is the A-A cut-open view of Fig. 1;
Fig. 3, Fig. 4 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Fig. 3 is a front view, and Fig. 4 is the B-B cut-open view of Fig. 3;
Fig. 5, Fig. 6 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Fig. 5 is a front view, and Fig. 6 is the C-C cut-open view of Fig. 5;
Fig. 7, Fig. 8 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Fig. 7 is a front view, and Fig. 8 is the D-D cut-open view of Fig. 7;
Fig. 9, Figure 10 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Fig. 9 is a front view, and Figure 10 is the E-E cut-open view of Fig. 9;
Figure 11, Figure 12 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Figure 11 is a front view, and Figure 12 is the F-F cut-open view of Figure 11;
Figure 13, Figure 14 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Figure 13 is a front view, and Figure 14 is the G-G cut-open view of Figure 13;
Figure 15, Figure 16 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Figure 15 is a front view, and Figure 16 is the H-H cut-open view of Figure 15;
Figure 17, Figure 18, Figure 19, Figure 20 are another structural representations of the present invention, also are the synoptic diagram of a kind of embodiment, and Figure 17 is a front view, and Figure 18 is the J-J cut-open view of Figure 17, and Figure 19 is the K-K cut-open view of Figure 18, and Figure 20 is the I-I cut-open view of Figure 17;
Embodiment
Embodiment 1:
Capacitive acceleration detector intermediate movable electrode as shown in Figure 1 and Figure 2 is provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, and mass 1 is provided with metal polar plate 4, and brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 corner, and perpendicular to mass 1 and frame 3, manufacturing process is simple, cost is low, is not easy to form stress in the manufacturing process and concentrates, and is not easy to cause the distortion fracture, the electric capacity high conformity, noise is little, stable performance, and waveform distortion is little.
Embodiment 2:
Capacitive acceleration detector intermediate movable electrode as shown in Figure 3, Figure 4, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, and brace summer 2 is positioned in the middle of mass 1 side, perpendicular to mass 1 and frame 3 inboards, manufacturing process is simple, cost is low, is not easy to form stress in the manufacturing process and concentrates, and is not easy to cause the distortion fracture, the electric capacity high conformity, noise is little, stable performance, and waveform distortion is little.
Embodiment 3:
As Fig. 5, capacitive acceleration detector intermediate movable electrode shown in Figure 6, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, and mass 1 is provided with metal polar plate 4, and brace summer 2 is straight shape brace summer, brace summer 2 is positioned on mass 1 wedge angle and frame 3 interior angles, and manufacturing process is simple, and cost is low, being not easy to form stress in the manufacturing process concentrates, be not easy to cause the distortion fracture, the electric capacity high conformity, noise is little, stable performance, waveform distortion is little.
Embodiment 4:
As Fig. 7, capacitive acceleration detector intermediate movable electrode shown in Figure 8, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, and mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 corner, is parallel to mass 1 side and frame 3, as can be seen from Figure, brace summer 2 is longer, highly sensitive, manufacturing process is simple, and cost is low, being not easy to form stress in the manufacturing process concentrates, be not easy to cause the distortion fracture, the electric capacity high conformity, noise is little, stable performance, waveform distortion is little.
Embodiment 5:
As Fig. 9, capacitive acceleration detector intermediate movable electrode shown in Figure 10, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 corner, perpendicular to mass 1 and frame 3, with frame 3, mass 1, the brace summer 2 corresponding parallel lower frames 7 that are provided with, following mass 6, lower support beam 5, frame 3 is fitted whole with lower frame 7, be whole frame, mass 1 fits integral body with following mass 6, is the total quality piece, brace summer 2 and lower support beam 5 form the double layer support beam, brace summer 2 and lower support beam 5 and column alignment, the mass vibration is stable, and waveform distortion is little, total quality piece quality is big, and is highly sensitive.
Embodiment 6:
As Figure 11, capacitive acceleration detector intermediate movable electrode shown in Figure 12, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 side centre position, perpendicular to mass 1 and frame 3 inboards, with frame 3, mass 1, the brace summer 2 corresponding parallel lower frames 7 that are provided with, following mass 6, lower support beam 5, frame 3 is fitted whole with lower frame 7, be whole frame, mass 1 fits integral body with following mass 6, is the total quality piece, brace summer 2 and lower support beam 5 form the double layer support beam, brace summer 2 and lower support beam 5 and column alignment, the mass vibration is stable, and waveform distortion is little, total quality piece quality is big, and is highly sensitive.
Embodiment 7:
As Figure 13, capacitive acceleration detector intermediate movable electrode shown in Figure 14, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned on mass 1 wedge angle and frame 3 interior angles, with frame 3, mass 1, the brace summer 2 corresponding parallel lower frames 7 that are provided with, following mass 6, lower support beam 5, frame 3 fits integral body with lower frame 7, is whole frame, mass 1 is fitted whole with following mass 6, be the total quality piece, brace summer 2 and lower support beam 5 form the double layer support beam, brace summer 2 and lower support beam 5 and column alignment, the mass vibration is stable, waveform distortion is little, and total quality piece quality is big, and is highly sensitive.
Embodiment 8:
As Figure 15, capacitive acceleration detector intermediate movable electrode shown in Figure 16, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 corner, is parallel to mass 1 side and frame 3, with frame 3, mass 1, the brace summer 2 corresponding parallel lower frames 7 that are provided with, following mass 6, lower support beam 5, frame 3 is fitted whole with lower frame 7, be whole frame, mass 1 fits integral body with following mass 6, is the total quality piece, brace summer 2 and lower support beam 5 form the double layer support beam, brace summer 2 and lower support beam 5 and column alignment, the mass vibration is stable, and waveform distortion is little, total quality piece quality is big, and is highly sensitive.
Embodiment 9:
As Figure 17, Figure 18, Figure 19, capacitive acceleration detector intermediate movable electrode shown in Figure 20, be provided with mass 1, uniform brace summer 2 on the mass 1, brace summer 2 connects frame 3 inboards, mass 1 is provided with metal polar plate 4, brace summer 2 is straight shape brace summer, brace summer 2 is positioned at mass 1 corner, be parallel to mass 1 side and frame 3, with frame 3, mass 1, the brace summer 2 corresponding parallel lower frames 7 that are provided with, following mass 6, lower support beam 5, frame 3 is fitted whole with lower frame 7, be whole frame, mass 1 is fitted whole with following mass 6, be the total quality piece, brace summer 2 and lower support beam 5 form the double layer support beam, as can be seen from the figure, brace summer 2 and lower support beam 5 are parallel to mass 1, following mass 6, frame 3, lower frame 7, it is longer that brace summer 2 and lower support beam 5 can design, and brace summer 2 and lower support beam 5 are interspersed, as can be seen from the figure, brace summer 2 and the 5 staggered 90 ° of distributions of lower support beam, can the stable support mass, total quality piece quality is big, and brace summer quantity is less relatively simultaneously, help improving sensitivity and dynamic range, waveform distortion is little.
Claims (9)
1. a capacitive acceleration detector intermediate movable electrode is provided with mass, uniform brace summer on the mass, and brace summer connects scuncheon, and mass is provided with metal polar plate, it is characterized in that: brace summer is straight shape brace summer.
2. capacitive acceleration detector intermediate movable electrode according to claim 1 is characterized in that: said brace summer is positioned at the mass corner, perpendicular to mass and frame.
3. capacitive acceleration detector intermediate movable electrode according to claim 1 is characterized in that: said brace summer is positioned in the middle of the mass side, perpendicular to mass and frame.
4. capacitive acceleration detector intermediate movable electrode according to claim 1 is characterized in that: said brace summer is positioned on mass wedge angle and the frame interior angle.
5. capacitive acceleration detector intermediate movable electrode according to claim 1 is characterized in that: said brace summer is positioned at the mass corner, is parallel to mass side and frame.
6. according to claim 1 or 2 or 3 or 4 or 5 described capacitive acceleration detector intermediate movable electrode, it is characterized in that: said brace summer is the mono-layer propping beam.
7. according to claim 1 or 2 or 3 or 4 or 5 described capacitive acceleration detector intermediate movable electrode, it is characterized in that: said frame, mass, corresponding parallel lower frame, following mass, the lower support beam of being provided with of brace summer, frame is fitted whole with lower frame, be whole frame, mass is fitted whole with following mass, be the total quality piece, brace summer and lower support beam form the double layer support beam.
8. capacitive acceleration detector intermediate movable electrode according to claim 7 is characterized in that: said brace summer and lower support beam and column alignment.
9. capacitive acceleration detector intermediate movable electrode according to claim 7 is characterized in that: said brace summer and lower support beam are interspersed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200291228U CN201444162U (en) | 2009-06-26 | 2009-06-26 | Capacitance accelerometer middle movable electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200291228U CN201444162U (en) | 2009-06-26 | 2009-06-26 | Capacitance accelerometer middle movable electrode |
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| Publication Number | Publication Date |
|---|---|
| CN201444162U true CN201444162U (en) | 2010-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009200291228U Expired - Fee Related CN201444162U (en) | 2009-06-26 | 2009-06-26 | Capacitance accelerometer middle movable electrode |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103728467A (en) * | 2012-10-16 | 2014-04-16 | 无锡华润上华半导体有限公司 | Parallel-plate capacitor |
-
2009
- 2009-06-26 CN CN2009200291228U patent/CN201444162U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103728467A (en) * | 2012-10-16 | 2014-04-16 | 无锡华润上华半导体有限公司 | Parallel-plate capacitor |
| CN103728467B (en) * | 2012-10-16 | 2016-03-16 | 无锡华润上华半导体有限公司 | Plane-parallel capacitor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100428 Termination date: 20140626 |
|
| EXPY | Termination of patent right or utility model |