CN201442990U - Pressure relief device for polycrystalline silicon ingot production furnace - Google Patents
Pressure relief device for polycrystalline silicon ingot production furnace Download PDFInfo
- Publication number
- CN201442990U CN201442990U CN2009200289552U CN200920028955U CN201442990U CN 201442990 U CN201442990 U CN 201442990U CN 2009200289552 U CN2009200289552 U CN 2009200289552U CN 200920028955 U CN200920028955 U CN 200920028955U CN 201442990 U CN201442990 U CN 201442990U
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- CN
- China
- Prior art keywords
- pressure relief
- relief device
- polycrystalline silicon
- bolt shaft
- silicon ingot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a pressure relief device for a polycrystalline silicon ingot production furnace. The pressure relief device is installed on a through hole of a furnace cover (1) and comprises a base (2), a fixing seat (8), a stud shaft (3), a coping (4), a spring (5), a conical ball tap (7), a screw cap (10), an exhaust pipe (9) and an exhaust air absorber (12), wherein the stud shaft (3) is designed into a hollow shaft with a side hole (6), an air hole (13) is formed on the base (2), the stud shaft (3) is screwed with the fixing seat (8) after penetrating the through hole of the furnace cover (1), the conical ball tap (7) is arranged at the lower end of the inner cavity of the stud shaft (3), the coping (4) is installed at the conic node of the conical ball tap (7) and fixedly connected with the inner wall of the screw cap (10) through the spring (5), the protective screw cap (10) is hermetically screwed with the upper end of the stud shaft (3), and the exhaust pipe (9) is hermetically connected with the stud shaft (3) at the side hole (6). The pressure relief device is secure and environment-friendly.
Description
Technical field
The utility model relates to a kind of polycrystalline silicon ingot or purifying furnace pressure relief device.
Background technology
Traditional production of polysilicon is mainly produced under certain pressure and temperature, so the temperature in the stove is in high state of temperature constantly, pressure is very high.Traditional polycrystalline silicon ingot or purifying furnace generally is to adopt reprint formula safety valve to reduce pressure, but the pressure security that the pressure release valve of this reprint formula can not be uprushed moment gushes, and causes the generation of hazardous condition extremely easily.And in the middle of the existing technology, have plenty of the gap that utilizes between bell and the body of heater flange to carry out the opening pressure release; But this pressure release mode has directly been opened bell, and opening is too big, and silicon liquid and gas may sharply spray, and also brings out danger easily; And gas pollutes the environment after discharging.
Summary of the invention
The purpose of this utility model is in order to overcome above-mentioned the deficiencies in the prior art, to provide simple in structure, can safety relief, can effectively reduce a kind of polycrystalline silicon ingot or purifying furnace pressure relief device of expellant gas again to the pollution of environment.
For realizing above-mentioned technical purpose, the technical solution adopted in the utility model is:
A kind of polycrystalline silicon ingot or purifying furnace pressure relief device, this pressure relief device is installed on the through hole of bell, by base, permanent seat, bolt shaft, bear down on one, spring, the taper floating suppository, nut, vapor pipe, vent absorber is formed, described bolt shaft is arranged to have the cavity axle of side opening, base is provided with pore, pore docks with through hole on the bell, bolt shaft is passed through hole and is spirally connected at the outside surface and the permanent seat of bell, bolt shaft inner chamber lower end is provided with the taper floating suppository, correspondence is equipped with and bears down on one on the vertex of a cone of taper floating suppository, bearing down on one is connected with the top of bolt shaft by spring, and Protective nut is fixedlyed connected with the bolt shaft top, and vapor pipe is tightly connected at side opening place and bolt shaft.
Preferably, described taper floating suppository inside is provided with gas passage, and the outlet of gas passage is located on the tapered slope.
Preferably, be provided with gasket between described base, permanent seat and the bell, base is connected with the logical screw retention of bell inwall.
Preferably, described vapor pipe is provided with switch-valve, and the air outlet of vapor pipe is connected with vent absorber.
By technique scheme, the beneficial effects of the utility model are:
1, the utility model by bear down on one, the cooperation of spring, taper floating suppository, can effectively the gas that surpasses under the standard atmosphere pressure be discharged out of the furnace, need not to start bell and get final product pressure release, security is good;
2, expellant gas can effectively be deflated the resorber processing after the utility model pressure release, is very beneficial for environmental protection.
Description of drawings
Fig. 1 is the structural representation of a kind of polycrystalline silicon ingot or purifying furnace pressure relief device of the utility model;
Fig. 2 is the structural representation of a kind of polycrystalline silicon ingot or purifying furnace pressure relief device of the utility model when pressure release;
Among the figure: bell 1, base 2, bolt shaft 3 bears down on one 4, spring 5, side opening 6, taper floating suppository 7, permanent seat 8, vapor pipe 9, nut 10, nut 10, switch-valve 11, vent absorber 12, pore 13, gas passage 14, screw 15, gasket 16.
Embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
As shown in Figure 1, a kind of polycrystalline silicon ingot or purifying furnace pressure relief device, this pressure relief device is installed on the through hole of bell 1, by base 2, permanent seat 8, bolt shaft 3, bear down on one 4, spring 5, taper floating suppository 7, nut 10, vapor pipe 9, vent absorber 12 is formed, described bolt shaft 3 is arranged to have the cavity axle of side opening 6, base 2 is provided with pore 13, bolt shaft 3 is passed bell 1 through hole and permanent seat 8 is spirally connected, bolt shaft 3 inner chamber lower ends are provided with taper floating suppository 7, be equipped with on the vertex of a cone of taper floating suppository 7 and bear down on one 4, bear down on one and 4 fixedly connected with the inwall of nut 10 by spring 5, Protective nut 10 seals with bolt shaft 3 upper ends and is spirally connected, and vapor pipe 9 is tightly connected at side opening 6 places and bolt shaft 3.
Described taper floating suppository 7 inside are provided with gas passage 14, and the outlet of gas passage 14 is located on the tapered slope.
Be provided with gasket 16 between described base 2, permanent seat 8 and the bell 1, base 2 is fixedlyed connected with the logical screw 15 of bell 1 inwall.
Described vapor pipe 9 is provided with switch-valve 11, and the air outlet of vapor pipe 9 is connected with vent absorber 12.
As shown in Figure 2, when the paranormal volume operating pressure of the pressure in the stove, air pressure will enter the inner chamber of bolt shaft 3 from the pore 13 of base 2, and pressure can promote taper floating suppository 7 and upwards slide; Meanwhile, air-flow also can overflow from taper floating suppository 7 gas inside passages 14.When pressure was increasing, taper floating suppository 7 will continue come-up, and then promoted the 4 upwards slips of bearing down on one above it.When pressure reaches when surpassing pre-designed pressure threshold, bearing down on one 4 will slip over side opening 6, and this is that gas passage 14 will be communicated with vapor pipe 9 by side opening 6, opens switch-valve 11, gas will successfully be discharged from vapor pipe 9, and is deflated resorber 12 environmental protection treatment.
After pressure release, when the pressure in the stove dropped to reasonable levels, spring will promote to bear down on one under the effect of natural elasticity and the taper floating suppository glides, and until bearing down on one side opening 6 is covered.The utility model need not the breakdown bell just can pressure release, and security is good, and compliance with environmental protection requirements.
The above only is preferred embodiment of the present utility model, and not in order to restriction the utility model, common variation that those skilled in the art carries out in the technical solutions of the utility model scope and replacement all should be included in the protection domain of the present utility model.
Claims (4)
1. polycrystalline silicon ingot or purifying furnace pressure relief device, it is characterized in that: this pressure relief device is installed on the through hole of bell (1), by base (2), permanent seat (8), bolt shaft (3), bear down on one (4), spring (5), taper floating suppository (7), nut (10), vapor pipe (9), vent absorber (12) is formed, described bolt shaft (3) is arranged to have the cavity axle of side opening (6), base (2) is provided with pore (13), bolt shaft (3) passes bell (1) through hole and permanent seat (8) is spirally connected, bolt shaft (3) inner chamber lower end is provided with taper floating suppository (7), on the vertex of a cone of taper floating suppository (7) bear down on one (4) are installed, bear down on one (4) fixedly connected with the inwall of nut (10) by spring (5), Protective nut (10) is spirally connected with the sealing of bolt shaft (3) upper end, and vapor pipe (9) is located to be tightly connected with bolt shaft (3) at side opening (6).
2. polycrystalline silicon ingot or purifying furnace pressure relief device according to claim 1 is characterized in that: described taper floating suppository (7) is arranged to inside and is provided with gas passage (14), and the outlet of gas passage (14) is located on the tapered slope.
3. polycrystalline silicon ingot or purifying furnace pressure relief device according to claim 1 is characterized in that: be provided with gasket (16) between described base (2), permanent seat (8) and the bell (1), base (2) is fixedlyed connected with the logical screw (15) of bell (1) inwall.
4. polycrystalline silicon ingot or purifying furnace pressure relief device according to claim 1 is characterized in that: described vapor pipe (9) is provided with switch-valve (11), and the air outlet of vapor pipe (9) is connected with vent absorber (12).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200289552U CN201442990U (en) | 2009-07-06 | 2009-07-06 | Pressure relief device for polycrystalline silicon ingot production furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009200289552U CN201442990U (en) | 2009-07-06 | 2009-07-06 | Pressure relief device for polycrystalline silicon ingot production furnace |
Publications (1)
Publication Number | Publication Date |
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CN201442990U true CN201442990U (en) | 2010-04-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2009200289552U Expired - Fee Related CN201442990U (en) | 2009-07-06 | 2009-07-06 | Pressure relief device for polycrystalline silicon ingot production furnace |
Country Status (1)
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CN (1) | CN201442990U (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105671643A (en) * | 2016-03-16 | 2016-06-15 | 江苏华盛天龙光电设备股份有限公司 | Furnace cover for single-crystal furnace |
CN105734663A (en) * | 2016-03-16 | 2016-07-06 | 江苏华盛天龙光电设备股份有限公司 | Pressurizing device of single-crystal furnace |
CN108265327A (en) * | 2018-04-06 | 2018-07-10 | 深圳市东晶体技术有限公司 | A kind of pressure furnace for being used to prepare indium phosphide single crystal |
CN109443018A (en) * | 2018-11-21 | 2019-03-08 | 洛阳三升高新材料有限公司 | A kind of stewing fire grate device of air of Brown Alundum refining |
-
2009
- 2009-07-06 CN CN2009200289552U patent/CN201442990U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105671643A (en) * | 2016-03-16 | 2016-06-15 | 江苏华盛天龙光电设备股份有限公司 | Furnace cover for single-crystal furnace |
CN105734663A (en) * | 2016-03-16 | 2016-07-06 | 江苏华盛天龙光电设备股份有限公司 | Pressurizing device of single-crystal furnace |
CN108265327A (en) * | 2018-04-06 | 2018-07-10 | 深圳市东晶体技术有限公司 | A kind of pressure furnace for being used to prepare indium phosphide single crystal |
CN109443018A (en) * | 2018-11-21 | 2019-03-08 | 洛阳三升高新材料有限公司 | A kind of stewing fire grate device of air of Brown Alundum refining |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100428 Termination date: 20100706 |