CN201407852Y - Solar-energy light spectrum high-temperature selective absorbing membrane - Google Patents

Solar-energy light spectrum high-temperature selective absorbing membrane Download PDF

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Publication number
CN201407852Y
CN201407852Y CN200920051707XU CN200920051707U CN201407852Y CN 201407852 Y CN201407852 Y CN 201407852Y CN 200920051707X U CN200920051707X U CN 200920051707XU CN 200920051707 U CN200920051707 U CN 200920051707U CN 201407852 Y CN201407852 Y CN 201407852Y
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Prior art keywords
layer
base material
spectrum high
solar
temperature selective
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Expired - Lifetime
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CN200920051707XU
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Inventor
贺冬枚
彭启成
李皓桢
周拥仔
赵华平
陈玉琴
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CAMDA NEW ENERGY EQUIPMENT CO., LTD.
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DONGGUAN CAMDA GENERATOR WORK Co Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S70/00—Details of absorbing elements
    • F24S70/30—Auxiliary coatings, e.g. anti-reflective coatings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S70/00—Details of absorbing elements
    • F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
    • F24S70/225—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption for spectrally selective absorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
    • F24S70/00—Details of absorbing elements
    • F24S70/20—Details of absorbing elements characterised by absorbing coatings; characterised by surface treatment for increasing absorption
    • F24S70/25—Coatings made of metallic material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/40—Solar thermal energy, e.g. solar towers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Laminated Bodies (AREA)

Abstract

The utility model discloses a solar-energy light spectrum high-temperature selective absorbing membrane, which comprises base material as well as a reflecting layer, an absorbing layer and a reducingreflection layer that are sequentially arranged on the base material from inside to outside, wherein the reflecting layer is made of Fe-Mo alloy, the absorbing layer is made of Mo-Al2O3 alloy, and thereducing reflection layer is made of Al2O3. The solar-energy light spectrum high-temperature selective absorbing membrane has excellent infrared reflecting effect, is good for reducing the emissivity, and improves the practicability greatly.

Description

Solar spectrum high-temperature selective absorbing film
Technical field
The utility model belongs to thin film technique and thin-film material field, has been specifically related to a kind of solar spectrum high-temperature selective absorbing film.
Background technology
Structure according to principle that absorbs sunshine and coating is different, and the solar spectrum high-temperature selective absorber coatings mainly is divided into coated semiconductor, interference of light coating, porous coating and metal-cermic coating four classes.Common semi-conducting material has silicon (Si), germanium (Ge), black chromium (Cr xO y), black nickel (NiS-ZnS), the black (Cu of cupric oxide xO y) and iron oxide (Fe 3O 4) etc.; Interference of light coating is made up of deielectric-coating and absorbing composite membrane, metal substrate or the bottom film of non-absorption, such as Al 2O 3-Mox-Al 2O 3(AMA) trilamellar membrane, AlN-Al/Al eight tunics etc.; Porous coating is by pattern and the structure of control coating surface, makes the size of surface discontinuity suitable with the visible spectrum peak value, thereby visible light is played the trap effect, and long-wave radiation is had fine reflex; Cermet coating is according to effective medium theory, utilizes metallic finely divided in parent, and the different wave length level photon of visible light is produced Multiple Scattering and internal reflection and it is absorbed, and the eutectoid coating of metallic and oxide is such as Al-Al 2O 3, Mo-Al 2O 3, Mo-SiO 2, Ti-TiO 2, W-Al 2O 3, Ni-Al 2O 3, Co-Al 2O 3, Au-Al 2O 3Etc. coating.
Existing solar spectrum high-temperature selective mostly is four-layer structure, ground floor is a base material, the second layer is for being the metal reflection layer, the 3rd layer is light absorbing zone, and the 4th layer is the light antireflective, and this four-layer structure superposes successively, because mostly being single metal M o, Ni, Cu or Fe, the reflecting layer cause the associativity between itself and base material and the absorbed layer good inadequately, the infrared reflectivity of the absorbing film of this structure is lower simultaneously, cause emissivity to increase, so practicality has to be strengthened.
The utility model content
The solar spectrum high-temperature selective absorbing film that the associativity that the purpose of this utility model provides a kind of interlayer is good, practicality is strengthened.
The technical scheme that its technical problem that solves the utility model adopts is: solar spectrum high-temperature selective absorbing film, comprise base material, and be successively set on from the inside to the outside reflecting layer, absorbed layer and anti-reflection layer on the base material, and described reflecting layer is the Fe-Mo alloy, described absorbed layer is Mo-Al 2O 3Alloy, described anti-reflection layer are Al 2O 3, described absorbed layer comprises three layers, is progressively reduced by the atom percentage content of nexine to top layer Mo.
Described nexine Mo content is 80-90%, and intermediate layer Mo content is 50-60%, and top layer Mo content is 20-40%.
The thickness in described reflecting layer is 100-200nm.The thickness of described absorbed layer is 150-200nm.The thickness of described anti-reflection layer is 30-80nm.
The beneficial effects of the utility model are: adopted the Fe-Mo alloy as the reflecting layer, strengthen the adhesion between base material and the absorbed layer, and had good properties of infrared reflection and non-proliferation function, and had more excellent infrared external reflection effect, be beneficial to the reduction emissivity, Mo-Al 2O 3The absorbed layer of alloy is the three-decker that Mo content progressively reduces, and forms many Interface Absorptions layer so that the ultraviolet of solar spectrum, visible and infrared light through Multi reflection, refraction, interference and absorption after, the coated absorption of the radiation more than 97% changes into heat, Al 2O 3Anti-reflection layer can further improve the absorptivity of rete, and that solar spectrum high-temperature selective absorbing film of the present utility model has is high temperature resistant, antioxygenic property is strong, the characteristic that chemical inertness and microstructure are stable, and practicality strengthens greatly.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is a generalized section of the present utility model;
Fig. 2 is the generalized section of employed three target sputtering equipments of preparation the utility model.
The specific embodiment
Below in conjunction with accompanying drawing the utility model is described in further detail.
With reference to shown in Figure 1, solar spectrum high-temperature selective absorbing film comprises base material 1, and described base material 1 can be metal, plastics or ceramic material, as specific embodiment, the elite stainless steel metal pipe of using is provided with reflecting layer 2 at base material 1, is provided with absorbed layer 3 on the reflecting layer 2, be provided with anti-reflection layer 4 on the absorbed layer 3, three layers of successively sputter stack, described reflecting layer 2 is the Fe-Mo alloy, described absorbed layer 3 is Mo-Al 2O 3Alloy comprises three layers on high tenor layer, middle tenor layer and low-metal content layer, is progressively reduced by the content of nexine to top layer Mo.
As first embodiment of the present utility model, the atom percentage content of three layers of Mo is respectively in the absorbed layer 3: nexine Mo content is 80%, and intermediate layer Mo content is 50%, and top layer Mo content is 20%.
As second embodiment of the present utility model, the atom percentage content of three layers of Mo is respectively in the absorbed layer 3: nexine Mo content is 90%, and intermediate layer Mo content is 60%, and top layer Mo content is 40%.
As the 3rd embodiment of the present utility model, the atom percentage content of three layers of Mo is respectively in the absorbed layer 3: nexine Mo content is 80%, and intermediate layer Mo content is 50-60%, and top layer Mo content is 20-40%.
The thickness of each layer of the utility model is as follows respectively: the thickness in reflecting layer is 100-200nm, by depositing the reflecting layer of such thickness, the light reflection is strengthened; The thickness of absorbed layer is 150-200nm, can strengthen the absorption to solar energy like this; The thickness of anti-reflection layer is 30-80nm, though the thickness of this scope can make light radiation see through, can interfere the absorption that promotes solar energy by absorbed inside and phase compensation.
With reference to shown in Figure 2, the utility model absorbing film can use three target sputtering equipments to prepare, this equipment comprises airtight sputter stove 7, be evenly distributed with three columniform target electrodes on the sidewall in the sputter stove 7, it is Fe target 8, Mo target 9 and Al target 10, the axis of any two target electrodes is 60 ° angle, three target electrodes join as negative electrode with power supply respectively and optionally, sputter stove and power supply are connected to form plus earth, the wall of sputter stove 7 is provided with two air inlet pipe, the center of sputter stove 7 is provided with the rotation movements and postures of actors 11 around the rotation of sputter stove central shaft, be used to place base material 1, base material 1 is realized self rotation when can rotate on the circular orbit of the rotation movements and postures of actors 11, be convenient to even plated film, different voltages are set between target electrode and base material, from air inlet pipe 5 and air inlet pipe 6, can feed argon gas and oxygen respectively.
The utility model manufacture method is as follows:
A), to the stainless steel metal tube-surface as base material polish, decontamination, acetone ultrasonic cleaning and alcohol rinsing, then base material is placed on the rotation movements and postures of actors 11, base material keeps rotation in the revolution on the rotation movements and postures of actors 11.
B), close the sputter stove, vacuumize, after vacuum reaches certain requirement, in sputter stove 7, charge into argon gas from air inlet pipe 5, and on base material, apply bias voltage, earlier base material is carried out plasma and cleans.Open Fe target 8 and Mo target 9 afterwards, when argon ion bombardment target surperficial, Fe and Mo metallic atom and atomic group are sputtered out, and it is the Fe-Mo alloy reflecting layer of 50-60% that sputter forms Mo content.The process conditions in this stage can be provided with as follows: the electric current of Fe target 8 is 35A, and voltage is 411V; The electric current of Mo target 9 is 40A, and voltage is 450V; Substrate bias is 270-300V; Vacuum is 0.10Pa, and sedimentation time is 8-10min.
C), in sputter stove 7, charge into argon gas, in sputter stove 7, charge into oxygen from air inlet pipe 6 simultaneously from air inlet pipe 5.Close the Fe target, open Mo target and Al target, at the reflecting layer of Fe-Mo alloy 2 surface sputtering one deck Mo-Al 2O 3Metal forms Gradient Absorption layer 3, at this moment, the Mo metal not with oxygen reaction, and Al and oxygen reaction generation Al 2O 3, two kinds of materials jointly are deposited on and form Mo-Al on the base material 2O 3Film, the content of Mo metal is controlled by target current, voltage, oxygen partial pressure are set, the thickness of film is controlled by control sputter rate and time, the flow of control oxygen can be controlled the growing amount of oxide, pass into excessive oxygen total overall reaction and generate oxide and deposit on the base material, thereby finish the preparation of composite coating.Vacuum in this stage sputter stove 7 can be controlled between the 0.16-0.2Pa, and substrate bias is set to 200-250V, and sedimentation time is set to 10-15min.
D), simultaneously in the sputter stove, be filled with oxygen and argon gas, close Fe target and Mo target, open the Al target base material is carried out Ions Bombardment, adopts method sputter same as described above to obtain the complete transparent Al of one deck 2O 3Film.The electric current of this stage A l target is 38A, and voltage is 320V, and vacuum is 0.25Pa, sedimentation time 5-8min.
The utlity model has selection absorption characteristic, record its average absorption rate 〉=97% at 200-2500nm to the solar spectrum excellence; Emissivity≤7% (room temperature).Anneal respectively in air He under the vacuum condition, tested the heat endurance of different temperatures and time, the result is as follows:
Anneal in air, temperature is 750 ℃, 2 hours time, and its heat endurance is constant.
In a vacuum annealing, temperature is 600 ℃, 3 hours time, it is stable that its absorptivity and emissivity all keep.
Anneal in air, temperature is 500 ℃, 48 hours time, and its optical property does not have degradation phenomena significantly yet.
Absorbing film of the present utility model adopts the Fe-Mo alloy as the reflecting layer, has strengthened the adhesion between base material and the absorbing film, and has excellent more infrared external reflection effect, is beneficial to the reduction emissivity.Refractive index according to each rete is different with extinction coefficient, not only reflecting layer, absorbed layer and anti-reflection layer is designed to gradient film, and further with Mo-Al 2O 3Absorbed layer is designed to three layers gradient-structure, so that the ultraviolet of solar spectrum, visible and infrared light (200-2500nm) through Multi reflection, refraction, interference and absorption after, the coated absorption of radiation more than 97%, change into heat, obtain that a kind of adhesion is strong, the solar selectively absorbing coating of high-absorbility, low-launch-rate.
The foregoing description is illustrative principle of the present utility model and effect thereof only; and the embodiment of part utilization; for the person of ordinary skill of the art; under the prerequisite that does not break away from the utility model creation design; can also make some distortion and improvement, these all belong to protection domain of the present utility model.

Claims (4)

1, solar spectrum high-temperature selective absorbing film comprises base material, and is successively set on from the inside to the outside reflecting layer, absorbed layer and anti-reflection layer on the base material, it is characterized in that: described reflecting layer is the Fe-Mo alloy, and described absorbed layer is Mo-Al 2O 3Alloy, described anti-reflection layer are Al 2O 3
2, solar spectrum high-temperature selective absorbing film according to claim 1 is characterized in that, the thickness in described reflecting layer is 100-200nm.
3, solar spectrum high-temperature selective absorbing film according to claim 1 is characterized in that, the thickness of described absorbed layer is 150-200nm.
4, solar spectrum high-temperature selective absorbing film according to claim 1 is characterized in that, the thickness of described anti-reflection layer is 30-80nm.
CN200920051707XU 2009-02-26 2009-02-26 Solar-energy light spectrum high-temperature selective absorbing membrane Expired - Lifetime CN201407852Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103547871A (en) * 2011-05-19 2014-01-29 山特维克知识产权股份有限公司 A solar thermal absorber material
CN103963387A (en) * 2014-01-15 2014-08-06 洛阳新晶润工程玻璃有限公司 High-heat-absorption low-reflection blue film coated glass and production method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103547871A (en) * 2011-05-19 2014-01-29 山特维克知识产权股份有限公司 A solar thermal absorber material
CN103547871B (en) * 2011-05-19 2016-08-17 山特维克知识产权股份有限公司 Solar heat absorber material
CN103963387A (en) * 2014-01-15 2014-08-06 洛阳新晶润工程玻璃有限公司 High-heat-absorption low-reflection blue film coated glass and production method thereof
CN103963387B (en) * 2014-01-15 2016-01-20 洛阳新晶润工程玻璃有限公司 A kind of high heat absorption blue film coated glass of low reflection and manufacture method thereof

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C56 Change in the name or address of the patentee

Owner name: CAMDA NEW ENERGY EQUIPMENT CO., LTD.

Free format text: FORMER NAME: DONGGUAN CAMDA GENERATOR WORK CO., LTD.

CP01 Change in the name or title of a patent holder

Address after: 523413 Tong Yan Industrial Zone, Liaobu Town, Dongguan, Guangdong

Patentee after: CAMDA NEW ENERGY EQUIPMENT CO., LTD.

Address before: 523413 Tong Yan Industrial Zone, Liaobu Town, Dongguan, Guangdong

Patentee before: Dongguan Camda Generator Work Co., Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20100217