CN201387494Y - Wire grating broadband polarization device - Google Patents
Wire grating broadband polarization device Download PDFInfo
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- CN201387494Y CN201387494Y CN200720088544U CN200720088544U CN201387494Y CN 201387494 Y CN201387494 Y CN 201387494Y CN 200720088544 U CN200720088544 U CN 200720088544U CN 200720088544 U CN200720088544 U CN 200720088544U CN 201387494 Y CN201387494 Y CN 201387494Y
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Abstract
The utility model relates to a wire grating broadband polarization device, which belongs to the optical part, and aims at providing a wire grating broadband polarization device with high polarized light extinction ratio and luminous flux, simple structure and wide range of work wavelength. An aluminum nano wire grating is sedimentated on a substrate, and the substrate is of an optical material which is transparent at the wave band from ultraviolet to the infrared; and the structural parameters of the aluminum wire grating are: the cycle length of the wire grating is 40 to 80 nm, the duty factor of the wire grating is 60 percent to 40 percent, the thickness of the wire grating is 40 to 80 nm, and the interlayer spacing is 10 to 20 nm. The polarized light extinction ratio of the broadband polarization device at the range of the wave band from 300 nm to 500 nm can reach 33 to 70 dB, and the transmission of the polarized light can reach 68 percent to 94 percent.
Description
Technical field
The utility model belongs to the optical device in the optical system, particularly a kind of wire grating polarizer.
Background technology
Polarizer generally can be divided into: color separation polarizer, aeolotropic crystal polarizer, Brewster angle polarizer and wire-grid polarizer.But above-mentioned each polarizer all is merely able to corresponding less and a relatively-stationary operating wavelength range.For a lot of optics and optoelectronics application, people wish to obtain a kind of polarizer of broadband, and its operating wavelength range can covers entire ultraviolet-visible-infrared band.
Nano metal wire-grid polarizer a kind of device that can reach this requirement that comes to this.Up to the present, obtained using widely at radiowave, microwave and far infrared field sub-wavelength metal wire-grid polarizer.And along with the continuous development of nanofabrication technique, prepare the littler this polarizer of lines, and apply it near infrared, visible even ultraviolet light wave band has also become possibility.2005, Princeton one research institute and Chinese Wuhan Research Institute of Posts ﹠ Telecommunications utilize ultraviolet light nano-imprinting method and electron beam lithography method to prepare the successfully wire grating polarizer of 200 nano-scale linewidths respectively on glass substrate, and the operation wavelength of this polarizer is at the communication band of 1520-1570 nanometer.2006, the relevant lithographic technique success of Switzerland micro-nano technical institute and Princeton one research institute utilization deep ultraviolet on glass substrate, prepare the wire grating polarizer of live width in 100 nanometers, its service band scope has reached the 300-900 nanometer.These up-to-date achievements in research have all proved utilizes the wire grating polarizer can realize device near infrared, visible, and ultraviolet band work, but the scientific research personnel solve all the time with a polarizer may be simultaneously operated in infrared, visible, reach this difficult problem of ultraviolet band.Chinese Wuhan one research group of the Central China University of Science and Technology in 2007 proposed a kind of on the calcium fluoride substrate polarizer of plating aluminium nanometer wire grid construction, its operation wavelength can reach the 300-5000 nanometer, referring to document Z.Y.Yang and Y.F.Lu, " Broadband nanowire-grid polarizers in ultraviolet-visible-near-infraredregions; " Opt.Express, vol.15, no.15, Jul.2007, pp.9510-9519, but the structure of this polarizer is very complicated, and it need all prepare the metal nano wiregrating on two surfaces up and down of substrate, and this has increased the technology difficulty of making greatly.
Summary of the invention
The utility model proposes a kind of wire grating wideband polarizer, purpose is to make it to have high polarized light extinction ratio and luminous flux, and simultaneously simple in structure, operating wavelength range is wide.
A kind of wire grating wideband polarizer of the present utility model deposits parallel strip metallic aluminium nanometer wiregrating on substrate, it is characterized in that: described substrate is for arriving all transparent optical material of infrared band in ultraviolet; The structural parameters of described metallic aluminium nanometer wiregrating are: wiregrating Cycle Length 40-80 nanometer, wiregrating dutycycle 60%-40%, wiregrating thickness 40-80 nanometer, interlamellar spacing 10-20 nanometer.
Described wire grating wideband polarizer, the optical material of described substrate are calcium fluoride, magnesium fluoride or aluminium oxide.
The preparation method of the utility model wire grating wideband polarizer comprises the steps:
(1). substrate is cleaned;
(2). the method with chemical vapor deposition deposits layer protecting film at substrate surface;
(3). spin coating one deck photoresist on diaphragm;
(4). form the nanometer wire grid construction on the photoresist surface, expose the diaphragm of appropriate section;
(5). on diaphragm, carve the nanometer wire grid construction with reactive ion etching equipment, expose the substrate of appropriate section;
(6). carve the nanometer wire grid construction with reactive ion etching equipment on substrate, etching depth is the 50-100 nanometer;
(7). remove remaining diaphragm on the substrate with reactive ion etching equipment;
(8). at substrate vertical surface plated aluminum metal film, the aluminum metal film thickness is the 40-80 nanometer with magnetron sputtering apparatus, forms parallel strip metallic aluminium nanometer wiregrating.
When the photoresist surface formed the nanometer wire grid construction, the nanometer that adopts thin polymer film was from the moulding method.In the whole technological process of the utility model, key is how to obtain the large-area nano wire grid construction on the photoresist surface.The nanometer of thin polymer film is at first to be proposed by one research group of Princeton university in September, 2007 from the moulding method, referring to document Leonard F.Pease III etc., " Self-formation of sub-60-nm half-pitch gratings with large areas throughfracturing; " Nature Nanotechnology, Vol.2, Sep.2007, pp-545-548..The nanometer that adopts thin polymer film is from the moulding method, and process is simple, does not need to prepare in advance mask plate, and is more convenient to the control ratio of live width, and the shaping area is big, and cost is low.Utilize this method, prepared the wire grid construction of live width at present less than 60 nanometers.
Wideband polarization device of the present utility model, simple in structure, by adjusting and optimize the parameter (as: wiregrating Cycle Length, height etc.) of metallic aluminium nanometer wiregrating, polarization extinction ratio in the 300-5000nm wavelength band can reach 33-70dB, the polarized light transmitance can reach 68%-94%, is better than existing polarizer; Can be implemented in the work in the 300-5000 nanometer banded wavelength ranges, operating wavelength range can cover ultraviolet-visible-infrared band.Be applicable to Networks of Fiber Communications, free space optical-fiber network, magneto-optic data-storage system, based on the image processing system of polarization theory.
Description of drawings
Fig. 1 is a wideband polarization device structural representation of the present utility model;
It is the optical indicatrix of substrate with calcium fluoride, magnesium fluoride, aluminium oxide that Fig. 2 (a) and (b), (c) are respectively first kind of embodiment of the present utility model;
It is the optical indicatrix of substrate with calcium fluoride, magnesium fluoride, aluminium oxide that Fig. 3 (a) and (b), (c) are respectively second kind of embodiment of the present utility model;
It is the optical indicatrix of substrate with calcium fluoride, magnesium fluoride, aluminium oxide that Fig. 4 (a) and (b), (c) are respectively the third embodiment of the present utility model;
Fig. 5 is preparation method's process chart of the present utility model.
Embodiment
To the analysis of metallic aluminium nano wire grid polarizer structure Design and optical property, adopt Finite Difference-Time Domain branch (FDTD) algorithm to finish.Figure 1 shows that wideband polarization device structural representation of the present utility model.Substrate among the figure is chosen in ultraviolet to the transparent optical material of infrared band, as calcium fluoride, magnesium fluoride, aluminium oxide.In the selection of metal nanometer line grid material, adopted aluminum with High Extinction Ratio, high light flux.
Be labeled as among the figure: metallic aluminium nanometer wiregrating 1, polarizer substrate 2, wiregrating Cycle Length p, etching width w, dutycycle Λ=w/p, the thickness t of wiregrating, interlamellar spacing d.
Being respectively shown in Fig. 2 (a) and (b), (c) with calcium fluoride, magnesium fluoride, aluminium oxide is the optical indicatrix of the metallic aluminium nano wire grid polarizer of substrate, and concrete structural parameters are the p=40 nanometer, Λ=60%, t=40 nanometer, d=10 nanometer.Among the figure, the extinction ratio of the curve representation device that black real frame is linked to be, the transmitance of the curve representation device that white square frame is linked to be, as can be seen from the figure these three kinds of polarizers can both be operated in the spectral range in this broadband of 300-5000 nanometer.The polarizer that with the magnesium fluoride is substrate among them has better optical characteristics.This mainly is because the refractive index of magnesium fluoride is lower, thereby can reduce the reflection of light loss.
Being respectively shown in Fig. 3 (a) and (b), (c) with calcium fluoride, magnesium fluoride, aluminium oxide is the optical indicatrix of the metallic aluminium nano wire grid polarizer of substrate, and concrete structural parameters are the p=60 nanometer, Λ=50%, t=60 nanometer, d=15 nanometer.Among the figure, the extinction ratio of the curve representation device that black real frame is linked to be, the transmitance of the curve representation device that white square frame is linked to be, as can be seen from the figure these three kinds of polarizers can both be operated in the spectral range in this broadband of 300-5000 nanometer.
Being respectively shown in Fig. 4 (a) and (b), (c) with calcium fluoride, magnesium fluoride, aluminium oxide is the optical indicatrix of the metallic aluminium nano wire grid polarizer of substrate, and concrete structural parameters are the p=80 nanometer, Λ=40%, t=80 nanometer, d=20 nanometer.Among the figure, the extinction ratio of the curve representation device that black real frame is linked to be, the transmitance of the curve representation device that white square frame is linked to be, as can be seen from the figure these three kinds of polarizers can both be operated in the spectral range in this broadband of 300-5000 nanometer.
Figure 5 shows that preparation method's process chart of the present utility model.The dotted line layer is represented substrate among the figure, and the oblique line layer is represented diaphragm, and white layer is represented photoresist and aluminum metal film, and (1) is cleaned substrate; (2) method with chemical vapor deposition (CVD) deposits layer protecting film at substrate surface; (3) spin coating one deck photoresist on diaphragm; (4) with polymkeric substance from the moulding method, form the nanometer wire grid construction on photoresist surface; (5) on diaphragm, carve the nanometer wire grid construction with reactive ion etching equipment, expose the substrate of appropriate section; (6) carve the nanometer wire grid construction with reactive ion etching equipment on substrate, etching depth is the 50-100 nanometer; (7) remove remaining diaphragm on the substrate with reactive ion etching equipment; (8) use magnetron sputtering apparatus at substrate vertical surface plated aluminum metal film, the aluminum metal film thickness is the 40-80 nanometer, forms parallel strip metallic aluminium nanometer wiregrating.
Claims (2)
1. a wire grating wideband polarizer deposits parallel strip metallic aluminium nanometer wiregrating on substrate, it is characterized in that: described substrate is for arriving all transparent optical material of infrared band in ultraviolet; The structural parameters of described metallic aluminium nanometer wiregrating are: wiregrating Cycle Length 40-80 nanometer, wiregrating dutycycle 60%-40%, wiregrating thickness 40-80 nanometer, interlamellar spacing 10-20 nanometer.
2. wire grating wideband polarizer as claimed in claim 1, the optical material of described substrate are calcium fluoride, magnesium fluoride or aluminium oxide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200720088544U CN201387494Y (en) | 2007-11-26 | 2007-11-26 | Wire grating broadband polarization device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200720088544U CN201387494Y (en) | 2007-11-26 | 2007-11-26 | Wire grating broadband polarization device |
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| CN201387494Y true CN201387494Y (en) | 2010-01-20 |
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| CN200720088544U Expired - Fee Related CN201387494Y (en) | 2007-11-26 | 2007-11-26 | Wire grating broadband polarization device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197368A (en) * | 2013-04-28 | 2013-07-10 | 南京大学 | Sandwich structure wire grid broadband polarizer and preparation method thereof |
| CN103246002A (en) * | 2013-05-13 | 2013-08-14 | 上海图锐数码科技有限公司 | Polaroid with optical thin-films |
| CN105487160A (en) * | 2016-01-15 | 2016-04-13 | 京东方科技集团股份有限公司 | Metal wire grid polarizer, manufacturing method thereof and display device comprising metal wire grid polarizer |
| WO2019006800A1 (en) * | 2017-07-07 | 2019-01-10 | 深圳市华星光电技术有限公司 | Method for manufacturing nano wire grid polarizer |
| US10353239B2 (en) | 2017-07-07 | 2019-07-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Method of manufacturing nanowire grid polarizer |
| CN113937171A (en) * | 2021-11-23 | 2022-01-14 | 长春理工大学 | Ultraviolet polarization spectrum detector based on metal wire grid composite film |
-
2007
- 2007-11-26 CN CN200720088544U patent/CN201387494Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103197368A (en) * | 2013-04-28 | 2013-07-10 | 南京大学 | Sandwich structure wire grid broadband polarizer and preparation method thereof |
| CN103197368B (en) * | 2013-04-28 | 2015-08-05 | 南京大学 | A kind of sandwich structure wire grid broadband polarizer and preparation method thereof |
| CN103246002A (en) * | 2013-05-13 | 2013-08-14 | 上海图锐数码科技有限公司 | Polaroid with optical thin-films |
| CN103246002B (en) * | 2013-05-13 | 2016-02-24 | 上海图锐数码科技有限公司 | There is the polaroid of optical thin film |
| CN105487160A (en) * | 2016-01-15 | 2016-04-13 | 京东方科技集团股份有限公司 | Metal wire grid polarizer, manufacturing method thereof and display device comprising metal wire grid polarizer |
| CN105487160B (en) * | 2016-01-15 | 2018-12-18 | 京东方科技集团股份有限公司 | Metallic wire grid polarizer and preparation method thereof, display device |
| WO2019006800A1 (en) * | 2017-07-07 | 2019-01-10 | 深圳市华星光电技术有限公司 | Method for manufacturing nano wire grid polarizer |
| US10353239B2 (en) | 2017-07-07 | 2019-07-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Method of manufacturing nanowire grid polarizer |
| CN113937171A (en) * | 2021-11-23 | 2022-01-14 | 长春理工大学 | Ultraviolet polarization spectrum detector based on metal wire grid composite film |
| CN113937171B (en) * | 2021-11-23 | 2024-06-04 | 长春理工大学 | Ultraviolet polarized spectrum detector based on metal wire grid composite film |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100120 Termination date: 20101126 |