CN201321509Y - Crystal growing furnace with a fixed valued pneumatic release valve - Google Patents
Crystal growing furnace with a fixed valued pneumatic release valve Download PDFInfo
- Publication number
- CN201321509Y CN201321509Y CNU2008202276073U CN200820227607U CN201321509Y CN 201321509 Y CN201321509 Y CN 201321509Y CN U2008202276073 U CNU2008202276073 U CN U2008202276073U CN 200820227607 U CN200820227607 U CN 200820227607U CN 201321509 Y CN201321509 Y CN 201321509Y
- Authority
- CN
- China
- Prior art keywords
- definite value
- furnace
- safety valve
- air pressure
- crystal growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a crystal growing furnace with a fixed valued pneumatic release valve which comprises a furnace body, wherein the furnace body is structured as double seal, a interlayer provided with circulating cooling water, the lateral surface on the external of the crystal growing furnace is provided with a fixed valued pneumatic release valve, the fixed valued pneumatic release valve is installed on the interface port arranged on the pipeline which is communicated with a furnace chamber. When the water in the interlayer of the furnace cavity leaks into the furnace cavity and then evaporates, thereby causing sharply raise of the pressure, the pressure in the furnace cavity is gradually higher than the atmospheric pressure outside, at this moment, the cover board of the fixed valued pneumatic release valve gets an acting force moving outward, high pressure gas in the furnace cavity escaping causes the pressure in the furnace to decrease, at the same time, the cover board gradually moves back until the gas in the furnace cavity is separated from the atmosphere by the cover board.
Description
Technical field
Novel a kind of crystal growing furnace, the especially a kind of crystal growing furnace that discharges safety valve with definite value air pressure of providing of this use.
Background technology
Existing crystal growth equipment, the intravital environmental facies of stove are rendered as negative pressure, the condition of high temperature for external environment when work.If leak in the body of heater because of unforeseen circumstances causes water coolant, at high temperature water coolant can instant vaporization transfer gas to, cause the intravital air pressure of stove sharply to increase to above the outer normal atmosphere of body of heater, light then may cause the damage of crystal growth equipment or the stable situation of other harm crystal growth equipments, heavy then may set off an explosion, jeopardize personnel safety.Present of home make crystal growth equipment does not all design overvoltage protection, and there is very big hidden danger in the security of equipment, gives the safety in utilization of crystal growth equipment and brings adverse influence work-ing life.
The utility model content
In order to solve problems of the prior art, the novel band definite value air pressure of this use discharges the crystal growing furnace of safety valve, comprise body of heater, body of heater is a double-layer sealing structure, recirculated cooling water is arranged in the interlayer, exterior lateral sides at the crystal growth furnace body is provided with a definite value air pressure release safety valve, and definite value air pressure discharges the interface that safety valve is installed in the pipeline that is arranged at the body of heater outside, and pipeline communicates with the inner chamber of body of heater.
As to improvement of the present utility model, the novel band definite value air pressure of this use discharges the crystal growing furnace of safety valve, definite value air pressure discharges cover plate, definite value spring, pressing plate and the pull bar that safety valve comprises the tape guide post, pull bar one end is packed on the outer rim of interface of pipeline, the other end and pressing plate are fixedly connected, cover plate is equipped by the pilot hole and the pull bar gap that are provided with on it, guidepost on the cover plate and the pilot hole gap on the pressing plate are equipped, are set with the definite value spring on the guidepost between cover plate and the pressing plate.
As to further improvement of the utility model, the novel band definite value air pressure of this use discharges the crystal growing furnace of safety valve, between pipeline and definite value air pressure release safety valve, be provided with sealing-ring, in the pilot hole of pressing plate, be fitted with the guide pin bushing of band outer rim, guidepost gap on the cover plate is fitted in the endoporus of guide pin bushing, and the outer rim of guide pin bushing is fixed on the pressing plate.
Adopt this structure and discharge safety valve owing to be outside equipped with the definite value air pressure that communicates with it at body of heater, the situation that pressure can't safe release in the time of just can effectively preventing the body of heater inner high voltage, guarantee the intravital stable gas pressure of stove, thereby reduce the appearance of unsafe condition to greatest extent.
Description of drawings
Fig. 1 is the front view of the crystal growing furnace of the utility model band safety valve.
Fig. 2 is the sectional view that the utility model band definite value air pressure discharges the crystal growing furnace safety valve of safety valve.
By Fig. 1, Fig. 2 as can be known, the crystal growing furnace of the utility model band safety valve, comprise body of heater, body of heater is a double-layer sealing structure, recirculated cooling water is arranged in the interlayer, exterior lateral sides at the crystal growth furnace body is provided with a definite value air pressure release safety valve 1, definite value air pressure discharges the interface that safety valve 1 is installed in the pipeline 2 that is arranged at the body of heater outside, pipeline 2 communicates with the inner chamber of body of heater, definite value air pressure discharges the cover plate 3 that safety valve 1 comprises the tape guide post, definite value spring 4, pressing plate 5 and pull bar 6, pull bar 6 one ends are packed on the outer rim of interface of pipeline 2, the other end and pressing plate 5 are fixedly connected, cover plate 3 is equipped by the pilot hole and pull bar 6 gaps that are provided with on it, pilot hole gap on guidepost on the cover plate 3 and the pressing plate 5 is equipped, on the guidepost between cover plate 3 and the pressing plate 5, be set with definite value spring 4, between pipeline 2 and definite value air pressure release safety valve 1, be provided with sealing-ring 7, in the pilot hole of pressing plate 5, be fitted with the guide pin bushing 8 of band outer rim, guidepost gap on the cover plate 3 is fitted in the endoporus of guide pin bushing 8, and the outer rim of guide pin bushing 8 is fixed on the pressing plate 5.
Definite value air pressure discharges safety valve 1 place pipeline 2 and communicates with furnace chamber, pipeline 2 internal gas pressures equate with the furnace chamber internal gas pressure, the external world of pipeline 2 is a normal atmosphere, operating air pressure in the furnace chamber is less than normal atmosphere, situation lower cover 3 the getting in touch because of the pressure of barometric point and definite value spring 4 automatic closed furnace body inside and ambient atmosphere of works better.
In the time of in water coolant is leaked to body of heater, water coolant can flash to gas rapidly, cause the body of heater chamber pressure sharply to raise, when the intravital pressure of stove is higher than the pressure of external pressure and 4 pairs of cover plates 3 of spring gradually, cover plate 3 can be subjected to a reactive force that makes progress and outwards motion, the intravital gas of stove contacts with atmosphere outside, the excessive intravital pressure of stove that causes of the intravital gas of stove reduces, pressure reduces in the process, cover plate 3 gradually to swivel motion, when pressure was reduced to certain value, cover plate 3 was once more with intravital gas of stove and isolated from atmosphere.
Claims (4)
1, a kind of crystal growing furnace that discharges safety valve with definite value air pressure, comprise body of heater (9), body of heater is a double-layer sealing structure, recirculated cooling water is arranged in the interlayer, it is characterized in that: the exterior lateral sides at the crystal growth furnace body is provided with a definite value air pressure release safety valve (1), definite value air pressure discharges the interface that safety valve (1) is installed in the pipeline (2) that is arranged at the body of heater outside, and pipeline (2) communicates with the inner chamber (10) of body of heater.
2, band definite value air pressure according to claim 1 discharges the crystal growing furnace of safety valve, it is characterized in that: definite value air pressure discharges the cover plate (3) that safety valve (1) comprises the tape guide post, definite value spring (4), pressing plate (5) and pull bar (6), pull bar (6) one ends are packed on the outer rim of interface of pipeline (2), the other end and pressing plate (5) are fixedly connected, cover plate (3) is equipped by the pilot hole and pull bar (6) gap that are provided with on it, pilot hole gap on guidepost on the cover plate (3) and the pressing plate (5) is equipped, is set with definite value spring (4) on the guidepost between cover plate (3) and the pressing plate (5).
3, band definite value air pressure according to claim 1 and 2 discharges the crystal growing furnace of safety valve, it is characterized in that: be provided with sealing-ring (7) between pipeline (2) and definite value air pressure release safety valve (1).
4, band definite value air pressure according to claim 2 discharges the crystal growing furnace of safety valve, it is characterized in that: the guide pin bushing (8) that in the pilot hole of pressing plate (5), is fitted with the band outer rim, guidepost gap on the cover plate (3) is fitted in the endoporus of guide pin bushing (8), and the outer rim of guide pin bushing (8) is fixed on the pressing plate (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202276073U CN201321509Y (en) | 2008-12-03 | 2008-12-03 | Crystal growing furnace with a fixed valued pneumatic release valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202276073U CN201321509Y (en) | 2008-12-03 | 2008-12-03 | Crystal growing furnace with a fixed valued pneumatic release valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201321509Y true CN201321509Y (en) | 2009-10-07 |
Family
ID=41158895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202276073U Expired - Fee Related CN201321509Y (en) | 2008-12-03 | 2008-12-03 | Crystal growing furnace with a fixed valued pneumatic release valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201321509Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111023797A (en) * | 2019-11-29 | 2020-04-17 | 合肥科晶材料技术有限公司 | Safety sealing system for down-loading vacuum atmosphere high-temperature sintering equipment |
| CN111623067A (en) * | 2020-04-23 | 2020-09-04 | 山东天岳先进材料科技有限公司 | Damping device for vacuum reaction furnace and crystal growth furnace |
-
2008
- 2008-12-03 CN CNU2008202276073U patent/CN201321509Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111023797A (en) * | 2019-11-29 | 2020-04-17 | 合肥科晶材料技术有限公司 | Safety sealing system for down-loading vacuum atmosphere high-temperature sintering equipment |
| CN111623067A (en) * | 2020-04-23 | 2020-09-04 | 山东天岳先进材料科技有限公司 | Damping device for vacuum reaction furnace and crystal growth furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091007 Termination date: 20141203 |
|
| EXPY | Termination of patent right or utility model |